Information
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Patent Grant
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D420023
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Patent Number
D420,023
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Date Filed
Saturday, January 9, 199926 years ago
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Date Issued
Tuesday, February 1, 200025 years ago
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Inventors
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Original Assignees
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Examiners
Agents
- Thomason, Moser & Patterson
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US Classifications
Field of Search
US
- D15 140
- 118 728
- 361 230
- 361 233
- 361 234
- 361 235
- 279 128
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International Classifications
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Claims
- The ornamental design for an electrostatic chuck with improved spacing mask and workpiece detection device, as shown.
US Referenced Citations (4)
| Number |
Name |
Date |
Kind |
|
D406852 |
Burkhart et al. |
Mar 1999 |
|
|
5671116 |
Husain |
Sep 1997 |
|
|
5691876 |
Chen et al. |
Nov 1997 |
|
|
5745332 |
Burkhart et al. |
Apr 1998 |
|
Continuation in Parts (1)
|
Number |
Date |
Country |
| Parent |
079584 |
Nov 1997 |
|
