The broken lines in the drawings depict unclaimed environmental subject matter.
The broken lines in the drawings depict unclaimed environmental subject matter.
Number | Name | Date | Kind |
---|---|---|---|
D311177 | Peters, III | Oct 1990 | S |
5749469 | Williams | May 1998 | A |
5957292 | Mikkelsen | Sep 1999 | A |
6176023 | Doche | Jan 2001 | B1 |
6199291 | Ozee | Mar 2001 | B1 |
6398033 | Wu | Jun 2002 | B1 |
6676759 | Takagi | Jan 2004 | B1 |
D488153 | Tosh | Apr 2004 | S |
7792350 | Kiley et al. | Sep 2010 | B2 |
D665387 | Hsiao | Aug 2012 | S |
8384033 | Burns et al. | Feb 2013 | B2 |
8397739 | Gregor et al. | Mar 2013 | B2 |
8784033 | Kremerman et al. | Jul 2014 | B2 |
8857619 | Yang | Oct 2014 | B1 |
9457464 | Kremerman et al. | Oct 2016 | B2 |
9579788 | Rosenberg et al. | Feb 2017 | B2 |
D792389 | Keisling | Jul 2017 | S |
D802582 | Krivonak | Nov 2017 | S |
9881820 | Wong et al. | Jan 2018 | B2 |
9947517 | Luere et al. | Apr 2018 | B1 |
10014198 | Richardson | Jul 2018 | B2 |
10041868 | Gottscho | Aug 2018 | B2 |
10043695 | Chang | Aug 2018 | B1 |
10062589 | Wong et al. | Aug 2018 | B2 |
10062590 | Wong et al. | Aug 2018 | B2 |
10062599 | Genetti et al. | Aug 2018 | B2 |
10103010 | Luere et al. | Oct 2018 | B2 |
10124492 | Genetti et al. | Nov 2018 | B2 |
20010042697 | Yajima | Nov 2001 | A1 |
20020020650 | Fujimori | Feb 2002 | A1 |
20050247594 | Mimura | Nov 2005 | A1 |
20060013674 | Elliott | Jan 2006 | A1 |
20060061979 | Elliott | Mar 2006 | A1 |
20060278564 | Obayashi | Dec 2006 | A1 |
20070134904 | Wan et al. | Jun 2007 | A1 |
20070231110 | Akiyama | Oct 2007 | A1 |
20070295638 | Nakatogawa | Dec 2007 | A1 |
20080041761 | Nakatogawa | Feb 2008 | A1 |
20100194015 | Vekstein et al. | Aug 2010 | A1 |
20100206767 | Odashima | Aug 2010 | A1 |
20130068656 | Sheng | Mar 2013 | A1 |
20140367307 | Oyama | Dec 2014 | A1 |
20150030416 | Sakiya | Jan 2015 | A1 |
20150041353 | Adams | Feb 2015 | A1 |
20150279711 | Matsutori | Oct 2015 | A1 |
20160141194 | Kirkland | May 2016 | A1 |
20160211165 | McChesney et al. | Jul 2016 | A1 |
20160211166 | Yan et al. | Jul 2016 | A1 |
20160216185 | Gottscho | Jul 2016 | A1 |
20170053819 | Richardson | Feb 2017 | A1 |
20170113355 | Genetti et al. | Apr 2017 | A1 |
20170115657 | Trussell et al. | Apr 2017 | A1 |
20170117172 | Genetti et al. | Apr 2017 | A1 |
20170119339 | Johnson et al. | May 2017 | A1 |
20170133283 | Kenworthy | May 2017 | A1 |
20170213758 | Rice et al. | Jul 2017 | A1 |
20170236688 | Caron et al. | Aug 2017 | A1 |
20170236741 | Angelov et al. | Aug 2017 | A1 |
20170236743 | Severson et al. | Aug 2017 | A1 |
20170263478 | McChesney et al. | Sep 2017 | A1 |
20170287682 | Musselman et al. | Oct 2017 | A1 |
20170287753 | Musselman et al. | Oct 2017 | A1 |
20170330786 | Genetti et al. | Nov 2017 | A1 |
20170334074 | Genetti et al. | Nov 2017 | A1 |
20170372930 | Schober | Dec 2017 | A1 |
20180019107 | Ishizawa | Jan 2018 | A1 |
20180019142 | Wong et al. | Jan 2018 | A1 |
20180032062 | Trussell et al. | Feb 2018 | A1 |
20180040492 | Wong et al. | Feb 2018 | A1 |
20180068879 | Wong et al. | Mar 2018 | A1 |
20180090354 | Sugita et al. | Mar 2018 | A1 |
20180122674 | Dovids | May 2018 | A1 |
20180166259 | Ueda | Jun 2018 | A1 |
20180218933 | Luere et al. | Aug 2018 | A1 |
20180233328 | Ueda et al. | Aug 2018 | A1 |
20180277416 | Takahashi et al. | Sep 2018 | A1 |
20180301322 | Sugita et al. | Oct 2018 | A1 |
20180315583 | Luere et al. | Nov 2018 | A1 |
20180315640 | Ueda et al. | Nov 2018 | A1 |
20190088531 | Sarode Vishwanath et al. | Mar 2019 | A1 |
20190244845 | Parathithasan | Aug 2019 | A1 |
20200122320 | Yoshida et al. | Apr 2020 | A1 |
Number | Date | Country |
---|---|---|
1434256 | Jun 2004 | EP |
10165884 | Jun 1998 | JP |
2009095783 | May 2009 | JP |
4559317 | Oct 2010 | JP |
20160016409 | Feb 2016 | KR |
WO-2017186172 | Nov 2017 | WO |
WO-2018112055 | Jun 2018 | WO |
WO-2018226800 | Dec 2018 | WO |
WO-2019097832 | May 2019 | WO |
Entry |
---|
International Seach Report and Written Opinion dated Sep. 1, 2020, for application No. PCT/US2020/033774. |
Entegris F300 AutoPds, Wafer Carrier Clean, Secure wafer transport and optimum automation intergartion, https://www.entergris.com. |
Entegris Spectra Foup, Front opening unified pod platform with superior microenvironment control, https:/www.entegris.com/content/dam/shared-product-assets/wafer-processing/datasheet-spectra-foup-2413.pdf, Retrieved May 20, 2019. |