Various aspects of this disclosure relate to emission sources and methods of forming the same.
A laser (acronym for light amplification by stimulated emission of radiation) emits coherent light through a process of optical amplification via the stimulated emission of electromagnetic radiation. Lasers or coherent light sources have many important applications which form the cornerstones of our modern society. These range from fast information processing and telecommunications; optical data storage; bio-imaging; medical diagnostic and phototherapy to scientific research and defence applications. The demands for such applications continue to grow with Mankind's relentless pursuit of sustainable growth.
The heart of a laser is its gain medium—a material that makes light stronger or permits optical amplification to occur. Optical amplification, also known as gain occurs when the gain material transfers part of its energy to light and makes the light more intense and in phase. Typical gain media include crystals (e.g., neodymium-doped yttrium aluminum garnet (Nd:YAG), titanium doped aluminum oxide (Ti:Sapphire) and neodymium-doped yttrium orthovanadate (Nd:YVO4) etc.) and high quality semiconductors (e.g. gallium arsenide (GaAs) and aluminum gallium arsenide (AlxGa(1-x)As) etc). These gain media typically operate in the infrared (IR) region of the electromagnetic spectrum. To obtain wavelengths in the ultraviolet (UV) or visible (VIS) region, wavelength conversion of IR photons with nonlinear crystals is performed. For example, in the modest hand-held laser pointer, the green light is generated indirectly—beginning with an AlGaAs laser diode (808 nm) pumping a NdYVO4 crystal to generate 1064 nm photons which are then frequency doubled by a KTP crystal to 532 nm. It is important to note the stringent conditions needed to prepare the high quality, crystalline gain materials, which involve costly high temperature growth and processing. For example, GaAs and AlxGa(1-x)As heterostructures require expensive elevated temperature and high vacuum growth techniques such as chemical vapor deposition (CVD) and molecular beam epitaxy (MBE).
In various embodiments, an emission source may be provided. The emission source may also include a gain medium including a halide semiconductor material. The emission source may further include a pump source configured to provide energy to the gain medium.
In various embodiments, a method of forming an emission source may be provided. The method may include providing a gain medium including a halide semiconductor material. The method may also include providing a pump source configured to provide energy to the gain medium.
The invention will be better understood with reference to the detailed description when considered in conjunction with the non-limiting examples and the accompanying drawings, in which:
The following detailed description refers to the accompanying drawings that show, by way of illustration, specific details and embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. Other embodiments may be utilized and structural, and logical changes may be made without departing from the scope of the invention. The various embodiments are not necessarily mutually exclusive, as some embodiments can be combined with one or more other embodiments to form new embodiments.
In order that the invention may be readily understood and put into practical effect, particular embodiments will now be described by way of examples and not limitations, and with reference to the figures.
Various embodiments relate to low temperature, solution processable high crystallinity gain media. Various embodiments not only reduce the production costs but also permit application of such solution processable gain media to a much wider range of resonator designs compatible for on-chip integration.
In other words, the emission source may include a gain medium 102 made of a halide semiconductor material. The emission source may further include a pump source 104 to provide energy to the gain medium 102.
The halide semiconductor material may also be referred to as a halide semiconductor. The halide semiconductor material may be or may include a halide perovskite material. The halide perovskite material may include an organic-inorganic perovskite material. The halide perovskite material may be or may include a three dimensional halide perovskite material. The halide perovskite material may also be referred to as perovskite material. In general, the halide semiconductor material may be or may include a three dimensional halide semiconductor material.
In various embodiments, the emission source may be a source for providing amplified spontaneous emission (ASE). In addition, the emission may additionally or alternatively provide spontaneous emission (SE), and/or stimulated emission (laser).
The pump source 204 may be configured to supply energy to the gain medium through a process called pumping. In various embodiments, the pump source 204 may be or may include an optical source configured to provide light as energy to the gain medium 202. The optical source may a flash lamp or by a laser. The optical source may emit light of a wavelength different from the light which the emission source generates or emit.
In various alternate embodiments, the pump source 204 may be or may include an electrical source configured to provide electrical energy to the gain medium 202. The electrical source may be configured to supply a current to the gain medium 202.
As shown in
The first reflective structure 208a may be arranged to reflect light incident on the first reflective structure 208a towards the second reflective structure 208b along the optical axis and the second reflective structure 208b may be arranged to reflect light incident on the second reflective surface 208b towards the first reflective surface 208a along the optical axis. In other words, light may bounce between the first reflective structure 208a and the second reflective structure 208b, passing through the gain medium 204 after each reflection. As the light passes through the gain medium 204, a wavelength or range of wavelengths of the light is amplified by stimulated emission.
The first reflective structure 208a and the second reflective structure 208b may be arranged substantially parallel to each other.
The first reflective structure 208a may be partially transparent so that light incident in the first reflective structure 208a may be partially transmitted through the first reflective structure 208a and partially reflected towards the second reflective structure 208b along the optical axis. The first reflective structure 208a may be referred to as an optical coupler. The second reflective structure 208b may be a highly reflective mirror. The resonant cavity 206 may be defined or may include other suitable arrangements of reflective surfaces. The halide semiconductor material may be represented by the general formula AMX3, where A may be a monopositive organic or inorganic ion (e.g. an organic group or organic cation or a metal cation or element), M may be a divalent metal cation or element, and X may be a halogen anion or element. Examples may include CH3NH3PbI3, CH3NH3PbBr3, CH3NH3PbBr2I, CsSnI3, CsPbI3, NH2CH═NH2PbI3. The halide semiconductor material may be alternatively represented by A2MX6, where A may be a monopositive organic or inorganic ion (e.g. an organic group or organic cation or a metal cation or element), M may be a tetravalent metal cation or element, and X may a halogen anion or element. Examples may include Cs2SnI6, (CH3NH3)2SnI6. The halide semiconductor material may also have the general formula A2+mMmX3m+2, where A may be a monopositive organic or inorganic ion (e.g. an organic group or organic cation or a metal cation or element), M may be a divalent metal cation or element, and X may an halogen anion or element (m greater or equal to 1). Examples may include (CH3NH3)3SnI5, (NH2CH═NH2)2CH3NH3SnI5, (NH2CH═NH2)2CH3NH3SnI2Br3. The halide semiconductor may instead be represented by the formula A3n−1 MnX3n+1, where A may be a monopositive organic or inorganic ion (e.g. an organic group or organic cation or a metal cation or element), M may be a divalent metal cation or element, and X may an halogen anion or element (n greater or equal to 1). An example may be (CH3NH3)2CuCl3Br. In various embodiments, the halide semiconductor material may include an organic ammonium cation or organic ammonium cation group. The organic group may be the organic ammonium cation or group. The organic ammonium group may be selected from a group consisting of an ammonium group, a hydroxylammonium group, a methylammonium group, a hydrazinium group, a azetidinium group, a formamidinium group, an imidazolium group, a dimethylammonium group, an ethylammonium group, a guanidinium group, a group with formula [CnH2n+1 NH3] where 2<n<20 or a long chain group such as phenethylammonium group [(C6H5—C2H4)NH3] and combinations thereof. The organic ammonium cation may be selected from a group consisting of an ammonium ion [NH4]+, a hydroxylammonium ion [H3NOH]+, a methylammonium ion [(CH3)NH3]+, a hydrazinium ion [H3N—NH2]+, an azetidinium ion [(CH2)3NH2]+, a formamidinium ion [NH2(CH)NH2]+, an imidazolium ion [C3N2H5]+, a dimethylammonium ion [(CH3)2NH2]+, an ethylammonium ion [(C2H5)NH3]+, a guanidinium ion [C(NH2)3]+, a cation with formula [CnH2n+1NH3]+ where 2<n<20 or a long chain ion such as phenethylammonium ion [(C6H5—C2H4)NH3]+ and combinations thereof. In various alternate embodiments, the halide semiconductor material may include a metal cation such as Cs+, K+, Rb+. The halide semiconductor material may include a metal such as Cs, K or Rb.
