Electrostatic chuck with improved spacing mask and workpiece detection device

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Information

Patent Grant
D425919

References
Source

Patent Number
D425,919
Date Filed
Friday, November 14, 1997
27 years ago
Date Issued
Tuesday, May 30, 2000
25 years ago

Inventors
Original Assignees
- Applied Materials, Inc.
Examiners
- Davis; Antoine Duval
Agents
- Thomason, Moser & Patterson

US Classifications
- D15 - Machines not elsewhere specified
Field of Search
- US
- D15 140
- 118 728
- 279 128
- 361 230-233
- 361 234
- 361 235
International Classifications
- 1509
- Term of Grant
  14Years

Information

Abstract

Description

Claims

The ornamental design for an electrostatic chuck with improved spacing mask and workpiece detection device, as shown.

US Referenced Citations (3)

Number	Name	Date	Kind
5671116	Husain	Sep 1997
5691876	Chen et al.	Nov 1997
5745332	Burkhart et al.	Apr 1998