The disclosure generally relates to a polymeric composition including a fluoropolymer matrix perfluorinated ionomer having electrostatic dissipative properties and articles, including electrostatic dissipative tubing, formed therefrom.
Electrostatic discharge is an important technical issue for fluid delivery and storage systems in the semiconductor industry and in other technology applications. Frictional contact between fluids and surfaces of various operational components (e.g. tubing or piping, valves, fittings, filters, etc.) in the fluid system can result in generation and accumulation of static electrical charges. The extent of charge generation depends on various factors including, but not limited to, the nature of the components and the fluid, fluid velocity, fluid viscosity, electrical conductivity of the fluid, pathways to ground, turbulence and shear in liquids, presence of air in the fluid, and surface area. Further, as the fluid flows through the system, the charge can be carried downstream in a phenomenon called a streaming charge, where charge may accumulate beyond where the charge originated. Sufficient charge accumulations can cause electrostatic discharge at the tubing or pipe walls, component surfaces, or even onto substrates or wafers at various process steps. A continued need exists for mitigating electrostatic discharge in fluid delivery and storage systems.
Some embodiments of the disclosure, as described herein, relate to electrostatic dissipative polymeric composites including a fluoropolymer matrix having regions of perfluorinated ionomer distributed within the matrix. Other embodiments relate to electrostatic dissipative tubing incorporating a composite including a fluoropolymer matrix having regions of perfluorinated ionomer distributed within the matrix. Still other embodiments relate to articles, such as various operative components of a fluid handling system, incorporating a composite including a fluoropolymer matrix having regions of perfluorinated ionomer distributed within the matrix into their construction. The tubing and various operative components incorporating the composite are electrostatic dissipative in nature having a surface resistivity ranging from between 1×104 ohms/square and 1×1012 ohms/square.
Some embodiments of the disclosure, as described herein, relate to a tubing segment. The tubing segment includes a tubing body defining a fluid flow path from a first end of the tubing body to the second end of the tubing body. The tubing body includes a first portion including a non-conductive fluoropolymer and a second portion, in contact with the first portion, the second portion formed from a composite including a fluoropolymer matrix having regions of perfluorinated ionomer distributed throughout the fluoropolymer matrix such that the tubing body has a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square. An amount of perfluorinated ionomer in the composite ranges from 0.01 wt. % to 5 wt. % of the total weight of the composite.
In one embodiment, the first portion is an outer layer and defines an outer surface of the tubing body and the second portion is an inner layer and defines an inner surface of the tubing body that comes into contact with a fluid flowing through the fluid flow path.
In another embodiment, the first portion is an inner layer defining an inner surface of the tubing body that comes into contact with a fluid flowing through the fluid flow path and the second portion is an outer layer defining an outer surface of the tubing body, wherein the second layer is disposed over and is in contact with the first layer.
In yet another embodiment, the first portion is an outer layer of the tubing body disposed over and in contact with the second portion forming an inner layer of the tubing body defining an inner surface of the tubing body that comes into contact with a fluid flowing through the fluid path, wherein the first layer includes a one or more conductive stripes extending axially within the first layer in a direction from the first end to the second end of the tubular body.
Some embodiments of the present disclosure, as described herein, relate to an operative component of a fluid delivery and storage system. The operative component includes at least a portion formed from a composite including a fluoropolymer matrix having regions of perfluorinated ionomer distributed throughout the fluoropolymer matrix such that the operative component is electrostatic dissipative and has a surface resistivity of between 1×104ohms/square and 1×1012 ohms/square. The operative component can be any one of a fitting body, valve body, filter housing, heat exchanger housing, sensors housing, pump body, valve diaphragm, break seal, dispense head, spray nozzle, mixer, container, container liner, or storage drum.
