Electrostatic chuck

Abstract

Description

The patent or application file contains at least one drawing executed in color. Copies of this patent or patent application publication with color drawing(s) will be provided by the Office upon request and payment of the necessary fee.

FIG. 1 is a perspective view of an electrostatic chuck.

FIG. 2 is a top plan view of the electrostatic chuck of FIG. 1.

FIG. 3 is a front side view of the electrostatic chuck of FIG. 1, the other sides being identical.

FIG. 4 is a bottom plan view of the electrostatic chuck of FIG. 1.

FIG. 5 is a cross-sectional view of the electrostatic chuck of FIG. 1 taken along section line 5-5 of FIG. 4.

FIG. 6 is an enlarged partial view of FIG. 5.

FIG. 7 is an enlarged partial view of FIG. 1.

FIG. 8 is a color photograph illustrating the electrostatic chuck of FIG. 2 from a top view; and,

FIG. 9 is color photograph illustrating the electrostatic chuck of FIG. 1 from a perspective view.

The broken lines in the figures form no part of the claimed design.

The drawings are lined for color. The pattern on the surface of the claimed design represents the color copper.

Claims

The ornamental design for an electrostatic chuck, as shown and described.