Number | Date | Country | Kind |
---|---|---|---|
6-311050 | Dec 1994 | JP |
This is a continuation of application Ser. No. 08/706,761, filed Sep. 3, 1996, which is a continuation application of application Ser. No. 08/384,081, filed Feb. 6, 1995, both now abandoned.
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---|---|---|---|
3737215 | De Jager | Jun 1973 | A |
3909115 | Kano | Sep 1975 | A |
3955883 | Sugiyama | May 1976 | A |
4080048 | Kimura | Mar 1978 | A |
4666273 | Shimizu et al. | May 1987 | A |
4770477 | Shafer | Sep 1988 | A |
4772107 | Friedman | Sep 1988 | A |
4811055 | Hirose | Mar 1989 | A |
4891663 | Hirose | Jan 1990 | A |
4977426 | Hirose | Dec 1990 | A |
5097291 | Suzuki | Mar 1992 | A |
5105075 | Ohta et al. | Apr 1992 | A |
5159496 | Kataoka | Oct 1992 | A |
5170207 | Tezuka et al. | Dec 1992 | A |
5194893 | Nishi | Mar 1993 | A |
5235465 | Hayashi | Aug 1993 | A |
5245384 | Mori | Sep 1993 | A |
5247324 | Estelle | Sep 1993 | A |
5260832 | Togino et al. | Nov 1993 | A |
5493402 | Hirukawa | Feb 1996 | A |
5506684 | Ota et al. | Apr 1996 | A |
5534970 | Nakashima et al. | Jul 1996 | A |
5636000 | Ushida et al. | Jun 1997 | A |
5781278 | Matsuzawa et al. | Jul 1998 | A |
5805344 | Sasaya et al. | Sep 1998 | A |
5831770 | Matsuzawa et al. | Nov 1998 | A |
5835285 | Matsuzawa et al. | Nov 1998 | A |
5856884 | Mercado | Jan 1999 | A |
5943172 | Sasaya et al. | Aug 1999 | A |
RE37846 | Matsuzawa et al. | Sep 2002 | E |
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---|---|---|
34 43 856 | Jun 1985 | DE |
47-35017 | Sep 1972 | JP |
55-12902 | Jan 1980 | JP |
58-4112 | Jan 1983 | JP |
63-118115 | May 1988 | JP |
4-157412 | Mar 1992 | JP |
5-107469 | Apr 1993 | JP |
5-164962 | Jun 1993 | JP |
5-173065 | Jul 1993 | JP |
6-313845 | Nov 1994 | JP |
6-331941 | Dec 1994 | JP |
6-349701 | Dec 1994 | JP |
7-140385 | Jun 1995 | JP |
179204 | Jul 1996 | JP |
1659951 | Jun 1991 | SU |
WO 9304391 | Mar 1993 | WO |
Entry |
---|
SPIE, vol. 811 Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection (1987), “Quality of Microlithographic Projection Lenses”, Joseph Braat, pp. 22-30. |
U.S. patent application Ser. No. 08/152,490, refiled as U.S. patent application Ser. No. 08/727,206, which was refiled as U.S. patent application Ser. No. 08/929,155; Apr. 23, 1999 which was allowed, but no issue date or patent number.* |
U.S. patent application Ser. No. 08/255,927, filed Jun. 7, 1994, Nakashima et al. U.S. Pat. No. 5,534,970, issue date Jul. 9, 1996.* |
Naumann, Schroder, “Bauelemente der Optik”, 6th Ed. 1992 Munich, Vienna, pp. 379, 393. |
Erhard Glatzel, “Zeiss-Inform”, 26, 8-13 (1981) No. 92. |
W. Emmerich, Ch. Hofmann, “Jenaer Rundschau” Apr. 1986, pp. 193-196. |
Smith, Warren et al., “Modern Lens Design” ISBN 0-07-059178-4 McGraw-Hill, 1992, Chapter 3.3. |
Number | Date | Country | |
---|---|---|---|
Parent | 08/885694 | Jun 1997 | US |
Child | 09/772848 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 08/706761 | Sep 1996 | US |
Child | 08/885694 | US | |
Parent | 08/384081 | Feb 1995 | US |
Child | 08/706761 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 08/885694 | Jun 1997 | US |
Child | 09/772848 | US |