Some embodiments of the present disclosure, as described herein, relate to a composition including a composite including a fluoropolymer matrix having regions of perfluorinated ionomer distributed throughout the matrix, wherein an amount of the perfluorinated ionomer in the composite ranges from 0.01 wt. % to 5 wt. % of the total weight of the composite such that the composite has a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square. In one embodiment, the fluoropolymer is perfluoroalkoxy alkane polymer (PFA) and the perfluorinated ionomer is a perfluorinated sulfonic acid copolymer. In certain embodiments, the perfluorinated sulfonic acid copolymer is in acidic form.
Still other embodiments of the disclosure relate to a method including neutralizing a perfluorinated ionomer; blending the neutralized perfluorinated ionomer with a fluoropolymer to form a composite including regions of neutralized perfluorinated ionomer distributed throughout the fluoropolymer; forming a least a portion of an article including the composite; and contacting the article with an acid to convert the neutralized perfluorinated ionomer to an acidic form, wherein the article has a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square.
The disclosure may be more completely understood in consideration of the following description of various illustrative embodiments in connection with the accompanying drawings
While the disclosure is amenable to various modifications and alternative forms, specifics thereof have been shown by way of example in the drawings and will be described in detail. It should be understood, however, that the intention is not to limit aspects of the disclosure to the particular illustrative embodiments described. On the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the disclosure.
The following detailed description should be read with reference to the drawings in which similar elements in different drawings are numbered the same. The detailed description and the drawings, which are not necessarily to scale, depict illustrative embodiments and are not intended to limit the scope of the invention. The illustrative embodiments depicted are intended only as exemplary. Selected features of any illustrative embodiment may be incorporated into an additional embodiment unless clearly stated to the contrary.
According to various embodiments, perfluorinated ionomer particles are blended with a non-conductive fluoropolymer to form a composite including a non-conductive fluoropolymer matrix and regions of perfluorinated ionomer distributed within the non-conductive fluoropolymer matrix. The regions of perfluorinated ionomer within the non-conductive fluoropolymer matrix imparts electrostatic dissipative properties to the resultant composite. An electrostatic dissipative material is a material having a surface resistivity equal to or greater than 1×104 ohms/square but less than 1×1012 ohms/square or a volume resistivity equal to or granter than 1×104 ohms-cm2 but less than 1×1011 ohms-cm2. Electrostatic dissipative materials are classified as “antistatic” which is used to describe materials that prevent the buildup of static electricity, which is undesirable in fluid delivery and storage systems used in the semiconductor manufacturing industry.
Exemplary non-conductive fluoropolymers used to form the electrostatic dissipative composite according to the various embodiments can include, but are not limited to, fluoropolymers such as: perfluoroalkoxy alkane polymer (PFA); ethylene and tetrafluoroethylene polymer (ETFE); ethylene, tetrafluoroethylene and hexafluoropropylene polymer (EFEP); and fluorinated ethylene propylene polymer (FEP), all of which are melt-processable. In addition to providing a non-corrosive and inert construction, many fluoropolymers, such as PFA, are injection moldable and extrudable. In one embodiment, the non-conductive fluoropolymer is perfluoroalkoxy alkane polymer (PFA). In other embodiments, the non-conductive fluoropolymer can be polytetrafluoroethylene (PTFE) or tetrafluoroethylene polymer (PTFE) or modified tetrafluoroethylene polymer (TFM), which are not melt-processable, but can be compression molded.
The perfluorinated ionomer particles are blended with the non-conductive fluoropolymer, such as PFA, in an amount effective to impart electrostatic dissipative properties to the composite. Generally, a perfluorinated ionomer is an ionomer that includes a tetrafluoroethylene backbone and a vinyl ether side-chain terminating in an ion-exchange group. The ion-exchange group can be a sulfonic acid group (sulfonate) or a carboxylic acid group (carboxylate). In some cases, the perfluorinated ionomer can include a mixture of sulfonic acid groups and carboxylic acid groups. Due to the presence of the ion-exchange groups, the perfluorinated ionomer is capable of conducting protons and therefore has proton conductivity. However, the perfluorinated ionomer does not conduct anions or electrons.
