Patent Grant
7592751
This application claims priority from Japanese Patent Application Serial No. 2005-314033 filed on Oct. 28, 2005, the contents of which are incorporated herein by reference in its entirety.
Described herein is an excimer lamp and an excimer light emitting apparatus which are used as a light source for dry washing (UV/O3 washing), before carrying out an LCD or semiconductor manufacturing process etc.
A UV/O3 cleaning method is widely used as a washing method in which ultraviolet rays and ozone (O3) which is an oxygen radical kind are used together. For example, molecular bonds of, for example, an organic compound adhering to a surface of a substrate for an LCD, or a semiconductor substrate are cut by emitting ultraviolet rays to the surface, so that impurities, such as an adhering organic compound can be removed.
In recent years, as a light source used for the UV/O3 cleaning method, instead of a conventional low-pressure mercury lamp which emits ultraviolet rays having wavelengths of 185 nm and 254 nm, an excimer lamp is used in which, for example, xenon gas is used as a light-emitting material so that a vacuum-ultraviolet light with a wavelength of 172 nm may be emitted, and the washing capacity thereof is superior to that of a low-pressure mercury lamp.
An ultraviolet-ray emitting apparatus has a metal case 10 in which inert gas is circulated through a gas introducing port 10b and a gas exhaust port 10c which are provided in side surfaces of the case. A plurality of excimer lamps 1 are disposed inside the case 10, in which tube axes are in parallel to each other. A gutter-like reflection mirror 2 which reflects ultraviolet rays emitted from the excimer lamp 1 toward a work piece is disposed corresponding to each excimer lamp 1. Each excimer lamp 1 for which the reflection mirror 2 is fixed to a cooling block 3 made of aluminum, in which a water-cooled pipe is piped throughout the interior.
Such an excimer lamp 1 is shown in Japanese Laid Open Patent No. 2005-100934. As shown in
As shown in
If the above excimer lamp reaches the end of life span thereof, the intensity of radiation of vacuum ultraviolet radiation decrease as the quartz glass etc. forming the arc tube is deteriorated. Therefore, although it is necessary to replace it with a new one, it is in general difficult to determine whether it reached the end of the life span from the appearance of the excimer lamp. Thus, there is a demand that integral lighting time information be added to each excimer lamp. Moreover, if the physical-property information of each excimer lamp etc. is given in addition to the integral lighting time information, it is advantageous when lighting of a lamp is controlled.
Here, the lamp physical-property information includes but is not limited to information of the light intensity property, that is, information that the luminance is 1 lm (lumen) per 100 W of input power at a portion downwardly apart by 10 mm from the arc tube, or load property information, that is, information that unusual electric discharge does not take place when the input power is less than 100 W.
Here, Japanese Laid Open Patent No. 2003-68478 discloses the technology of making each lamp have integral lighting time information in the light source apparatus used for an endoscope etc. in order to know the end of the life span of the lamp.
According to this light source apparatus, since the integral lighting time information which is updated up to the last usage is stored in an IC tag (comprising such as a chip or an integrated circuit) attached to the lamp unit, when the light is turned on, the integral lighting time information can be updated to the latest information as needed by updating and storing the integral lighting time information in the IC tag. Therefore, if the IC tag is attached to each excimer lamp shown in
Since in the above-mentioned excimer lamp, discharge is caused by applying a high voltage, and 90% or more of electric discharge energy is changed into heat, the temperature of the outer surface of the arc tube becomes extremely high at the time of lighting. And when an IC tag is attached to the outer surface of such an arc tube, the temperature of the IC tag becomes superfluously high, whereby a function for storing desired information will be lost.
Therefore, as disclosed in Japanese Laid Open Patent No. 2003-68478, it seems that it is possible to prevent the temperature of the IC tag from becoming high by attaching the IC tag to a surface of a lamp bracket which holds the lamp.
