Extracting semiconductor device model parameters

Abstract

The present invention includes a method for extracting semiconductor device model parameters for a device model such as the BSIM4 model. The device model parameters for the device model includes a plurality of base parameters, DC model parameters, temperature dependent related parameters, and AC parameters. The method also includes steps for extracting various DC model parameters. The present invention also includes a method for extracting device model parameters including the steps of extracting a portion of the DC model parameters based on the terminal current data, modifying the terminal current data based on the extracted portion of the DC model parameters, and extracting a second portion of the DC model parameters based on the modified terminal current data.

Description

BACKGROUND OF THE INVENTION

1. Field of the Invention

The invention relates generally to computer-aided electronic circuit simulation, and more particularly, to a method of extracting semiconductor device model parameters for use in integrated circuit simulation.

2. Description of Related Art

Computer aids for electronic circuit designers are becoming more prevalent and popular in the electronic industry. This move toward electronic circuit simulation was prompted by the increase in both complexity and size of circuits. As circuits have become more complex, traditional breadboard methods have become burdensome and overly complicated. With increased computing power and efficiency, electronic circuit simulation is now standard in the industry. Examples of electronic circuit simulators include the Simulation Program with Integrated Circuit Emphasis (SPICE) developed at the University of California, Berkeley (UC Berkeley), and various enhanced versions or derivatives of SPICE, such as, SPICE2 or SPICE3, also developed at UC Berkeley; HSPICE, developed by Meta-software and now owned by Avant!; PSPICE, developed by Micro-Sim; and SPECTRE, developed by Cadence. SPICE and its derivatives or enhanced versions will be referred to hereafter as SPICE circuit simulators.

SPICE is a program widely used to simulate the performance of analog electronic systems and mixed mode analog and digital systems. SPICE solves sets of non-linear differential equations in the frequency domain, steady state and time domain and can simulate the behavior of transistor and gate designs. In SPICE, any circuit is handled in a node/element fashion; it is a collection of various elements (resistors, capacitors, etc.). These elements are then connected at nodes. Thus, each element must be modeled to create the entire circuit. SPICE has built in models for semiconductor devices, and is set up so that the user need only specify model parameter values.

An electronic circuit may contain any variety of circuit elements such as resistors, capacitors, inductors, mutual inductors, transmission lines, diodes, bipolar junction transistors (BJT), junction field effect transistors (JFET), and metal-on-silicon field effect transistors (MOSFET), etc. A SPICE circuit simulator makes use of built-in or plug-in models for semiconductor device elements such as diodes, BJTs, JFETs, and MOSFETs. If model parameter data is available, more sophisticated models can be invoked. Otherwise, a simpler model for each of these devices is used by default.

A model for a device mathematically represents the device characteristics under various bias conditions. For example, for a MOSFET device model, in DC and AC analysis, the inputs of the device model are the drain-to-source, gate-to-source, bulk-to-source voltages, and the device temperature. The outputs are the various terminal currents. A device model typically includes model equations and a set of model parameters. The model parameters, along with the model equations in the device model, directly affect the final outcome of the terminal currents. In order to represent actual device performance, a successful device model is tied to the actual fabrication process used to manufacture the device represented. This connection is represented by the model parameters, which are dependent on the fabrication process used to manufacture the device.

SPICE has a variety of preset models. However, in modern device models, such as BSIM (Berkeley Short-Channel IGFET Model) and its derivatives, BSIM3, BSIM4, and BSIMPD (Berkeley Short-Channel IGFET Model Partial Depletion), all developed at UC Berkeley, only a few of the model parameters can be directly measured from actual devices. The rest of the model parameters are extracted using nonlinear equations with complex extraction methods. See Daniel Foty, “MOSFET Modeling with Spice—Principles and Practice,” Prentice Hall PTR, 1997.

Since the sets of equations utilized in a modern semiconductor device model are complex with numerous unknowns, there is a need to extract the model parameters in the equations in an efficient and accurate manner so that using the extracted parameters, the model equations will closely emulate the actual process.

SUMMARY OF THE INVENTION

The present invention includes a method for extracting semiconductor device model parameters for a device model such as the BSIM4 model. The device model parameters for the device model includes a plurality of base parameters, DC model parameters, temperature dependent related parameters, and AC parameters. The method includes steps for extracting the DC model parameters, such of V_th related parameters, I_gb related parameters, I_gidl related parameters, I_gd and I_gs related parameter, L_eff, R_d and R_s related parameters, mobility and W_eff related parameters, V_th geometry related parameters, sub-threshold region related parameters, drain induced barrier lower related parameters; I_dsat related parameters, and additional DC related parameters, based on the terminal current data corresponding to various bias conditions measured from a set of test devices.

The present invention also includes a method for extracting device model parameters including the steps of extracting a portion of the DC model parameters based on the terminal current data, modifying the terminal current data based on the extracted portion of the DC model parameters, and extracting a second portion of the DC model parameters based on the modified terminal current data.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram of a system according to an embodiment of the present invention;

FIG. 2 is a flow chart illustrating a modeling process in accordance with an embodiment of the present invention;

FIG. 3A is a block diagram of a model definition input file in accordance with an embodiment of the present invention;

FIG. 3B is a block diagram of an object definition input file in accordance with an embodiment of the present invention;

FIG. 4 is a diagrammatic cross sectional view of a MOSFET device for which model parameters are extracted in accordance with an embodiment of the present invention;

FIG. 5 is a graph illustrating sizes of test devices used to obtain experimental data for model parameter extraction in accordance with an embodiment of the present invention;

FIG. 6 is a graph illustrating sizes of test devices used to obtain experimental data for model parameter extraction in accordance with an alternative embodiment of the present invention;

FIGS. 7A-7D are examples of current-voltage (I-V) curves representing some of the terminal current data for the test devices;

FIG. 8 is a flow chart illustrating in further detail a parameter extraction process in accordance with an embodiment of the present invention; and

FIG. 9 is a flow chart illustrating in further detail a DC parameter extraction process in accordance with an embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

As shown in FIG. 1, system 100, according to one embodiment of the invention, comprises a central processing unit (CPU) 102, which includes a RAM, and a disk memory 110 coupled to the CPU 102 through a bus 108. The system 100 further comprises a set of input/output (I/O) devices 106, such as a keypad, a mouse, and a display device, also coupled to the CPU 102 through the bus 108. The system 100 may further include an input port 104 for receiving data from a measurement device (not shown), as explained in more detail below. The system 100 may also include other devices 122. An example of system 100 is a Pentium 233 PC/Compatible computer having RAM larger than 64 MB and a hard disk larger than 1 GB.

Memory 110 has computer readable memory spaces such as database 114 that stores data, memory space 112 that stores operating system 112 such as Windows 95/98/NT4.0/2000, which has instructions for communicating, processing, accessing, storing and searching data, and memory space 116 that stores program instructions (software) for carrying out the method of the present invention. Memory space 116 may be further subdivided as appropriate, for example to include memory portions 118 and 120 for storing modules and plug-in models, respectively, of the software.

A set of model parameters for a semiconductor device is often referred to as a model card for the device. Together with the model equations, the model card is used by a circuit simulator to emulate the behavior of the semiconductor device in an integrated circuit. A model card may be determined by process 200 as shown in FIG. 2. Process 200 begins by loading 210 the input files into the RAM of the CPU 102. The input files may include a model definition file and an object definition file. The object definition file provides information of the object (device) to be simulated. The model definition file provides information associated with the device model for modeling the behavior of the object. These files are discussed in further detail below in conjunction with FIGS. 3A and 3B.

Next, the measurement data is loaded 220 from database 114. The measurement data includes physical measurements from a set of test devices, as will be explained in more detail below. Once the data has been loaded, the next step is extraction 230 of the model parameters. The parameter extraction step 230 is discussed in detail in connection with FIGS. 8, and 9 below.

After the parameters are extracted, binning 240 may be performed. Binning is an optional step depending on whether the device model is binnable or not. The next step is verification 250. Verification checks the quality of the extracted model parameters. Once verified, the extracted parameters are output 260 as model card, an error report is generated 270, and the process 200 is then complete. More detailed discussion about the binning step 240 and verification step 250 can be found in the BSIMPro+User Manual—Basic Operation, by Celestry Design Technologies, released in September, 2001, which is incorporated by reference in its entirety herein.

Referring to FIG. 3A, model definition file 300A comprises a general model information field 310, a parameter definition field 320, an intermediate variable definition field 330, and an operation point definition field 340. The general model information field 310 includes general information about the device model, such as model name, model version, compatible circuit simulators, model type and binning information. The parameter definition field 320 defines the parameters in the model. As an example, a list of the model parameters in the BSIM4 model are provided in Appendix A. For each parameter, the model definition file specifies information associated with the parameter, such as parameter name, default value, parameter unit, data type, and optimization information. The operation point definition section 340 defines operation point or output variables, such as device terminal currents, threshold voltage, etc., used by the model.

Referring to FIG. 3B, object definition file 300B defines object related information, including input variables 350, output variables 360, instance variables 370, object and node information 380. Input variables 350 and output variables 360 are associated with the inputs and outputs, respectively, of the device in an integrated circuit. The instance variables 370 are associated with the geometric characteristics of the device to be modeled. The object node information 380 is the information regarding the nodes or terminals of the device to be modeled.

Process 200 can be used to generate model cards for models describing semiconductor devices such as BJTs, JFETs, and MOSFETs, etc. Discussions about the use of some of these models can be found in the BSIMPro+User Manual—Device Modeling Guide, by Celestry Design Technologies, released in September, 2001, which is incorporated by reference in its entirety herein. As an example, the BSIM4 model, which was developed by UC Berkeley to model MOSFET devices, is used here to further describe the parameter extraction step 230 of the process 200. The model equations for the BSIM4 model are provided in Appendix B. More detailed discussion about the BSIM4 model can be found in the BSIM4.2.0 MOSFET Model Users' Manual by the Department of Electrical Engineering and Computer Sciences, UC Berkeley, Copyright 2001, which is incorporated by reference in its entirety herein.

Preferred embodiments of the present invention, thus may be further understood by reference to an exemplary parameter extraction process for a MOSFET device. As shown in FIG. 4, a MOSFET device 400 includes a source 430 and a drain 450 formed in a substrate 440. The MOSFET also includes a gate 410 over the substrate 440 and is separated from the substrate 440 by a thin layer of gate oxide 420.

The MOSFET as described can be considered a four terminal (node) device. The four terminals are the gate terminal (node g), the source terminal (node s), the drain terminal (node d), and the substrate or body terminal (node b). Nodes g, s, b, and d, can be connected to different voltage sources.

For ease of further discussion, Table I below lists the symbols corresponding to the physical variables associated with the operation of MOSFET device 400.

TABLE I
Cbd -    body to drain capacitance
CbS -    body to source capacitance
Id -     current through drain (d) node
Idgidl - gate induced leakage current at the drain
Ids -    current flowing from source to drain
Idsat -  drain saturation current
Ib -     current through substrate node
Igb -    gate oxide tunneling current to substrate
Igs -    current flowing from gate to source
Igd -    current flowing from gate to drain
Igc -    current flowing from gate to channel
Isub -   impact ionization current
Is -     current through source (s) node
Lgisl -  gate induced source leakage current at the source
Ldrawn - drawn channel length
Leff -   effective channel length
Rd -     drain resistance
Rs -     source resistance
Rds -    drain/source resistance
Rout -   output resistance
Vbs -    voltage between node b and node s
Vd -     drain voltage
VDD -    maximum operating DC voltage
Vds -    voltage between node d and node s
Vb -     substrate voltage
Vg -     gate voltage
Vgs -    voltage between node g and node s
Vs -     source voltage
Vth -    threshold voltage
Wdrawn - drawn channel width
Weff -   effective channel width

In order to model the behavior of the MOSFET device 400 using the BSIM4 model, experimental data are used to extract model parameters associated with the model. These experimental data include terminal current data and capacitance data measured in test devices under various bias conditions. In one embodiment of the present invention, the measurement is done using a conventional semiconductor device measurement tool that is coupled to system 100 through input port 104. The measured data are thus organized by CPU 102 and stored in database 114. The test devices are typically manufactured using the same or similar process technologies for fabricating the MOSFET device. In one embodiment of the present invention, a set of test devices having different device sizes, meaning different channel widths and channel lengths are used for the measurement. The device size requirement can vary with different applications. Ideally, as shown in FIG. 5, the set of devices include:

• • one largest device, meaning the device with the longest drawn channel length and widest drawn channel width that is available, as represented by dot 502;
  • one smallest device, meaning the device with the shortest drawn channel length and smallest drawn channel width that is available, as represented by dot 516;
  • one device with the smallest drawn channel width and longest drawn channel length, as represented by dot 510;
  • one device with the widest drawn channel length and shortest drawn channel length, as represented by dot 520;
  • three devices having the widest drawn channel width and different drawn channel lengths, as represented by dots 504, 506, and 508;
  • two devices with the shortest drawn channel length and different drawn channel widths, as represented by dots 512 and 514;
  • two devices with the longest drawn channel length and different drawn channel widths, as represented by dots 522 and 524;
  • (optionally) up to three devices with smallest drawn channel width and different drawn channel lengths, as represented by dots 532, 534, and 536; and
  • (optionally) up to three devices with medium drawn channel width (about halfway between the widest and smallest drawn channel width) and different drawn channel lengths, as represented by dots 538, 540, and 542. If in practice, it is difficult to obtain measurements for all of the above required devices sizes, a smaller set of different sized devices can be used. For example, the different device sizes shown in FIG. 6 are sufficient according to an alternative embodiment of the present invention. The test devices as shown in FIG. 6 include:
  • one largest device, meaning the device with the longest drawn channel length and widest drawn channel width, as represented by dot 502;
  • one smallest device, meaning the device with the shortest drawn channel length and smallest drawn channel width, as represented by dot 516;
  • (optional) one device with the smallest drawn channel width and longest drawn channel length, as represented by dot 510;
  • one device with the widest drawn channel width and shortest drawn channel length, as represented by dot 520;
  • one device and two optional devices having the widest drawn channel width and different drawn channel lengths, as represented by dots 504 (optional), 506 (optional), and 508, respectively;
  • (optional) two devices with the shortest drawn channel length and different drawn channel widths, as represented by dots 512 and 514.

For each test device, terminal currents are measured under different terminal bias conditions. These terminal current data are put together as I-V curves representing the I-V characteristics of the test device. In one embodiment of the present invention, for each test device, the following I-V curves are obtained:

• • 1. Linear region I_d vs. V_gs curves for a set of V_b values. These curves are obtained by grounding the s node, setting V_d to a low value, such as 0.05V, and for each of the set of V_b values, measuring I_d while sweeping V_g in step values across a range such as from 0 to V_DD. (−V_DD for NMOS _and V_DD for PMOS).
  • 2. Saturation region I_d vs. V_gs curves for a set of V_b values. These curves are obtained by grounding the s node, setting V_d to a high value, such as V_DD, and for each of the set of V_b values, measuring I_d while sweeping V_g in step values across a range such as from 0 to V_DD. (−V_DD for NMOS _and V_DD for PMOS).
  • 3. Saturation region I_d VS V_ds curves for a set of V_g values. These curves are obtained by grounding the s node, setting V_b to 0 and for each set of V_g values, measuring I_d while sweeping V_d in step values across a range such as V_th+0.02 to V_DD.
  • 4. Linear region I_d vs V_ds curves for a set of V_g values with substrate biased. These curves are obtained by grounding the s node, setting V_b to −V_DD and for each set of V_g values, measuring I_d while sweeping V_d in step values across a range such as V_th+0.02 to V_DD.
  • 5. I_b vs. V_gs curves for different V_d values, obtained by grounding the s and b nodes, and for each of the set of V_d values, measuring I_b while sweeping V_g in step values across a range such as from 0 to V_DD.
  • 6. I_g vs. V_bs curves obtained by grounding d, g, and s nodes, measuring I_g while sweeping V_b in step values across a range such as from −V_DD to 0.7.
  • 7. I_g/I_d/I_s vs. V_gs curves for different V_d values, obtained by grounding s and b nodes, and for each of a set of V_d values sweeping V_g in step values across a range such as from 0 to V_DD.
  • 8. I_s vs. V_gd curves for different V_b and V_s values, obtained by grounding d node, and for each combination of V_b, and V_s values, measuring I_s while sweeping V_g in step values across a range such as from 0 to −V_DD.

As examples, FIG. 7A shows a set of linear region I_d vs. V_gs curves for different V_bs values, FIG. 7B shows a set of saturation region I_d vs. V_ds curves for different V_gs values, FIG. 7C shows a set of I_g vs. V_gs curves for different V_ds values; and FIG. 7D shows a set of I_g vs. V_gs curves for different V_bd values.

In addition to the terminal current data, for each test device, capacitance data are also collected from the test devices under various bias conditions. The capacitance data can be put together into capacitance-current (C-V) curves. In one embodiment of the present invention, the following C-V curves are obtained:

• 1. C_bs VS. V_bs curve obtained by grounding s node, setting I_d to zero, or to very small values, and measuring C_bs while sweeping V_b in step values across a range such as from −V_DD to V_DD.
• 2. C_bd vs. V_bs curve obtained by grounding s node, setting I_s to zero, or to very small values, and measuring C_bd while sweeping V_b in step values across a range such as from −V_DD to V_DD.