The one or more metal elements may be selected from Group 14 of the periodic table. The halide semiconductor material may include one or more metal elements selected from a group consisting of Cu, Pb, Sn, Ge, Eu, Cr, Mn, Ni, Zn, Pd, Cd, Hg, Ba and Sr. The halide semiconductor material may include one or more metal cations selected from the cationic 2+ group (e.g. Cu2+, Pb2+, Sn2+ Ge2+, Eu2+, Cr2+, Mn2+, Ni2+, Zn2+, Pd2+, Cd2+, Hg2+, Ba2+ and Sr2+).
The one or more halogen elements may be selected from Group 17 of the periodic table. The halide semiconductor material may include one or more halogen elements selected from a group consisting of F, I, Cl and Br. The halide semiconductor material may include one or more halide anions selected from a group consisting of F−, I−, Cl− and Br−.
Examples of halide semiconductor materials may for instance include HNC(NH2)2SnF3, C2H5NH3Pb0.5Sn0.5Cl3, and CH3NH3SnFCl2.
Various embodiments relate to halide semiconductor materials as a gain medium. Various embodiments relate to the use or the application of low temperature solution processed halide semiconductor materials as coherent light emission gain medium that could be driven by photons and/or electrons.
The emission source may be configured to generate light, i.e. amplified spontaneous emission, spontaneous emission, and/or laser beam. The emission source may be configured to generate or emit coherent light. A coherent light may mean a polarized electromagnetic wave at a frequency whose phase is correlated over a relatively large distance (the coherence length) along the beam. The coherence length may be more than 10 cm or more than 15 cm or more than 20 cm or more than 50 cm or more than 1 m. The emission source may be configured to generate the amplified spontaneous emission and/or laser beam when energy is supplied or pumped into the gain medium 202 by the pump source 204.
In the present context, light may be any electromagnetic waves or combination of electromagnetic waves. In various embodiments, the emission source may be configured to generate light of a wavelength or range of wavelengths from a range of 250 nm to about 1 mm, e.g. about 380 nm to about 1 mm, e.g. from about 390 to about 790 nm. The emission source may be configured to generate visible light and/or infrared light. In other words, lasing wavelengths spanning from the visible to the infrared may be achieved using this class of materials.
Halide semiconductor materials may have a low trap density. The gain medium 202 may have a trap density below 1018 cm−3, e.g. below 0.5×1018 cm−3, e.g. below 1017 cm−3, e.g. below 0.5×1017 cm−3, e.g. below 1016 cm−3. The gain medium may be configured to achieve amplified spontaneous emission (ASE) at a pump fluence substantially equal to or below 50 μJ cm−2, e.g. substantially equal to or below 20 μJ cm−2, e.g. substantially equal to or below 15 μJ cm−2, substantially equal to or below 14 μJ cm−2, e.g. substantially equal to or below 12 μJ cm−2, substantially equal to or below 10 μJ cm−2. The threshold pump fluence may be dependent on the quality of the cavity. The emission source may be configured to generate light via amplified spontaneous emission (ASE).
The low trap density of halide semiconductor materials may allow amplified spontaneous emission (ASE) in bare films (i.e. without any cavity or optical feedback) to be achieved with the ultralow threshold pump fluence.
In various embodiments, the halide semiconductor material may have a ASE threshold carrier density below 1019 cm−3, e.g. below 5×1018 cm−3, e.g. below 2×1018 cm−3 e.g. about 1.7×1018 cm−3.
Halide semiconductor materials may also exhibit high optical stability and durability. Halide semiconductor materials may have long range balanced electron and hole diffusion lengths that makes it possible to achieve efficient electrical-driven lasing.
In various embodiments, the gain medium 202 may have a bulk trap density below or about 1017 cm−3, e.g. below or about 6×1016 cm−3, below or about 6×1016 cm−3.
Further, the gain medium may include halide semiconductor materials (e.g. halide perovskite materials) that are solution processable. A solution processable gain medium has much greater versatility than traditional gain media for integration with existing silicon based technologies. The halide semiconductor materials may be applied to a much wider range of optical cavity designs and substrates by methods such as spin-coating, dip-coating or dropcasting. Further, halide semiconductor materials exhibit broadband gain profile. In various embodiments, the gain medium may have undergone a post film treatment. In various embodiments, the gain medium may further include additives to control trap density. Additives may include metal halides with a generic structure MI2, where M represents a metal cation and I represents the iodide anion. Non-limiting examples include PBI2, SnI2, SnF2. The additives may be configured to control metal vacancies/oxidation states. Other additives to improve film formation properties may include acids such as HCl, HI or other halide derivatives such as CH3NH3Cl.