According to various embodiments, the perfluorinated ionomer can be a perfluorinated sulfonic acid copolymer. An exemplary perfluorinated sulfonic acid copolymer suitable for use in the electrostatic dissipative composite is a perfluorosulfonic acid (PFSA) polymer having a poly(tetrafluoroethylene) backbone with perfluoroether pendant side chains terminated by sulfonic acid groups. An example of one such perfluorosulfonic acid (PFSA) polymer having a poly(tetrafluoroethylene) backbone with perfluoroether pendant side chains terminated by sulfonic acid groups is NAFION™. NAFION™ is a trademark of The Chemours Company. Additional examples of a perfluorosulfonic acid (PFSA) polymer having a poly(tetrafluoroethylene) backbone with perfluoroether pendant side chains terminated by sulfonic acid groups include FLEMION® (Asahi Glass Company), ACIPLEX® (Asahi Kasei), and FUMION® F. (FuMA-Tech).
In one embodiment, the perfluorinated ionomer particles are particles of a perfluorinated sulfonic acid copolymer in its acid (H+) form. NAFION™ particles are one example of particles of a perfluorinated sulfonic acid copolymer in acidic form that can be used to form the electrostatic dissipative composite, as described herein. The perfluorinated sulfonic acid copolymer particles are provided as beads having an average bead size ranging from: 100 nanometers to 1000 nanometers; from 100 nanometers to 500 nanometers; or from 100 nanometers to 200 nanometers. In one embodiment, the perfluorinated sulfonic acid copolymer particles have an average bead size of about 200 nanometers. In some cases, the perfluorinated ionomer particles are available as a suspension in a solvent. In other cases, the perfluorinated ionomer particles are available as dry resin beads.
The perfluorinated sulfonic acid copolymer particles are dispersed within the non-conductive fluoropolymer in an effective amount such that the surface resistivity of the resultant composite ranges from greater than 1×104 ohms/square and less than 1×1012 ohms/square and more particularly, ranges from 1×105 ohms/square to 1×108 ohms/square. The composite is formed into sheets and surface resistivity measured according to ASTM F1711. In some embodiments, to form the composite, the perfluorinated sulfonic acid copolymer particles are first contacted with a strong base such as ammonium hydroxide or sodium hydroxide to convert the particles from an acid (H+) form of the copolymer to a neutralized or non-ionic form of the copolymer to aid in blending the perfluorinated sulfonic acid copolymer particles with the non-conductive fluoropolymer to form a composite including regions of perfluorinated sulfonic acid copolymer distributed within the non-conductive fluoropolymer matrix. The perfluorinated sulfonic acid copolymer can be converted back to its acidic form after blending by contacting the blended material with a strong acid such as, for example, hydrochloric acid. In one embodiment, an amount of the perfluorinated sulfonic acid copolymer in the composite ranges from 0.01 wt. % to 10 wt. % of the total weight of the composite. In another embodiment, an amount of the perfluorinated sulfonic acid copolymer in the composite ranges from 0.01 wt. % to 5 wt. % of the total weight of the composite. In yet another embodiment, an amount of the perfluorinated sulfonic acid copolymer ranges from 1 wt. % to 5 wt. % of the total weight of the composite. In still another embodiment an amount of the perfluorinated sulfonic acid copolymer ranges from 2 wt. % to 5 wt. % of the total weight of the composite. In some embodiments, the perfluorinated sulfonic acid copolymer is in acid form in the final composite.
In one non-limiting example, an electrostatic dissipative composite includes PFA having regions of NAFION™ in acidic form in an amount ranging from 0.01 wt. % to 5 wt. %, the composite having a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square. In another non-limiting example, an electrostatic dissipative composite includes PFA having regions NAFION™ in acidic form in an amount ranging from 2 wt. % to 5 wt. %, the composite having a surface resistivity of between 1×105 ohms/square and 1×108 ohms/square. The composites are formed into sheets and the surface resistivity of the material is measured according to ASTM F1711.