As shown in FIG. 8, in one embodiment of the present invention, the parameter extraction step 230 comprises extracting base parameters 810; extracting other DC model parameters 820; extracting temperature dependent related parameters 830; and extracting AC parameters 840. In base parameters extraction step 810, base parameters, such as V_th (the threshold voltage at V_bs=0), K₁ (the first order body effect coefficient), and K₂ (the second order body effect coefficient) are extracted based on process parameters corresponding to the process technology used to fabricate the MOSFET device to be modeled. The base parameters are then used to extract other DC model parameters at step 820, which is explained in more detail in connection with FIG. 9 below.

The temperature dependent parameters are parameters that may vary with the temperature of the device and include parameters such as: Kt1 (temperature coefficient for threshold voltage); Ua1 (temperature coefficient for U_a), and Ub1 (temperature coefficient for U_b), etc. These parameters can be extracted using a conventional parameter extraction method.

The AC parameters are parameters associated with the AC characteristics of the MOSFET device and include parameters such as: CLC (constant term for the short channel model) and moin (the coefficient for the gate-bias dependent surface potential), etc. These parameters can also be extracted using a conventional parameter extraction method.

As shown in FIG. 9, the DC parameter extraction step 820 further comprises: extracting V_th related parameters (step 902); extracting I_gb related parameters (step 904); extracting I_gidl related parameters (step 906); extracting I_gd and I_gs related parameters (step 908); extracting I_gc and its partition (I_gcs and I_gcd) related parameters (step 910); extracting L_eff related parameters, R_d related parameters, and R_s related parameters (step 912); extracting mobility related parameters and W_eff related parameters (step 914); extracting V_th geometry related parameters (step 916); extracting sub-threshold region related parameters (step 918); extracting parameters related to drain-induced barrier lower than regular (DIBL) (step 920); extracting I_dsat related parameters (step 922); extracting I_sub related parameters (step 924); and extracting junction parameters (step 926).

The equation numbers below refer to the equations set forth in Appendix B.

In step 902, threshold voltage V_th related parameters, such as V_th0, k1, k2, and Ndep, are extracted by using the linear I_d vs V_gs curves measured from the largest device.

In step 904, the tunneling current, Igb, related parameters are extracted. The tunneling current is comprised of two components as defined by the following equation: I_gb=Igbacc+Igbinv

Igbacc and Igbinv related parameters are extracted separately in step 904. For the extraction of Igbacc related parameters, the I_g vs. V_bs curves for V_ds=0 and V_gs=0 are used. V_ds and V_gs are set to zero to minimize the effects of other currents. Then model parameters Aigbacc, Bigbacc, and Cigbacc are extracted with nonlinear-square-fit, using Equation 4.3.1. Once these parameters are extracted, Nigbacc is obtained by linear interpolation of Equation 4.3.1b using maximum slope position in the I_g vs. V_bs curves.

For the extraction of Igbinv related parameters, the I_b vs. V_gs curves when V_ds=0 and V_bs=0 are used. V_ds and V_bs are set to zero to minimize the effects of other currents. Model parameters Aigbinv, Bigbinv, Cigbinv are then extracted with nonlinear-square-fit, using Equation 4.3.2. Then Nigbinv and Eigbinv are obtained using Equation 4.3.2a by conventional optimization methods such as the Newton-Raphson algorithm.

In step 906, I_gidl-related parameters, such as parameters AGIDL, BGIDL, CGIDL, and EGIDL, are extracted. I_gidl represents the gate-induced drain leakage current, and the parameters are extracted using the device with the maximum width, W, and data from the I_d VS V_gs and I_s vs V_gs curves measured at the condition of V_gs<0 for NMOS (V_gs>0 for PMOS) and at different V_ds and V_bs bias conditions. I_sub is negligible where V_gs<0 and therefore the I_b vs V_gs curve can be used for this extraction. These assumptions and curves are used in conjunction with the extracted V_th, related parameters from step 902 and the following equation: $\begin{array}{c}{I}_{\mathrm{GIDL}}=\mathrm{AGIDL}·W_{\mathrm{effCJ}}·\mathrm{Nf}·\frac{V_{\mathrm{ds}}-V_{\mathrm{gse}}-\mathrm{EGIDL}}{3·T_{\mathrm{oxe}}}·\\ \exp \left(-\frac{3·T_{\mathrm{oxe}}·\mathrm{BGIDL}}{V_{\mathrm{ds}}-V_{\mathrm{gse}}-\mathrm{EGIDL}}\right)·\frac{V_{\mathrm{db}}^3}{\mathrm{CGIDL}+V_{\mathrm{db}}^3}\end{array}$ CGIDL is extracted using the I_b vs V_gs curve data for varying V_ds. Next AIGDL and BIGDL are extracted using a conventional non-linear square fit. Finally EGIDL is obtained by optimizing AGIDL, BGIDL, and EGIDL simultaneously using a conventional optimizer such as the Newton-Raphson algorithm.

In step 908, the gate to source, I_gs, and gate to drain, I_gd current parameters are extracted. I_gs represents the gate tunneling current between the gate and the source diffusion region, I_gd represents the gate tunneling current between the gate and the drain diffusion region. Parameters extracted in step 908 include DLCIG, AIGSD, BIGSD, and CIGSD. The values of the parameters POXEDGE, TOXREF, and NTOX are set to their default values. These parameters are extracted using the I_d vs V_gs and I_s vs V_gs curves measured at the condition of V_ds=0 and V_bs=0. V_ds and V_bs are set equal to zero to minimize the effects of other currents such as channel current. This extraction utilizes the device with the maximum L_drawn*W_drawn, where L_drawn is the device channel length and W_drawn is the device width, and the extracted V_th, related parameters from step 902.

The following equations are utilized: I_gs=W_effDLCIG·A·T_oxRatioEdge·V_gs·V′_gs·exp[−B·TOXE·POXEDGE·(AIGSD−BIGSD·V′_gs)·(1+CIGSD·V′_gs)] and I_gd=W_effDLCIG·A·T_oxRatioEdge·V_gd·V′_gd·exp[−B·TOXE·POXEDGE·(AIGSD−BIGSD·V′_gd)·(1+CIGSD·V′_gd)] where $T_{\mathrm{oxRatioEdge}}={\left(\frac{\mathrm{TOXREF}}{\mathrm{TOXE}·\mathrm{POXEDGE}}\right)}^{\mathrm{NTOX}}·\frac{1}{{\left(\mathrm{TOXE}·\mathrm{POXEDGE}\right)}^2}$ and V′_gs{square root}{square root over ((V_gs−V_fbsd)²+1.0e−4)}V_gd={square root}{square root over ((V_gd−V_fbsd)²+1.0e−4)} DLCIG is set equal to 0.7 *X_j which is a proven experimental value. Then AIGSD, BIGSD, and CIGSD are extracted from the I_d/I_s vs V_gs curve using the non-linear square fit method.

In step 910, the gate to current, I_gc, and it's partition related parameters are extracted. Parameters extracted in step 910 includes: AIGC, BIGC, CIGC, NIGC and P_igcd. These parameters are extracted using the device with the maximum L_drawn*W_drawn and the data from the I_g vs V_gs curve measured at the condition of V_ds=0 and V_bs=0. V_ds and V_bs are set equal to zero to minimize the effects of other currents such as channel current. The data of I_g includes I_gc, I_gs and I_gd data and is characterized by the following equation. I_g=I_gc+I_gs+I_gd Since I_gs and I_gd are extracted in earlier steps, these effects can easily be removed with the calculated I_gs and I_gd. I_gc is then calculated using the extracted V_th, related parameters from step 902, in coordination data from the I_g vs V_gs curve and the following equation: I_gc=W_effL_eff·A·T_oxRatio·V_gseV_aux·exp[−B·TOXE(AIGC−BIGC·V_oxdepinv)·(1+CIGC·V_oxdepinv)] Where $V_{\mathrm{aux}}=\mathrm{NIGC}·v_t·\log \left(1+\exp \left(\frac{V_{\mathrm{gse}}-\mathrm{VTH0}}{\mathrm{NIGC}·v_t}\right)\right)$ Using a non-linear square fit, AIGC, BIGC, and CIGC are extracted. NIGC is then extracted at V_gs=V_th0 using linear interpolation.

Once calculated, Igc is then divided into its two components I_gcs and I_gcd$\begin{array}{c}{I}_{\mathrm{gcs}}=I_{\mathrm{gc}}·\frac{\mathrm{PIGCD}·V_{\mathrm{ds}}+\exp \left(-\mathrm{PIGCD}·V_{\mathrm{ds}}\right)-1+1.0e-4}{{\mathrm{PIGCD}}^2·V_{\mathrm{ds}}^2+2.0e-4}\\ I_{\gcd }=I_{\mathrm{gc}}·\frac{1-\left(\mathrm{PIGCD}·V_{\mathrm{ds}}+1\right)·\exp \left(-\mathrm{PIGCD}·V_{\mathrm{ds}}\right)+1.0e-4}{{\mathrm{PIGCD}}^2·V_{\mathrm{ds}}^2+2.0e-4}\end{array}$ and

In step 912, parameters related to the effective channel length L_eff, the drain resistance R_d and source resistance R_s are extracted. The L_eff, R_d and R_s related parameters include parameters such as L_int, and R_dsw, and are extracted using data from the linear I_d vs V_gs curves as well as the extracted V_th related parameters from step 902.

In step 914, parameters related to the mobility and effective channel width W_eff, such as μ₀, U_a, U_b, U_c, Wint, Wr, Prwb, Wr, Prwg, R_dsw, Dwg, and Dwb, are extracted, using the linear I_d VS V_gs curves and the extracted V_th, related parameters from step 902.

Steps 902, 912, and 914 can be performed using a conventional BSIM4 model parameter extraction method. Discussions about some of the parameters involved in these steps can be found in the following:

• • Liu, William “MOSFET Models for SPICE Simulation, Including BSIM3v3 and BSIM4,” John Wiley & Sons, Inc. 2001 which is incorporated by reference herein.

In step 916, the threshold voltage V_th geometry related parameters, such as D_VT0, D_VT1, D_VT2, N_LX1, D_VT0W, D_VT1W, D_VT2W, k₃, and k_3b, are extracted, using the linear I_d vs V_gs curve, the extracted V_th, L_eff, and mobility and W_eff related parameters from steps 902, 912, and 914, and Equations 2.5.5-2.5.7.

In step 918, sub-threshold region related parameters, such as C_it, Nfactor, V_off, D_dsc, and C_dscd, are extracted, using the linear I_d vs V_gs curves, the extracted V_th, L_eff and R_d and R_s and mobility and W_eff related parameters from steps 902, 912, and 914, and Equations (3.2.1-3.2.3.

In step 920, DIBL related parameters, such as D_sub, Eta0 and Etab, are extracted, using the saturation I_d vs V_gs curves and the extracted V_th related parameters from step 902, and Equations 2.5.5-2.5.7.

In step 922, the drain saturation current I_dsat related parameters, such as B0, B1, A0, Keta, and A_gs, are extracted using the saturation I_d VS V_ds curves, the extracted V_th, L_eff and R_d and R_s, mobility and W_eff, V_th geometry, sub-threshold region, and DIBL related parameters from steps 902, 912, 914, 916, 918, and 920 and Equation 14.1.

In step 924, the impact ionization current I_ii related parameters, such as α₀, α₁, and β₀, are extracted using the data from the linear I_d VS V_gs curve and Equations 6.1.1-6.1.2.

In step 926, the junction parameters, such as Cjswg, Pbswg, and Mjswg, are extracted using the C_bs VS. V_bs and C_bd vs. V_bs curves, and Equations 10.2.1-10.2.7.

In performing the DC parameter extraction steps (steps 902-926), it is preferred that after the I_gb, I_gd, I_gs I_gidl, and I_gc related parameters are extracted in steps 904 through 910, I_gb, I_gd, I_gs, I_gidl, and I_gc are calculated based on these parameters and the model equations. This calculation is done for the bias condition of each data point in the measured I-V curves. The I-V curves are then modified for the first time based on the calculated I_gb, I_gd, I_gs, I_gidl, and I_gc values. In one embodiment of the present invention, the I-V curves are first modified by subtracting the calculated I_gb, I_gd, I_gs, I_gidl, and I_gc values from respective I_s, I_d, and I_b data values. For example, for a test device having drawn channel length L_drn and drawn channel width W_drn, if under bias condition where V_s=V_s^T, V_d=V_d^T, V_p=V_p^T, V_e=V_e^T, and V_g=V_g^T, the measured drain current is I_d^T, then after the first modification, the drain current will be I_d^{first-modified}=I_d^T−I_gd^T−I_gidl^T where I_gd^T and I_gidl^T, are calculated respectively, for the same test device under the same bias condition. The first-modified I-V curves are then used for additional DC parameter extraction. This results in higher degree of accuracy in the extracted parameters. In one embodiment the I_gb, I_gd, I_gs, I_gidl and I_gc related parameters are extracted before extracting other DC parameters, so that I-V curve modification may be done for more accurate parameter extraction. However, if such accuracy is not required, one can choose not to do the above modification and the I_gb, I_gd, I_gs, I_gidl, and I_gc related parameters can be extracted at any point in the DC parameter extraction step 820.

The forgoing descriptions of specific embodiments of the present invention are presented for purpose of illustration and description. They are not intended to be exhaustive or to limit the invention to the precise forms disclosed, obviously many modifications and variations are possible in view of the above teachings. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best utilize the invention and various embodiments with various modifications as are suited to the particular use contemplated. Furthermore, the order of the steps in the method are not necessarily intended to occur in the sequence laid out. It is intended that the scope of the invention be defined by the following claims and their equivalents.