Facile substitution of the metal element and organic component may allow a wide choice of lasing wavelengths. For instance, the material may be or may include CH3NH3PbCl3, CH3NH3PbCl1.5Br1.5 and/or CH3NH3PbCl2Br. In various embodiments, the halide semiconductor material may include more than one organic cation or group. The halide semiconductor material may include more than one metal cation. The halide semiconductor material may include more than one halide anion. The gain medium 202 may include more than one halide semiconductor materials. For instance, the gain medium 202 may include a mixture of CH3NH3PbCl3, CH3NH3PbCl1.5Br1.5 and CH3NH3PbCl2Br
In various embodiments, the halide semiconductor material layer may on a substrate such as a quartz substrate. In various embodiments, the emission source may include a layer such as CH3NH3PbI3/[6,6]-phenyl-C61-butyric acid methyl ester (PCBM) on or in contact with the halide semiconductor material layer. In various embodiments, the gain medium may include a substrate and a halide semiconductor material layer on the substrate. In various embodiments, the gain medium may further include a layer such as CH3NH3PbI3/[6,6]-phenyl-C61-butyric acid methyl ester (PCBM) on the halide semiconductor material layer.
Various embodiments may find applications in areas such as telecommunication, quantum computing, data storage and reading out (CD, DVD), laser pointer, barcode readers, laser printers, image scanners, laser surgery, industrial laser machining, directed energy weaponry, laser medicine, etc.
The emission source may be or may include an optical pumped bulk perovskite laser according to various embodiments. The halide semiconductor material may be or may include a three-dimensional perovskite gain material 212 such as CH3NH3PbX3(X═Cl, Br, I or their combinations), CsSnI3(SnF2)x or any other suitable perovskite material. The perovskite gain materials may be contained in an optical cavity such as a self formed optical cavity or formed by other optical elements such as partially transmission mirror 218a and mirrored element 218b. The elements 218a, 218b may be the reflective structures. The mirrored element 218b may be disposed at one end of the gain material 212 and the partially transmission mirror 218a may be disposed at the other end. A suitable pumping source 214 such as a Ti:sapphire laser may provide a pumping energy (e.g. at a wavelength of 400 nm). The energy may be transmitted through lens 215 and mirror 218b to energize the perovskite material. The laser output beam 220 may exit through the partially reflective mirror 218a.
The emission source shown in
Although we only show bulk lasers with perovskite used as the gain material in the earlier figures, various embodiments may relate also to perovskite channel waveguide laser as shown in
The perovskite DBR laser may be on a substrate 245 with periodic structures 248a, 248b serving as gratings to provide optical feedback for the emission in the perovskite gain medium 242. Laser beam 250 exits from the top 248a.
The emission source may include a substrate 255a, a diffraction grating 255c on the substrate 255a. The emission source may further include a laser element 255a on the diffraction grating 255c. The diffraction grating 255c may include the gain medium 255c and be configured to reflect light to and from the gain medium 255c to generate laser beam 260. In other words, a periodic structure such as a diffraction grating 255c may be integrated into the active perovskite gain medium 252. The diffraction grating 255c may provide optical feedback for the emission. The whole structure may be supported by a substrate 255a with a laser element 255c on top of it. Laser beam 260 may exit from the side.
In other words, a method of fabricating a emission source may include providing a gain medium including an halide semiconductor material and arranging a pump source so that the pump source is able to provide energy, e.g. electrical energy and/or optical energy to the gain medium.
In various embodiments, the gain medium may be arranged within a resonant cavity. The gain medium may be arranged within the cavity by arranging the gain medium between a first reflective structure and a second reflective structure along an optical axis.
In various embodiments, the first reflective structure may be arranged to reflect light incident on the first reflective structure towards the second reflective structure along the optical axis and the second reflective structure may be arranged to reflect light incident on the second reflective surface towards the first reflective surface along the optical axis.
In various embodiments, the first reflective structure may be partially transparent so that light incident in the first reflective structure may be partially transmitted through the first reflective structure and partially reflected towards the second reflective structure along the optical axis.
In various embodiments, the halide semiconductor material may be formed by reacting a metal halide (e.g. PbI2, SnCl2, CaBr2) with an organic ammonium halide. The metal halide may be caused to react with the organic or inorganic halide such as an ammonium halide (e.g. CH3NH3I, CH3NH3F, HNC(NH2)2Br etc.) by mixing the metal halide with the organic ammonium halide in a suitable solvent.
While only selected examples are mentioned in the experimental section of halide semiconductor material, these examples are not intended to be limiting and other halide semiconductor materials may show similar results.
In various embodiments, the halide semiconductor material may be formed by dropcasting or spincoating or any other solution-based methods. The halide semiconductor material may be formed by printing processes, (e.g. dropcasting or spincoating etc.), physical deposition methods (e.g. thermal evaporation, sputtering etc.) or combinations thereof.
The halide semiconductor material, e.g. organic-inorganic perovskite films may be prepared by simple solution deposition processes such as dropcasting and spincoating. The solution may include CH3NH3X and PbX2 (where X may be a halogen such as I, Cl, Br and F or mixtures of them) dissolved in an appropriate solvent such as DMF (Dimethyl formamide) or GBL (Gamma butyrylactone). The wt % of the solute (CH3NH3X+PbX2) may be as high as 40%, or as high as 35%. Upon deposition and mild heating, the deposited film may transform into crystalline CH3NH3PbX3. Heating temperature may be a temperature less than 100° C., e.g. less than 80° C., e.g. less than 50° C. Another solution based technique may include the spincoating of PbX2 on a substrate followed by dipping it in a CH3NH3X solution to complete its transformation to CH3NH3PbX3. Other non-solution based techniques such as evaporative deposition may also possible.
Solution processed organic-inorganic perovskite materials may provide simple and inexpensive alternatives to traditional semiconductor gain mediums which were produced with expensive gas-phase methods. Various embodiments may be easily integrated with existing silicon based electronics. If compared with traditional semiconductor gain mediums, various embodiments may also provide better temperature stability of the ASE occurring threshold. The low temperature of processing may also enable integration of these materials on to flexible substrates.
Low-temperature solution-processed materials that show optical gain and can be embedded into a wide range of cavity resonators are attractive for the realization of on-chip coherent light sources. Organic semiconductors and colloidal quantum dots are considered the main candidates for this application.
