Information
-
Patent Grant
-
D489739
-
Patent Number
D489,739
-
Date Filed
Friday, June 20, 200321 years ago
-
Date Issued
Tuesday, May 11, 200420 years ago
-
Inventors
-
Original Assignees
-
Examiners
Agents
-
-
US Classifications
Field of Search
US
- D15 140
- 361 230
- 361 233
- 361 234
- 361 235
- 279 128
- D13 199
- 269 8
- 269 903
-
International Classifications
-
Description
FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;
FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror image thereof;
FIG. 3 is a right side elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is a sectional view taking along the line 7—7 in FIG. 5.
Claims
- The ornamental design for a electrostatic chuck, as shown and described.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2002-035561 |
Dec 2002 |
JP |
|
US Referenced Citations (10)
Number |
Name |
Date |
Kind |
5535090 |
Sherman |
Jul 1996 |
A |
5656093 |
Burkhart et al. |
Aug 1997 |
A |
5825607 |
Burkhart |
Oct 1998 |
A |
5838528 |
Os et al. |
Nov 1998 |
A |
D406852 |
Burkhart et al. |
Mar 1999 |
S |
D407073 |
Burkhart et al. |
Mar 1999 |
S |
D420022 |
Burkhart et al. |
Feb 2000 |
S |
D420023 |
Flanigan et al. |
Feb 2000 |
S |
D425919 |
Burkhart et al. |
May 2000 |
S |
6081414 |
Flanigan et al. |
Jun 2000 |
A |