APPENDIX A
Parameter List
Parameter		Default
name	Description	value	Binnable?	Note
A.1 BSIM 4.0.0 Model Selectors/Controllers
(LEVEL	SPICE3 model selector	14	NA	BSIM4
SPICE3				also set as
parameter)				the default
				model in
				SPICE3
VERSION	Model version number	4.0.0	NA	Berkeley
				Latest
				official
				release
BINUNIT	Binning unit selector	1	NA	—
PARAMCHK	Switch for parameter value check	1	NA	Parameters
				checked
MOBMOD	Mobility model selector	0	NA	—
RDSMOD	Bias-dependent source/drain	0	NA	Rds(V)
	resistance model selector			modeled
				internally
				through IV
				equation
IGCMOD	Gate-to-channel tunneling current	0	NA	OFF
	model selector
IGBMOD	Gate-to-substrate tunneling current	0	NA	OFF
	model selector
CAPMOD	Capacitance model selector	2	NA	—
RGATEMOD	Gate resistance model selector	0
(Also an		(no gate
instance		resistance)
parameter)
RBODYMOD	Substrate resistance network model	0	NA	—
(Also an	selector	(network
instance		off)
parameter)
TRNQSMOD	Transient NQS model selector	0	NA	OFF
(Also an
instance
parameter)
ACNQSMOD	AC small-signal NQS model	0	NA	OFF
(Also an	selector
instance
parameter)
FNOIMOD	Flicker noise model selector	1	NA	—
TNOIMOD	Thermal noise model selector	0	NA	—
DIOMOD	Source/drain junction diode IV	1	NA	—
	model selector
PERMOD	Whether PS/PD (when given)	1	NA	—
	includes the gate-edge perimeter	(including
		the gate-
		edge
		perimeter)
GEOMOD	Geometry-dependent parasitics	0	NA	—
(Also an	model selector - specifying how the	(isolated)
instance	end S/D diffusions are connected
parameter)
RGEOMOD	Source/drain diffusion resistance	0	NA	—
(Instance	and contact model selector -	(no S/D
parameter	specifying the end S/D contact type:	diffusion
only)	point, wide or merged, and how	resistance)
	S/D parasitics resistance is
	computed
A.2 Process Parameters
EPSROX	Gate dielectric constant relative to	3.9 (SiO2)	No	Typically
	vacuum			greater
				than or
				equal to
				3.9
TOXE	Electrical gate equivalent oxide	3.0e−9m	No	Fataleno
	thickness			r if not
				positive
TOXP	Physical gate equivalent oxide	TOXE	No	Fatalerro
	thickness			r if not
				positive
TOXM	Tox at which parameters are extracted	TOXE	No	Fatal
				error if
				not
				positive
DTOX	Defined as (TOXE-TOXP)	0.0 m	No	—
XJ	S/D junction depth	1.5e−7m	Yes	—
GAMMA1	Body-effect coefficient near the surface	calculated	V1/2	Note-1
(λ1 in	calculated
equation)
GAMMA2	Body-effect coefficient in the bulk	calculated	V1/2	Note-1
(λ1 in
equation)
NDEP	Channel doping concentration at	1.7e17cm−3	Yes	Note-2
	depletion edge for zero body bias
NSUB	Substrate doping concentration	6.0e16cm−3	Yes	—
NGATE	Poly Si gate doping concentration	0.0 cm−3	Yes	—
NSD	Source/drain doping concentrationFatal	1.0e20cm−3	Yes	—
	error if not positive
VBX	Vb s at which the depletion region	calculated	No	Note-3
	width equalsXT	(V)
XT	Doping depth	1.55e−7m	Yes	—
RSH	Source/drain sheet resistance	0.0 ohm/	No	Should
		square		not be
				negative
RSHG	Gate electrode sheet resistance	0.1 ohm/	No	Should
		square		not be
				negative
A.3 Basic Model Parameters
VTH0 or	Long-channel threshold voltage at	0.7 V	Yes	Note-4
VTHO	Vbs = 0	(NMOS)
		−0.7 V
		(PMOS)
VEB	Flat-band voltage	−1.0 V	Yes	Note-4
PHLN	Non-uniform vertical doping effect on	0.0 V	Yes	—
	surface potential
K1	First-order body bias coefficient	0.5 V1/2	Yes	Note-5
K2	Second-order body bias coefficient	0.0	Yes	Note-5
K3	Narrow width coefficient	80.0	Yes	−
K3B	Body effect coefficient of K3	0.0 V−1	Yes	—
W0	Narrow width parameter	2.5e−6m	Yes	—
LPE0	Lateral non-uniform doping parameter	1.74e−7m	Yes	—
	at VbS = 0
LPEB	Lateral non-uniform doping effect on	0.0 m	Yes	—
	K1
VBM	Maximum applied body bias in VTHO	−3.0 V	Yes	—
	calculation
DVT0	First coefficient of short-channel effect	2.2	Yes	—
	on Vth
DVT1	Second coefficient of short-channel	0.53	Yes	—
	effect on Vth
DVT2	Body-bias coefficient of short-channel	−0.032 V −1	Yes	—
	effect on Vth
DVTPO	First coefficient of drain-induced Vth	0.0 m	Yes	Not
	shift due to for long-channel pocket			modeled
	binned devices			if
				binned
				DVTPO
				<=0.0
DVTP1	First coefficient of drain-induced Vth	0.0 V−1	Yes	—
	chist due to for long-channel pocket
	devices
Basic Model Parameters
DVT0W	First coefficient of narrow width effect	0.0	Yes	—
	on Vth for small channel length
DVT1W	Second coefficient of narrow width	5.3e6m−1	Yes	—
	effect on Vth for small channel length
DVT2W	Body-bias coefficient of narrow width	−0.032 V−1	Yes
	effect for small channel length
U0	Low-field mobility	0.067	Yes	—
		m2/(Vs)
		(NMOS);
		0.025
		m2/(Vs)
		PMOS
UA	Coefficient of first-order mobility	1.0e−9 m/V	Yes	—
	degradation due to vertical field for	MOBMOD =
			0 and 1;
		1.0e−15 m/V
		for
	MOBMOD = 2
UB	Coefficient of secon-order mobility	1.0e−19 m2/V2	Yes	—
	degradation due to vertical field
UC	Coefficient of mobility degradation	−0.0465 V−1	Yes	—
		due to body-
		bias effect
		for MOB-
		MOD = 1;
		−0.0465e−9
		m/V2 for
		MOBMOD =
		0 and 2
EU	Exponent for mobility degradation of	1.67		—
	MOBMOD = 2	(NMOS);
		1.0
		(PMOS)
VSAT	Saturation velocity	8.0e4m/s	Yes	—
A0	Coefficient of channel-length	1.0	Yes	—
	dependence of bulk charge effect
AGS	Coefficient of Vgs dependence of bulk	0.0 V−1	Yes	—
	charge effect
B0	Bulk charge effect coefficient for	0.0 m	Yes	—
	channel width
B1	Bulk charge effect width offset	0.0 m	Yes	—
KETA	Body-bias coefficient of bulk charge	—0.047 V−1	Yes	—
	effect
A1	First non-saturation effect parameter	0.0 V−1	Yes
A2	Second non-saturation factor	1.0	Yes	—
WINT	Channel-width offset parameter	0.0 m	No	—
LINT	Channel-length offset parameter	0.0 m	No	—
DWG	Coefficient of gate bias dependence of	0.0 m/V	Yes	—
	Weff
DWB	Coefficient of body bias dependence of	0.0 m/V1/2	Yes	—
	Weff
VOFF	Offset voltage in subtbreshold	−0.08 V	Yes	—
	region for large W and L
VOFFL	Channel-length dependence of VOFF	0.0 mV	No	—
MINV	Vgsteff fitting parameter for moderate	0.0	Yes	—
	inversion condition
NFACTOR	Subthreshold swing factor	1.0	Yes	—
ETA0	DIBL coefficient in subthreshold region	0.08	Yes	—
ETAB	Body-bias coefficient for the	−0.07 V−1	Yes	—
	subthreshold DTBL effect
DSUB	DIBL coefficient exponent in	DROUT	Yes	—
	subthreshold region
CIT	Interface trap capacitance	0.0 F/m2	Yes	—
CDSC	coupling capacitance between	2.4e−4F/m2	Yes	—
	source/drain and channel
CDSCB	Body-bias sensitivity of Cdsc	0.0F/(Vm2)	Yes	—
CDSCD	Drain-bias sensitivity of CDSC	0.0(F/Vm2)	Yes	—
PCLM	Channel length modulation parameter	1.3	Yes	—
PDIBLC1	Parameter for DIBL effect on Rout	0.39	Yes	—
PDIBLC2	Parameter for DIBL effect on Rout	0.0086	Yes	—
PDIBLCB	Body bias coefficient of DIBL effect on	0.0V−1	Yes	—
	Rout
DROUT	Channel-length dependence of DIBL	0.56	Yes	—
	effect on Rout
PSCBE1	First substrate current induced body-	4.24e8Vm	Yes	—
	effect parameter
PSCBE2	Second substrate current induced body-	1.0e−5m/V	Yes	—
	effect parameter
PVAG	Gate-bias dependence of Early voltage	0.0	Yes	—
DELTA	Parameter for DC Vdseff	0.01V	Yes	—
(δ in
equation)
FPROUT	Effect of pocket implant on Rout	0.0 V/m0.5	Yes	Not
	degradation			modeled
				if binned
				FPROUT
			not
				positive
PDITS	Impact of drain-induced Vth shift on	0.0 V−1	Yes	Not modeled
	Rout			if Rout
				binned
				PDITS =
				0;
				Fatal
				error if
				binned
				PDITS
				negative
PDITSL	Channel-length dependence of drain-	0.0 m−	No	Fatal
	induced Vth shift for Rout			error if
				PDITSL
				negative
PDITSD	Vds dependence of drain-induced Vth		Yes	—
	shift for Rout
A.4 Parameters for Asymmetric and Bias-Dependent Rds Model
RDSW	Zero bias LDD resistance per unit width	200.0	Yes	If
	for RDSMOD = 0	ohm		negative,
		(μm)WR		reset to
				0.0
RDSWMIN	LDD resistance per unit width at	0.0	No	—
	high Vgs and zero Vbs	ohm
	for RDSMOD = 0	(μm)WR
RDW	Zero bias lightly-doped drain resistance	100.0	Yes	—
	Rd(V) per unit width for RDS-MOD = 1	ohm
		(μm)WR
RDWMIN	Lightly-doped drain resistance per unit	0.0	No	—
	width at high Vgs and zero Vbs for	ohm
	RDSMOD = 1	(μm)WR
RSW	Zero bias lightly-doped source	100.0	Yes	—
	resistance Rs(V) per unit	ohm
	width for RDS-MOD = 1	(μm)WR
RSWMIN	Lightly-doped source resistance per unit	0.0	No	—
	width at high Vgs and zero Vbs for
	RDSMOD = 1
PRWG	Gate-bias dependence of LDD	1.0 V−1	Yes	—
	resistance
PRWB	Body-bias dependence of LDD	0.0 V−0.5	Yes	—
	resistance
WR	Channel-width dependence parameter of	1.0	Yes	—
	LDD resistance
NRS	Number of source diffusion square	1.0	No	—
(instance
parameter
only)
NRD	Number of drain diffusion squares	1.0	No	—
(instance
parameter
only)
ALPHA0	First parameter of impact ionization	0.0 Am/V	Yes	—
	current
ALPHA1	Isub parameter for length scaling	0.0 A/V	Yes	—
BETA0	The second parameter of impact	30.0 V	Yes	—
	ionization current
A.6 Gate-Induced Drain Leakage Model Parameters
AGIDL	Pre-exponential coefficient for GLDL	0.0 mho	Yes	Igidl = 0.0
				if binned
				AGIDL =
				0.0
BGIDL	Exponential coefficient for GIDL	2.3e9 V/m Yes	Igidl = 0.0
				if binned
				BGIDL =
				0.0
CGIDL	Paramter for body-bias effect on GIDL	0.5 V3	Yes	—
DGIDL	Fitting parameter for band bending for	0.8 V	Yes	—
	GIDL
A.7 Gate Dielectric Tunneling Current Model Parameters
AIGBACC	Parameter for Igb in accumulation	0.43	Yes	—
		(Fs2/g)0.5m−1
BIGBACC	Parameter for Igb in accumulation	0.054	Yes	—
		(Fs2/g)0.5
		m−1V−1
CIGBACC	Parameter for Igb in accumulation	0.075 V−1	Yes	—
NIGBACC	Parameter for Igb in accumulation	1.0	Yes	Fatal error
		if binned
		value not
		positive
AIGBINV	Parameter for Igb in inversion	0.35	Yes	—
		(Fs2/g)0.5m−1
BIGBINV	Parameter for Igb in inversion	0.03	Yes	—
		(Fs2/g)0.5
CIGBINV	Parameter for Igb in inversion	0.006 V−1	Yes	—
EIGBINV	Parameter for Igb in inversion	1.1 V	Yes	—
NIGBINV	Parameter for Igb in inversion	3.0	Yes	Fatal error
				if binned
				value not
				positive
AIGC	Parameter for Igcs and Igcd	0.054	Yes	—
		(NMOS) and
		0.31
		(PMOS)
		(Fs2/g)0.5m−1
BIGC	Parameter for Igcs and Igcd	0.054	Yes	—
		(NMOS) and
		0.024
		(PMOS)
		(Fs2/g)0.5
		m−1V−1
CIGG	Parameter for Igcs and Igcd	0.075	Yes	—
		(NMOS) and
		0.03
		(PMOS) V−1
AIGSD	Parameter for Igs and Igd	0.43	Yes	—
		(NMOS) and
		0.31
		(PMOS)
		(Fs2/g)0.5m−1
BIGSD	Parameter for Igs and Igd	0.054	Yes	—
		(NMOS) and
		0.024
		(PMOS)
		(Fs2/g)0.5
		m−1V−1
CIGSD	Parameter for Igs and Igd	0.075	Yes	—
		(NMOS) and
		0.03
		(PMOS) V−1
DLCIG	Source/drain overlap length for Igs	LINT	Yes	—
	and Igd
NIGC	Parameter for Igcs, Igcd, Igs and Igd	1.0	Yes	Fatal error
				if binned
				value not
				positive
POXEDGE	Factor for the gate oxide thickness in	1.0	Yes	Fatal error
	source/drain overlap regions			if binned
				value not
				positive
PIGCD	Vds dependence of Igcs and Igcd	1.0	Yes	Fatal error
				if binned
				value not
				positive
NTOX	Exponent for the gate oxide ratio	1.0	Yes	—
TOXREF	Nominal gate oxide thickness for gate	3.0e−9m	No	Fatal error
	dielectric tunneling current model			if not positive
	only
A.8 Charge and Capacitance Model Parameters
XPART	Charge partition parameter	0.0	No	—
CGSO	Non LDD region source-gate overlap	calculated	No	Note-6
	capacitance per unit channel width	(F/m)
CGDO	Non LDD region drain-gate overlap	calculated	No	Note-6
	capacitance per unit channel width	(F/m)
CGBO	Gate-bulk overlap capacitance per	0.0	F/m	Note-6
	unit channel length
CGSL	Overlap capacitance between gate and	0.0 F/m	Yes	—
	lightly-doped source region
CGDL	Overlap capacitance between gate and	0.0 F/m	Yes	—
	lightly-doped source region
CKAPPAS	Coefficient of bias-dependent overlap	0.6 V	Yes	—
	capacitance for the source side
CKAPPAD	Coefficient of bias-dependent overlap	CKAPPAS	Yes	—
	capacitance for the drain side
CF	Fringing field capacitance	calculated	Yes	Note-7
		(F/m)
CLC	Constant term for the short channel	1.0e−7m	Yes	—
	model
CLE	Exponential term for the short channel	0.6	Yes	—
	model
DLC	Channel-length offset parameter for	LINT (m)	No	—
	CV model
DWC	Channel-width offset parameter for	WINT (m)	No	—
	CV model
VFBCV	Flat-band voltage parameter (for	—1.0 V	Yes	—
	CAPMOD = 0 only)
NOFF	CV parameter in Vgsteff,CV for weak to	1.0	Yes	—
	strong inversion
VOFFCV	CV parameter in Vgsteff,CV for week to	0.0 V	Yes	—
	strong inversion
ACDE	Exponential coefficient for charge	1.0 m/V	Yes	—
	thickness in CAPMOD = 2 for accumu-
	lation and depletion regions
MOIN	Coefficient for the gate-bias depen-	15.0	Yes	—
	dent surface potential
A.9 High-Speed/RF Model Parameters
XRCRG1	Parameter for distributed channel-	12.0	Yes	Warning
	resistance effect for both intrinsic-			message
	input resistance and charge-deficit			issued if
	NQS models			binned
				XRCRG1
			<=0.0
XRCRG2	Parameter to account for the excess	1.0	Yes	—
	channel diffusion resistance for both
	intrinsic input resistance and charge-
	deficit NQS models
RBPB	Resistance connected between	50.0 ohm	No	If less than
(Also an	bNodePrime and bNode			1.0e−3ohm,
instance				reset to
parameter)				1.0e−3ohm
RBPD	Resistance connected between	50.0 ohm	No	If less than
(Also an	bNodePrime and dbNode			1.0e−3ohm,
instance				reset to
parameter)				1.0e−3ohm
RBPS	Resistance connected between	50.0 ohm	No	If less than
(Also an	bNodePrime and sbNode			1.0e−3ohm,
instance				reset to
parameter)				1.0e−3ohm
RBDB	Resistance connected between	50.0 ohm	No	If less than
(Also an	dbNode and bNode			1.0e−3ohm,
instance			reset to
parameter)				1.0e−3ohm
RBSB	Resistance connected between	50.0 ohm	No	If less than
(Also an	sbNode and bNode			1.0e−3ohm,
instance			reset to
parameter)				1.0e−3ohm
GBMIN	Conductance in parallel with each of	1.0e−12mho	No	Warning
	the five substrate resistances to avoid			message
	potential numerical instability due to			issued if
	unreasonably too large a substrate			less than
	resistance			1.0e−20
				mho
A.10 Flicker and Thermal Noise Model Parameters
NOIA	Flicker noise parameter A	6.25e41	No	—
		(eV)−1s1−EFm−3
		for NMOS;
		6.188e40
		(eV)−1s1−EFm−3
		for PMOS
NOIB	Flicker noise parameter B	3.125e26	No	—
		(eV)−1s1−EFm−1
		for NMOS;
		1.5e25
		(eV)−1s1−EFm−1
		for PMOS
NOIC	Flicker noise parameter C	8.75	No	—
		(eV)−1s1−EFm
EM	Saturation field	4.1e7V/m	No	—
AF	Flicker noise exponent	1.0	No	—
EF	Flicker noise frequency exponent	1.0	No	—
KY	Flicker noise coefficient	0.0	No	—
		A2−EFs1−EFF
NTNOI	Noise factor for short-channel devices	1.0	No	−
	for TNOIMOD = 0 only
TNOIA	Coefficient of channel-length depen-	1.5	No	—
	dence of total channel thermal noise
TNOIB	Channel-length dependence parameter	3.5	No	—
	for channel thermal noise partitioning
A.11 Layout-Dependent Parasitics Model Parameters
DMCG	Distance from S/D contact center to	0.0 m	No	—
	the gate edge
DMCI	Distance from S/D contact center to	DMCG	No	—
	the isolation edge in the channel-
	length direction
DMDG	Same as DMCG but for merged	0.0 m	No	—
	device only
DMCGT	DMCG of test structures	0.0 m	No	—
NF	Number of device fingers	1	No	Fatal error
(instance				if less than
parameter				one
only)
DWJ	Offset of the S/D junction width	DWC (in	No	—
		CVmodel)
MIN	Whether to minimize the number of	0	No	—
(instance	drain or source diffusions for even-	(minimize
parameter	number fingered device	the drain dif-
only)		fusion number)
XGW	Distance from the gate contact to the	0.0 m	No	—
	channel edge
XGL	Offset of the gate length due to varia-	0.0 m	No	—
	tions in patterning
XL	Channel length offset due to mask/	0.0 m	No	—
	etch effect
XW	Channel width offset due to mask/etch	0.0 m	No	—
	effect
NGCON	Number of gate contacts	1	No	Fatal error
				if less than
				one; if not
				equal to I
				or 2, warn-
				ing mes-
				sage issued
				and reset to 1
A.12 Asymmetric Source/Drain Junction Diode Model Parameters
(separate for
source and drain
side as indicated
in the names)
IJTHSREV	Limiting current in reverse bias region	IJTHSREV =	No	If not posi-
IJTHDREV		0.1 A		tive, reset
		IJTHDREV =		to 0.1 A
		IJTHSREV
IJTHSFWD	Limiting current in forward bias	IJTHSFWD =	No	If not posi-
IJTHDFWD	region	0.1 A		tive, reset
		IJTHDFWD =
		IJTHSFWD
XJBVS	Fitting parameter for diode break-	XJBVS = 1.0	No	Note-8
XJBVD	down	XJBVD =
		XJBVS
BVS	Breakdown voltage	BVS = 10.0 V	No	If not posi
BVD		BVD = BVS		tive, reset
				to 10.0 V
JSS	Bottom junction reverse saturation	JSS =	No	—
JSD	current density	1.0e−4 A/m2
		JSD = JSS
JSWS	Isolation-edge sidewall reverse satura-	JSWS =	No	—
JSWD	tion current density	0.0 A/m
		JSWD =
		JSWS
JSWGS	Gate-edge sidewall reverse saturation	JSWGS =	No	—
JSWGD	current density	0.0 A/m
		JSWGD =
		JSWGS
CJS	Bottom junction capacitance per unit	CJS = 5.0e−4	No	—
CJD	area at zero bias	F/m2
		CJD = CJS
MJS	Bottom junction capacitance grating	MJS = 0.5	No	—
MID	coefficient	MJD = MJS
MJSWS	Isolation-edge sidewall junction	MJSWS =	No	—
MJSWD	capacitance grading coefficient	0.33
		MJSWD =
		MJSWS
CJSWS	Isolation-edge sidewall junction	CJSWS =	No	—
CJSWD	capacitance per unit area	5.0e−10
		F/m
		CJSWD =
		CJSWS
CJSWGS	Gate-edge sidewall junction capaci-	CJSWGS =	No	—
CJSWGD	tance per unit length	CJSWS
		CJSWGD =
		CJSWS
MISWGS	Gate-edge sidewall junction capaci-	MJSWGS =	No	—
MJSWGD	tance grading coefficient	MJSWS
		MJSWGD =
		MJSWS
PB	Bottom junction bnilt-in potential	PBS = 1.0 V	No	—
		PBD = PBS
PBSWS	Isolation-edge sidewall junction built-	PBSWS =	No	—
PBSWD	in potential	1.0 V
		PBSWD =
		PBSWS
PBSWGS	Gate-edge sidewall junction built-in	PBSWGS =	No	—
PBSWGD	potential	PBSWS
		PBSWGD =
		PBSWS
A.13 Temperature Dependence Parameters
TNOM	Temperature at which parameters are	27° C.	No	—
	extracted
UTE	Mobility temperature exponent	−1.5	Yes	—
KT1	Temperature coefficient for threshold	−0.11 V	Yes	—
	voltage
KT1L	Channel length dependence of the	0.0 Vm	Yes	—
	temperature coefficient for threshold
	voltage
KT2	Body-bias coefficient of Vth tempera-	0.022	Yes	—
	ture effect
UA1	Temperature coefficient for UA	1.0e−9m/V	Yes	—
UBI	Temperature coefficient for UB	−1.Oe−18	Yes	—
		(m/V)2
UC1	Temperature coefficient for UC	0.067 V−1 for	Yes	—
		MOBMOD = 1;
		0.025 m/V2
		for MOBMOD =
		0 and 2
AT	Temperature coefficient for satura-	3.3e4m/s	Yes	—
	tion velocity
PRT	Temperature coefficient for Rdsw	0.0 ohm-m	Yes	—
NIS, NJD	Emission coefficients of junction for	NJS = 1.0;	No	—
	source and drain junctions, respec-	NJD = NJS
	tively
XTIS, XTID	Junction current temperature expo-	XTIS = 3.0;	No	—
	nents for source and drain junctions,	XTID = XTIS
	respectively
TPB	Temperature coefficient of PB	0.0 V/K	No	—
TPBSW	Temperature coefficient of PBSW	0.0 V/K	No	—
TPBSWG	Temperature coefficient of PBSWG	0.0 V/K	No	—
TCJ	Temperature coefficient of CJ	0.0 K−1	No	—
TCJSW	Temperature coefficient of CJSW	0.0 K−1	No	—
TCJSWG	Temperature coefficient of CJSWG	0.0 K−1	No	—
A.14 dW and dL Parameters
WL	Coefficient of length dependence for	0.0 mWLN	No	—
	width offset
WLN	Power of length dependence of width	1.0	No	—
	offset
WW	Coefficient of width dependence for	0.0 mWWN	No	—
	width offset
WWN	Power of width dependence of width	1.0	No	—
	offset
WWL	Coefficient of length and width cross	0.0	No	—
	term dependence for width offset	mWWN+WLN
LL	Coefficient of length dependence for	0.0 mLLN	No	—
	length offset
LLN	Power of length dependence for	1.0	No	—
	length offset
LW	Coefficient of width dependence for	0.0 mLWN	No	—
	length offset
LWN	Power of width dependence for length	1.0	No	—
	offset
LWL	Coefficient of length and width cross	0.0	No	—
	term dependence for length offset	mLWN+LLN
LLC	Coefficient of length dependence for	LL	No	—
	CV channel length offset
LWC	Coefficient of width dependence for	LW	No	—
	CV channel length offset
LWLC	Coefficient of length and width cross-	LWL	No	—
	term dependence for CV channel
	length offset
WLC	Coefficient of length dependence for	WL	No	—
	CV channel width offset
WWC	Coefficient of width dependence for	WW	No	—
	CV channel width offset
WWLC	Coefficient of length and width cross-	WWL	No	—
	term dependence for CV channel
	width offset
NOTES:
Note-1:
If γ1 is not given, it is calculated by
${\gamma }_1=\frac{\sqrt{2q{\varepsilon }_{\mathrm{si}}\mathrm{NDEP}}}{C_{\mathrm{oxe}}}$
If γ2 is not given, it is calculated by
${\gamma }_2=\frac{\sqrt{2q{\varepsilon }_{\mathrm{si}}\mathrm{NSUB}}}{C_{\mathrm{oxe}}}$
Note-2:
If NDEP is not given and γ1 is given, NDEP is calculated from
$\mathrm{NDEP}=\frac{{\gamma }_1^2{C}_{\mathrm{oxe}}^2}{2q{\varepsilon }_{\mathrm{si}}}$
If both γ1 and NDEP are not given, NDEP defaults to 1.7e17 cm−3
and γ1 is calculated from NDEP.
Note-3:
If VBX is not given, it is calculated by
$\frac{\mathrm{qNDEP}·{\mathrm{XT}}^2}{2{\varepsilon }_{\mathrm{si}}}={\Phi }_s-\mathrm{VBX}$
Note-4:
If VTH0 is not given, it is calculated by
$\mathrm{VTH0}=\mathrm{VFB}+{\Phi }_s+\mathrm{K1}\sqrt{{\Phi }_s-V_{\mathrm{bs}}}$
where VFB = −1.0. If VTH0 is given, VFB defaults to
$\mathrm{VFB}=\mathrm{VTH0}-{\Phi }_s-\mathrm{K1}\sqrt{{\Phi }_s-V_{\mathrm{bs}}}$
Note-5:
If K1 and K2 are not given, they are calculated by
$\begin{array}{c}\mathrm{K1}={\gamma }_2-2\mathrm{K2}\sqrt{{\Phi }_s-\mathrm{VBM}}\\ \mathrm{K2}=\frac{\left({\gamma }_1-{\gamma }_2\right)\left(\sqrt{{\Phi }_s-\mathrm{VBX}}-\sqrt{{\Phi }_s}\right)}{2\sqrt{{\Phi }_s}\left(\sqrt{{\Phi }_s-\mathrm{VBM}}-\sqrt{{\Phi }_s}\right)+\mathrm{VBM}}\end{array}\hspace{1em}$
Note-6:
If CGSO is not given, it is calculated by
If(DLC is given and > 0.0)
CGSO = DLC · Coxe − CGSL
if (CGSO < 0.0), CGSO = 0.0
Else
CGSO = 0.6 · XJ · Coxe
If CGDO is not given, it is calculated by
If(DLC is given and > 0.0)
CGDO = DLC · Coxe − CGDL
if(CGDO < 0.0), CGDO = 0.0
Else
CGDO = 0.6 · XJ · Coxe
If CGBO is not given, it is calculated by
CGBO = 2 · DWC · Coxe
Note-7:
If CF is not given, it is calculated by
$\mathrm{CF}=\frac{2·\mathrm{EPSROX}·{\varepsilon }_0}{\pi }·\log \left(1+\frac{4.0e-7}{\mathrm{TOXE}}\right)$
Note-8:
For dioMod = 0, if XJBVS < 0.0, it is reset to 1.0.
For dioMod = 2, if XJBVS <= 0.0, it is reset to 1.0.
For dioMod = 0, if XJBVD < 0.0, it is reset to 1.0.
For dioMod = 2, if XJBVD <= 0.0, it is reset to 1.0.