However, such a structure cannot be applied to an ultraviolet-ray emitting apparatus shown in the
Moreover, in Japanese Laid Open Patent No. 2003-68478, since the lamp and IC tag are not integrally formed, when it is necessary to replace the lamp, the IC tag is necessarily replaced together with the new lamp, since there will be a problem that the old lamp information stored in the IC tag does not mach with information of the new lamp if the IC tag is not replaced together with the lamp.
In addition, as mentioned above, since such an excimer lamp becomes extremely high temperature at the time of lighting, the lamp is installed in a metal case in which a water-cooled block is built as shown in
On the other hand, when an IC tag is installed, it is necessary to provide an antenna for transmission and reception of data near the IC tag. However, where there is such a metallic case between the IC tag and the antenna, a problem may occur in transmission and reception of data. Therefore, it is necessary to take into consideration mutual attachment positions of the IC tag and the antenna so that the data may be transmitted and received between the IC tag and the antenna.
Furthermore, in order to cause discharge in an excimer lamp, it is necessary to impress a high frequency/high voltage to electrodes through a high voltage power supply terminal by high-frequency lighting power supply. For this reason, a strong electric field is generated around the electric supply cable of the excimer lamp. Therefore, depending on the installation position of the IC tag, the strong electric field is applied to the IC tag, so that the IC tag may be broken down by electromotive force generated in the IC tag, or the IC tag malfunctions by a noise.
Although, as mentioned above, there is a demand that an IC tag be installed, corresponding to each excimer lamp, there are various problems that the IC tag cannot be attached to the arc tube of the excimer lamp since it becomes high temperature during lighting, that there is a possibility that the high frequency/high voltage impressed to an excimer lamp may have a bad influence on the IC tag, and that a determination of the installation positions of the antenna which transmits and receives data with the IC tag is difficult, etc. Therefore, it is necessary to solve these problems in order to install the IC tags according to individual excimer lamps.
In view of the above problem, in the present excimer lamp and the present ultraviolet ray emitting apparatus, it is possible to install an IC tag capable of storing various information according to individual excimer lamps, and the IC tag is not affected by the high frequency/high voltage applied to the excimer lamp while there is no problem in communication between the IC tag and an antenna.
As mentioned above, an IC tag cannot be provided on the outer surface of an arc tube of an excimer lamp. Therefore, the present inventor examined measures from the above stand point, and discovered that it is preferred that the IC tag may be installed in a high voltage power supply terminal in an insulated holder whose temperature is much lower than that of the outer surface of an arc tube. However, in order to cause discharge in an excimer lamp, it is necessary to impress the high voltage to electrodes through a high voltage power supply terminal by high-frequency lighting power supply. In such a case, when a strong electric field occurs around an electric supply cable inserted into an insulated holder, the strong electric is built against the IC tag, so that electromotive force arises in the IC tag, and the problem that IC tag breaks occur. Moreover, there is also a problem that transmission and reception of data is not necessarily performed between an antenna and IC tag.
The above-mentioned problems are solved as set forth below.
(1) The present excimer lamp has an arc tube made of dielectric materials capable of transmitting ultraviolet rays, has a pair of electrodes facing each other through the dielectric materials forming the arc tube, and a high voltage power supply terminal for supplying high voltage to the electrodes through a high voltage power supply cable, the excimer lamp, in which electric discharge material is filled up with in its inner space. The excimer lamp includes an insulated holder provided in the high voltage power supply terminal, wherein the insulated holder has an inner space and the high voltage power supply cable connected to a connector for electric supply is inserted in the insulated holder, and an IC tag, wherein a gap is provided between the high voltage power supply cable and the IC tag. Thus, since the insulated holder in which the high voltage power supply cable connected to the connector for electric power supply is inserted is provided in the high voltage power supply terminal which is much lower temperature than the outer surface of the arc tube, and further, an inner space was formed in this insulated holder, in which an IC tag for storing the information about the excimer lamp connected to the high voltage power supply terminal is provided in the inner space thereof, the IC tag will not be raised to a high temperature, and the IC tag will not malfunction.