However, stumbling blocks in organic lasing include intrinsic losses from bimolecular annihilation and the conflicting requirements of high charge carrier mobility and large stimulated emission; whereas challenges pertaining to Auger losses and charge transport in quantum dots still remain. Herein, we reveal that halide semiconductors such as solution-processed organic-inorganic halide perovskites (CH3NH3PbX3 where X D Cl, Br, I) may demonstrate huge potential in photovoltaics and may have promising optical gain. Their ultra-stable amplified spontaneous emission at strikingly low thresholds may stem from their large absorption coefficients, ultralow bulk defect densities and slow Auger recombination. Straightforward visible spectral tunability (390-790 nm) is demonstrated. Importantly, in view of their balanced ambipolar charge transport characteristics, these materials may show electrically driven lasing.
Organic-inorganic halide perovskites have recently emerged as a new class of photovoltaic materials with high efficiencies driven by the large absorption coefficients and long-range balanced electron and hole transport lengths. Surprisingly, we found that they may also exhibit excellent coherent light emission properties.
The CH3NH3PbI3 films on quartz substrates were prepared by spin-coating 10 vol % solutions in DMF. [6,6]-phenyl-C61-butyric acid methyl ester (PCBM) layers were spin-coated from a solvent mixture (10 mg ml−1) of anhydrous chlorobenzene and anhydrous chloroform (1:1 v/v).
The samples were put in vacuum for more than three days to get rid of any residual solvent before the optical measurements. Mixed halides were prepared by blending appropriate molar ratios of CH3NH3PbI3, CH3NH3PbBr3 and CH3NH3PbCl3 solutions. The solar cells were fabricated using the sequential deposition procedure, as previously reported and characterized under simulated air mass 1.5 global (AM1.5G) solar irradiation in the dark.
Optical spectroscopy. For femtosecond optical spectroscopy, the laser sources were a Coherent Legend regenerative amplifier (150 fs, 1 kHz, 800 nm) seeded by a Coherent Vitesse oscillator (100 fs, 80 MHz) and a Coherent Libra regenerative amplifier (50 fs, 1 kHz, 800 nm) seeded by a Coherent Vitesse oscillator (50 fs, 80 MHz). 800 nm wavelength laser pulses were from the regenerative amplifier's output whereas 400 nm wavelength laser pulses were obtained with a BBO doubling crystal. 600-nm laser pulses were generated from the Coherent TOPAS-C and Coherent OPerA-Solo optical parametric amplifiers. The laser pulses (circular spot, diameter 1.5 mm) were directed to the films under vacuum in a cryostat. The emission from the samples was collected at a backscattering angle of 150 by a pair of lenses into an optical fibre that was coupled to a spectrometer (Acton, Spectra Pro 2500i) and detected by a charge coupled device (Princeton Instruments, Pixis 400B). Time-resolved PL (TRPL) was collected using an Optronis Optoscope streak camera system which has an ultimate temporal resolution of about 10 ps. All optical measurements were performed at room temperature, except for ASE from CH3NH3PbCl3 (at 150 K). Room-temperature photoluminescence quantum yield (PLQY) of the perovskite thin films was measured using an integrating sphere. The samples were excited with 600 nm pulses generated from the Coherent OPerA-Solo. The emission was corrected for CCD and grating responsivity. Room-temperature gain measurements were carried out using standard VSL methods. The excitation stripe was focused by a cylindrical lens (with focal length f=20 cm) to a stripe and the emission collection configuration was the same as described above. The excitation stripe length was varied through an adjustable slit actuated by a micrometer which was placed at the focal line of the cylindrical lens.
After spincoating, a clear optically flat film of CH3NH3PbI3 was obtained with thickness of about 65 nm.
Above the threshold fluence (12±2 μJ cm−2), the emission intensity may increase superlinearly (as shown in
The intrinsic gain properties of perovskites are investigated by examining the ASE behaviour in a cavity-free configuration. The ASE values provide a better benchmark for comparing different material sets on their intrinsic suitability for gain applications.
From the measured threshold fluence (12±2 μJ cm−2 and absorption coefficient (á=5.7×104 cm−1 at 600 nm), the ASE threshold carrier density may be calculated to be about 1.7×1018 cm−3. The threshold carrier density may correspond to the ease with which a material can attain net gain through optical or electrical generated means. Comparatively, for highly crystalline high-temperature-grown ZnSe and CdS nanowires (with similar α=105 cm−1 at the excitation wavelengths), the typical threshold carrier densities are nearly one order larger under similar measurement conditions.
Similarly, the typical ASE threshold carrier density for solution-processed organic thin films may be approximately one order larger. As a point of comparison, state-of-the-art cavity-free solution-processed polymer films such as poly[9,9-dioctylfluorene-co-9,9-di(4-methoxyphenyl)-fluorene] (F8DP) and Super Yellow exhibited an ASE threshold of about 6 μJ cm−2 (calculated from reported threshold pump energy of 0.1 μJ per pulse; excitation stripe about 400 μm×about 4 mm) and about 36 μJ cm−2 (calculated from the reported values of 315 nJ/pulse over a rectangular spot of length about 2.5 mm and width about 350 μm) respectively.
The results on CH3NH3PbI3 also compare favourably to reported CdSe/ZnCdS core/shell colloidal quantum dot (QD) films having an ASE threshold of 90 μJ cm−2.
Photoluminescence quantum yield (PLQY) values approaching 20% at pump fluence above the ASE thresholds have also measured using an integrating sphere.
The room temperature gain of the CH3NH3PbI3 sample was assessed using Variable Stripe Length (VSL) measurements.
The data is fitted using two methods. The method developed by Shaklee and Leheny (Shaklee, K. L. & Leheny, R. F. “Direct determination of optical gain in semiconductor crystals.” Appl. Phys. Lett. 18, 475-477 (1971)), is a straightforward way to determine the gain spectrum of a material over the small signal regime (utilized for inorganic and organic semiconductors in slab geometry).
The equation is provided by:
where Io(z), g, and z are the detected light intensity, gain coefficient and excitation stripe length, respectively; Is is the spontaneous emission rate per unit volume and A is the cross-sectional area of the excited volume.
Another method developed by Chan et al. (Chan, Y. et al., Blue semiconductor nanocrystal laser, Appl. Phys. Lett. 86, 073102 (2005)) for analysis over the entire signal regime (including saturation) and is more commonly used in solution processed colloidal quantum dot films.