Poly Silicon Gate Depletion $\begin{array}{cc}{V}_{\mathrm{poly}}=0.5X_{\mathrm{poly}}{E}_{\mathrm{poly}}=\frac{\mathrm{qNGATE}·X_{\mathrm{poly}}^2}{2{\varepsilon }_{\mathrm{si}}}& \left(1.2\mathrm{.1}\right)\\ \mathrm{EPSROX}·E_{\mathrm{ox}}={\varepsilon }_{\mathrm{si}}{E}_{\mathrm{poly}}=\sqrt{2q{\varepsilon }_{\mathrm{si}}\mathrm{NGATE}·V_{\mathrm{poly}}}& \left(1.2\mathrm{.2}\right)\\ V_{\mathrm{gs}}-V_{\mathrm{FB}}-{\Phi }_s=V_{\mathrm{poly}}+V_{\mathrm{ox}}& \left(1.2\mathrm{.3}\right)\\ {a\left(V_{\mathrm{gs}}-V_{\mathrm{FB}}-{\Phi }_s-V_{\mathrm{poly}}\right)}^2-V_{\mathrm{poly}}=0& \left(1.2\mathrm{.4}\right)\end{array}$ V_gs−V_FB−Φ_s=V_polyV_ox  (1.2.3) a(V_gs−V_FB−Φ_s−V_poly)²V_poly=0  (1.2.4) where $\begin{array}{cc}a=\frac{{\mathrm{EPSROX}}^2}{2q{\varepsilon }_{\mathrm{si}}\mathrm{NGATE}·{\mathrm{TOXE}}^2}& \left(1.2\mathrm{.5}\right)\\ V_{\mathrm{gse}}=\mathrm{VFB}+{\Phi }_s+\frac{q{\varepsilon }_{\mathrm{si}}\mathrm{NGATE}·{\mathrm{TOXE}}^2}{{\mathrm{EPSROX}}^2}& \left(1.2\mathrm{.6}\right)\\ \left(\sqrt{1+\frac{2{\mathrm{EPSROX}}^2\left(V_{\mathrm{gs}}-\mathrm{VFB}-{\Phi }_s\right)}{q{\varepsilon }_{\mathrm{si}}\mathrm{NGATE}·{\mathrm{TOXE}}^2}}-1\right)& \end{array}$ Effective Channel Length and Width $\begin{array}{cc}{L}_{\mathrm{eff}}=L_{\mathrm{drawn}}+\mathrm{XL}-2dL& \left(1.3\mathrm{.1}\right)\\ W_{\mathrm{eff}}=\frac{W_{\mathrm{drawn}}}{\mathrm{NF}}+\mathrm{XW}-2\mathrm{dW}& \left(1.3\mathrm{.2}a\right)\\ W_{\mathrm{eff}}^{\prime }=\frac{W_{\mathrm{drawn}}}{\mathrm{NF}}+\mathrm{XW}-2{\mathrm{dW}}^{\prime }& \left(1.3\mathrm{.2}b\right)\\ \mathrm{dW}={\mathrm{dW}}^{\prime }+\mathrm{DWG}·V_{\mathrm{gsteff}}+\mathrm{DWB}\left(\sqrt{{\Phi }_s-V_{\mathrm{bseff}}}-\sqrt{{\Phi }_s}\right)& \left(1.3\mathrm{.3}\right)\\ {\mathrm{dW}}^{\prime }=\mathrm{WINT}+\frac{\mathrm{WL}}{L^{\mathrm{WLN}}}+\frac{\mathrm{WW}}{W^{\mathrm{WWN}}}+\frac{\mathrm{WWL}}{L^{\mathrm{WLN}}{W}^{\mathrm{WWN}}}& \\ \mathrm{dL}=\mathrm{LINT}+\frac{\mathrm{LL}}{L^{\mathrm{LLN}}}+\frac{\mathrm{LW}}{W^{\mathrm{LWN}}}+\frac{\mathrm{LWL}}{L^{\mathrm{LLN}}{W}^{\mathrm{LWN}}}& \left(1.3\mathrm{.4}\right)\\ L_{\mathrm{active}}=L_{\mathrm{drawn}}+\mathrm{XL}-2\mathrm{dL}& \left(1.3\mathrm{.5}\right)\\ W_{\mathrm{active}}=\frac{W_{\mathrm{drawn}}}{\mathrm{NF}}+\mathrm{XW}-2\mathrm{dW}& \left(1.3\mathrm{.6}\right)\\ \mathrm{dL}=\mathrm{DLC}+\frac{\mathrm{LLC}}{L^{\mathrm{LLN}}}+\frac{\mathrm{LWC}}{W^{\mathrm{LWN}}}+\frac{\mathrm{LWLC}}{L^{\mathrm{LLN}}{W}^{\mathrm{LWN}}}& \left(1.3\mathrm{.7}\right)\\ \mathrm{dW}=\mathrm{DWC}+\frac{\mathrm{WLC}}{L^{\mathrm{WLN}}}+\frac{\mathrm{WWC}}{W^{\mathrm{WWN}}}+\frac{\mathrm{WWLC}}{L^{\mathrm{WLN}}{W}^{\mathrm{WWN}}}& \left(1.3\mathrm{.8}\right)\\ W_{\mathrm{effcj}}=\frac{W_{\mathrm{drawn}}}{\mathrm{NF}}-& \left(1.3\mathrm{.9}\right)\\ 2·\left(\mathrm{DWJ}+\frac{\mathrm{WLC}}{L^{\mathrm{WLN}}}+\frac{\mathrm{WWC}}{W^{\mathrm{WWN}}}+\frac{\mathrm{WWLC}}{L^{\mathrm{WLN}}{W}^{\mathrm{WWN}}}\right)& \end{array}$ Long Channel Model with Uniform Doping $\begin{array}{cc}{V}_{\mathrm{th}}=\mathrm{VFB}+{\Phi }_s+\gamma \sqrt{{\Phi }_s-V_{\mathrm{bs}}}& \left(2.1\mathrm{.1}\right)\\ =\mathrm{VTH0}+\gamma \left(\sqrt{{\Phi }_s-V_{\mathrm{bs}}}-\sqrt{{\Phi }_s}\right)& \\ \gamma =\frac{\sqrt{2q{\varepsilon }_{\mathrm{si}}{N}_{\mathrm{substrate}}}}{C_{\mathrm{oxe}}}& \left(2.1\mathrm{.2}\right)\end{array}$ Long Channel Model with Non-Uniform Doping $\begin{array}{cc}\begin{array}{c}{V}_{\mathrm{th}}=V_{\mathrm{th},\mathrm{NDEP}}+\frac{{\mathrm{qD}}_0}{C_{\mathrm{oxe}}}+\\ {\mathrm{K1}}_{\mathrm{NDEP}}\left(\sqrt{{\phi }_s-V_{\mathrm{bs}}-\frac{{\mathrm{qD}}_1}{{\varepsilon }_{\mathrm{si}}}}-\sqrt{{\phi }_s-V_{\mathrm{bs}}}\right)\end{array}& \left(2.2\mathrm{.1}\right)\end{array}$

