Encapsulated light-guide optical element

Information

  • Patent Grant
  • 12140790
  • Patent Number
    12,140,790
  • Date Filed
    Sunday, July 19, 2020
    4 years ago
  • Date Issued
    Tuesday, November 12, 2024
    14 days ago
  • Inventors
  • Original Assignees
    • LUMUS LTD.
  • Examiners
    • Williams; Joseph L
    Agents
    • Friedman; Rivka
Abstract
A light-guide optical element (LOE) and methods of manufacture are disclosed. The LOE includes a transparent substrate having a first refractive index, the substrate having a pair of parallel external surfaces along a length thereof, and a plurality of mutually parallel at least partially reflective internal surfaces, the mutually parallel internal surfaces being angled obliquely relative to the pair of external surfaces; and a transparent polymer resin encapsulating at least a part of the substrate to form an encapsulated structure, the polymer resin having a second refractive index that is matched to the first refractive index; wherein the encapsulated structure comprises a pair of parallel external surfaces of optical quality formed from the resin.
Description
TECHNICAL FIELD

The presently disclosed subject matter relates to a light-guide optical element and, more particularly, to a light-guide optical element for a near-eye display system.


BACKGROUND

Light-guide optical elements (LOE) are sometimes used for augmented reality applications, and may be comprised within a near-eye display system such as a head mounted device. Certain types of LOEs are made of a transparent substrate having a pair of parallel external surfaces, and a non-parallel set of mutually parallel partially reflective internal surfaces (“facets”). In some cases these LOEs further include, on an outer surface, a wedge-shaped prism through which an image is coupled in via a projector. The image propagates through the LOE via Total Internal Reflection (TIR) between the pair of parallel external surfaces and is coupled out towards the pupil of a viewer via the set of facets.


General Description


According to one aspect of the presently disclosed subject matter there is provided a method of manufacturing a light-guide optical element (LOE) including the steps of: forming an optical combiner element comprised of a transparent substrate having a first refractive index, the combiner element having a pair of parallel external surfaces along a length thereof, and a plurality of mutually parallel at least partially reflective internal surfaces, the mutually parallel internal surfaces being angled obliquely relative to the pair of external surfaces; and encapsulating, using a molding process, at least a part of the combiner element with a transparent polymer resin to form an encapsulated structure, the resin having a second refractive index that is matched to the first refractive index; wherein the encapsulated structure includes a pair of parallel external surfaces of optical quality formed from the resin.


In some embodiments, the molding process includes: providing a hollow mold having an internal cavity; fixing the combiner element to the mold such that the combiner element extends at least partially into the cavity; and filling the cavity with the resin and curing the resin, whereupon the combiner element is at least partially encapsulated by the resin.


In some embodiments, the method includes polishing the pair of parallel external surfaces of the resin.


In some embodiments, the method includes forming an angled surface at one longitudinal end of the LOE.


In some embodiments the method includes bonding a wedge prism to the angled surface.


In some embodiments the mold includes at least an upper portion and a lower portion, and the molding process further comprises, prior to filling the cavity with resin, aligning the upper portion and lower portion relative to one another to obtain parallelism between the pair of external surfaces of the encapsulated structure.


In some embodiments, the cavity includes a main cavity and a secondary cavity at a longitudinal end of the main cavity, the secondary cavity having a wedge shape such that upon removing the combiner element from the mold, the encapsulating resin includes a wedge-shaped portion at a longitudinal end thereof.


In some embodiments, the molding process is performed in two stages, in which a first stage comprises filling the secondary cavity with a first part of the resin, and the second stage comprises, after curing of the first part of the resin, filling the main cavity with a second part of the resin.


In some embodiments, the molding process includes polishing active areas of the mold prior to filling with resin, such that the parallel external surfaces of the encapsulated structure satisfy one or more desired structural parameters of the LOE.


In some embodiments, the one or more structural parameters include at least one of roughness less than or equal to 25 nm peak value (Ra), and flatness equal to or less than 6 fringe power with 2 power irregularity over a circle of 20 mm diameter.


In some embodiments, the upper and lower portions are aligned using an active alignment process such that that after molding, the encapsulated structure includes parallel external surfaces.


According to another aspect of the presently disclosed subject matter there is provided a light-guide optical element (LOE) including a transparent substrate having a first refractive index, the substrate having a pair of parallel external surfaces along a length thereof, and a plurality of mutually parallel at least partially reflective internal surfaces, the mutually parallel internal surfaces being angled obliquely relative to the pair of external surfaces; and a transparent polymer resin encapsulating at least a part of the substrate to form an encapsulated structure, the polymer resin having a second refractive index that is matched to the first refractive index; wherein the encapsulated structure comprises a pair of parallel external surfaces of optical quality formed from the resin.


In some embodiments, the external surfaces of the encapsulating the pair of external surfaces of the encapsulating resin are parallel to a tolerance of up to 1.5 arcminutes.


In some embodiments, the LOE includes an angled surface at one longitudinal end thereof.


In some embodiments, the LOE includes a wedge prism bonded to the angled surface.


In some embodiments, the encapsulating resin includes a wedge-shaped portion at one longitudinal end thereof.