The equation is provided by:
Wherein I, g, and z are the ASE intensity, gain coefficient and excitation stripe length. Respectively; while zo accommodates for possible pump beam inhomogenity and delayed ASE onset. Ia is a parameter that accounts for the saturation in ASE intensity which is defined as the gain lifetime multiplied by the speed of light within the gain medium.
The relatively low yield may be a consequence of the low exciton binding energy (19±3 meV) as well as high electron and hole mobilities. Nonetheless, variable stripe length (VSL) measurements on CH3NH3PbI3 have revealed a gain of about 250 cm−1 (fitted with Chan's method in Chan, Y. et al., Blue semiconductor nanocrystal laser, Appl. Phys. Lett. 86, 073102 (2005), typically used for colloidal QDs, see
Various embodiments may show better performance than other solution processed systems. Typical competing non-radiative pathways that can rapidly deplete the carrier population and make ASE unfavourable in other solution-processed semiconductors may not be dominant in various embodiments. The non-radiative pathways may include bulk defects such as vacancies, interstitials, antisites etc.) with fast trapping in the fs and ps timescales, surface traps which typically may require more than 100 ps for carrier diffusion through a few tens of nanometers of the material, and multi-particle loss mechanisms (such as bimolecular recombination in organic thin films or Auger recombination in quantum dots).
Following photo-excitation across the CH3NH3PbI3 bandgap (at low pump fluence where Auger recombination is not dominant), the excited charge carriers may either relax through bandedge emission or trap-mediated non-radiative pathways. The former (relaxing through bandgap emission) may give rise to SE with a lifetime (τ0) of 4.5±0.3 ns (as shown in
Under low fluence fs laser pulse excitation (where Auger recombination is negligible) and the assumption that trap states recombination is much slower than band edge radiative recombination, the dynamics of photo-generated charge carrier density (nc) can be described with the following set of differential equations:
Wherein nTPi(t) is the trap states density and ai is the product of the trapping cross section and the carrier velocity. Therefore the first term in equation (3) represents various trap-mediated non-radiative pathways, while the second term denotes the radiative recombination inside the film. Thus the relationship between the integrate bandedge PL intensity (IPL=k∫0∞nc(t)/τ0dt, where k is a constant) the initial photogenerated charge carrier density ne(0) can be obtained as:
Fitting the experimental result with equation (5) yields two types of traps in these CH3NH3PbI3 thin films, with the bulk (surface/interfacial) traps exhibiting fast (slow) trapping times. The bulk trap density nTPF is about 5×1016 cm−3 while the surface/interfacial trap density nTPS is about 1.6×1017 cm−3. This correlates well with a simple estimation of the total trap density (bulk and surface) obtained by the intersection of the linearly extrapolated PL intensity (indicated by line 806) with that of the pump fluence axis from
The bulk trap density (nTPF) is about 5×1016 cm−3 whereas the surface trap density (nTPS) is about 1.6×1017 cm−3. The trap densities measured in CH3NH3PbI3 may be comparable to defect densities in highly ordered organic crystals (1015-1018 cm−3) and superior to those of solution-processed organic thin films (1019 cm−3). Solution-deposited, high-temperature annealed Cu—In—Ga—S/Se (CIGS) chalcogenide layers also exhibit comparable defect densities to that reported here (1016 cm−3). These low bulk defect densities in perovskite are also consistent with the high solar cell efficiencies in this material.
Finite difference time domain (FDTD) simulations (Lumerical™ FDTD software) were performed to evaluate the optical confinement effects of the PCBM layer. The structure includes Quartz (100 nm)/CH3NH3PbI3 (65 nm)/[6,6]-phenyl-C61-butyric acid methyl ester (PCBM) (45 nm-optional)/vacuum (390 nm).
To examine the effects of the more prevalent surface traps on the carrier dynamics and ASE, PL measurements on bare CH3NH3PbI3 were compared against CH3NH3PbI3/[6,6]-phenyl-C61-butyric acid methyl ester (PCBM), C60) bilayers to mimic the presence of infinite interfacial electron trap states. Selective excitation of the CH3NH3PbI3 layer (about 65 nm thick for both cases) was performed with 600 nm laser pulses.
The presence of the PCBM layer (˜45 nm) is expected to severely quench the SE from the CH3NH3PbI3 layer; see
This value is slightly smaller than that of the bare CH3NH3PbI3 film (12±2 μJ cm−2) (shown in
Remarkably, ASE can also be observed in functional photovoltaic devices (ç=11.4%; Device structure: FTO/TiO2 compact layer/TiO2 mesoporous layer/CH3NH3PbI3/Spiro-OMeTAD/Au) with optical excitation; see
Although a low bulk defect density is favourable for obtaining reduced ASE thresholds, a critical criterion for achieving ASE is suppressed multi-particle non-radiative recombination rates (for example, bimolecular recombination noted in organics or Auger recombination in inorganic semiconductors). Bimolecular recombination (which is a limiting process in organic lasing) has been reported to be extremely low in CH3NH3PbI3—defying the Langevin recombination limit by at least four orders of magnitude.
These low bi-molecular charge recombination constants are consistent with our findings of low bulk defect densities as discussed earlier. The Auger recombination process in perovskite, which manifests under high pump fluence (nonlinear regime), typically yields Auger lifetimes (τAuger) from a few ps to ns, depending on the photo-generated charge carrier density. The Auger recombination in CH3NH3PbI3 is efficient (τAuger˜300 ps) compared with SE (4.5±0.3 ns) because of the long-range electron-hole diffusion lengths within them. However, the timescale for the occurrence of ASE (<10 ps-limited by the instrument response) signifies that the carrier build-up time for population inversion and the subsequent avalanche, out-competes the Auger processes in these CH3NH3PbI3 thin films (Supplementary Information). In contrast to solution-processed colloidal QDs (typical biexciton τAuger˜50 ps for 5 nm diameter CdSe QDs), such an Auger loss mechanism is less dominant in this ‘bulk-like’ CH3NH3PbI3 film.
Temperature dependent studies were also performed to further characterize the solution-processed CH3NH3PbI3 gain medium.