• • where K1_NDEP is the body-bias coefficient for N_substrate=NDEP, V_th,NDEP=VTH0+K1_NDEP({square root}{square root over (φ_s−V_bs)}−{square root}{square root over (φ_s)})  (2.2.2) with a definition of $\begin{array}{cc}{\psi }_s=0.4+\frac{k_{B}T}{q}\ln \left(\frac{\mathrm{NDEP}}{n_i}\right)& \left(2.2\mathrm{.3}\right)\\ D_0=D_{00}+D_{01}={\int }_0^{X_{\mathrm{dep}}0}\left(N\left(x\right)-\mathrm{NDEP}\right)dx+{\int }_{X_{\mathrm{dep}}0}^{X_{\mathrm{dep}}}\left(N\left(x\right)-\mathrm{NDEP}\right)dx& \left(2.2\mathrm{.4}\right)\\ D_1=D_{10}+D_{11}={\int }_0^{X_{\mathrm{dep}}0}\left(N\left(x\right)-\mathrm{NDEP}\right)xdx+{\int }_{x_{\mathrm{dep}}0}^{X_{\mathrm{dep}}}\left(N\left(x\right)-\mathrm{NDEP}\right)xdx& \left(2.2\mathrm{.5}\right)\\ V_{\mathrm{th}}=\mathrm{VTH}0+K1\left(\sqrt{{\Phi }_s-V_{\mathrm{bs}}}-\sqrt{{\Phi }_s}\right)-K2·V_{\mathrm{bs}}& \left(2.2\mathrm{.6}\right)\end{array}$ V_th=VTH0+K1({square root}{square root over (Φ_s−V_bs)}−{square root}{square root over (Φ_s)})−K2·V_bs  (2.2.6) where K2=qC₀₁/C_oxe, and the surface potential is defined as $\begin{array}{cc}{\Phi }_s=0.4+\frac{k_{B}T}{q}\ln \left(\frac{\mathrm{NDEP}}{n_i}\right)+\mathrm{PHIN}& \left(2.2\mathrm{.7}\right)\end{array}$ where PHIN=−qD₁₀/ε_si K1=γ₂−2K2{square root}{square root over (Φ_s−VBM)}  (2.2.8) $\begin{array}{cc}\mathrm{PHIN}=-{\mathrm{qD}}_{10}/{\varepsilon }_{\mathrm{si}}& \\ \mathrm{K1}={\gamma }_2-2\mathrm{K2}\sqrt{{\Phi }_s-\mathrm{VBM}}& \left(2.2\mathrm{.8}\right)\\ \mathrm{K2}=\frac{\left({\gamma }_1-{\gamma }_2\right)\left(\sqrt{{\Phi }_s-\mathrm{VBX}}-\sqrt{{\Phi }_s}\right)}{2\sqrt{{\Phi }_s}\left(\sqrt{{\Phi }_s-\mathrm{VBM}}-\sqrt{{\Phi }_s}\right)+\mathrm{VBM}}& \left(2.2\mathrm{.9}\right)\\ {\gamma }_1=\frac{\sqrt{2q{\varepsilon }_{\mathrm{si}}\mathrm{NDEP}}}{C_{\mathrm{oxe}}}& \left(2.2\mathrm{.10}\right)\\ {\gamma }_2=\frac{\sqrt{2q{\varepsilon }_{\mathrm{si}}\mathrm{NSUB}}}{C_{\mathrm{oxe}}}& \left(2.2\mathrm{.11}\right)\\ \frac{\mathrm{qNDEP}·{\mathrm{XT}}^2}{2{\varepsilon }_{\mathrm{si}}}={\Phi }_s-\mathrm{VBX}& \left(2.2\mathrm{.12}\right)\end{array}$ Non-Uniform Lateral Doping $\begin{array}{cc}\begin{array}{c}{V}_{\mathrm{th}}=\mathrm{VTH0}+\mathrm{K1}\left(\sqrt{{\Phi }_s-V_{\mathrm{bs}}}-\sqrt{{\Phi }_s}\right)·\sqrt{1+\frac{\mathrm{LPEB}}{L_{\mathrm{eff}}}}-\\ \mathrm{K2}·V_{\mathrm{bs}}+\mathrm{K1}\left(\sqrt{1+\frac{\mathrm{LPE0}}{L_{\mathrm{eff}}}}-1\right)\sqrt{{\Phi }_s}\end{array}& \left(2.3\mathrm{.1}\right)\\ \Delta V_{\mathrm{th}}\left(\mathrm{DITS}\right)=-{\mathrm{nv}}_t·\ln \left(\frac{\left(1-e^{-V_{\mathrm{ds}}/v_t}\right)·L_{\mathrm{eff}}}{L_{\mathrm{eff}}+\mathrm{DVTP0}·\left(1+e^{-\mathrm{DVTP1}·V_{\mathrm{ds}}}\right)}\right)& \left(2.3\mathrm{.2}\right)\\ \Delta V_{\mathrm{th}}\left(\mathrm{DITS}\right)=-{\mathrm{nv}}_t·\ln \left(\frac{L_{\mathrm{eff}}}{L_{\mathrm{eff}}+\mathrm{DVTP0}·\left(1+e^{-\mathrm{DVTP1}·V_{\mathrm{ds}}}\right)}\right)& \left(2.3\mathrm{.3}\right)\end{array}$ Short-Channel and DIBL Effect ΔV_th(SCE,DIBL)=−θ_th(L_eff)·[2(V_bi−Φ_s)+V_ds]  (2.4.1) $\begin{array}{cc}\Delta V_{\mathrm{th}}\left(\mathrm{SCE},\mathrm{DIBL}\right)=-{\theta }_{\mathrm{th}}\left(L_{\mathrm{eff}}\right)·\left[2\left(V_{\mathrm{bi}}-{\Phi }_s\right)+V_{\mathrm{ds}}\right]& \left(2.4\mathrm{.1}\right)\\ V_{\mathrm{bi}}=\frac{k_{B}T}{q}\ln \left(\frac{\mathrm{NDEP}·\mathrm{NSD}}{n_i^2}\right)& \left(2.4\mathrm{.2}\right)\\ {\theta }_{\mathrm{th}}\left(L_{\mathrm{eff}}\right)=\frac{0.5}{\cosh \left(\frac{L_{\mathrm{eff}}}{l_t}\right)-1}& \left(2.4\mathrm{.3}\right)\\ l_t=\sqrt{\frac{{\varepsilon }_{\mathrm{si}}·\mathrm{TOXE}·X_{\mathrm{dep}}}{\mathrm{EPSROX}·\eta }}& \left(2.4\mathrm{.4}\right)\\ X_{\mathrm{dep}}=\sqrt{\frac{2{\varepsilon }_{\mathrm{si}}\left({\Phi }_s-V_{\mathrm{bs}}\right)}{\mathrm{qNDEP}}}& \left(2.4\mathrm{.5}\right)\\ {\theta }_{\mathrm{th}}\left(L_{\mathrm{eff}}\right)=\exp \left(-\frac{L_{\mathrm{eff}}}{2l_t}\right)+2\exp \left(-\frac{L_{\mathrm{eff}}}{l_t}\right)& \left(2.4\mathrm{.6}\right)\\ {\theta }_{\mathrm{th}}\left(\mathrm{SCE}\right)=\frac{0.5·\mathrm{DVT0}}{\cosh \left(\mathrm{DVT1}·\frac{L_{\mathrm{eff}}}{l_t}\right)-1}& \left(2.4\mathrm{.7}\right)\\ \Delta V_{\mathrm{th}}\left(\mathrm{SCE}\right)=-{\theta }_{\mathrm{th}}\left(\mathrm{SCE}\right)·\left(V_{\mathrm{bi}}-{\Phi }_s\right)& \left(2.4\mathrm{.8}\right)\\ l_t=\sqrt{\frac{{\varepsilon }_{\mathrm{si}}·\mathrm{TOXE}·X_{\mathrm{dep}}}{\mathrm{EPSROX}}}·\left(1+\mathrm{DVT2}·V_{\mathrm{bs}}\right)& \left(2.4\mathrm{.9}\right)\\ {\theta }_{\mathrm{th}}\left(\mathrm{DIBL}\right)=\frac{0.5}{\cosh \left(\mathrm{DSUB}·\frac{L_{\mathrm{eff}}}{l_{\mathrm{t0}}}\right)-1}& \left(2.4\mathrm{.10}\right)\\ {\mathrm{\Delta V}}_{\mathrm{th}}\left(\mathrm{DIBL}\right)=-{\theta }_{\mathrm{th}}\left(\mathrm{DIBL}\right)·\left(\mathrm{ETA0}+\mathrm{ETAB}·V_{\mathrm{bs}}\right)·V_{\mathrm{ds}}& \left(2.4\mathrm{.11}\right)\\ l_{\mathrm{t0}}=\sqrt{\frac{{\varepsilon }_{\mathrm{si}}·\mathrm{TOXE}·X_{\mathrm{dep0}}}{\mathrm{EPSROX}}}& \left(2.4\mathrm{.12}\right)\\ X_{\mathrm{dep0}}=\sqrt{\frac{2{\varepsilon }_{\mathrm{si}}{\Phi }_s}{\mathrm{qNDEP}}}& \left(2.4\mathrm{.13}\right)\end{array}$ Narrow Width Effect $\begin{array}{cc}\frac{\pi \mathrm{qNDEP}·X_{\mathrm{dep},\max }^2}{2C_{\mathrm{axe}}{W}_{\mathrm{eff}}}=3\pi \frac{\mathrm{TOXE}}{W_{\mathrm{eff}}}{\Phi }_s& \left(2.5\mathrm{.1}\right)\\ \Delta V_{\mathrm{th}}\left(\mathrm{Narrow\_width1}\right)=\left(\mathrm{K3}+\mathrm{K3B}·V_{\mathrm{bs}}\right)\frac{\mathrm{TOXE}}{W_{\mathrm{eff}}^{\prime }+\mathrm{W0}}{\Phi }_s& \left(2.5\mathrm{.2}\right)\\ \Delta V_{\mathrm{th}}\left(\mathrm{Narrow\_width2}\right)=-\frac{0.5·\mathrm{DVT0W}}{\cosh \left(\mathrm{DVT1W}·\frac{L_{\mathrm{eff}}{W}_{\mathrm{eff}}^{\prime }}{l_{\mathrm{tw}}}\right)-1}·\left(V_{\mathrm{bi}}-{\Phi }_s\right)& \left(2.5\mathrm{.3}\right)\\ l_{\mathrm{tw}}=\sqrt{\frac{{\varepsilon }_{\mathrm{si}}·\mathrm{TOXE}·X_{\mathrm{dep}}}{\mathrm{EPSROX}}}·\left(1+\mathrm{DVT2W}·V_{\mathrm{bs}}\right)& \left(2.5\mathrm{.4}\right)\\ \begin{array}{c}{V}_{\mathrm{th}}=\mathrm{VTH0}+\\ \left(K_{1\mathrm{ox}}·\sqrt{{\Phi }_s-V_{\mathrm{bseff}}}-\mathrm{K1}·\sqrt{{\Phi }_s}\right)\sqrt{1+\frac{\mathrm{LPEB}}{L_{\mathrm{eff}}}}-\\ K_{2\mathrm{ox}}{V}_{\mathrm{bseff}}+K_{1\mathrm{ox}}\left(\sqrt{1+\frac{\mathrm{LPE0}}{L_{\mathrm{eff}}}}-1\right)\sqrt{{\Phi }_s}+\\ \left(\mathrm{K3}+\mathrm{K3B}·V_{\mathrm{bseff}}\right)\frac{\mathrm{TOXE}}{W_{\mathrm{eff}}^{\prime }+\mathrm{W0}}{\Phi }_s-0.5·\\ [\frac{\mathrm{DVT0W}}{\cosh \left(\mathrm{DVT1W}\frac{L_{\mathrm{eff}}{W}_{\mathrm{eff}}^{\prime }}{l_{\mathrm{tw}}}\right)-1}+\\ \frac{\mathrm{DVT0}}{\cosh \left(\mathrm{DVT1}\frac{L_{\mathrm{eff}}}{l_t}\right)-1}]\left(V_{\mathrm{bi}}-{\Phi }_s\right)-\\ \frac{0.5}{\cosh \left(\mathrm{DSUB}\frac{L_{\mathrm{eff}}}{l_{\mathrm{t0}}}\right)-1}\left(\mathrm{ETA0}+\mathrm{ETAB}·V_{\mathrm{bseff}}\right)·V_{\mathrm{ds}}\end{array}& \left(2.5\mathrm{.5}\right)\\ K_{1\mathrm{ox}}=\mathrm{K1}·\frac{\mathrm{TOXE}}{\mathrm{TOXM}}& \left(2.5\mathrm{.6}\right)\\ \mathrm{and}& \\ K_{2\mathrm{ox}}=\mathrm{K2}·\frac{\mathrm{TOXE}}{\mathrm{TOXM}}& \left(2.5\mathrm{.7}\right)\\ V_{\mathrm{bseff}}=V_{\mathrm{bc}}+0.5·\left[\left(V_{\mathrm{bs}}-V_{\mathrm{bc}}-{\delta }_1\right)+\sqrt{{\left(V_{\mathrm{bs}}-V_{\mathrm{bc}}-{\delta }_1\right)}^2-4{\delta }_1·V_{\mathrm{bc}}}\right]& \left(2.5\mathrm{.8}\right)\\ V_{\mathrm{bc}}=0.9\left({\Phi }_s-\frac{{\mathrm{K1}}^2}{4{\mathrm{K2}}^2}\right)& \left(2.5\mathrm{.9}\right)\end{array}$ Channel Charge Model $\begin{array}{cc}{Q}_{\mathrm{chsubs0}}=\sqrt{\frac{{\mathrm{qNDEP\varepsilon }}_{\mathrm{si}}}{2{\Phi }_s}}{v}_t·\exp \left(\frac{V_{\mathrm{gse}}-V_{\mathrm{th}}-{\mathrm{Voff}}^{\prime }}{{\mathrm{nv}}_t}\right)& \left(3.1\mathrm{.1}\right)\end{array}$ where $\begin{array}{cc}{\mathrm{Voff}}^{\prime }=\mathrm{VOFF}+\frac{\mathrm{VOFFL}}{L_{\mathrm{eff}}}& \left(3.1\mathrm{.1}a\right)\\ Q_{\mathrm{chs0}}=C_{\mathrm{oxe}}·\left(V_{\mathrm{gse}}-V_{\mathrm{th}}\right)& \left(3.1\mathrm{.2}\right)\\ Q_{\mathrm{ch0}}=C_{\mathrm{oxeff}}·V_{\mathrm{gsteff}}& \left(3.1\mathrm{.3}\right)\\ C_{\mathrm{oxeff}}=\frac{C_{\mathrm{oxe}}·C_{\mathrm{cen}}}{C_{\mathrm{axe}}+C_{\mathrm{cen}}}\mathrm{with}{C}_{\mathrm{cen}}=\frac{{\varepsilon }_{\mathrm{xi}}}{X_{\mathrm{DC}}}& \left(3.1\mathrm{.4}\right)\\ X_{\mathrm{DC}}=\frac{1.9\times {10}^{-9}\mathrm{cm}}{1+{\left(\frac{V_{\mathrm{gsteff}}+4\left(\mathrm{VTH0}-\mathrm{VFB}-{\Phi }_s\right)}{2\mathrm{TOXP}}\right)}^{0.7}}& \left(3.1\mathrm{.5}\right)\\ V_{\mathrm{gsteff}}=\frac{{\mathrm{nv}}_t\ln \left\{1+\exp \left[\frac{m^{*}\left(V_{\mathrm{gse}}-V_{\mathrm{th}}\right)}{{\mathrm{nv}}_t}\right]\right\}}{m^{*}+{\mathrm{nC}}_{\mathrm{oxe}}·\sqrt{\frac{2{\Phi }_s}{\mathrm{qNDEP}{\varepsilon }_{\mathrm{si}}}}\exp \left[-\frac{\left(1-m^{*}\right)\left(V_{\mathrm{gse}}-V_{\mathrm{th}}\right)-{\mathrm{Voff}}^{\prime }}{{\mathrm{nv}}_t}\right]}& \left(3.1\mathrm{.6}a\right)\end{array}$ where $\begin{array}{cc}m\text{*}=0.5+\frac{\arctan \left(\mathrm{MINV}\right)}{\pi }& \left(3.1\mathrm{.6}b\right)\\ Q_{\mathrm{chs}}\left(y\right)=C_{\mathrm{axeff}}·\left(V_{\mathrm{gse}}-V_{\mathrm{th}}-A_{\mathrm{bulk}}{V}_F\left(y\right)\right)& \left(3.1\mathrm{.7}\right)\\ Q_{\mathrm{chs}}\left(y\right)=Q_{\mathrm{chr0}}+{\mathrm{\Delta Q}}_{\mathrm{chs}}\left(y\right)& \left(3.1\mathrm{.8}\right)\\ Q_{\mathrm{chsubs}}\left(y\right)=Q_{\mathrm{chsubs0}}·\exp \left(-\frac{A_{\mathrm{bulk}}{V}_F\left(y\right)}{{\mathrm{nv}}_i}\right)& \left(3.1\mathrm{.9}\right)\\ Q_{\mathrm{chsubs}}\left(y\right)=Q_{\mathrm{chsubs0}}\left(1-\frac{A_{\mathrm{bulk}}{V}_F\left(y\right)}{{\mathrm{nv}}_i}\right)& \left(3.1\mathrm{.10}\right)\\ Q_{\mathrm{chsubs}}\left(y\right)=Q_{\mathrm{chsubs0}}+{\mathrm{\Delta Q}}_{\mathrm{chsubs}}\left(y\right)& \left(3.1\mathrm{.11}\right)\\ {\mathrm{\Delta Q}}_{\mathrm{chsubs}}\left(y\right)=-Q_{\mathrm{chsubs0}}·\frac{A_{\mathrm{bulk}}{V}_F\left(y\right)}{{\mathrm{nv}}_i}& \left(3.1\mathrm{.12}\right)\\ {\mathrm{\Delta Q}}_{\mathrm{ch}}\left(y\right)=\frac{{\mathrm{\Delta Q}}_{\mathrm{chs}}\left(y\right)·{\mathrm{\Delta Q}}_{\mathrm{chsubs}}\left(y\right)}{{\mathrm{\Delta Q}}_{\mathrm{chs}}\left(y\right)+{\mathrm{\Delta Q}}_{\mathrm{chsubs}}\left(y\right)}& \left(3.1\mathrm{.13}\right)\\ {\mathrm{\Delta Q}}_{\mathrm{ch}}\left(y\right)=-\frac{V_F\left(y\right)}{V_b}{Q}_{\mathrm{ch0}}& \left(3.1\mathrm{.14}\right)\\ V_b=\frac{V_{\mathrm{gtseff}}2\nu t}{A_{\mathrm{bulk}}}& \left(3.1\mathrm{.15}\right)\\ Q_{\mathrm{ch}}\left(y\right)=C_{\mathrm{axeff}}·V_{\mathrm{gsteff}}·\left(1-\frac{V_F\left(y\right)}{V_b}\right)& \left(3.1\mathrm{.16}\right)\end{array}$ Subthreshold Swing $\begin{array}{cc}{I}_{\mathrm{ds}}=I_0\left[1-\exp \left(-\frac{V_{\mathrm{ds}}}{v_t}\right)\right]·\exp \left(\frac{V_{\mathrm{gs}}-V_{\mathrm{th}}-V_{\mathrm{off}}^{\prime }}{{\mathrm{nv}}_t}\right)& \left(3.2\mathrm{.1}\right)\end{array}$ where $\begin{array}{cc}{I}_0=\mu \frac{W}{L}\sqrt{\frac{q{\varepsilon }_{\mathrm{si}}\mathrm{NDEP}}{2{\Phi }_s}{v}_t^2}& \left(3.2\mathrm{.2}\right)\\ n=1+\mathrm{NFACTOR}·\frac{C_{\mathrm{dep}}}{C_{\mathrm{oxe}}}+\frac{\mathrm{Cdsc\_Term}+\mathrm{CIT}}{C_{\mathrm{oxe}}}\mathrm{Cdsc\_Term}=\left(\mathrm{CDSC}+\mathrm{CDSCD}·V_{\mathrm{ds}}+\mathrm{CDSCB}·V_{\mathrm{bseff}}\right)·\frac{0.5}{\cosh \left(\mathrm{DVT1}\frac{L_{\mathrm{eff}}}{l_t}\right)-1}& \left(3.2\mathrm{.3}\right)\end{array}$ Voltage Across Oxide $\begin{array}{cc}{V}_{\mathrm{oxacc}}=V_{\mathrm{fbzb}}-V_{\mathrm{FBeff}}& \left(4.2\mathrm{.1}a\right)\\ V_{\mathrm{oxdepinv}}=K_{\mathrm{lox}}\sqrt{{\Phi }_s}+V_{\mathrm{gsteff}}& \left(4.2\mathrm{.1}b\right)\\ V_{\mathrm{fbzb}}=V_{\mathrm{th}}{|}_{{\mathrm{zeroV}}_{\mathrm{bs}}\mathrm{and}{v}_{\mathrm{ds}}}-{\Phi }_s-K1\sqrt{{\Phi }_s}\text{and}& \left(4.2\mathrm{.2}\right)\\ V_{\mathrm{FBeff}}=V_{\mathrm{fbzb}}-0.5\left[\left(V_{\mathrm{fbzb}}-V_{\mathrm{gb}}-0.02\right)+\sqrt{{\left(V_{\mathrm{fbzb}}-V_{\mathrm{gb}}-0.02\right)}^2+0.08V_{\mathrm{fbzb}}}\right]& \left(4.2\mathrm{.3}\right)\end{array}$ Gate to Substrate Current $\begin{array}{cc}\mathrm{Igbacc}=W_{\mathrm{eff}}{L}_{\mathrm{eff}}·A·T_{\mathrm{oxRatio}}·V_{\mathrm{gb}}·V_{\mathrm{aux}}·\exp \left[-B·\mathrm{TOXE}\left(\mathrm{AIGBACC}-\mathrm{BIGBACC}·V_{\mathrm{oxacc}}\right)·\left(1+\mathrm{CIGBACC}·V_{\mathrm{oxacc}}\right)\right]T_{\mathrm{oxRatio}}={\left(\frac{\mathrm{TOXREF}}{\mathrm{TOXE}}\right)}^{\mathrm{NTOX}}·\frac{1}{{\mathrm{TOXE}}^2}{V}_{\mathrm{aux}}=\mathrm{NIGBACC}·v_t·\log \left(1+\exp \left(-\frac{V_{\mathrm{gb}}-V_{\mathrm{fbzb}}}{\mathrm{NIGBACC}·v_t}\right)\right)& \left(4.3\mathrm{.1}\right)\\ \mathrm{Igbinv}=W_{\mathrm{eff}}{L}_{\mathrm{eff}}·A·T_{\mathrm{oxRatio}}·V_{\mathrm{gb}}·V_{\mathrm{aux}}·\exp \left[-B·\mathrm{TOXE}\left(\mathrm{AIGBINV}-\mathrm{BIGBINV}·V_{\mathrm{oxdepinv}}\right)·\left(1+\mathrm{CIGBINV}·V_{\mathrm{oxdepinv}}\right)\right]V_{\mathrm{aux}}=\mathrm{NIGBINV}·v_t·\log \left(1+\exp \left(\frac{V_{\mathrm{oxdepinv}}-\mathrm{EIGBINV}}{\mathrm{EIGBINV}·v_t}\right)\right)& \left(4.3\mathrm{.2}\right)\end{array}$ Gate to Channel Current $\begin{array}{cc}\mathrm{Igc}=W_{\mathrm{eff}}{L}_{\mathrm{eff}}·A·T_{\mathrm{oxRatio}}·V_{\mathrm{gse}}·V_{\mathrm{aux}}·\exp \left[-B·\mathrm{TOXE}\left(\mathrm{AIGC}-\mathrm{BIGC}·V_{\mathrm{oxdepinv}}\right)·\left(1+\mathrm{CIGC}·V_{\mathrm{oxdepinv}}\right)\right]V_{\mathrm{aux}}=\mathrm{NIGC}·v_t·\log \left(1+\exp \left(\frac{V_{\mathrm{gse}}-\mathrm{VTH0}}{\mathrm{NIGC}·v_t}\right)\right)& \left(4.3\mathrm{.3}\right)\\ \mathrm{Igs}=W_{\mathrm{eff}}\mathrm{DLCIG}·A·T_{\mathrm{oxRatioEdge}}·V_{\mathrm{gs}}·V_{\mathrm{gs}}^{\prime }·\exp \left[-B·\mathrm{TOXE}·\mathrm{POXEDGE}·\left(\mathrm{AIGSD}-\mathrm{BIGSD}·V_{\mathrm{gs}}^{\prime }\right)·\left(1+\mathrm{CIGSD}·V_{\mathrm{gs}}^{\prime }\right)\right]\mathrm{and}& \left(4.3\mathrm{.4}\right)\\ \mathrm{Igd}=W_{\mathrm{eff}}\mathrm{DLCIG}·A·T_{\mathrm{oxRatioEdge}}·V_{\mathrm{gd}}·V_{\mathrm{gd}}^{\prime }·\exp \left[-B·\mathrm{TOXE}·\mathrm{POXEDGE}·\left(\mathrm{AIGSD}-\mathrm{BIGSD}·V_{\mathrm{gd}}^{\prime }\right)·\left(1+\mathrm{CIGSD}·V_{\mathrm{gd}}^{\prime }\right)\right]T_{\mathrm{oxRatioEdge}}={\left(\frac{\mathrm{TOXREF}}{\mathrm{TOXE}·\mathrm{POXEDGE}}\right)}^{\mathrm{NTOX}}·\frac{1}{{\left(\mathrm{TOXE}·\mathrm{POXEDGE}\right)}^2}{V}_{\mathrm{gs}}^{\prime }=\sqrt{{\left(V_{\mathrm{gs}}-V_{\mathrm{fbsd}}\right)}^2+1.0e-4}{V}_{\mathrm{gd}}^{\prime }=\sqrt{{\left(V_{\mathrm{gd}}-V_{\mathrm{fbsd}}\right)}^2+1.0e-4}{V}_{\mathrm{fbsd}}=\frac{k_{B}T}{q}\log \left(\frac{\mathrm{NGATE}}{\mathrm{NSD}}\right)& \left(4.3\mathrm{.5}\right)\end{array}$ Partition Igc=Igcs+Igcd $\begin{array}{cc}\mathrm{Igc}=\mathrm{Igcs}+\mathrm{Igcd}\mathrm{Igcs}=\mathrm{Igc}·\frac{\mathrm{PIGCD}·V_{\mathrm{ds}}+\exp \left(-\mathrm{PIGCD}·V_{\mathrm{ds}}\right)-1+1.0e-4}{{\mathrm{PIGCD}}^2·V_{\mathrm{ds}}^2+2.0e-4}& \left(4.3\mathrm{.6}\right)\\ \mathrm{Igcd}=\mathrm{Igc}·\frac{1-\left(\mathrm{PIGCD}·V_{\mathrm{ds}}+1\right)·\exp \left(-\mathrm{PIGCD}·V_{\mathrm{ds}}\right)+1.0e-4}{{\mathrm{PIGCD}}^2·V_{\mathrm{ds}}^2+2.0e-4}& \left(4.3\mathrm{.7}\right)\end{array}$ Drain Current Model