Moreover, since the IC tag is provided in the insulated holder attached to the high voltage power supply cable of the excimer lamp, there is no problem that the information stored in the IC tag does not correspond to the replaced lamp since when the excimer lamp is replaced, the IC tag is also replaced together with the high voltage power supply cable. Furthermore, by arranging the IC tag through a gap between the IC tag and the high voltage power supply cable, the electric field of the circumference of the IC tag become low and the problems of the IC tag breaking and/or malfunctioning can be avoided. Moreover, the IC tag can also be protected from heat generated by surroundings of the electric supply cable.
(2) The excimer lamp may include a high frequency current absorber provided between the high voltage supply cable and the IC tag, and a shield material provided on an IC tag side surface of the high frequency current absorber. Therefore, the high frequency current generated around the high voltage supply cable can be absorbed, so that the IC tag can be protected from the noise caused thereby.
(3) Moreover, when imaginary part (μ″) of complex permeability (μ=μ′−jμ″) of the high frequency current absorber into is 1.0 or more, a good high-frequency-current absorption property can be acquired against approximately 600 MHz noise generated from a high voltage power supply cable.
(4) In addition to the shield material, the excimer lamp may have a magnetic sheet which has the high complex permeability with high real part and low imaginary part on the IC tag side of the high frequency current absorber. Therefore, it is possible to perform good communication with the IC tag.
(5) When the insulated holder is made from an insulator having relative permittivity of 4.0 or less, the insulation between the terminal area of the high voltage power supply cable and the case can be fully secured.
(6) In the excimer lamp, the insulated holder may be made of a metal oxide or quartz glass so that the heat insulation effect between the IC tag and the high voltage power supply cable may be improved.
Moreover, the heat insulation effect between IC tag and the high voltage power supply cable can be improved by the insulated holder made from a metal oxide or quartz glass.
(7) An ultraviolet-ray emitting apparatus comprises an excimer lamp having an arc tube made from dielectric material capable of transmission of ultraviolet-ray, a pair of electrodes which face each other through the dielectric material, a high voltage power supply terminal including an insulated holder having an inner space, which supply high voltage to the pair of electrodes through a high voltage power supply cable, wherein the high voltage power supply cable to be connected to a power supply connector is inserted in the high voltage power supply terminal, a metallic case having a light emitting window from which light from the excimer lamp is emitted outside thereof, a connector member which is proved on the case, is made of material capable of transmission of electric wave, and supplies high voltage to the high voltage power supply terminal of the excimer lamp, an IC tag is arranged in the inner space wherein a gap is provided between the high voltage power supply cable and the IC tag; and an antenna which carries out transmission or reception of information with the IC tag.
Therefore, even if the case is made of metal, it is possible to perform communications between the IC tag and the antenna through the connector portion made from material capable of transmitting electric waves, such as resin.
Thus the present invention possesses a number of advantages or purposes, and there is no requirement that every claim directed to that invention be limited to encompass all of the advantages and purposes.
Other features and advantages of the present excimer lamp and ultraviolet-rays irradiation apparatus will be apparent from the ensuing description, taken in conjunction with the accompanying drawings, in which:
The ultraviolet-ray emitting apparatus has a metal case 10 therein, in which inert gas is circulated, as described above. As shown in
In the excimer lamp 1, as shown in
Moreover, a high voltage power supply terminal 12 is attached to an end portion of the high voltage power supply cable 12c, and an IC tag is provided in an insulated holder of the high voltage power supply terminal 12 as described below. By inserting a plug of the high voltage power supply terminal 12 in the connector 11, the internal electrode 1b and a high-frequency lighting power supply are electrically connected to each other. Although the connection of the external electrode 1c is not illustrated in the figures, the electrode is electrically connected to the high-frequency lighting power supply, as well.