Due to the limited bound states in the film, the emission intensity of these two peaks exhibit clear saturation behaviors at higher pump fluence. However, the free exciton emission intensity increases continually with increasing pump fluence, finally achieving ASE above a threshold fluence of 10±2 0/cm2. This ASE threshold at 6 K is comparable to that at 300 K (i.e., 12±2 μJ cm−2). Comparatively, traditional inorganic semiconductor gain media are highly susceptible to temperature induced effects: strong phonon assisted charge carrier trapping; temperature dependent exciton dissociation and photo-generated charge carrier diffusion and dilution. Hence, the threshold pump fluence for generating coherent light emission from these inorganic semiconductor materials are strongly temperature dependent. However, for CH3NH3PbI3, the ASE threshold is almost temperature-insensitive, which are similar to organic chromophores and quantum dots. The line 602 represents the fit to experimental data in the regime of SE for the 746 nm PL peak. The line 604 represents the fit to experimental data in the regime of ASE for the 746 nm PL peak. Line 606 indicates variation of PL intensity for the 782 nm peak as a function of pump fluence. The temperature-insensitivity of CH3NH3PbI3 ASE threshold stems from its extremely low trap states density and almost temperature invariant charge carrier diffusion as indicated by
Our experiments also show that such perovskite gain media have nearly temperature independent threshold pump fluence (carrier density). In contrast, traditional semiconductor gain media have strong temperature dependent threshold pump fluence (carrier density).
The photostability of the CH3NH3PbI3 thin films was assessed by monitoring the ASE intensity as a function of time under laser irradiation at a 1 kHz repetition rate at room temperature.
This performance compares favourably against the state-of-the-art organic semiconducting thin films (50% drop in output power after about 107 laser shots; Grivas, C. & Pollnau, M. “Organic solid-state integrated amplifiers and lasers”, Laser Photon. Rev. 6, 419-462 (2012)) and colloidal QDs (50% drop in output power after about 106 laser shots; Chan, Y. et al. “Blue semiconductor nanocrystal laser”, Appl. Phys. Lett. 86, 073102 (2005)). The impressive ASE stability of the perovskite layers is also evident from tests of perovskite solar cells irradiated for about 8 h under ambient conditions (
In the absence of any significant defect concentrations, the SE may originate from the bandedge emission. Because the SE may provide the seed photons for the photon cascade in ASE, the ASE wavelengths may be in turn dependent on the bandgap of the semiconducting film. This is clearly evident from our temperature-dependent studies, where an increase in the bandgap due to a tetragonal to orthorhombic phase transition results in a blue-shifted SE and a corresponding shift in the ASE (
Various embodiments may be fabricated using a low temperature solution processed approach. In contrast, traditional semiconductor gain media are usually produced at elevated temperatures and using high vacuum growth techniques that require significant infrastructural investments.
Further, a solution processable gain medium according to various embodiments may have much greater versatility than traditional gain media for integration with existing silicon based technologies. It may be applied to a much wider range of optical cavity designs and substrates by simply spin-coating, dip-coating or dropcasting.
The lasing wavelength in these classes of materials may be determined by the band to band transition. The energetic separation between the bands (and hence the lasing wavelength) can be modified by facile substitution of either the metal or the organic component or the halide. This can allow lasing wavelengths from the visible to the infrared.
Our findings show that these organic-inorganic halide semiconductors may be a new class of robust solution-processed gain media with highly desirable characteristics. The low ASE threshold and the long-range balanced charge carrier diffusion length may stem from the low bulk defect density in CH3NH3PbI3 films. The highly crystalline PbX6 three-dimensional network may lend crystalline inorganic character to CH3NH3PbX3 while maintaining its solution processability. Broad wavelength tunability is possible with both cation and anion replacement. Their low-temperature solution processing may be highly compatible with unconventional substrates, printing technologies and monolithic integration with silicon-based electronics. Together with the long-range balanced electron and hole diffusion, high charge carrier mobilities and low bimolecular charge recombination rates, as well as large wavelength range continuously tunable coherent emission, our findings indicate that the simple solution-processed CH3NH3PbX3 may hold the key to realizing electrically driven solution-processed on-chip coherent light sources.
Low temperature solution processed photovoltaics suffer from low efficiencies due to poor exciton/electron-hole diffusion lengths (typically about 10 nanometers). Recent reports of highly efficient CH3NH3PbI3-based solar cells in a broad range of configurations raise a compelling case for understanding the fundamental photophysical mechanisms in these materials. By applying femtosecond transient optical spectroscopy to bilayers that interface this perovskite with either selective electron or selective hole extraction materials, we have uncovered concrete evidence of balanced long-range electron-hole diffusion lengths of at least 100 nm in solution processed CH3NH3PbI3. The high photoconversion efficiencies of these systems stem from the comparable optical absorption length and charge carrier diffusion lengths, transcending the traditional constraints of solution processed semiconductors.
An ideal solar cell material should combine good optical absorption characteristics with efficient charge transport properties. Low temperature solution processed light harvesting films prepared by techniques such as spin coating and chemical bath deposition are typically amorphous or poorly crystalline, consequently suffering from poor charge carrier transport. This limitation necessitates device designs that decouple light absorption and charge carrier transport lengths, including light trapping strategies such as plasmonics as well as the sensitized solar cell architecture. The recent development of organic-inorganic halide perovskite materials such as CH3NH3PbI3 as light harvesters in solid state sensitized solar cells has led to reports of impressive efficiency values of up to 15%. This remarkable material has been employed in a variety of photovoltaic architectures. A configuration employed by Kim et al. (H. S. Kim et al., “Lead iodide perovskite sensitized all-solid-state submicron thin film mesoscopic solar cell with efficiency exceeding 9%”, Scientific Reports 2, 591 (2012)) and Heo et al. (J. H. Heo et al., Efficient inorganic-organic hybrid heterojunction solar cells containing perovskite compound and polymeric hole conductors. Nature Photonics 7, 486 (2013)), sandwiches the thin perovskite layer between a rough mesoporous TiO2 photoanode and a hole transporting layer such as (2,2′,7,7′-tetrakis(N,N-di-p-methoxyphenylamine)-9,9′-spirobi-fluorene (Spiro-OMeTAD). Lee et al. (M. M. Lee, J. Teuscher, T. Miyasaka, T. N. Murakami, H. J. Snaith, “Efficient hybrid solar cells based on meso-superstructured organometal halide perovskites”, Science 338, 643 (2012)) have shown that efficient solar cells can be fabricated by replacing the TiO2 photoanode with an insulating Al2O3 scaffold—implying good electron transport properties. Surprisingly, Etgar et al. (L. Etgar et al., Mesoscopic CH3NH3PbI3/TiO2 heterojunction solar cells. Journal of the American Chemical Society 134, 17396 (2012)) reported an efficiency of 5.5% in a configuration without the hole transporting layer—indicating good hole transport properties. These indications of ambipolar charge transport capabilities are supported by a recent report by Ball et al. (J. M. Ball, M. M. Lee, A. Hey, H. J. Snaith, Low-temperature processed mesosuperstructured to thin-film perovskite solar cells. Energy and Environmental Science 6, 1739 (2013)) which demonstrated that ˜350 nm thick planar films sandwiched between a TiO2 compact layer and a hole transporting layer can generate short circuit current densities of 15 mA/cm2. These reports together imply that the electron and hole transport lengths within these organic-inorganic hybrid materials are high. Nonetheless, the innate dynamics of the photoexcited electrons and holes in CH3NH3PbI3 driving the high efficiencies in these solar cells are unknown. Herein, through femtosecond transient optical spectroscopy of CH3NH3PbI3 heterojunctions with selective electron and hole extraction, we successfully decouple electron and hole dynamics and show clear evidence of long electron and hole transport lengths (both over 100 nm). Our findings indicate that this class of materials does not suffer from the bottleneck of low collection lengths which handicap typical low temperature solution processed photovoltaic materials.