Bulk Charge Effect $\begin{array}{cc}{A}_{\mathrm{bulk}}=\left\{1+\mathrm{F\_doping}·\left[\begin{array}{c}\begin{array}{c}\frac{\mathrm{A0}·L_{\mathrm{eff}}}{L_{\mathrm{eff}}+2\sqrt{\mathrm{XJ}·X_{\mathrm{dep}}}}·\\ \left(1-\mathrm{AGS}·{V_{\mathrm{gstef}}\left(\frac{L_{\mathrm{eff}}}{L_{\mathrm{eff}}+2\sqrt{\mathrm{XJ}·X_{\mathrm{dep}}}}\right)}^2\right)+\end{array}\\ \frac{\mathrm{B0}}{W_{\mathrm{eff}}^{\prime }+\mathrm{B1}}\end{array}\right]·\right\}\frac{1}{1+\mathrm{KETA}·V_{\mathrm{bseff}}}& \left(5.1\mathrm{.1}\right)\\ \mathrm{F\_doping}=\frac{\sqrt{1+\mathrm{LPEB}/L_{\mathrm{eff}}}{K}_{1\mathrm{ox}}}{2\sqrt{{\Phi }_s-V_{\mathrm{bseff}}}}+K_{2\mathrm{ox}}-\mathrm{K3B}\frac{\mathrm{TOXE}}{W_{\mathrm{eff}}^{\prime }+\mathrm{W0}}{\Phi }_s& \left(5.1\mathrm{.2}\right)\end{array}$

Unified Mobility Model $\begin{array}{cc}{E}_{\mathrm{eff}}=\frac{Q_B+\left(Q_n/2\right)}{{\varepsilon }_{\mathrm{si}}}& \left(5.2\mathrm{.1}\right)\\ {\mu }_{\mathrm{eff}}=\frac{{\mu }_0}{1+{\left(E_{\mathrm{eff}}/E_o\right)}^v}& \left(5.2\mathrm{.2}\right)\\ E_{\mathrm{eff}}\approx \frac{V_{\mathrm{gs}}+V_{\mathrm{ih}}}{6\mathrm{TOXE}}& \left(5.2\mathrm{.3}\right)\end{array}$

• • mobMod=0 $\begin{array}{cc}{\mu }_{\mathrm{eff}}=\frac{\mathrm{U0}}{1+\left(\mathrm{UA}+{\mathrm{UCV}}_{\mathrm{bseff}}\right)}\left(\frac{V_{\mathrm{gsteff}}+2V_{\mathrm{ih}}}{\mathrm{TOXE}}\right)+{\mathrm{UB}\left(\frac{V_{\mathrm{gsteff}}+2V_{\mathrm{ih}}}{\mathrm{TOXE}}\right)}^2& \left(5.2\mathrm{.4}\right)\end{array}$
  • mobMod=1 $\begin{array}{cc}{\mu }_{\mathrm{eff}}=\frac{\mathrm{U0}}{\begin{array}{c}1+[\mathrm{UA}\left(\frac{V_{\mathrm{gsteff}}+2V_{\mathrm{ih}}}{\mathrm{TOXE}}\right)+\\ {\mathrm{UB}\left(\frac{V_{\mathrm{gsteff}}+2V_{\mathrm{ih}}}{\mathrm{TOXE}}\right)}^2]\left(1+\mathrm{UC}·V_{\mathrm{bseff}}\right)\end{array}}& \left(5.2\mathrm{.5}\right)\end{array}$
  • mobMod=2 $\begin{array}{cc}{\mu }_{\mathrm{eff}}=\frac{\mathrm{U0}}{1+\left(\mathrm{UA}+\mathrm{UC}·V_{\mathrm{bseff}}\right){\lceil \frac{V_{\mathrm{gsteff}}+C_0·(\mathrm{VTHO}-\mathrm{VFB}-\mathrm{\Phi s}}{\mathrm{TOXE}}\rceil }^{\mathrm{EU}}}& \left(5.2\mathrm{.6}\right)\end{array}$ Asymmetric and Bias Dependent Source/Drain Resistance Model
  • rdsMod=0 $\begin{array}{cc}{R}_{\mathrm{ds}}\left(V\right)=\frac{\left\{\begin{array}{c}\mathrm{RDSWMIN}+\mathrm{RDSW}·\\ \left[\mathrm{PRWB}·\left(\sqrt{{\Phi }_s-V_{\mathrm{bseff}}}-\sqrt{{\Phi }_s}\right)+\frac{1}{1+\mathrm{PRWG}·V_{\mathrm{gseff}}}\right]\end{array}\right\}}{{\left(1\mathrm{e6}·W_{\mathrm{effcj}}\right)}^{\mathrm{WR}}}& \left(5.3\mathrm{.1}\right)\end{array}$
  • rdsMod=1 $\begin{array}{cc}{R}_d\left(V\right)=\frac{\left\{\begin{array}{c}\mathrm{RDWMIN}+\mathrm{RDW}·\\ \left[-\mathrm{PRWB}·V_{\mathrm{bd}}+\frac{1}{1+\mathrm{PRWG}·V_{\mathrm{gd}}-V_{\mathrm{fbsd}}}\right]\end{array}\right\}}{\left[{\left(1\mathrm{e6}·W_{\mathrm{effcj}}\right)}^{\mathrm{WR}}·\mathrm{NF}\right]}& \left(5.3\mathrm{.2}\right)\\ R_s\left(V\right)=\frac{\left\{\begin{array}{c}\mathrm{RSWMIN}+\mathrm{RSW}·\\ \left[-\mathrm{PRWB}·V_{\mathrm{bs}}+\frac{1}{1+\mathrm{PRWG}·\left(V_{\mathrm{gs}}-V_{\mathrm{fbsd}}\right)}\right]\end{array}\right\}}{\left[{\left(1\mathrm{e6}·W_{\mathrm{effcj}}\right)}^{\mathrm{WR}}·\mathrm{NF}\right]}& \left(5.3\mathrm{.3}.\right)\end{array}$ Drain Current for Triode Region
  • rdsMod=1 $\begin{array}{cc}{I}_{\mathrm{ds}}\left(y\right)={\mathrm{WQ}}_{\mathrm{ch}}\left(y\right){\mu }_{\mathrm{ne}}\left(y\right)\frac{d{V}_F\left(y\right)}{dy}& \left(5.4\mathrm{.1}\right)\\ {\mu }_{\mathrm{ne}\left(y\right)}=\frac{{\mu }_{\mathrm{eff}}}{1+\frac{E_y}{E_{\mathrm{sat}}}}& \left(5.4\mathrm{.2}\right)\\ I_{\mathrm{ds}}\left(y\right)={\mathrm{WQ}}_{\mathrm{ch0}}\left(1-\frac{V_F\left(y\right)}{V_b}\right)\frac{{\mu }_{\mathrm{eff}}}{1+\frac{E_y}{E_{\mathrm{sat}}}}\frac{d{V}_F\left(y\right)}{dy}& \left(5.4\mathrm{.3}\right)\\ I_{\mathrm{ds0}}=\frac{W{\mu }_{\mathrm{eff}}{Q}_{\mathrm{ch0}}{V}_{\mathrm{ds}}\left(1-\frac{V_{\mathrm{ds}}}{2V_b}\right)}{L\left(1+\frac{V_{\mathrm{ds}}}{E_{\mathrm{sat}}L}\right)}.& \left(5.4\mathrm{.4}\right)\end{array}$
  • rdsMod=0 $\begin{array}{cc}{I}_{\mathrm{ds}}=\frac{I_{\mathrm{dso}}}{1+\frac{R_{\mathrm{ds}}{I}_{\mathrm{dso}}}{V_{\mathrm{ds}}}}& \left(5.4\mathrm{.5}\right)\end{array}$ Velocity Saturation $\begin{array}{cc}v=\frac{{\mu }_{\mathrm{eff}}E}{1+E/E_{\mathrm{sat}}}E<E_{\mathrm{sat}}=\mathrm{VSAT}E\ge E_{\mathrm{sat}}& \left(5.5\mathrm{.1}\right)\\ E_{\mathrm{sat}}=\frac{2\mathrm{VSAT}}{{\mu }_{\mathrm{eff}}}& \left(5.5\mathrm{.2}\right)\end{array}$ Saturation Voltage Vdsat