In some embodiments, the substrate is at least partly encapsulated by the resin using a molding process.


In some embodiments, the molding process includes active alignment of one or more mold parts to achieve desired parallelism between the external surfaces of the encapsulated structure.


In some embodiments, the molding process includes machining of one or more mold parts to satisfy desired structural parameters of the LOE during the molding process.


In some embodiments, the one or more structural parameters include at least one of roughness less than or equal to 25 nm peak value (Ra), and flatness equal to or less than 6 fringe power with 2 power irregularity over a circle of 20 mm diameter.





BRIEF DESCRIPTION OF THE DRAWINGS

In order to understand the invention and to see how it can be carried out in practice, embodiments will be described, by way of non-limiting examples, with reference to the accompanying drawings, in which:



FIG. 1A illustrates a side view of a LOE according to the prior art;



FIG. 1B illustrate a top-down view of a LOE according to the prior art;



FIG. 2A illustrates schematically a side view of a LOE according to a first embodiment of the disclosed subject matter;



FIG. 2B illustrates schematically a top-down view of a LOE according to a first embodiment of the disclosed subject matter;



FIG. 3 illustrates schematically an exemplary mold 30 in accordance with certain aspects of the disclosed subject matter;



FIG. 4 illustrates schematically a double side polishing process on the encapsulated LOE in accordance with certain aspects of the disclosed subject matter;



FIG. 5 illustrates schematically forming an angled surface at one longitudinal end of the LOE in accordance with certain aspects of the disclosed subject matter;



FIG. 6 illustrates schematically bonding a wedge prism on the angled surface of the LOE in accordance with certain aspects of the disclosed subject matter;



FIG. 7A illustrates schematically a side view of a LOE according to a second embodiment of the disclosed subject matter;



FIG. 7B illustrates schematically a top-down view of a LOE according to a second embodiment of the disclosed subject matter;



FIG. 8A illustrates schematically an exploded view of an exemplary mold according to embodiments of the disclosed subject matter;



FIG. 8B illustrates a cross-sectional view of an exemplary mold oriented vertically according to embodiments of the disclosed subject matter; and



FIG. 9 illustrates schematically an alignment process according to embodiments of the disclosed subject matter.





DETAILED DESCRIPTION

In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the invention. However, it will be understood by those skilled in the art that the presently disclosed subject matter may be practiced without these specific details. In other instances, well-known methods, procedures, and components have not been described in detail so as not to obscure the presently disclosed subject matter.


It should be appreciated that the drawings are not drawn to scale, and in some cases may be exaggerated to emphasize certain details that may otherwise not be apparent.



FIGS. 1A-1B illustrate a side view and top-down view, respectively, of a LOE according to the prior art. The LOE includes an optical combiner element 10 made of a transparent substrate having a pair of parallel external surfaces 12a, 12b along a length hereof, and a plurality of mutually parallel at least partially reflective internal surfaces 14, the mutually parallel internal surfaces being angled obliquely relative to the pair of external surfaces. The LOE further includes a pair of transparent optical plates 16a, 16b bonded to the parallel surfaces 12a, 12b of the combiner element. The plates typically have a refractive index optically matched to the refractive index of the substrate, in order to facilitate total internal reflection between external surfaces of the plates of light rays propagating along the length of the combiner element. The external surfaces 17a, 17b of optical plates 16a, 16b are also parallel to each other and to the surfaces 12a, 12b of the combiner element. Typically, after bonding the glass plates, the plates are polished using a double side polishing process to achieve accurate parallelism. In some cases, the LOE includes a wedge prism 18 bonded to one longitudinal end thereof. In some cases, the LOE further includes a corner 19 at the longitudinal end opposite the wedge prism 18.


Amongst problems of the prior art methods of fabricating the LOE is the arduous process of bonding the glass plates to the combiner element, which must be performed delicately and accurately. As a result, the bonding process is long and expensive.


An additional difficulty exists in the process of bonding the wedge prism, which also must be performed very accurately, and as a result makes mass production difficult and expensive.


In contrast to the prior art LOE described above, the LOE disclosed herein solves the problem posed by bonding glass plates, by encapsulating the combiner element in optical resin which is used in place of glass plates.


Additionally, according to some embodiments disclosed herein, the wedge prism is integrally formed with the encapsulating resin, thereby solving the second difficulty described above, and enhancing the mass production capabilities of the LOE.



FIGS. 2A-2B illustrate, respectively, a side view and top-down view of a LOE according to a first embodiment of the disclosed subject matter. The LOE includes an optical combiner element 10 made of a transparent substrate having a pair of parallel external surfaces 12a, 12b along a length hereof, and a plurality of mutually parallel at least partially reflective internal surfaces 14, the mutually parallel internal surfaces 14 being angled obliquely relative to the pair of external surfaces 12a, 12b. The combiner element 10 is at least partially encapsulated by a transparent polymer resin 20 having a refractive index (RI) that is optically matched to the RI of the substrate. The overall encapsulated structure includes a pair of parallel external surfaces of optical quality formed from the resin, the pair of parallel external surfaces of the encapsulated structure being parallel to the surfaces 12a, 12b of the combiner element. “Parallel external surfaces” refers herein in the description and claims to external surfaces which are parallel, preferably to within a tolerance of 1.5 arcminutes angular offset or less.