As shown in
A plug 12a is provided at an end of the high voltage power supply cable 12c and the other end thereof is connected to one of the external leads 1g of the excimer lamp shown in
The insulated holder 12b has a sufficient inner space to contain the IC tag 13 while the high voltage power supply cable 12c is inserted and passed therethrough. Moreover, since the case shown in
The IC tag 13 is installed in the inner space of the insulated holder 12b, and an end thereof is pressed to the high frequency current absorber 12e by one of elastic sheets 12d which are made from silicone rubber or fluorine system rubber (elastomer), and the other end of the IC tag 13 is pressed against the inner wall of the insulated electrode holder 12b by the other elastic sheet 12d, so as to be fixed thereto. Furthermore, in the example of
Although the high frequency current absorber 12e is integrally formed as a unit as shown in the example of
Moreover, a high frequency current absorber may be made from low dielectric constant material, such as a SiOC film and an organic polymer film.
Since the noise generated from the high voltage power supply cable is about 600 MHZ in the case of the excimer lamp according the embodiment, a good high frequency current absorption property can be acquired by changing imaginary part of complex permeability or more into 1.0. From such a viewpoint, it is desirable that the high frequency current absorber made of silicone and carbonyl iron may be used.
The electromagnetic wave which enters from a side of the high voltage power supply cable 12c to the high frequency current absorber 12e exponentially causes attenuation loss until it reaches shield material 12f, and the wave is completely reflected by the shield material 12f. The reflected wave decreases similarly until it reaches the surface of the high frequency current absorber 12e, and turns into a transmitted wave and a secondary reflected wave on the surface, and this process is repeated. Therefore, it is possible to prevent the electromagnetic wave generated around the electric supply cable 12c of the excimer lamp from reaching the IC tag 13. By such a structure of the high voltage power supply terminal 12, even if high frequency current is generated from the high voltage power supply cable 12c when the excimer electric discharge takes place, high frequency current (noise) is absorbed as mentioned above by the high frequency current absorber 12e having the high complex permeability, which is provided between the high voltage power supply cable 12c and the IC tag 13, so that it is possible to prevent the noise from reaching the IC tag 13. That is, when such a high frequency current absorber 12e is not provided, there is a possibility that the IC tag 13 malfunctions due to the influence of the noise generated at the time of excimer electric discharge, but since the IC tag 13 is protected from the noise by the above-mentioned structure, it is possible to certainly prevent such a problem. And since there are the high frequency current absorber 12e and the gap between the high voltage power supply cable 12c and the IC tag 13, the effect of reducing the intensity of the electric field applied to the IC tag 13 becomes more remarkable.
Moreover, since the thermal resistance between the high voltage power supply cable 12c and the IC tag 13 becomes still higher by arranging the high frequency current absorber 12e between them, the heat insulation effect becomes remarkable.
By inserting the high voltage power supply terminal 12 shown in
The high voltage power supply terminal 12 connected to the electrodes of the excimer lamp 1 is connected through the connector 11 (not shown in
A CPU 21 controls the reader/writer 23 so as to write data in the IC tag 13, or read out data from the IC tag 13, and controls the high frequency lighting power supply 20, and controls lighting of a lamp 1.
In addition, although only one excimer lamp is shown in
An example of lighting control of the excimer lamp using the information memorized in the IC tag is explained below referring to
Before the lighting of the excimer lamp 1 starts, the integral lighting time information which is updated up to the time of the last use and memorized in the IC tag 13 is read out through the antenna from the IC tag by the reader/writer 23, and this information is stored in the memory 22 connected to the CPU 21. The life span information peculiar to each excimer lamp 1 is also memorized in the IC tag 13. The CPU 21 checks whether the integral lighting time read from the IC tag 13 is less than the life span of each of the lamp, and when the integral lighting time is less than the life span, a lighting signal is transmitted from the CPU 21 to the high frequency lighting power supply 20. Thereby, the high frequency lighting power supply 20 supplies high voltage/high frequency voltage to the excimer lamps 1, so that the excimer lamps 1 are turned on.
The latest lighting time information of each lamp is added to the integral lighting time stored in the memory 22 on an as needed basis during lighting of the excimer lamps 1. And if an integral lighting time of any one of the lamp reaches the life span, the CPU 21 will transmit a lighting stop signal to the high frequency lighting power supply 20, and switches off the excimer lamps 1. Moreover, when the excimer lamp is switched off before an integral lighting time reaches the life span, the latest lighting time information is added to the integral lighting time information stored by the memory 22 immediately after the excimer lamp is turned off, and the latest integral lighting time information is stored in the IC tag 13 through the antenna by the reader/writer 23. By carrying out the above control, it is possible to efficiently manage the excimer lamp integral lighting time information for each excimer lamp.