Intrinsic $\begin{array}{cc}{V}_{\mathrm{dsat}}=\frac{E_{\mathrm{sat}}L\left(V_{\mathrm{gsteff}}+2_{\mathrm{Vt}}\right)}{A_{\mathrm{bulk}}{E}_{\mathrm{sat}}L+V_{\mathrm{gsteff}}+2_{\mathrm{vt}}}.& \left(5.6\mathrm{.1}\right)\end{array}$

Extrinsic $\begin{array}{cc}{V}_{\mathrm{dsat}}=\frac{-b-\sqrt{b^2-4\mathrm{ac}}}{2a}& \left(5.6\mathrm{.2}a\right)\\ a=A_{\mathrm{bulk}}^2{W}_{\mathrm{eff}}{\mathrm{VSATC}}_{\mathrm{oxe}}{R}_{\mathrm{ds}}+A_{\mathrm{bulk}}\left(\frac{1}{\lambda }-1\right)& \left(5.6\mathrm{.2}b\right)\\ b=-\left[\begin{array}{c}\left(V_{\mathrm{gsteff}}+2v_t\right)\left(\frac{2}{\lambda }-1\right)+A_{\mathrm{bulk}}{E}_{\mathrm{sat}}{L}_{\mathrm{eff}}+\\ 3A_{\mathrm{bulk}}\left(V_{\mathrm{gsteff}}+2v_t\right)W_{\mathrm{eff}}{\mathrm{VSATC}}_{\mathrm{oxe}}{R}_{\mathrm{ds}}\end{array}\right]& \left(5.6\mathrm{.2}c\right)\\ c=\left(V_{\mathrm{gsteff}}+2v_t\right)E_{\mathrm{sat}}{L}_{\mathrm{eff}}+2{\left(V_{\mathrm{gsteff}}+2v_t\right)}^2{W}_{\mathrm{eff}}{\mathrm{VSATC}}_{\mathrm{oxe}}{R}_{\mathrm{ds}}& \left(5.6\mathrm{.2}d\right)\\ \lambda ={\mathrm{A1V}}_{\mathrm{gsteff}}+\mathrm{A2}& \left(5.6\mathrm{.2}e\right)\end{array}$ c=(V_gsteff+2ν₁)E_satL_eff+2(V_gsteff+2ν₁)²W_effVSATC_oxeR_ds  (5.6.2d) λ=A1V_gsteff+A2  (5.6.2e) Vdseff $\begin{array}{cc}{V}_{\mathrm{dseff}}=V_{\mathrm{dsat}}-\frac{1}{2}\left[\left(V_{\mathrm{dsat}}-V_{\mathrm{ds}}-\delta \right)+\sqrt{\left(V_{\mathrm{dsat}}-V_{\mathrm{ds}}-{\delta }^2\right)+4\delta ·V_{\mathrm{dsat}}}\right]& \left(5.6\mathrm{.3}\right)\end{array}$ Saturation-Region Output Conductance Model $\begin{array}{cc}{I}_{\mathrm{ds}}\left(V_{\mathrm{gs}},V_{\mathrm{ds}}\right)=I_{\mathrm{dsat}}\left(V_{\mathrm{gs}},V_{\mathrm{dsat}}\right)+{\int }_{V_{\mathrm{dsat}}}^{V_{\mathrm{ds}}}\frac{\partial I_{\mathrm{ds}}\left(V_{\mathrm{gs}},V_{\mathrm{ds}}\right)}{\partial V_d}·d{V}_d& \left(5.7\mathrm{.1}\right)\\ =I_{\mathrm{dsat}}\left(V_{\mathrm{gs}},V_{\mathrm{dsat}}\right)·\left[1+{\int }_{V_{\mathrm{dsat}}}^{V_{\mathrm{ds}}}\frac{1}{V_A}·d{V}_d\right]& \\ V_A=I_{\mathrm{dsat}}·{\left[\frac{\partial I_{\mathrm{ds}}\left(V_{\mathrm{gs}},V_{\mathrm{ds}}\right)}{\partial V_d}\right]}^{-1}& \left(5.7\mathrm{.2}\right)\end{array}$ Channel Length Modulation $\begin{array}{cc}{V}_{\mathrm{ACLM}}=I_{\mathrm{dsat}}·{\left[\frac{\partial I_{\mathrm{ds}}\left(V_{\mathrm{gs}},V_{\mathrm{ds}}\right)}{\partial L}·\frac{\partial L}{\partial V_d}\right]}^{-1}& \left(5.7\mathrm{.3}\right)\\ V_{\mathrm{ACLM}}=C_{\mathrm{clm}}·\left(V_{\mathrm{ds}}-V_{\mathrm{dsat}}\right)& \left(5.7\mathrm{.4}\right)\\ C_{\mathrm{clm}}=\frac{1}{\mathrm{PCLM}}·F·\left(1+\mathrm{PVAG}\frac{V_{\mathrm{gsteff}}}{E_{\mathrm{sat}}{L}_{\mathrm{eff}}}\right)\left(1+\frac{R_{\mathrm{ds}}·I_{\mathrm{dso}}}{V_{\mathrm{dseff}}}\right)\left(L_{\mathrm{eff}}+\frac{V_{\mathrm{dsat}}}{E_{\mathrm{sat}}}\right)·\frac{1}{\mathrm{litl}}& \left(5.7\mathrm{.5}\right)\\ F=\frac{1}{1+\mathrm{FPROUT}·\frac{\sqrt{L_{\mathrm{eff}}}}{V_{\mathrm{gsteff}}+2v_t}}& \left(5.7\mathrm{.6}\right)\\ \mathrm{litl}=\sqrt{\frac{{\varepsilon }_{\mathrm{si}}\mathrm{TOXE}·\mathrm{XJ}}{\mathrm{EPSROX}}}& \left(5.7\mathrm{.7}\right)\end{array}$ Drain Induced Barrier Lower (DIBL) $\begin{array}{cc}{V}_{\mathrm{ADIBL}}=I_{\mathrm{dsat}}·{\left[\frac{\partial I_{\mathrm{ds}}\left(V_{\mathrm{gs}},V_{\mathrm{ds}}\right)}{\partial V_{\mathrm{th}}}·\frac{\partial V_{\mathrm{th}}}{\partial V_d}\right]}^{-1}& \left(5.7\mathrm{.8}\right)\\ V_{\mathrm{ADIBL}}=\frac{V_{\mathrm{gsteff}}+2v_t}{{\theta }_{\mathrm{rout}}\left(1+\mathrm{PDIBLCB}·V_{\mathrm{bseff}}\right)}\left(1-\frac{A_{\mathrm{bulk}}{V}_{\mathrm{dsat}}}{A_{\mathrm{bulk}}{V}_{\mathrm{dsat}}+V_{\mathrm{gsteff}}+2v_t}\right)·\left(1+\mathrm{PVAG}\frac{V_{\mathrm{gsteff}}}{E_{\mathrm{sat}}{L}_{\mathrm{eff}}}\right)& \left(5.7\mathrm{.9}\right)\\ {\theta }_{\mathrm{rout}}=\frac{\mathrm{PDIBLC1}}{2\cosh \left(\frac{\mathrm{DROUT}·L_{\mathrm{eff}}}{\mathrm{lt0}}\right)-2}+\mathrm{PDIBLC2}& \left(5.7\mathrm{.10}\right)\end{array}$ Substrate Current Induced Body Effect (SCBE) $\begin{array}{cc}{I}_{\mathrm{sub}}=\frac{A_i}{B_i}{I}_{\mathrm{ds}}\left(V_{\mathrm{ds}}-V_{\mathrm{dsat}}\right)\exp \left(-\frac{B_i·\mathrm{litl}}{V_{\mathrm{ds}}-V_{\mathrm{dsat}}}\right)& \left(5.7\mathrm{.11}\right)\\ I_{\mathrm{ds}}=I_{\mathrm{ds}-w/o-\mathrm{Isub}}+I_{\mathrm{sub}}& \left(5.7\mathrm{.12}\right)\\ =I_{\mathrm{ds}-w/o-\mathrm{Isub}}·\left[1+\frac{V_{\mathrm{ds}}-V_{\mathrm{dsat}}}{\frac{B_i}{A_i}\exp \left(\frac{B_i·\mathrm{litl}}{V_{\mathrm{ds}}-V_{\mathrm{dsat}}}\right)}\right]& \\ V_{\mathrm{ASCBE}}=\frac{B_i}{A_i}\exp \left(\frac{B_i·\mathrm{litl}}{V_{\mathrm{ds}}-V_{\mathrm{dsat}}}\right)& \left(5.7\mathrm{.13}\right)\\ \frac{1}{V_{\mathrm{ASCBE}}}=\frac{\mathrm{PSCBE2}}{L_{\mathrm{eff}}}\exp \left(-\frac{\mathrm{PSCBE1}·\mathrm{litl}}{V_{\mathrm{ds}}-V_{\mathrm{dsat}}}\right).& \left(5.7\mathrm{.14}\right)\end{array}$ Drain Induced Threshold Shift (DITS) $\begin{array}{cc}{V}_{\mathrm{ADITS}}=\frac{1}{\mathrm{PDITS}}·F·\left[1+\left(1+\mathrm{PDITSL}·L_{\mathrm{eff}}\right)\exp \left(\mathrm{PDITSD}·V_{\mathrm{ds}}\right)\right]& \left(5.7\mathrm{.15}\right)\end{array}$ Single Equation Channel Current Model $\begin{array}{cc}{I}_{\mathrm{ds}}=\frac{I_{\mathrm{ds0}}·\mathrm{NF}}{1+\frac{R_{\mathrm{ds}}{I}_{\mathrm{ds0}}}{V_{\mathrm{dseff}}}}\left[1+\frac{1}{C_{\mathrm{clm}}}\ln \left(\frac{V_A}{V_{\mathrm{Asat}}}\right)\right]·\left(1+\frac{V_{\mathrm{ds}}-V_{\mathrm{dseff}}}{V_{\mathrm{ADIBL}}}\right)·\left(1+\frac{V_{\mathrm{ds}}-V_{\mathrm{dseff}}}{V_{\mathrm{ADITS}}}\right)·\left(1+\frac{V_{\mathrm{ds}}-V_{\mathrm{dseff}}}{V_{\mathrm{ASCBE}}}\right)& \left(5.8\mathrm{.1}\right)\end{array}$ where NF is the number of device fingers, and V_A is written as  (5.8.2) V_A=V_Asat+V_ACLM  (5.8.3) $\begin{array}{cc}{V}_A\mathrm{is}\mathrm{written}\mathrm{as}& \left(5.8\mathrm{.2}\right)\\ V_A=V_{\mathrm{Asat}}+V_{\mathrm{ACLM}}& \left(5.8\mathrm{.3}\right)\\ V_{\mathrm{Asat}}=\frac{\begin{array}{c}{E}_{\mathrm{sat}}{L}_{\mathrm{eff}}+V_{\mathrm{dsat}}+\\ 2R_{\mathrm{ds}}{\mathrm{vsatC}}_{\mathrm{oxe}}{W}_{\mathrm{eff}}{V}_{\mathrm{gsteff}}·\lfloor 1-\frac{A_{\mathrm{bulk}}{V}_{\mathrm{dsat}}}{2\left(V_{\mathrm{gsteff}}+2v_t\right)}\rfloor \end{array}}{R_{\mathrm{ds}}{\mathrm{vsatC}}_{\mathrm{oxe}}{W}_{\mathrm{eff}}{A}_{\mathrm{bulk}}-1+\frac{2}{\lambda }}& \left(5.8\mathrm{.4}\right)\end{array}$ Body Current Model

Iii Model $\begin{array}{cc}\begin{array}{c}{I}_u=\frac{\mathrm{ALPHA0}+\mathrm{ALPHA1}·L_{\mathrm{eff}}}{L_{\mathrm{eff}}}\left(V_{\mathrm{ds}}-V_{\mathrm{dseff}}\right)\exp \\ \left(\frac{\mathrm{BETA0}}{V_{\mathrm{ds}}-V_{\mathrm{dseff}}}\right)·I_{\mathrm{dsNoSCBE}}\end{array}& \left(6.1\mathrm{.1}\right)\\ \begin{array}{c}{I}_{\mathrm{dsNoSCBE}}=\frac{I_{\mathrm{ds0}}·\mathrm{NF}}{1+\frac{R_{\mathrm{ds}}{I}_{\mathrm{ds0}}}{V_{\mathrm{dseff}}}}\left[1+\frac{1}{C_{\mathrm{clm}}}\ln \left(\frac{V_A}{V_{\mathrm{Asat}}}\right)\right]·\\ \left(1+\frac{V_{\mathrm{ds}}-V_{\mathrm{dseff}}}{V_{\mathrm{ADIBL}}}\right)·\left(1+\frac{V_{\mathrm{ds}}-V_{\mathrm{dseff}}}{V_{\mathrm{ADITS}}}\right)\end{array}& \left(6.1\mathrm{.2}\right)\end{array}$

Igidl Model $\begin{array}{cc}\begin{array}{c}{I}_{\mathrm{GIDL}}=\mathrm{AGIDL}·W_{\mathrm{effCl}}·\mathrm{Nf}·\frac{V_{\mathrm{ds}}-V_{\mathrm{gse}}-\mathrm{EGIDL}}{3·T_{\mathrm{oxe}}}·\\ \exp \left(-\frac{3·T_{\mathrm{oxe}}·\mathrm{BGIDL}}{V_{\mathrm{ds}}-V_{\mathrm{gse}}-\mathrm{EGIDL}}\right)·\frac{V_{\mathrm{db}}^3}{\mathrm{CGIDL}+V_{\mathrm{db}}^3}\end{array}& \left(6.2\mathrm{.1}\right)\end{array}$ Intrinsic Capacitance Modeling Basic Formulation $\begin{array}{cc}\{\begin{array}{c}\begin{array}{c}{Q}_g=-\left(Q_{\mathrm{sub}}+Q_{\mathrm{inv}}+Q_{\mathrm{acc}}\right)\\ Q_b=Q_{\mathrm{acc}}+Q_{\mathrm{sub}}\end{array}\\ Q_{\mathrm{inv}}=Q_s+Q_d\end{array}& \left(7.2\mathrm{.1}\right)\\ Q_g=-\left(Q_{\mathrm{inv}}+Q_{\mathrm{acc}}+Q_{\mathrm{sub0}}+\delta Q_{\mathrm{sub}}\right)& \left(7.2\mathrm{.2}\right)\\ V_{\mathrm{th}}\left(y\right)=V_{\mathrm{th}}\left(0\right)+\left(A_{\mathrm{built}}-1\right)V_y& \left(7.2\mathrm{.3}\right)\\ \{\begin{array}{c}{Q}_c=W_{\mathrm{active}}{\int }_0^{L_{\mathrm{active}}}{q}_{c}dy=-W_{\mathrm{active}}{C}_{\mathrm{oxe}}{\int }_0^{L_{\mathrm{active}}}\left(V_{\mathrm{gt}}-A_{\mathrm{bulk}}{V}_y\right)dy\\ Q_g=W_{\mathrm{active}}{\int }_0^{L_{\mathrm{active}}}{q}_{g}dy=W_{\mathrm{active}}{C}_{\mathrm{oxe}}{\int }_0^{L_{\mathrm{active}}}\left(V_{\mathrm{gt}}+V_{\mathrm{th}}-V_{\mathrm{FB}}-{\Phi }_s-V_y\right)dy\\ Q_b=W_{\mathrm{active}}{\int }_0^{L_{\mathrm{active}}}{q}_{b}dy=-W_{\mathrm{active}}{C}_{\mathrm{oxe}}{\int }_0^{L_{\mathrm{active}}}\left(V_{\mathrm{th}}-V_{\mathrm{FB}}-{\Phi }_s+\left(A_{\mathrm{bulk}}-1\right)V_y\right)dy\end{array}& \left(7.2\mathrm{.4}\right)\end{array}$