In some embodiments, a tubing segment includes an electrostatic dissipative composite, as described herein, such that the tubing segment is electrostatic dissipative having a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square or more particularly of between 1×105 ohms/square and 1×108 ohms/square. Incorporation of the electrostatic dissipative material into the tubing segment can reduce the build-up of static charges on the outer surface of the tubing segment as a result of a fluid flowing through the tubing segment. In addition, to the extent that static charges have accumulated on the outer surface of the tubing segment, incorporation of the electrostatic dissipative composite into the tubing segment causes the build-up charges on the outer surface of the tubing segment to more slowly flow to ground. Both the reduction in the accumulation of static charge and the slow transfer of charge to ground may prevent an electrostatic discharge event in a fluid delivery and storage system.
The electrostatic dissipative composite used to construct the tubing body 22 includes a PFA matrix having regions of perfluorinated sulfonic acid copolymer distributed throughout the matrix such that the composite has a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square. In one embodiment, the perfluorinated sulfonic acid copolymer is NAFION™. The perfluorinated sulfonic acid copolymer can be in acidic form in the final product. The amount of perfluorinated sulfonic acid copolymer in the electrostatic dissipative composite used to form the inner layer 38 can range from: 0.01 wt. % to 10 wt. % of the total weight of the composite; from 0.01 wt. % to 5 wt. % of the total weight of the composite; from 1 wt. % to 5 wt. % of the total weight of the composite; or more particularly, from 2 wt. % to 5 wt. % of the total weight of the composite. The tubing body 22 can have a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square or more particularly, of between 1×105 ohms/square and 1×108 ohms/square. Surface resistivity of the tubing body 36 can be measured according to ASTM F1711.
In some embodiments, the first portion forming the outer layer 34 of the tubing body is formed from a non-conductive fluoropolymer. Suitable non-conductive fluoropolymers used to form the outer layer include, but are not limited to, fluoropolymers such as: perfluoroalkoxy alkane polymer (PFA); ethylene and tetrafluoroethylene polymer (ETFE); ethylene, tetrafluoroethylene and hexafluoropropylene polymer (EFEP); and fluorinated ethylene propylene polymer (FEP). In one embodiment, the first portion forming the outer layer 34 is formed from PFA.
The second portion forming the inner layer 38 defining an inner surface 42 of the tubing body 36 can be formed form an electrostatic dissipative composite including a non-conductive fluoropolymer matrix having regions of perfluorinated ionomer distributed throughout the matrix. In some embodiments, the electrostatic dissipative composite includes a PFA matrix having regions of perfluorinated sulfonic acid copolymer distributed throughout the matrix such that the composite has a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square. In one embodiment, the perfluorinated sulfonic acid copolymer is NAFION™. The perfluorinated sulfonic acid copolymer can be in acidic form in the final product. The amount of perfluorinated sulfonic acid copolymer in the electrostatic dissipative composite used to form the inner layer 38 can range from: 0.01 wt. % to 10 wt. % of the total weight of the composite; from 0.01 wt. % to 5 wt. % of the total weight of the composite; from 1 wt. % to 5 wt. % of the total weight of the composite; or more particularly, from 2 wt. % to 5 wt. % of the total weight of the composite. The tubing body 36 can have a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square or more particularly, of between 1×105 ohms/square and 1×108 ohms/square. Surface resistivity of the tubing body 36 can be measured according to ASTM F1711.
In one embodiment, the outer layer 34 can be co-extruded with the inner layer 38 to form the tubing body 36. In another embodiment, the inner layer 38 can be formed first by extrusion. The outer layer 34 can then be extruded over the inner layer 38 to form the tubing body 36.