As used above and throughout this description, “transparent”, should be understood to include less than complete transparency. Practically speaking, the substrate and resin need only be sufficiently transparent to propagate an injected image (e.g. via a projector) whilst facilitating transmission of light from the outside world. Additionally the term “matched” should be understood to mean that the RI of the substrate and the RI of the resin are within +/−1E−4 of each other, or at least within 0.002% of each other, and are preferably sufficiently close that the interface does not generate a clearly visible optical discontinuity. An “optical quality” external surface should be understood to mean sufficiently smooth that it does not give rise to significant scattering of light, and is therefore suitable as a surface through which a viewer can observe a projected image and/or the real world.


In some embodiments, as shown in FIGS. 2A-2B, the LOE can include a wedge prism 18 at one longitudinal end, bonded to an angled polished surface of the encapsulated LOE.


Preferably, encapsulation of the combiner element is performed using a molding process. FIG. 3 illustrates schematically an exemplary mold 30 that may be used for the molding process, further details of which will now be provided. Mold 30 is preferably a hollow mold having an internal cavity 31. Mold 30 preferably consists of at least two parts 32a, 32b that are attachable to one another, with each part having a respective internal indentation that when attached, align to form the mold's internal cavity. The mold further includes of a first attachment mechanism 33 that facilitates attachment of the respective parts 32a, 32b to each other. The mold further includes of a second attachment mechanism 34 that facilitates fixing the combiner element to the mold such that the combiner element extends at least partially into cavity 31, as shown in FIG. 3, while keeping a space between surfaces 12a, 12b and the cavity walls of preferably 0.25-0.35 mm. The mold further includes an opening or hole 35 leading to cavity 31 that allows the cavity to be filled with a liquid or semi-liquid form polymer resin when parts 32a, 32b are attached to one another and the combiner element 10 is fixed in place. In some embodiments, the resin is inserted into the mold while the mold is positioned vertically with hole 35 on top such that the resin fills all the entire cavity.


Thus, an exemplary molding process for the encapsulation of the combiner element includes, using the exemplary mold described above, i) fixing the combiner element to the mold such that the combiner element extends at least partially into the cavity, ii) filling the cavity with the polymer resin, iii) curing the resin, and iv) removing the encapsulated structure from the mold.


In some embodiments, further processing may be performed on the encapsulated LOE as needed according to the require design specifications of the LOE. For example, in some embodiments, further processing may include one or more of:

    • 1. Polishing the major parallel external surfaces 21a, 21b of the encapsulated LOE to achieve accurate parallelism between the external surfaces, for example using a double-side polisher 40, as shown in FIG. 4, or other suitable techniques known to persons skilled in the art;
    • 2. Forming an angled surface 50 at one longitudinal end of the LOE, for example by angle grinding followed by polishing, as shown in FIG. 5;
    • 3. Bonding a wedge prism to the angled surface using an optical adhesive, as shown in FIG. 6. In some cases, a reflective coating can be applied to the interface between the angled surface and the wedge prism prior to bonding; and
    • 4. Shaping the final contours of the encapsulated LOE.



FIGS. 7A-7B illustrate a side view and top-view, respectively, of a LOE according to a second embodiment of the disclosed subject matter. This embodiment differs from the first embodiment in that the LOE includes a wedge-shaped portion 18′ at one longitudinal end that is integrally formed with the encapsulating resin and made from the polymer resin during the molding process.


According to this embodiment, the molding process is varied somewhat so as to include molding the wedge-shaped portion. Additionally, since double side polishing will be made more difficult with the existence of the wedge-shaped portion 18′, some embodiments include accurately aligning mold parts prior to filling with resin so that no additional processing is necessary to achieve the desired structural parameters of the finished LOE during the molding process.


According to this embodiment, the cavity of the mold includes a main cavity and a secondary cavity within the main cavity at one longitudinal end of the main cavity. The main cavity is sized and shaped based in accordance with the desired shape of the encapsulated LOE, excluding the wedge-shaped portion, while the secondary cavity is shaped to form a wedge. In some embodiments, the mold can have a plurality of different shaped components that fit together to form the main cavity and secondary cavity.



FIG. 8A illustrates an exemplary mold according to this embodiment. Mold 30′ includes an upper portion 32a′ having an active area 81a that shapes at least the top surface of the final LOE, a lower portion 32b′ having an active area 81b that shapes at least the bottom surface of the LOE. In a particularly preferred embodiment, mold 30′ further includes a middle portion 32c′ sandwiched between the upper and lower portions with an active area 81c that shapes at least part of the wedge-shaped portion of the LOE. In other embodiments, the wedge-shaped portion can be formed from one of the upper or lower portions 32a′, 32b′, or a combination of both. In this context, “active area” refers to an interior surface of mold 30′ (i.e. cavity wall) that contacts the resin.



