Electrostatic chuck

Information

  • Patent Grant
  • D497171
  • Patent Number
    D497,171
  • Date Filed
    Friday, June 20, 2003
    21 years ago
  • Date Issued
    Tuesday, October 12, 2004
    20 years ago
  • US Classifications
    Field of Search
    • US
    • D15 140
    • 361 230
    • 361 233
    • 361 234
    • 361 235
    • 279 128
    • D13 199
    • 269 8
    • 269 903
  • International Classifications
    • 1509
    • Term of Grant
      14Years
Abstract
Description




FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;




FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror image thereof;




FIG. 3 is a right side elevational view thereof;




FIG. 4 is a left side elevational view thereof;




FIG. 5 is a top plan view thereof;




FIG. 6 is a bottom plan view thereof; and,




FIG. 7 is a sectional view taken along the line 7—7 in FIG. 5.



Claims
  • The ornamental design for an electrostatic chuck, as shown and described.
Priority Claims (1)
Number Date Country Kind
2002-035565 Dec 2002 JP
US Referenced Citations (11)
Number Name Date Kind
4518889 'T Hoen May 1985 A
4692836 Suzuki Sep 1987 A
5474614 Robbins Dec 1995 A
5535090 Sherman Jul 1996 A
5572398 Federlin et al. Nov 1996 A
5671116 Husain Sep 1997 A
5838528 Os et al. Nov 1998 A
D420022 Burkhart et al. Feb 2000 S
D425919 Burkhart et al. May 2000 S
6268994 Logan et al. Jul 2001 B1
6639783 Shamouilian et al. Oct 2003 B1