The first portion forming the outer layer 44 of the tubing body 46 can be formed form an electrostatic dissipative composite including a fluoropolymer blended with perfluorinated ionomer particles, as described herein. In some embodiments, the electrostatic dissipative composite includes a PFA matrix having regions of perfluorinated sulfonic acid copolymer distributed throughout the matrix such that the composite has a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square. In one embodiment, the perfluorinated sulfonic acid copolymer is NAFION™. The perfluorinated sulfonic acid copolymer can be in acidic form in the final product. The amount of perfluorinated sulfonic acid copolymer in the electrostatic dissipative composite used to form the outer layer 44 can range from: 0.01 wt. % to 10 wt. % of the total weight of the composite; from 0.01 wt. % to 5 wt. % of the total weight of the composite; from 1 wt. % to 5 wt. % of the total weight of the composite; or more particularly, from 2 wt. % to 5 wt. % of the total weight of the composite. The tubing body 46 can have a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square or more particularly, of between 1×105 ohms/square and 1×108 ohms/square. Surface resistivity of the tubing body 46 is measured according to ASTM F1711.
The second portion forming the inner layer 48 of the tubing body 46 can be formed from a non-conductive fluoropolymer. Suitable non-conductive fluoropolymers used to form the inner layer include, but are not limited to, fluoropolymers such as: perfluoroalkoxy alkane polymer (PFA); ethylene and tetrafluoroethylene polymer (ETFE); ethylene, tetrafluoroethylene and hexafluoropropylene polymer (EFEP); and fluorinated ethylene propylene polymer (FEP). In one embodiment, the second portion forming the inner layer 48 is formed from PFA.
In one embodiment, the outer layer 44 can be co-extruded with the inner layer 48 to form the tubing body 46. In another embodiment, the inner layer 48 can be formed first by extrusion. The outer layer 44 can then be extruded over the inner layer 48 to form the tubing body 46.
In other embodiments, as depicted in
The second portion forming the inner layer 106 of the tubing body 104 shown in
In addition to imparting electrostatic dissipative properties to the tubing body 104, the presence of the inner layer 106 formed from the electrostatic dissipative composite may also provide a more inert inner surface 112 for contact with a fluid flowing through a fluid flow path 114 defined in the tubing body 104, and may also prevent contaminants from the conductive stripes 110 being introduced into the fluid.
The first portion 204 of the tubing body 202 can be formed from a non-conductive fluoropolymer. Suitable non-conductive fluoropolymers used to form the outer layer include, but are not limited to, fluoropolymers such as: perfluoroalkoxy alkane polymer (PFA); ethylene and tetrafluoroethylene polymer (ETFE); and ethylene, tetrafluoroethylene and hexafluoropropylene polymer (EFEP); and fluorinated ethylene propylene polymer (FEP). In one embodiment, the first portion 204 is formed from PFA.
The second portion 206 of the tubing body 202 can be formed form an electrostatic dissipative composite including a fluoropolymer blended with perfluorinated ionomer particles, as described herein. In some embodiments, the electrostatic dissipative composite includes a PFA matrix having regions of perfluorinated sulfonic acid copolymer distributed throughout the matrix such that the composite has a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square. In one embodiment, the perfluorinated sulfonic acid copolymer is NAFION™. The perfluorinated sulfonic acid copolymer can be in acidic form in the final product. The amount of perfluorinated sulfonic acid copolymer in the electrostatic dissipative composite used to form the inner layer 38 can range from: 0.01 wt. % to 10 wt. % of the total weight of the composite; from 0.01 wt. % to 5 wt. % of the total weight of the composite; from 1 wt. % to 5 wt. % of the total weight of the composite; or more particularly, from 2 wt. % to 5 wt. % of the total weight of the composite. The tubing body 202 can have a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square or more particularly, of between 1×105 ohms/square and 1×108 ohms/square. Surface resistivity of the tubing body is measured according to ASTM F1711.
The first portion 304 of the tubing body 302 can be formed from a non-conductive fluoropolymer. Suitable non-conductive fluoropolymers used to form the outer layer include, but are not limited to, fluoropolymers such as: perfluoroalkoxy alkane polymer (PFA); ethylene and tetrafluoroethylene polymer (ETFE); ethylene, tetrafluoroethylene and hexafluoropropylene polymer (EFEP); and fluorinated ethylene propylene polymer (FEP). In one embodiment, the first portion 304 is formed from PFA.