FIG. 8B illustrates exemplary mold 30′ oriented vertically, with the hole 35 on top such that the inserted resin first fills secondary cavity 31a and then fills the main cavity 31b. It should be noted that FIG. 8B omits the combiner element in order to draw the viewer's attention to the shape and location of the main cavity and secondary cavity, but that in practice the combiner element would be fixed to the mold so as to extend at least partially into the main cavity.


According to this embodiment, mold 30′ may be manufactured and processed such that after molding, the encapsulated LOE will satisfy specific predetermined design characteristics such that no further processing may be necessary, other than perhaps shaping the final contours.


In a particularly preferred embodiment, the active areas of the mold are machined prior to filling with resin in order to satisfy, during the molding process, specific design requirements pertaining to one or more structural parameters of the finished LOE. Typical structural parameters include, e g minimum tolerable values pertaining to flatness, roughness and parallelism of the external optical surfaces. For example, typical design requirements for the external surfaces of an LOE may include roughness equal to or less than twenty five (25) nm peak-value on average (25 nm Ra), and flatness equal to or less than six (6) fringe power, two (2) power irregularity over a circle of 20 mm diameter. These requirements can be achieved in the molding process by polishing the active areas of the mold (and particularly the active areas that shape the external parallel surfaces), e.g. using a diamond turning polisher, to achieve a roughness and flatness meeting or exceeding the parameters specified above. Parallelism can be achieved by alignment of mold active areas, as will be explained below.


Referring back to FIG. 8A, in a particularly preferred embodiment, the upper and lower portions of the mold are rotatable on three (3) axis rotatable relative to each other prior to fixing in place, for example using a series of tilt screws 82, such that the upper and lower mold portions can be accurately and actively aligned (e.g. using one or more autocollimators) prior to filling the cavity formed therein with resin.


Specific design requirements as to parallelism can be achieved during the molding process by accurately aligning the mold parts prior to filling with resin, most preferably using an active alignment process. FIG. 9 illustrates schematically an exemplary active alignment process. Autocollimator 90 emits parallel light beams 92a, 92b. Beam 92b is directed to hit the active area of the upper portion or a plane parallel thereto, while beam 92a is directed, using deployed reflective lenses 93, to hit the active area of the lower portion or a plane parallel thereto. The upper and lower portions are then rotated with respect to one another until each of beams 92a, 92b are accurately orthogonal to the respective active areas or planes parallel thereto. The upper and lower mold portions are then firmly fixed in place, thus guaranteeing parallelism between the active areas that shape the external surfaces of the overall encapsulated structure, such that after molding, the encapsulated structure includes parallel external surfaces 21a, 21b.


Additional design requirements for the finished LOE may dictate a maximum tolerable stress birefringence (e.g. 50 nm/cm). One challenge that can arise with a mold having a main cavity which is relatively narrow and a wider secondary cavity is that the resin in the secondary cavity can experience shrinkage during the curing process, causing non-homogenous flow of resin through a “passage” between the two cavities, and corresponding local internal stress in the finalized polymer-encapsulated LOE. Optically, those internal stresses can cause polarization retardancy known as birefringence. This undesirable effect can be reduced or even eliminated by inserting the resin into the mold in two stages. First, the resin is inserted into the secondary cavity and cured. After that, resin is inserted into the main cavity and cured.


It should be appreciated by those skilled in the art that using the molding process described above can produce a finished LOE that meets typical required design specifications without further processing, other than perhaps shaping out the final contours. Having therefore eliminated the step of bonding the wedge prism to the LOE, and reducing or eliminating the post-encapsulation processing steps, the LOE according to this embodiment may be mass produced quickly and efficiently, and at reduced cost.


It should further be appreciated by those skilled in the art that the principles disclosed herein are not limited to the specific combiner element described and shown in the drawings, but are applicable to any suitable combiner element, including, e.g. a two-dimensional expansion combiner element, with appropriate modification as needed.