In this study, electron extraction layers (such as [6,6]-phenyl-C61-butyric acid methyl ester (PCBM), C60) with conduction band levels below that of CH3NH3PbI3 and hole extraction layers (such as Spiro-OMeTAD, poly(3,4-ethylenedioxythiophene) poly(styrenesulfonate) (PEDOT:PSS)) with valence band levels above CH3NH3PbI3 were interfaced to CH3NH3PbI3 to permit decoupling of the electron and hole dynamics (
Under identical experimental conditions, the photoluminescence (PL) quantum yield of the 65 nm thick CH3NH3PbI3 is greatly reduced when the perovskite is interfaced with an electron extracting PCBM layer or a hole extracting Spiro-OMeTAD layer (
Efficient PL quenching suggests that the charge carrier diffusion length inside the CH3NH3PbI3 layer is comparable to or longer than the layer thickness (65 nm). Correspondingly, the PL lifetimes were also significantly shortened when CH3NH3PbI3 was interfaced with the PCBM or Spiro-OMeTAD layer (
To improve the accuracy of these estimated values from the direct PL approach and obtain more details on the photo-excited charge carrier dynamics, complementary transient absorption spectroscopy (TAS) measurements were also performed. Due to the large absorption coefficients and the long charge carrier diffusion lengths, low pump fluence is essential to avoid extensive Auger recombination in CH3NH3PbI3—see
Representative TA spectra of CH3NH3PbI3 and its bilayer counterparts over the same spectral region are shown in 1420, 1430, 1440 (
However, it is not straightforward to assign the transitions associated with the 480 nm PB1 band. Given that the photo-excitation energy (of ˜2.06 eV for 600 nm wavelength) is smaller than the energy of the PB1 peak (2.58 eV), only one of the two energy states involving this PB transition could be populated. The long-lived nature of this PB band further suggests that the populated energy level should be either VB1 or CB1 (see SM for a more detailed discussion of the assignment).
Upon selective excitation of the CH3NH3PbI3 layer, no new PB or photoinduced absorption bands are observed when the electron or hole extraction layer is present. A comparative study at the respective probe wavelengths of PB1 and PB2 would thus yield detailed information about the charge carrier dynamics. For pure CH3NH3PbI3, the recombination dynamics at different probe wavelengths are relatively invariant over a range of pump fluences where second order effects are insignificant (
However, given that the TA signal at PB2 is a combination of signals from both electrons and holes, it is difficult to estimate the detailed hole extraction efficiency at this stage. The origins of PB1 and PB2 suggest the possibility of hot holes cooling from VB2 to VB1 following excitation of CH3NH3PbI3 across the VB2-CB1 gap. Such hot hole cooling dynamics could be validated through varying the pump wavelengths.
After 3.10 eV (400 nm) excitation, 1510 (
From fitting the TA decay dynamics with the diffusion model, the electron and hole diffusion coefficients were found to be 0.036 and 0.022 cm2/s, respectively. Using these values, the electron and hole diffusion lengths (LD) perpendicular to the film surface were calculated to be LDc=130 nm and LDh=110 nm where LD=√{square root over (DτTA)}. As expected, the LDh (majority carrier diffusion length) determined here is longer than that extracted from the more direct PL approach presented earlier, which is sensitive to the minority carrier dynamics. The long transport lengths associated with CH3NH3PbI3 are linked to its crystal structure, which includes corner-connected PbI6 octahedra that form a three-dimensional framework.
Other organic/inorganic halide materials based on Sn have also displayed good charge transport properties. The slightly shorter diffusion length of the holes compared to the electrons is consistent with the hole's larger effective mass and larger positive space charge limited transport. Nonetheless, these values are relatively balanced as compared to typical values reported in bulk heterojunction solar cells where the electron and hole transport lengths (proportional to their mobility) differ by orders of magnitude resulting in space charge limited photocurrents. These balanced long charge carrier diffusion lengths would account for the remarkable performances reported for these CH3NH3PbI3 devices.
These LD values are underestimated mainly because of the assumption that no quenching at the CH3NH3PbI3-quartz or -vacuum interfaces occur. The measured carrier lifetimes, τ0 are more susceptible to the non-ideality of these interfaces in these thinner spincoated CH3NH3PbI3 layers, leading to smaller τ0 and consequently shorter LD. Measurements in more “bulk-like” samples would yield longer τ0 and higher LD (submicron)—
Methods and Materials. [6,6]-phenyl-C61-butyric acid methyl ester (PCBM) layers were spincoated from a solvent mixture (10 mg/ml) of anhydrous chlorobenzene and anhydrous chloroform (1:1 v/v) while PEDOT:PSS employed in the study was Clevios™ A1 4083) layer. (2,2′,7,7′-tetrakis(N,-di-p-methoxyphenylamine)-9,9-spirobifluorene) (Spiro-OMeTAD) films were prepared by spincoating 20 mg/ml solutions in chlorobenzene. The CH3NH3PbI3 films were prepared by spincoating 10 wt % solutions in anhydrous DMF. The samples were stored in vacuum for more than 3 days to rid them of any residual solvent before the optical measurements.