The stripes 308 forming the second portion 306 of the tubing body 302 can be formed form an electrostatic dissipative composite including a fluoropolymer blended with perfluorinated ionomer particles, as described herein. The fluoropolymer used to form the composite can be the same fluoropolymer used to form the first portion 304 of the tubing body 302, but this is not required. In some embodiments, the electrostatic dissipative composite includes a PFA matrix having regions of perfluorinated sulfonic acid copolymer distributed throughout the matrix such that the composite has a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square. In one embodiment, the perfluorinated sulfonic acid copolymer is NAFION™. The perfluorinated sulfonic acid copolymer can be in acidic form in the final product. The amount of perfluorinated sulfonic acid copolymer in the electrostatic dissipative composite used to form the inner layer 38 can range from: 0.01 wt. % to 10 wt. % of the total weight of the composite; from 0.01 wt. % to 5 wt. % of the total weight of the composite; from 1 wt. % to 5 wt. % of the total weight of the composite; or more particularly, from 2 wt. % to 5 wt. % of the total weight of the composite. The tubing body 302 can have a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square or more particularly, of between 1×105 ohms/square and 1×108 ohms/square. Surface resistivity of the tubing body is measured according to ASTM F1711.
In addition to tubing segments, at least a portion of various other operative components of a fluid delivery and storage system can be formed from an electrostatic dissipative composite, as disclosed herein according to the various embodiments. The term “operative component” as used herein in this disclosure refers to any component or device having a fluid input and a fluid output and that connect with tubing segments for directing or providing for the flow of fluid. The term “operative component” also includes operative parts of a component that are exposed to or in contact with a fluid such as, for example, a valve, pump diaphragm or a break seal. Examples of operative components include, but are not limited to, fitting bodies, valve bodies, valve diaphragms, filter housings, heat exchanger housing, sensor housings, pump bodies, diaphragms, break seals, dispense heads, spray nozzles, mixers, containers, container liners, storage drums, and/or the like. In one embodiment, the operative component is a valve body or a pump body. In another embodiment, the operative component is a valve diaphragm or a pump diaphragm. In some cases, at least a portion, if not all, of the operative component can be compression molded from the composite.
In various embodiments, connector fittings 326 and 327 have substantially the same design. As described above, in various embodiments the body portion 322, 330 is constructed using an electrostatic dissipative composite as described herein. For example, at least a portion of the body portion 322 or 330 can be constructed from an electrostatic dissipative composite including a PFA matrix having regions of blended perfluorinated sulfonic acid copolymer distributed throughout the matrix. In one embodiment, the perfluorinated sulfonic acid copolymer is NAFION™. The perfluorinated sulfonic acid copolymer can be in acidic form in the final product. The amount of perfluorinated sulfonic acid copolymer in the electrostatic dissipative composite used to form at least a portion of the body portion 322 or 330 can range from: 0.01 wt. % to 10 wt. % of the total weight of the composite; from 0.01 wt. % to 5 wt. % of the total weight of the composite; from 1 wt. % to 5 wt. % of the total weight of the composite; or more particularly, from 2 wt. % to 5 wt. % of the total weight of the composite. The operative component formed from the composite can have a surface resistivity of between 1×104 ohms/square and 1×1012 ohms/square or more particularly, of between 1×105 ohms/square and 1×108 ohms/square. Surface resistivity is measured according to ASTM F1711.
Having thus described several illustrative embodiments of the present disclosure, those of skill in the art will readily appreciate that yet other embodiments may be made and used within the scope of the claims hereto attached. Numerous advantages of the disclosure covered by this document have been set forth in the foregoing description. It will be understood, however, that this disclosure is, in many respects, only illustrative. Changes may be made in the details, particularly in matters of shape, size, and arrangement of parts without exceeding the scope of the disclosure. The disclosure's scope is, of course, defined in the language in which the appended claims are expressed.
This application claims priority to and the benefit of U.S. Provisional Application No. 62/737,572 filed Sep. 27, 2018, the entirety of which is incorporated herein by reference for all purposes.
Number | Date | Country | |
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62737572 | Sep 2018 | US |