Claims
  • 1. A method of manufacturing a light-guide optical element (LOE) comprising the steps of: forming an optical combiner element comprised of a transparent substrate having a first refractive index, the combiner element having a first pair of parallel external surfaces along a length thereof, and a plurality of mutually parallel at least partially reflective internal surfaces, the mutually parallel internal surfaces being angled obliquely relative to the first pair of external surfaces; andencapsulating, using a molding process, at least a part of the combiner element with a transparent polymer resin to form an encapsulated structure, the resin having a second refractive index that is matched to the first refractive index,wherein said encapsulated structure comprises a second pair of parallel external surfaces of optical quality formed from the resin.
  • 2. The method of claim 1, wherein the molding process comprises: providing a hollow mold having an internal cavity;fixing the combiner element to the mold such that the combiner element extends at least partially into the cavity; andfilling the cavity with the resin and curing the resin, whereupon the combiner element is at least partially encapsulated by the resin.
  • 3. The method of claim 2, wherein the mold comprises at least an upper portion and a lower portion, and the molding process further comprises, prior to filling the cavity with resin, aligning the upper portion and lower portion relative to one another such that the encapsulated structure is formed with parallel external surfaces.
  • 4. The method of claim 3, wherein the upper and lower portions are aligned using an active alignment process.
  • 5. The method of claim 2, wherein the cavity includes a main cavity and a secondary cavity at a longitudinal end of the main cavity, the secondary cavity having a wedge shape such that upon removing the combiner element from the mold, the encapsulating resin includes a wedge-shaped portion at a longitudinal end thereof.
  • 6. The method of claim 5, wherein the molding process is performed in two stages, in which a first stage comprises filling the secondary cavity with a first part of the resin, and the second stage comprises, after curing of the first part of the resin, filling the main cavity with a second part of the resin.
  • 7. The method of claim 2, further comprising polishing active areas of the mold prior to filling with resin, such that the parallel external surfaces of the encapsulated structure satisfy one or more structural parameters of the LOE.
  • 8. The method of claim 2, wherein the one or more structural parameters include at least one of: roughness less than or equal to 25 nm peak value (Ra), and flatness equal to or less than 6 fringe power with 2 power irregularity over a circle of 20 mm diameter.
  • 9. The method of claim 1, further comprising polishing the second pair of parallel external surfaces.
  • 10. The method of claim 1, further comprising forming an angled surface at one longitudinal end of the LOE.
  • 11. The method of claim 10, further comprising bonding a wedge prism to the angled surface.
  • 12. A light-guide optical element (LOE) comprising: an optical combiner element made of a transparent substrate having a first refractive index, the optical combiner element having a first pair of parallel external surfaces along a length thereof, and a plurality of mutually parallel at least partially reflective internal surfaces, the mutually parallel internal surfaces being angled obliquely relative to the first pair of external surfaces; anda transparent polymer encapsulating at least a part of the optical combiner element to form an encapsulated structure, the polymer having a second refractive index that is matched to the first refractive index,wherein said encapsulated structure comprises a second pair of parallel external surfaces of optical quality formed from the polymer.
  • 13. The light-guide optical element of claim 12, wherein the second pair of external surfaces are parallel to a tolerance of up to 1.5 arcminutes.
  • 14. The light-guide optical element of claim 12, further comprising an angled surface at one longitudinal end thereof.
