Etching Apparatus for Very Large Scale Integrated Circuits (VLSIC) Using Magnetically Confined Plasmas

Information

• NSF Award
• 8460183

Owner

• Plasma Physics Corp

• Award Id

  8460183

• Award Effective Date

  2/1/1985 - 40 years ago

• Award Expiration Date

  7/31/1985 - 39 years ago

• Award Amount

  $ 39,050.00

• Award Instrument

  Standard Grant

• Program Officer

  Cassandra M. Queen

• Min Amd Letter Date

  2/15/1985 - 40 years ago

• Max Amd Letter Date

  2/15/1985 - 40 years ago

• ARRA Amount

• Name

  Plasma Physics Corp

• City

  Locust Valley

• State

  NY

• Country

  United States

• Address

  P.O.Box 548

• Postal Code

  115600548

• Phone Number

  5166768468

• First Name

  John

• Last Name

  Coleman

• Start Date

  2/1/1985 12:00:00 AM

• Name

  Telecommunications

• Code

  206000

• Name

  Engineering-Electrical

• Code

  55

• Text

  SMALL BUSINESS PHASE I

• Code

  5371