Excimer lamp and ultraviolet-rays irradiation apparatus having the same

Abstract

An excimer lamp has an arc tube made of dielectric materials capable of transmitting ultraviolet rays, a pair of electrodes facing each other through the dielectric materials forming the arc tube, and a high voltage power supply terminal for supplying high voltage to the electrodes through a high voltage power supply cable, the excimer lamp. The excimer lamp further has an insulated holder provided in the high voltage power supply terminal, wherein the insulated holder has an inner space and the high voltage power supply cable connected to a connector for electric supply is inserted in the insulated holder, and an IC tag, wherein a gap is provided between the high voltage power supply cable and the IC tag.

Description

BRIEF DESCRIPTION OF DRAWINGS

Other features and advantages of the present excimer lamp and ultraviolet-rays irradiation apparatus will be apparent from the ensuing description, taken in conjunction with the accompanying drawings, in which:

FIG. 1 is a cross-sectional view showing the structure of an ultraviolet ray emitting apparatus according to an embodiment of the present invention;

FIG. 2 is an enlarged view of a high voltage power supply terminal of a first embodiment of the present invention;

FIG. 3 is a diagram showing the structure of a connecting portion of a high voltage power supply terminal and a connector according to the present invention;

FIG. 4 is a conceptual diagram showing an example of the structure of a control system which controls lighting of an excimer lamp according to the present invention;

FIG. 5 is an enlarged view of a high voltage power supply terminal according to a second embodiment of the present invention;

FIG. 6 is an enlarged view of a high voltage power supply terminal according to a third embodiment of the present invention;

FIG. 7 is a cross-sectional view explaining the conventional ultraviolet ray emitting apparatus in which an excimer lamp is installed;

FIG. 8 is a cross-sectional view thereof, taken along a line A-A′; and,

FIG. 9 is an enlarged cross-sectional of a portion IX of FIG. 8.

Claims

1. An excimer lamp which has an arc tube made of dielectric materials capable of transmitting ultraviolet rays, and is filled up with electric discharge material in its inner space, a pair of electrodes facing each other through the dielectric materials forming the arc tube, and a high voltage power supply terminal for supplying high voltage to the electrodes through a high voltage power supply cable, the excimer lamp comprising: an insulated holder provided in the high voltage power supply terminal, wherein the insulated holder has an inner space and the high voltage power supply cable connected to a connector for electric supply is inserted in the insulated holder, andan IC tag, wherein a gap is provided between the high voltage power supply cable and the IC tag.

2. The excimer lamp according to claim 1, further including a high frequency current absorber provided between the high voltage supply cable and the IC tag, and a shield material provided on an IC tag side surface of the high frequency current absorber.

3. The excimer lamp according to claim 2, wherein imaginary part (μ″) of complex permeability (μ=μ′″jμ″) of the high frequency current absorber into is 1.0 or more.

4. The excimer lamp according to claim 3, further including a magnetic sheet which has the high complex permeability with high real part and low imaginary part on the IC tag side of the high frequency current absorber.

5. The excimer lamp according to claim 1, wherein the insulated holder is made from an insulator having relative permittivity of 4.0 or less.

6. The excimer lamp according to claim 1, wherein the insulated holder is made of a metal oxide or quartz glass.

7. An ultraviolet-ray emitting apparatus comprising: an excimer lamp having an arc tube made from dielectric material capable of transmission of ultraviolet-ray, a pair of electrodes which face each other through the dielectric material, a high voltage power supply terminal including an insulated holder having an inner space, which supply high voltage to the pair of electrodes through a high voltage power supply cable, wherein the high voltage power supply cable to be connected to a power supply connector is inserted in the high voltage power supply terminal;a metallic case having a light emitting window from which light from the excimer lamp is emitted outside thereof;a connector member which is proved on the case, is made of material capable of transmission of electric wave, and supplies high voltage to the high voltage power supply terminal of the excimer lamp,an IC tag is arranged in the inner space wherein a gap is provided between the high voltage power supply cable and the IC tag; andan antenna which carries out transmission or reception of information with the IC tag.

8. An excimer lamp apparatus comprising: an arc tube made from dielectric material;a pair of electrodes which face each other through the dielectric material,a high voltage power supply cable;a high voltage power supply terminal including an insulated holder, which supplies high voltage to the pair of electrodes through a high voltage power supply cable, wherein the insulated holder has an inner space and the high voltage power supply cable connected to a connector for electric supply is inserted in the insulated holder; andan IC tag, wherein a gap is provided between the high voltage power supply cable and the IC tag.

9. The excimer lamp apparatus according to claim 8, wherein the IC tag is held by the insulated holder through an elastic sheet.

10. The excimer lamp apparatus according to claim 8, further including a high frequency current absorber.

11. The excimer lamp apparatus according to claim 10, wherein the IC tag is held between the insulated holder and the high frequency current absorber.

12. The excimer lamp apparatus according to claim 8, further including an antenna which receives and sends information to the IC tag, a memory which stores the excimer lamp information, and a CPU is configured to store the excimer lamp information in the memory and the IC tag.

13. The excimer lamp apparatus according to claim 8, wherein the IC tag and the high voltage power supply cable are provided as a unit.

14. The excimer lamp apparatus according to claim 10, wherein the high frequency current absorber has an IC tag fixing section, a high frequency current absorption section which is located between the high voltage power supply cable and the IC tag, and high voltage power supply cable fixing section.

15. The excimer lamp apparatus according to claim 14, wherein the voltage power supply cable fixing section has an opening for inserting a plug of the high voltage power supply cable.

16. The excimer lamp apparatus according to claim 15, wherein a shield material is provided on an IC tag side surface of the high frequency current absorber section.

17. The excimer lamp apparatus according to claim 16, wherein the shield metal is made of aluminum, or nickel

18. The excimer lamp apparatus according to claim 14, wherein an elastic sheet is pressed to the IC tag fixing section.