  • 15. The light-guide optical element of claim 14, further comprising a wedge prism bonded to the angled surface.
  • 16. The light-guide optical element of claim 15, wherein the encapsulating structure includes a wedge-shaped portion at one longitudinal end thereof.
  • 17. The light-guide optical element of claim 12, wherein the optical combiner element is at least partly encapsulated by the polymer using a process of resin molding.
  • 18. The light-guide optical element of claim 17, wherein the resin molding process includes active alignment of one or more mold parts to obtain parallelism between the mold parts prior to forming the encapsulated structure.
  • 19. The light-guide optical element of claim 17, wherein the resin molding process includes polishing one or more active areas of one or more mold parts prior to molding.
  • 20. The light-guide optical element of claim 19, wherein the one or more active areas are polished to at least one of the following parameters: roughness less than or equal to 25 nm peak value (Ra), and flatness equal to or less than 6 fringe power with 2 power irregularity over a circle of 20 mm diameter.
PCT Information
Filing Document Filing Date Country Kind
PCT/IL2020/050805 7/19/2020 WO
Publishing Document Publishing Date Country Kind
WO2021/009766 1/21/2021 WO A
US Referenced Citations (241)
Number Name Date Kind
2748659 Geffcken et al. Jun 1956 A
2795069 Hardesty Jun 1957 A
2886911 Hardesty May 1959 A
3491245 Hardesty Jan 1970 A
3626394 Nelson et al. Dec 1971 A
3667621 Barlow Jun 1972 A
3677621 Smith Jul 1972 A
3737212 Antonson et al. Jun 1973 A
3802763 Cook et al. Apr 1974 A
3857109 Pilloff Dec 1974 A
3873209 Schinke et al. Mar 1975 A
3940204 Withrington Feb 1976 A
3969023 Brandt Jul 1976 A
4084883 Eastman et al. Apr 1978 A
4191446 Arditty et al. Mar 1980 A
4309070 St Leger Searle Jan 1982 A
4331387 Wentz May 1982 A
4355864 Soref Oct 1982 A
4516828 Steele May 1985 A
4613216 Herbec et al. Sep 1986 A
4711512 Upatnieks Dec 1987 A
4715684 Gagnon Dec 1987 A
4775217 Ellis Oct 1988 A
4798448 Van Raalte Jan 1989 A
4805988 Dones Feb 1989 A
4932743 Isobe et al. Jun 1990 A
4978952 Irwin Dec 1990 A
5033828 Haruta Jul 1991 A
5076664 Migozzi Dec 1991 A
5096520 Faris Mar 1992 A
5157526 Kondo et al. Oct 1992 A
5231642 Scifres et al. Jul 1993 A
5301067 Bleier et al. Apr 1994 A
5353134 Michel et al. Oct 1994 A
5367399 Kramer Nov 1994 A
5369415 Richard et al. Nov 1994 A
5453877 Gerbe et al. Sep 1995 A
5543877 Takashi et al. Aug 1996 A
5555329 Kuper et al. Sep 1996 A
5619601 Akashi et al. Apr 1997 A
5650873 Gal et al. Jul 1997 A
5680209 Maechler Oct 1997 A
5712694 Taira et al. Jan 1998 A
5724163 Yair Mar 1998 A
5751480 Kitagishi May 1998 A
5764412 Suzuki et al. Jun 1998 A
5829854 Jones Nov 1998 A
5883684 Millikan et al. Mar 1999 A
5896232 Budd et al. Apr 1999 A
5919601 Nguyen et al. Jul 1999 A
5966223 Amitai et al. Oct 1999 A
5982536 Swan Nov 1999 A
6021239 Minami et al. Feb 2000 A
6052500 Takano et al. Apr 2000 A
6091548 Chen Jul 2000 A
6144347 Mizoguchi et al. Nov 2000 A
6222676 Togino et al. Apr 2001 B1
6231992 Niebauer et al. May 2001 B1
6322256 Inada et al. Nov 2001 B1
6324330 Stites Nov 2001 B1
6349001 Spitzer Feb 2002 B1
6362861 Hertz et al. Mar 2002 B1
6384982 Spitzer May 2002 B1
6388814 Tanaka May 2002 B2
6404550 Yajima Jun 2002 B1
6404947 Matsuda Jun 2002 B1
6490104 Gleckman et al. Dec 2002 B1
6509982 Steiner Jan 2003 B2
6542307 Gleckman Apr 2003 B2
6556282 Jamieson et al. Apr 2003 B2
6577411 David Jun 2003 B1
6580529 Amitai et al. Jun 2003 B1
6671100 McRuer Dec 2003 B1
6690513 Hulse et al. Feb 2004 B2
6710902 Takeyama Mar 2004 B2
6775432 Basu Aug 2004 B2
6791760 Janeczko et al. Sep 2004 B2
6798579 Robinson et al. Sep 2004 B2
6829095 Amitai Dec 2004 B2
6942925 Lazarev et al. Sep 2005 B1
7016113 Choi et al. Mar 2006 B2
7021777 Amitai Apr 2006 B2
7088664 Kim et al. Aug 2006 B2
7175304 Wadia et al. Feb 2007 B2
7205960 David Apr 2007 B2
7339742 Amitai et al. Mar 2008 B2
7355795 Yamazaki et al. Apr 2008 B1
7391573 Amitai Jun 2008 B2
7418170 Mukawa et al. Aug 2008 B2
7430355 Heikenfeld et al. Sep 2008 B2
7448170 Skendzic et al. Nov 2008 B2
7457040 Amitai Nov 2008 B2
7576916 Amitai Aug 2009 B2
7577326 Amitai Aug 2009 B2
7643214 Amitai Jan 2010 B2
7672055 Amitai Mar 2010 B2