Although in the above embodiments, the lighting of the excimer lamp is controlled by using the integral lighting time information updated up to the time of the last use stored in IC tag 13, for example, the illuminance property information stored in the IC tag 13 of each excimer lamp may be used, so that various control is possible using the information in the IC tag. For example, the illuminance of two or more excimer lamps may be controlled so as to be uniform, or supply of high frequency voltage may be controlled by using the load property information stored in the IC tag 13, so that abnormal electric discharge is not generated in each excimer lamp 1.
The high voltage power supply terminal 12 is equipped with the high voltage power supply cable 12c, the insulated holder 12b, the IC tag 13 that is a memory unit, and the elastic sheet 12d which holds the IC tag 13. The plug 12a is provided in an end of the high voltage power supply cable 12c, and the other end of the high voltage power supply cable 12c is connected to the external lead 1g of the excimer lamp 1 shown in
In the first embodiment, although the high frequency current absorber 12e is used, in this embodiment, the (air) gap is provided between the IC tag 13 and the high voltage power supply cable 12c.
Even in such a structure, since the air having a low dielectric constant is provided between the high voltage power supply cable and the IC tag 13, so that a potential slope becomes small, and the intensity of the electric field applied to the IC tag itself can be reduced.
Therefore, as in the first embodiment, it is possible to prevent the IC tag 13 from malfunctioning due to a noise.
Moreover, since the thermal resistance between the high voltage power supply cable 12c and the IC tag 13 becomes high when such a gap is provided therebetween, when high frequency voltage is impressed to the electrode of the excimer lamps 1, the IC tag 13 can be protected from the heat generated around the high voltage power supply cable 12c. As for the size of such a gap, it is desirable that the high frequency voltage supplied to the electrodes of the excimer lamp 1 shown in
In addition, it is desirable for the shortest distance to be 3.2 mm or more, when a gap and a high frequency current absorber 12e is provided, as shown in
In this embodiment, in the high voltage supply terminal 12, in addition to the shield material 12f, a magnetic sheet 15 is provided on the surface on the IC tag side of the high frequency current absorption section 12e-2. The magnetic sheet 15 is a thin magnetic sheet for improving wireless communications between the IC tag 13 and the antenna 14 near the metal case side. This magnetic sheet 15 has the magnetic substance which has complex permeability with low imaginary part and high real part. If a metal exists near the IC tag 13, an eddy current will occur in this metal at the time of communication, and a magnetic field required for communication is canceled, but a communication property is improved by providing the magnetic substance which has high complex permeability with low imaginary part and high real part as mentioned above. That is, magnetic flux is concentrated on the magnetic sheet 15, since the real part of the complex permeability of the magnetic sheet 15 is high. The magnetic flux flows without magnetic loss since imaginary part is low. For this reason, good communication is attained even if the IC tag 13 is installed near the metal case side.
The preceding description has been presented only to illustrate and describe exemplary embodiments of the excimer lamp and ultraviolet-rays irradiation apparatus according to the present invention. It is not intended to be exhaustive or to limit the invention to any precise form disclosed. It will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed as the best mode contemplated for carrying out this invention, but that the invention will include all embodiments falling within the scope of the claims. The invention may be practiced otherwise than is specifically explained and illustrated without departing from its spirit or scope.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2005-314033 | Oct 2005 | JP | national |
| Number | Name | Date | Kind |
|---|---|---|---|
| 6693397 | Handa et al. | Feb 2004 | B2 |
| Number | Date | Country |
|---|---|---|
| 2003-068478 | Mar 2003 | JP |
| 2005-100934 | Apr 2005 | JP |
| 2008269976 | Nov 2008 | JP |
| Number | Date | Country | |
|---|---|---|---|
| 20070149086 A1 | Jun 2007 | US |