All optical measurements were conducted in an optical cryostat under vacuum. For femtosecond optical spectroscopy, the laser source was a Coherent Legend™ regenerative amplifier (150 fs, 1 KHz, 800 nm) that was seeded by a Coherent Vitesse™ oscillator (100 fs, 80 MHz). 800 nm wavelength laser pulses were from the regenerative amplifier's output while 400 nm wavelength laser pulses were obtained through doubling the fundamental 800 nm pulses with a BBO crystal. 600-nm laser pulses were generated from a Light Conversion TOPAS-C optical parametric amplifier. The emission from the samples was collected at a backscattering angle of 150° by a pair of lenses and into an optical fiber that is coupled to a spectrometer (Acton, Spectra Pro 2500i) to be detected by a charge coupled device (CCD) camera (Princeton Instruments, Pixis 400B). Time-resolved PL was collected using an Optronis Optoscope™ streak camera system which has an ultimate temporal resolution of ˜10 ps. For femtosecond TA experiments, the samples were pumped at 2.07 eV (or 3.1 eV) and probed with a white-light continuum. The probe pulses (420-820 nm) were generated by focusing a small portion (˜5 μJ) of the fundamental 800 nm laser pulses into a 2 mm-thick sapphire plate. The linear polarization of the pump pulse was adjusted to be perpendicular to that of the probe pulse with a polarizer and a half waveplate. The cross-polarization will eliminate any contribution from coherent artifacts at early times. Pump-induced changes of transmission (DT/T) of the probe beam were monitored using a monochromator/PMT configuration with lock-in detection. The pump beam was chopped at 83 Hz and this was used as the reference frequency for the lock-in amplifier.
The optical transmittance and total reflectance spectra of CH3NH3PbI3 on quartz substrate and blank quartz substrate were measured with a UV-VIS-NIR spectrophotometer (Shimadzu UV-3600) with an integrating sphere (ISR-3100). The absorption coefficient of the ultrathin CH3NH3PbI3 film was calculated using the following expression:
where Rsub, Tsub and dsub are the substrate reflectance, transmittance and thickness, respectively. Rtot, Ttot and dtot are reflectance, transmittance and thickness of the substrate/film system, respectively. dfilm is the CH3NH3PbI3 film thickness. With equation (6), the interface effect between substrate and film can be taken into account.
Diffusion Model. The charge carrier diffusion lengths (LD) in the active layer can be estimated using a simple diffusion limited quenching model in a bilayer system. The laser pulse generated charge carrier density in the active layer can be described by a one-dimensional diffusion equation:
where n(z, t) is the charge carrier density, D is the charge carrier diffusion coefficient, k is the original charge carrier consumption rate without the acceptor layer. The spatial coordinate z represents the vertical distance of a point in the active layer from the quartz/active layer interface. With fs laser pulse excitation, the initial photo-generated charge carrier distribution in the active layer can be expressed as:
n(z,0)=n(0)e−αz 8
where ä is the linear absorption coefficient of the active layer at the excitation wavelength. Assuming that the donor/acceptor interface is the only quenching interface with infinite quenching rate, a minimum estimate of LD will be obtained. Solving Equation 7 with the initial charge carrier distribution and boundary conditions yields the time dependent charge carrier distribution (n(z, t)) and total charge number (N(t)) within the active layer:
where L is the active layer thickness.
Interpretation for Photobleaching (PB) Peaks at 480 nm and 760 nm.
From the linear absorption spectrum in
Scenario A: The long-lived nanosecond PB transient measured at 480 nm would exclude this situation because hot carrier relaxation to the lower levels would occur on a much faster picoseconds timescale.
Scenario D: The schematic represents a general situation where the band alignment could be either (a) a type I band alignment where the smaller bandgap system is located within the wider bandgap system; or (b) a type II band alignment where the energy bands of the two systems are staggered. Nonetheless, the following discussion is applicable. For the 600 nm pump pulse to yield two bleaching peaks at PB1 and PB2, a charge transfer from the smaller bandgap system (760 nm) to the larger bandgap system (480 nm) must have taken place. A key signature of such charge transfer is a concomitant decrease in the 760 nm probe signal with a rise in the 480 nm probe signal over the same time frame. This is not observed, thus eliminating Scenario D altogether.
Differentiating Scenario B and C: In Scenario B, the dependence of the dynamics at the two wavelengths could be described by:
where k1, k2 and k3 are proportionality constants and ne and nh are the electron and hole populations at CB1 and VB1. The transition at 480 nm does not depend on ne since the hot electron at CB2 decays within 1 ps.
In Scenario C, the dependence of the dynamics at the two wavelengths could be described by:
where k1, k2 and k3 are proportionality constants and ne and nh are the electron and hole populations at CB1 and VB1.
For the CH3NH3PbI3/PCBM bilayer, the dynamics originating from ne will be affected; while for the CH3NH3PbI3/Spiro-OMeTAD bilayer, the dynamics originating from nh will be affected. Experimentally, both 480 nm (PB1) and the 760 nm (PB2) transients are modulated in the presence of the electron accepting PCBM—indicating that the CB1 is participating in both the transitions. In addition, only the 760 nm transition (PB2) is affected by the presence of the hole accepting Spiro-OMeTAD—indicating that VB2 is participating in this transition. This eliminates Scenario B and confirms Scenario C.
Second Order Effects—Auger Recombination. It was found that these carrier dynamics are strongly pump fluence dependent due to the large light absorption coefficient (˜5.7×104 cm−1 at 600 nm (
While the invention has been particularly shown and described with reference to specific embodiments, it should be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. The scope of the invention is thus indicated by the appended claims and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced.
This application claims the benefit of priority of U.S. application No. 61/876,940 filed Sep. 12, 2013, the contents of it being hereby incorporated by reference in its entirety for all purposes.
Number | Name | Date | Kind |
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3451009 | Ross | Jun 1969 | A |
3949319 | Tofield | Apr 1976 | A |
5023877 | Eden | Jun 1991 | A |
7641815 | Varadarajan | Jan 2010 | B2 |
7906787 | Kang | Mar 2011 | B2 |
20040229061 | Kasai | Nov 2004 | A1 |
20110073935 | Sekihara | Mar 2011 | A1 |
20130284264 | Pfenninger et al. | Oct 2013 | A1 |
20130320836 | Kanatzidis | Dec 2013 | A1 |
20140008660 | Jorgenson | Jan 2014 | A1 |
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Number | Date | Country | |
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20150071319 A1 | Mar 2015 | US |
Number | Date | Country | |
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61876940 | Sep 2013 | US |