7724441 Amitai May 2010 B2
7724442 Amitai May 2010 B2
7724443 Amitai May 2010 B2
7751122 Amitai Jul 2010 B2
7778508 Hirayama Aug 2010 B2
7884985 Amitai et al. Feb 2011 B2
7949214 Dejong May 2011 B2
7995275 Maeda et al. Aug 2011 B2
8000020 Amitai Aug 2011 B2
8004765 Amitai Aug 2011 B2
8035872 Ouchi Oct 2011 B2
8098439 Amitai et al. Jan 2012 B2
8187481 Hobbs May 2012 B1
8369019 Baker Feb 2013 B2
8405573 Lapidot et al. Mar 2013 B2
8432614 Amitai Apr 2013 B2
8643948 Amitai et al. Feb 2014 B2
8655178 Capron et al. Feb 2014 B2
8665178 Wang Mar 2014 B1
8666208 Amirparviz et al. Mar 2014 B1
8736963 Robbins et al. May 2014 B2
8743464 Amirparviz Jun 2014 B1
8810914 Amitai et al. Aug 2014 B2
8861081 Amitai et al. Oct 2014 B2
8873148 Gupta et al. Oct 2014 B1
8902503 Amitai et al. Dec 2014 B2
8913865 Bennett Dec 2014 B1
8965152 Simmonds Feb 2015 B2
9025253 Hadad et al. May 2015 B2
9069180 Amitai et al. Jun 2015 B2
9104036 Amitai et al. Aug 2015 B2
9207457 Amitai Dec 2015 B2
9248616 Amitai Feb 2016 B2
9279986 Amitai Mar 2016 B2
9316832 Amitai et al. Apr 2016 B2
9417453 Amitai et al. Aug 2016 B2
9448408 Amitai et al. Sep 2016 B2
9500869 Amitai Nov 2016 B2
9551880 Amitai Jan 2017 B2
9568738 Mansharof et al. Feb 2017 B2
9740013 Amitai et al. Aug 2017 B2
9804396 Amitai Oct 2017 B2
9805633 Zheng Oct 2017 B2
9910283 Amitai Mar 2018 B2
9933684 Brown et al. Apr 2018 B2
10048499 Amitai Aug 2018 B2
10261321 Amitai Apr 2019 B2
10302835 Danziger May 2019 B2
10739598 Ofir Aug 2020 B2
20010030860 Kimura et al. Oct 2001 A1
20020015233 Park Feb 2002 A1
20020036751 Tanijiri et al. Mar 2002 A1
20020176173 Song Nov 2002 A1
20020191297 Gleckman et al. Dec 2002 A1
20030007157 Hulse et al. Jan 2003 A1
20030020006 Janeczko et al. Jan 2003 A1
20030063042 Friesem et al. Apr 2003 A1
20030072160 Kuepper et al. Apr 2003 A1
20030090439 Spitzer et al. May 2003 A1
20030165017 Amitai et al. Sep 2003 A1
20030197938 Schmidt et al. Oct 2003 A1
20030218718 Moliton et al. Nov 2003 A1
20040085649 Repetto et al. May 2004 A1
20040137189 Tellini et al. Jul 2004 A1
20040233534 Nakanishi et al. Nov 2004 A1
20050018308 Cassarly et al. Jan 2005 A1
20050024849 Parker et al. Feb 2005 A1
20050084210 Cha Apr 2005 A1
20050174641 Greenberg Aug 2005 A1
20050174658 Long et al. Aug 2005 A1
20050180687 Amitai et al. Aug 2005 A1
20050265044 Chen et al. Dec 2005 A1
20060126182 Levola Jun 2006 A1
20060132914 Weiss et al. Jun 2006 A1
20060268421 Shimizu et al. Nov 2006 A1
20070070859 Hirayama Mar 2007 A1
20070188837 Shimizu et al. Aug 2007 A1
20080025667 Amitai Jan 2008 A1
20080094586 Hirayama Apr 2008 A1
20080151375 Lin Jun 2008 A1
20080151379 Amitai Jun 2008 A1
20080192239 Otosaka Aug 2008 A1
20080198471 Amitai Aug 2008 A1
20080247150 Itoh et al. Oct 2008 A1
20080278812 Amitai Nov 2008 A1
20090010023 Kanade et al. Jan 2009 A1
20090052046 Amitai Feb 2009 A1
20090122414 Amitai May 2009 A1
20090190222 Simmonds et al. Jul 2009 A1
20100067110 Amitai et al. Mar 2010 A1
20100111472 DeJong May 2010 A1
20100202128 Saccomanno Aug 2010 A1
20100278480 Vasylyev et al. Nov 2010 A1
20100291489 Moskovits et al. Nov 2010 A1
20110096566 Tsai et al. Apr 2011 A1
20110227661 Numata et al. Sep 2011 A1
20110242661 Simmonds Oct 2011 A1
20120039576 Dangel et al. Feb 2012 A1
20120062998 Schultz et al. Mar 2012 A1
20120147361 Mochizuki et al. Jun 2012 A1
20120194781 Agurok Aug 2012 A1
20120306940 Machida Dec 2012 A1
20130022316 Pelletier et al. Jan 2013 A1
20130321432 Burns et al. Dec 2013 A1
20130334504 Thompson et al. Dec 2013 A1
20140003762 Macnamara Jan 2014 A1
20140043688 Schrader et al. Feb 2014 A1
20140185142 Gupta et al. Jul 2014 A1
20140226215 Komatsu et al. Aug 2014 A1
20140226361 Vasylyev Aug 2014 A1
20150016777 Abovitz et al. Jan 2015 A1
20150081313 Boross et al. Mar 2015 A1
20150138646 Tatsugi May 2015 A1
20150153569 Yonekubo Jun 2015 A1
20150160529 Popovich et al. Jun 2015 A1
20150182748 Gefen et al. Jul 2015 A1
20150219834 Nichol et al. Aug 2015 A1
20150241619 Richards et al. Aug 2015 A1
20160116743 Amitai Apr 2016 A1
20160170214 Amitai Jun 2016 A1
20160234485 Robbins et al. Aug 2016 A1
20160238844 Dobschal Aug 2016 A1
20160341964 Amitai Nov 2016 A1
20160370693 Watanabe Dec 2016 A1
20170045743 Dobschal et al. Feb 2017 A1
20170045744 Amitai Feb 2017 A1
