Electrostatic chuck

Information

  • Patent Grant
  • D490095
  • Patent Number
    D490,095
  • Date Filed
    Friday, June 20, 2003
    21 years ago
  • Date Issued
    Tuesday, May 18, 2004
    20 years ago
  • US Classifications
    Field of Search
    • US
    • D15 140
    • 361 230
    • 361 233
    • 361 234
    • 361 235
    • 279 128
    • D13 199
    • 269 8
    • 269 903
  • International Classifications
    • 1509
    • Term of Grant
      14Years
Abstract
Description




FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;




FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror imge thereof;




FIG. 3 is a right side elevational view thereof;




FIG. 4 is a left side elevational view thereof;




FIG. 5 is a top plan view thereof;




FIG. 6 is a bottom plan view thereof; and,




FIG. 7 is a sectional view taking along the line 7—7 in FIG. 5.



Claims
  • The ornamental design for a electrostatic chuck, as shown and described.
Priority Claims (1)
Number Date Country Kind
2002-035558 Dec 2002 JP
US Referenced Citations (11)
Number Name Date Kind
5535090 Sherman Jul 1996 A
5656093 Burkhart et al. Aug 1997 A
5825607 Burkhart Oct 1998 A
5838528 Os et al. Nov 1998 A
D406852 Burkhart et al. Mar 1999 S
D407073 Burkhart et al. Mar 1999 S
D420022 Burkhart et al. Feb 2000 S
D420023 Flanigan et al. Feb 2000 S
D425919 Burkhart et al. May 2000 S
6081414 Flanigan et al. Jun 2000 A
6595506 Zide et al. Jul 2003 B1