Epitaxial Ferroelectric/Conductive Oxide Thin-Film Heterostructures on Silicon for Microelectronics Applications

Information

• NSF Award
• 9361597

Owner

• Advanced Fuel Research, Inc.

• Award Id

  9361597

• Award Effective Date

  4/1/1994 - 30 years ago

• Award Expiration Date

  12/31/1994 - 29 years ago

• Award Amount

  $ 64,992.00

• Award Instrument

  Standard Grant

9361597 Li Important technologic obstacles must be removed before semiconductor devices monolithically integrated with oxide ferroelectrics can become a practical reality. The innovations of the proposed program are: 1) advancing thin-film deposition technology to achieve fully epitaxial growth of ferroelectric films on silicon substrated, by using the highly successful pulsed laser deposition (PLD) technique; 2) replacing the Pt bottom electrode with La0.5Sr0.5CoO3 (LSCO) - an epitaxial conductive oxide material; 3) achieving a full monolithic integration of high-density ferroelectric/conductive oxide capacitors with Si integrated circuits. The main thrust of Phase I will be to demonstrate the feasibility of epitaxial growth of a ferroelectric thin film (BaTiP3 or PbZrx Til-x), on top of a conductive oxide film (LSCO), on top of an epitaxial YSZ buffered silicon substrate. The resulting heterostructures will be used to fabricate a simple ferroelectric switched capacitor. This device will be fully characterized and will become the basic building block for applications of ferroelectric thin films to the microelectronics industry.

• Program Officer

  Darryl G. Gorman

• Min Amd Letter Date

  4/1/1994 - 30 years ago

• Max Amd Letter Date

  4/1/1994 - 30 years ago

• ARRA Amount

• Name

  Advanced Fuel Research, Inc.

• City

  East Hartford

• State

  CT

• Country

  United States

• Address

  87 Church Street

• Postal Code

  061083720

• Phone Number

  8605289806

• First Name

  Qi

• Last Name

  Li

• Start Date

  4/1/1994 12:00:00 AM

• Name

  Materials Research

• Code

  106000