20170075119 Schultz et al. Mar 2017 A1
20170097506 Schowengerdt et al. Apr 2017 A1
20170242249 Wall Aug 2017 A1
20170336636 Amitai et al. Nov 2017 A1
20170343822 Border et al. Nov 2017 A1
20170357095 Amitai Dec 2017 A1
20170363799 Ofir Dec 2017 A1
20180039082 Amitai Feb 2018 A1
20180157057 Gelberg et al. Jun 2018 A1
20180292599 Ofir et al. Oct 2018 A1
20190011710 Amitai Jan 2019 A1
20190056600 Danziger et al. Feb 2019 A1
20190064518 Danziger Feb 2019 A1
20190155035 Amitai May 2019 A1
20190170327 Eisenfeld et al. Jun 2019 A1
20190208187 Danziger Jul 2019 A1
20190212487 Danziger et al. Jul 2019 A1
20190227215 Danziger et al. Jul 2019 A1
20190293856 Danziger Sep 2019 A1
Foreign Referenced Citations (87)
Number Date Country
101542346 Sep 2009 CN
107238928 Oct 2017 CN
1422172 Nov 1970 DE
19725262 Dec 1998 DE
102013106392 Dec 2014 DE
0365406 Apr 1990 EP
0380035 Aug 1990 EP
0399865 Nov 1990 EP
0543718 May 1993 EP
0566004 Oct 1993 EP
1158336 Nov 2001 EP
1180711 Feb 2002 EP
1326102 Jul 2003 EP
1385023 Jan 2004 EP
1485747 Dec 2004 EP
1562066 Aug 2005 EP
0770818 Apr 2007 EP
1779159 May 2007 EP
2530510 Dec 2012 EP
2496905 Jun 1982 FR
2638242 Apr 1990 FR
2721872 Jan 1996 FR
2220081 Dec 1989 GB
2272980 Jun 1994 GB
2278222 Nov 1994 GB
2278888 Dec 1994 GB
H1994242260 Mar 1996 JP
2001021448 Jan 2001 JP
2002539498 Nov 2002 JP
2003140081 May 2003 JP
2003337298 Nov 2003 JP
2003536102 Dec 2003 JP
2004527801 Sep 2004 JP
2005084522 Mar 2005 JP
2006003872 Jan 2006 JP
2007505353 Mar 2007 JP
2009515225 Apr 2009 JP
2010060770 Mar 2010 JP
2010170606 Aug 2010 JP
2010217906 Sep 2010 JP
2012123936 Jun 2012 JP
2013076847 Apr 2013 JP
2014506340 Mar 2014 JP
2016028275 Feb 2016 JP
201809798 Mar 2018 TW
9510106 Apr 1995 WO
9815868 Apr 1998 WO
9952002 Oct 1999 WO
0004407 Jan 2000 WO
0063738 Oct 2000 WO
0127685 Apr 2001 WO
0195025 Dec 2001 WO
0195027 Dec 2001 WO
02082168 Oct 2002 WO
03058320 Jul 2003 WO
03081320 Oct 2003 WO
2004109349 Dec 2004 WO
2005024485 Mar 2005 WO
2005024491 Mar 2005 WO
2005024969 Mar 2005 WO
2005093493 Oct 2005 WO
2005124427 Dec 2005 WO
2006013565 Feb 2006 WO
2006085308 Aug 2006 WO
2006085309 Aug 2006 WO
2006085310 Aug 2006 WO
2006087709 Aug 2006 WO
2006098087 Sep 2006 WO
2006098097 Sep 2006 WO
2007054928 May 2007 WO
2007093983 Aug 2007 WO
2008023367 Feb 2008 WO
2008129539 Oct 2008 WO
2008149339 Dec 2008 WO
2009009268 Jan 2009 WO
2009074638 Jun 2009 WO
2011130720 Oct 2011 WO
12088478 Jun 2012 WO
2013065656 May 2013 WO
2013175465 Nov 2013 WO
2013188464 Dec 2013 WO
2015081313 Jun 2015 WO
2015158828 Oct 2015 WO
2016103251 Jun 2016 WO
2016132347 Aug 2016 WO
2017106873 Jun 2017 WO
2017199232 Nov 2017 WO
Non-Patent Literature Citations (7)
Entry
Da-Yong et al., “A Continuous Membrance Micro Deformable Mirror Based on Anodic Bonding of SOI to Glass Water”, Microsystem Technologies, Micro and Nanosystems Information Storage and Processing Systems, vol. 16, No. 10, May 20, 2010 pp. 1765-1769.
S. Chattopadhyay et al: “Anti-reflecting and photonic nanostructures”, Materials Science and Engineering: R: Repots, vol. 69, No. 1-3, Jun. 20, 2010, pp. 1-35.
Petros I Stavroulakis et al: “Suppression of backscattered diffraction from sub-wavelenght “moth-eye” arrays References and Links / Optics Express 1”, Endeavour Nanotechnology Zoolog. Sci. Philos. Trans. J. Mod. Opt. Appl. Opt. Opt. Acta (Lond.) Appl. Opt. Appl. Opt. Opt. Lett. Jpn. J. Appl. Pjys. J. Ceram. Soc. Jpn. Opt. Commun. App ;. Opt. Opt. Lett. Nanotechno, Jan. 1, 1967, pp. 79-84.
Chin-Hao Chang et al: “Nanostrutured gradient-index antireflection diffractive optics”, Optics Letters, vol. 36, No. 12, Jun. 15, 2011, p. 2354.
Qiaoyin Yang et al: “Antireflection effects at nanostructured material interfaces and the suppression of thin-film interference”, Nanotechnology, vol. 24, No. 23, May 15, 2013, p. 235202.
Hemant Kumar Raut et al: “Anti-reflective coatings: A critical, in-depth review”, Energy & Environmental Science, vol. 4, No. 10, Jan. 1, 2011, p. 3779.
R. J. Weiblen et al: “Optimized moth-eye anti-reflective structures for As_2S_3 chalcogentide optical fibers”, Optics Express, vol. 24, No. 10, May 2, 2016 p. 10172.
Related Publications (1)
Number Date Country
20220357496 A1 Nov 2022 US
Provisional Applications (1)
Number Date Country
62875533 Jul 2019 US