Semiconductor gas sensors function by offering a change in electrical resistance in response to a shift in the local concentration of the gas of interest. In general the resistance of the sensor is some function of the concentration of the target gas.
Oxides with the perovskite type crystal structure and general formula ABO3, where A represents a large main group ion, and B represents a transition metal, are particularly suitable for use as oxygen sensors. This is because the perovskite structure is very robust and allows a considerable variability in oxygen content without breakdown in structure. Early examples of compositions proposed for the application were SrTiO3 and BaTiO3.
The problem of temperature sensitivity with perovskite structures was overcome by the selection of a group of perovskite structure compositions that exhibited constant values of conductivity (in an atmosphere of constant oxygen partial pressure) over a considerable range of temperature. U.S. Pat. Nos. 4,454,494 and 4,677,414 describe this desirable property for a group of alkaline earth ferrates (for example, Sr Feo3-x and Ba FeO3-x) in which the iron component was partially substituted by other transition metals whose primary valence states were 4 or 5.
Subsequently U.S. Pat. No. 5,397,541 laid claim to a very wide range of perovskite structure oxides as potential sensors for oxygen. At least one of the examples in U.S. Pat. No. 5,397,541 (SrFe0.9Ti0.1Oy) lies within the range of compositions covered by U.S. Pat. No. 4,454,494.
Needs exist for improved methods and apparatus for sensing that are selective for a particular gas, without interference from other components of the atmosphere, including moisture (relative humidity), and/or changes in temperature.
In general the resistance of the sensor is some function of the concentration of the target gas. Two general mechanisms can be exploited to achieve this concentration dependence on gas composition. A present invention engineers a response, which is selective for a particular gas, without interference from other components of the atmosphere, including moisture (relative humidity), and/or changes in temperature.
The mechanism of semiconductor gas sensors operating at lower temperatures, generally within the range 200-500° C., involves reactions of molecules of the target gas with chemisorbed species on the surface of the semiconductor, which is usually a metal oxide, and results in a change in near-surface charge carrier density. Materials functioning through this mechanism can be employed in the detection and monitoring of either reducing gases, for example but not limited to hydrogen, carbon monoxide, methane, etc., or oxidizing gases, for example but not limited to nitric oxide, chlorine, ozone, etc., in ambient air. This response mechanism involves no change in the bulk composition of the semiconducting oxide.
Within a somewhat higher temperature range, approximately 500-700° C., a family of semiconducting oxides MOx, where M represents either a transition metal or a combination of metals, one of which is a transition metal, can be used for monitoring oxygen partial pressure. In this case the bulk stoichiometry does change because the oxygen content of the material (the value of x) equilibrates with the prevailing oxygen partial pressure. Changes in the value of x are compensated by changes in the ratio of the valence states of the transition metal component of M. The present sensor preferably operates via this second mechanism.
These and further and other objects and features of the invention are apparent in the disclosure, which includes the above and ongoing written specification, with the drawings.
In general, the conductivity of materials, such as SrTiO3 and BaTiO3, follows the form shown schematically in
A result of the minimum value present in each curve is that most measurements of conductance of the oxygen sensor are capable of two different interpretations because there are two values of oxygen partial pressure that could give rise to the same conductance value. Such ambiguity is likely to reduce the usefulness of the sensor unless it can be avoided.
An important feature of the dependence of conductivity on oxygen partial pressure, seen in
One of the major applications foreseen for oxygen sensors is in the monitoring and control of combustion processes and it transpires that, unfortunately, when the fuel in use contains even a small amount of sulfur, so that the atmosphere in which the sensor operates includes sulfur oxide gases, perovskite oxides structured around alkaline earth ions, for example Sr and Ba, undergo a permanent degradation due to the formation of stable sulfates, for example SrSO4, BaSO4, and quickly fail.
The present invention identifies a formulation for a subgroup of perovskite structure oxides that overcomes the outstanding problems for oxygen sensing in a combustion environment. The sub group has a formula ABOx where A is a large 3-valent ion, such as Pr3+, B is a transition metal ion, which is substituted to a small degree by tungsten, which has a stable valence of 6, and x indicates that the oxide can sustain a variable oxygen stoichiometry.
A preferred general formulation is a single-phase perovskite structure AB1-yWyOx where y preferably lies between 0.03 and 0.15, more preferably between 0.05 and 0.10 and where x is close to 3.
Preferred examples of compositions that can achieve these advantages include, but are not limited to, PrFe0.95W0.05Ox and LaFe0.95W0.05Ox.
A first advantage of this invention is that, lacking an alkaline earth, the compositions are not prone to the formation of sulfates as stable as SrSO4 and BaSO4, and therefore can be used in atmospheres where there is some contamination by sulfur gases.
A second advantage is that, with a minimum amount of doping on the B-site, the minimum in the conductance-oxygen partial pressure plot can be driven far in the low oxygen partial pressure direction, as seen to the left in
The use of a 6-valent ion, with nominally 3 excess positive charges over the ferric ion per substitution, is more effective than the use of 4-valent or 5-valent ions that have 1 or 2 excess positive charges respectively. Thus the required shift to p-type characteristic can be achieved with a lower level of doping on the B-site. The result is that the ambiguity in the interpretation of conductance measurements is eliminated for the range of partial pressure of interest.
Stoichiometric amounts of constituent oxides La2O3, Fe2O3 and WO3 sufficient to prepare approximately 20 grams of La1.0Fe0.95W0.05O3 were mixed thoroughly with 100 grams NaHCO3 and heated in an alumina crucible to 900° C. for 10 hours. The mixture was cooled to room temperature and washed with distilled water to remove all traces of sodium compounds. XRD confirmed that the product had a perovskite crystal structure.
The powder was ground and then dispersed in an organic vehicle and screen-printed over gold interdigitated electrodes on an alumina substrate to give an oxide layer thickness of 50 microns. The substrate, which had previously been equipped with a platinum resistance heater printed on the reverse, was fired in a belt furnace at 980° C. to give a brown colored sensor.
When exposed to a change in pO2 by switching the atmosphere from air (20% oxygen) to pure nitrogen (0% oxygen), with the sensor at 600° C. a resistance increase resulted, as expected for a p-type semiconducting oxide, see
The sensor, still at 600° C., was then exposed to an atmosphere containing 100 ppm H2S for 5 minutes and then returned to air. After 5 minutes the resistance had returned to within about 10% of its original value indicating that the device had not been poisoned by exposure to the sulfur-containing gas.
A preferred method of preparation of the sensor material comprises reacting starting material oxides in stoichiometric proportions in a molten salt, yielding a powder, screen-printing the powder on a substrate, forming a microstructure, and forming the sensor.
A preferred method of sensing combustion status (fuel-rich or fuel-lean) of an atmosphere of combustion gases comprises contacting the sensor material with the atmosphere, sensing change in conductance, resistance, capacitance and/or impedance in the sensor material, and monitoring and controlling combustion processes responsive to the change sensed in the sensor material.
While the invention has been described with reference to specific embodiments, modifications and variations of the invention may be constructed without departing from the scope of the invention.
Number | Date | Country | Kind |
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60402948 | Aug 2002 | US | national |
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/US03/25481 | 8/14/2003 | WO | 2/14/2005 |