Claims
- 1. A composition comprising:
- an admixture of an energy sensitive material and an electrically conductive material;
- said electrically conductive material contains acid functionality;
- said electrically conductive material has a predetermined pH provided by acid neutralizing functionality;
- said pH is predetermined to be in the range from about 1 to about 7;
- said acid neutralizing functionality is selected from the group consisting of tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrabutylammonium hydroxide, triethylamine, pyridine, t-butoxide, morpholine, pyrrolidinone, potassium hydroxide, sodium hydroxide, lithium hydroxide, triphenylsulfonium hydroxide, primary, secondary and tertiary amines, proton sponge, sodium hydride;
- said electrically conductive material is selected from the group consisting of substituted and unsubstituted polyparaphenylenes, polyparaphenylevevinylenes, polyanilines, polyazines, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophenes, polyacetylenes, combinations thereof and blends thereof with other polymers and copolymers of the monomers thereof;
- said energy sensitive material is selected from the group consisting of hydroxystyrene/t-butylmethacrylate copolymers and terpolymers, hydroxystyrene/t-butylmethacrylate copolymers with styrene based monomers and methylmethacrylate based monomers, protected hydroxystyrene based polymers and copolymers with styrene and methylmethacrylate based monomers, cross-linkable hydroxystyrene based polymers, methacrylateacrylate polymers and derivatives selected from the group consisting of polymethylmethacrylate, a-chloromethacrylate based polymers or copolymers with other methacrylate monomers or styrene or a-methylstyrene monomers, silicon containing resists, polybutanesulfones and derivatives, organometallic resists, novolak containing resists and novolak/diazoquinone resists.
- 2. A composition of matter according to claim 1 wherein said electrically conductive material is from about 0.1% by weight of said admixture to about 30% of said admixture.
- 3. A composition of matter according to claim 2 wherein said electrically conductive material is from about 0.5% by weight of said admixture to about 20% of said admixture.
- 4. A composition of matter according to claim 3 wherein said electrically conductive material is from about 1% by weight of said admixture to about 10% of said admixture.
- 5. A composition according to claim 1 wherein said energy sensitive admixture is sensitive to energy selected from the group consisting of electromagnetic radiation and a particle beam.
- 6. A composition according to claim 5 wherein said particle beam is selected from the group consisting of an electron beam and an ion beam.
- 7. A composition according to claim 1 wherein said energy sensitive admixture further includes a photosensitive agent.
Parent Case Info
This application claims priority from Provisional Application Serial No. 60/047,769 which was filed on May 29, 1997.
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