• • where V_gt=V_gse−V_th and $\mathrm{dy}=\frac{{\mathrm{dV}}_y}{E_y}$$\begin{array}{cc}\begin{array}{c}{I}_{\mathrm{ds}}=\frac{W_{\mathrm{active}}{\mu }_{\mathrm{eff}}{C}_{\mathrm{oxe}}}{L_{\mathrm{active}}}\left(V_{\mathrm{gt}}-\frac{A_{\mathrm{bulk}}}{2}{V}_{\mathrm{ds}}\right)V_{\mathrm{ds}}\\ =W_{\mathrm{active}}{\mu }_{\mathrm{eff}}{C}_{\mathrm{oxe}}\left(V_{\mathrm{gt}}-A_{\mathrm{bulk}}{V}_y\right)E_y\end{array}& \left(7.2\mathrm{.5}\right)\\ C_{\mathrm{ij}}=\frac{\partial Q_i}{\partial V_j}& \left(7.2\mathrm{.6}\right)\end{array}$ where i and j denote the transistor terminals, C_ij satisfies $\sum _i{C}_{\mathrm{ij}}=\sum _j{C}_{\mathrm{ij}}=0$ Short Channel Model $\begin{array}{cc}{V}_{\mathrm{dsat},\mathrm{IV}}<V_{\mathrm{dsat},\mathrm{CV}}<V_{\mathrm{dsat},\mathrm{IV}}{|}_{\mathrm{Lactive}->\infty }=\frac{V_{\mathrm{gsteff},\mathrm{CV}}}{A_{\mathrm{bulk}}}& \left(7.2\mathrm{.7}\right)\\ V_{\mathrm{dsat},\mathrm{CV}}=\frac{V_{\mathrm{gsteff},\mathrm{CV}}}{A_{\mathrm{bulk}}·\left[1+{\left(\frac{\mathrm{CLC}}{L_{\mathrm{active}}}\right)}^{\mathrm{CLE}}\right]}& \left(7.2\mathrm{.8}\right)\\ \begin{array}{c}{V}_{\mathrm{gsteff},\mathrm{CV}}=\mathrm{NOFF}·{\mathrm{nv}}_t·\\ \ln \left[1+\exp \left(\frac{V_{\mathrm{gse}}-V_{\mathrm{th}}-\mathrm{VOFFCV}}{\mathrm{NOFF}·{\mathrm{nv}}_t}\right)\right]\end{array}& \left(7.2\mathrm{.9}\right)\\ \begin{array}{c}{A}_{\mathrm{bulk}}=\{1+\mathrm{F\_doping}·\\ \left[\frac{\mathrm{A0}·L_{\mathrm{eff}}}{L_{\mathrm{eff}}+2\sqrt{\mathrm{XJ}·X_{\mathrm{dep}}}}·+\frac{\mathrm{B0}}{W_{\mathrm{eff}}^{\prime }+\mathrm{B1}}\right]·\}\\ \frac{1}{1+\mathrm{KETA}·V_{\mathrm{bseff}}}\end{array}\mathrm{where}\begin{array}{c}\mathrm{F\_doping}=\frac{\sqrt{1+\mathrm{LPEB}/L_{\mathrm{eff}}}{K}_{1\mathrm{ox}}}{2\sqrt{{\Phi }_s-V_{\mathrm{bseff}}}}+\\ \mathrm{K3B}\frac{\mathrm{TOXE}}{W_{\mathrm{eff}}^{\prime }+\mathrm{W0}}{\Phi }_s\end{array}{K}_{2\mathrm{ox}}-& \left(7.2\mathrm{.10}\right)\end{array}$ Single Equation Formulation
  • depletion to inversion region $\begin{array}{cc}Q\left(V_{\mathrm{gst}}\right)=Q\left(V_{\mathrm{gsteff},\mathrm{CV}}\right)& \left(7.2\mathrm{.11}\right)\\ C\left(V_{\mathrm{gst}}\right)=C\left(V_{\mathrm{gsteff},\mathrm{CV}}\right)\frac{\partial V_{\mathrm{gsteff},\mathrm{CV}}}{V_{g,d,s,b}}& \left(7.2\mathrm{.12}\right)\end{array}$ Accumulation to Depletion Region $\begin{array}{cc}\begin{array}{c}{V}_{\mathrm{FBeff}}=V_{\mathrm{fbzb}}-0.5[\left(V_{\mathrm{fbzb}}-V_{\mathrm{gb}}-0.02\right)+\\ \sqrt{{\left(V_{\mathrm{fbzb}}-V_{\mathrm{gb}}-0.02\right)}^2+0.08V_{\mathrm{fbzb}}}]\end{array}& \left(7.2\mathrm{.13}\right)\end{array}$ V_fbzb=V_th|_{zeroVbsandVds}−Φ_s−K1{square root}{square root over (Φ_s)}  (7.2.14) Linear to Saturation Region $\begin{array}{cc}{V}_{\mathrm{coeff}}=V_{\mathrm{dsat},\mathrm{CV}}-0.5\left\{V_4+\sqrt{V_4^2+4{\delta }_4{V}_{\mathrm{dsat},\mathrm{CV}}}\right\}\text{where}{V}_4=V_{\mathrm{dsat},\mathrm{CV}}-V_{\mathrm{ds}}-{\delta }_4;{\delta }_4=0.02V& \left(7.2\mathrm{.15}\right)\end{array}$ Charge Petitioning $\begin{array}{cc}\{\begin{array}{c}{Q}_s=W_{\mathrm{active}}{\int }_0^{L_{\mathrm{active}}}{q}_c\left(I-\frac{y}{L_{\mathrm{active}}}\right)dy\\ Q_d=W_{\mathrm{active}}{\int }_0^{L_{\mathrm{active}}}{q}_c\frac{y}{L_{\mathrm{active}}}dy\end{array}& \left(7.2\mathrm{.16}\right)\end{array}$ Charge—Thickness Capacitance Model $\begin{array}{cc}{C}_{\mathrm{oxeff}}=\frac{C_{\mathrm{oxe}}·C_{\mathrm{cen}}}{C_{\mathrm{oxe}}+C_{\mathrm{cen}}}& \left(7.3\mathrm{.1}\right)\end{array}$
  • where C_cen=ε_si/X_DC Accumulation and Depletion $\begin{array}{cc}\begin{array}{c}{X}_{\mathrm{DC}}=\frac{1}{3}{L}_{\mathrm{debye}}\\ \exp \left[\mathrm{ACDE}·{\left(\frac{\mathrm{NDEP}}{2\times {10}^{16}}\right)}^{-0.25}·\frac{V_{\mathrm{gse}}-V_{\mathrm{bseff}}-V_{\mathrm{FBeff}}}{\mathrm{TOXE}}\right]\end{array}& \left(7.3\mathrm{.2}\right)\end{array}$
  • where L_debye is Debye length, and X_DC is in the unit of cm and (V_gse−V_bseff−V_FBeff)/TOXE is in units of MV/Cm. For numerical statbility, (7.3.2) is replaced by (7.3.3) $\begin{array}{cc}{X}_{\mathrm{DC}}=X_{\max }-\frac{1}{2}\left(X_0+\sqrt{X_0^2+4{\delta }_x{X}_{\max }}\right)& \left(7.3\mathrm{.3}\right)\end{array}$ where X₀=X_max−X_DC−δ_x and X_max=L_debye/3; δ_x=10⁻³TOXE. Inversion Charge $\begin{array}{cc}{X}_{\mathrm{DC}}=\frac{1.9\times {10}^{-9}\mathrm{cm}}{1+{\left(\frac{V_{\mathrm{gsteff}}+4\left(\mathrm{VTH0}-\mathrm{VFB}-{\Phi }_s\right)}{2\mathrm{TOXP}}\right)}^{0.7}}& \left(7.3\mathrm{.5}\right)\end{array}$ Body Charge Thickness in Inversion $\begin{array}{cc}{\phi }_{\delta }={\Phi }_s-2{\Phi }_B=v_t\ln \left(\frac{V_{\mathrm{gsteffCV}}·(V_{\mathrm{gsteffCV}}+2K_{1\mathrm{ox}}\sqrt{2{\Phi }_B}}{\mathrm{MOIN}·K_{1\mathrm{ox}}^2{v}_t}\right)& \left(7.3\mathrm{.5}\right)\end{array}$ q_inv=−C_oseff·(V_gseff,CV−φ_δ)  (7.3.6) Intrinsic Capacitance Model Equations

Accumulation Region Q_δ=W_activeL_activeC_oxe(V_gs−V_bs−VFBCV) Q_sub=−Q_s Q_inv=0

Subthreshold Region $\begin{array}{c}{Q}_{\mathrm{sub0}}=-W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxe}}·\\ \frac{K_{1\mathrm{ox}}^2}{2}\left(-1+\sqrt{1+\frac{4\left(V_{\mathrm{gs}}-\mathrm{VFBCV}-V_{\mathrm{bs}}\right)}{K_{1\mathrm{ox}}^2}}\right)\end{array}$$Q_g=-Q_{\mathrm{sub0}}$$Q_{\mathrm{inv}}=0$

Strong Inversion Region $V_{\mathrm{dsat},\mathrm{cv}}=\frac{V_{\mathrm{gs}}-V_{\mathrm{th}}}{A_{\mathrm{bulk}}^{\prime }}$$A_{\mathrm{bulk}}^{\prime }=A_{\mathrm{bulk}}\left(1+{\left(\frac{\mathrm{CLC}}{L_{\mathrm{eff}}}\right)}^{\mathrm{CLE}}\right)$$V_{\mathrm{th}}=\mathrm{VFBCV}+{\Phi }_s+K_{1\mathrm{ox}}\sqrt{{\Phi }_s-V_{\mathrm{bseff}}}$ V_th=VFBCV+φ_s+K_lox{square root}{square root over (Φ_s−V_bseff)}

Linear Region $\begin{array}{c}{Q}_g=C_{\mathrm{oxe}}{W}_{\mathrm{active}}{L}_{\mathrm{active}}\\ \left(V_{\mathrm{gs}}-\mathrm{VFBCV}-{\Phi }_s-\frac{V_{\mathrm{ds}}}{2}+\frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{ds}}^2}{12\left(V_{\mathrm{gs}}-V_{\mathrm{th}}-\frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{ds}}}{2}\right)}\right)\end{array}$$\begin{array}{c}{Q}_b=C_{\mathrm{oxe}}{W}_{\mathrm{active}}{L}_{\mathrm{active}}(\mathrm{VFBCV}-V_{\mathrm{th}}-{\Phi }_s-\\ \frac{\left(1-A_{\mathrm{bulk}}^{\prime }\right)V_{\mathrm{ds}}}{2}-\frac{\left(1-A_{\mathrm{bulk}}^{\prime }\right)A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{ds}}^2}{12\left(V_{\mathrm{gs}}-V_{\mathrm{th}}-\frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{ds}}}{2}\right)})\end{array}$

50/50 Partitioning: $\begin{array}{c}{Q}_{\mathrm{inv}}=-C_{\mathrm{oxe}}{W}_{\mathrm{active}}{L}_{\mathrm{active}}\\ \left\{V_{\mathrm{gs}}-V_{\mathrm{th}}-{\Phi }_s-\frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{ds}}}{2}+\frac{A_{\mathrm{bulk}}^{\mathrm{\prime 2}}{V}_{\mathrm{ds}}^2}{12\left(V_{\mathrm{gs}}-V_{\mathrm{th}}-\frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{ds}}}{2}\right)}\right)\end{array}$$Q_s=Q_d=0.5Q_{\mathrm{inv}}$ Q_s=Q_d=0.5Q_inv

40/60 Partitioning: $\begin{array}{c}{Q}_d=-C_{\mathrm{oxe}}{W}_{\mathrm{active}}{L}_{\mathrm{active}}\\ (\frac{V_{\mathrm{gs}}-V_{\mathrm{th}}}{2}-\frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{ds}}}{2}+\\ \frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{ds}}\left[\frac{{\left(V_{\mathrm{gs}}-V_{\mathrm{th}}\right)}^2}{6}-\frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{ds}}\left(V_{\mathrm{gs}}-V_{\mathrm{th}}\right)}{8}+\frac{{\left(A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{ds}}\right)}^2}{40}\right]}{12{\left(V_{\mathrm{gs}}-V_{\mathrm{th}}-\frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{ds}}}{2}\right)}^2})\end{array}$$Q_s=-\left(Q_g+Q_b+Q_d\right)$ Q_s=−(Q_s+Q_b+Q_d)

0/100 Partitioning: $Q_d=-C_{\mathrm{oxe}}{W}_{\mathrm{active}}{L}_{\mathrm{active}}\left(\frac{V_{\mathrm{gs}}-V_{\mathrm{th}}}{2}+\frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{ds}}}{4}-\frac{{\left(A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{ds}}\right)}^2}{24}\right)$$Q_s=-\left(Q_g+Q_b+Q_d\right)$ Q_s=−(Q_g+Q_b+Q_d)

Saturation Region $Q_g=C_{\mathrm{oxe}}{W}_{\mathrm{active}}{L}_{\mathrm{active}}\left(V_{\mathrm{gs}}-\mathrm{VFBCV}-{\Phi }_s-\frac{V_{\mathrm{dsat}}}{3}\right)$$Q_b=-C_{\mathrm{oxe}}{W}_{\mathrm{active}}{L}_{\mathrm{active}}\left(\mathrm{VFBCV}+{\Phi }_s-V_{\mathrm{th}}+\frac{\left(1-A_{\mathrm{bulk}}^{\prime }\right)V_{\mathrm{dsat}}}{3}\right)$

50/50 Partitioning: $Q_s=Q_d=-\frac{1}{3}{C}_{\mathrm{axe}}{W}_{\mathrm{active}}{L}_{\mathrm{active}}\left(V_{\mathrm{gs}}-V_{\mathrm{th}}\right)$

40/60 Partitioning: $Q_d=-\frac{4}{15}{C}_{\mathrm{axe}}{W}_{\mathrm{active}}{L}_{\mathrm{active}}\left(V_{\mathrm{gs}}-V_{\mathrm{th}}\right)$ Q_s=−(Q_g+Q_b+Q_d)

0/100 Partitioning: Q_d=0 Q_s=−(Q_g+Q_b) capMod=1 Q_g=−(Q_inv+Q_acc+Q_sub0+δQ_sub) Q_b=−(Q_acc+Q_sub0+δQ_sub) Q_inv=Q_s+Q_d Q_acc=−W_activeL_activeC_oxe·(V_FBeff−V_fbzb) $Q_g=-\left(Q_{\mathrm{inv}}+Q_{\mathrm{acc}}+Q_{\mathrm{sub0}}+\delta Q_{\mathrm{sub}}\right)$$Q_b=-\left(Q_{\mathrm{acc}}+Q_{\mathrm{sub0}}+\delta Q_{\mathrm{sub}}\right)$$Q_{\mathrm{inv}}=Q_s+Q_d$$Q_{\mathrm{acc}}=-W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxe}}·\left(V_{\mathrm{FBeff}}-V_{\mathrm{fbzb}}\right)$$Q_{\mathrm{sub0}}=-W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxe}}·\frac{K_{1\mathrm{ox}}^2}{2}·\left[-1+\sqrt{1+\frac{4\left(V_{\mathrm{gse}}-V_{\mathrm{FBeff}}-V_{\mathrm{gsteff}}-V_{\mathrm{bseff}}\right)}{K_{1\mathrm{ox}}^2}}\right]$$V_{\mathrm{dsat},\mathrm{cv}}=\frac{V_{\mathrm{gsteffcv}}}{A_{\mathrm{bulk}}},Q_{\mathrm{inv}}=-W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxe}}·\left[V_{\mathrm{gsteff},\mathrm{cv}}-\frac{1}{2}{A}_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}+\frac{A_{\mathrm{bulk}}^{\mathrm{\prime 2}}{V}_{\mathrm{cveff}}^2}{12·\left(V_{\mathrm{gsteff},\mathrm{cv}}-A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}/2\right)}\right]$$\delta Q_{\mathrm{sub}}=W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxe}}·\left[\frac{1-A_{\mathrm{bulk}}^{\prime }}{2}{V}_{\mathrm{cveff}}-\frac{\left(1-A_{\mathrm{bulk}}^{\prime }\right)·A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}^2}{12·\left(V_{\mathrm{gsteff},\mathrm{cv}}-A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}/2\right)}\right]$

50/50 Charge Partitioning: $Q_S=Q_D=-\frac{W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxe}}}{2}[V_{\mathrm{gsteff},\mathrm{cv}}-\frac{1}{2}{A}_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}+\frac{A_{\mathrm{bulk}}^{\mathrm{\prime 2}}{V}_{\mathrm{cveff}}^2}{12·\left(V_{\mathrm{gsteff}}-A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}/2\right)}]$

40/60 Charge Partitioning: $Q_S=-\frac{W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxe}}}{2{\left(V_{\mathrm{gsteff},\mathrm{cv}}-A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}/2\right)}^2}[\begin{array}{c}{V}_{\mathrm{gsteff},\mathrm{cv}}^3-\frac{4}{3}{V}_{\mathrm{gsteff},\mathrm{cv}}^2{A}_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}+\\ \frac{2}{3}{V_{\mathrm{gsteff},\mathrm{cv}}\left(A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}\right)}^2-\frac{2}{15}{\left(A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}\right)}^3\end{array}]$$Q_D=-\frac{W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxe}}}{2{\left(V_{\mathrm{gsteff},\mathrm{cv}}-A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}/2\right)}^2}[\begin{array}{c}{V}_{\mathrm{gsteff},\mathrm{cv}}^3-\frac{5}{3}{V}_{\mathrm{gsteff},\mathrm{cv}}^2{A}_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}+\\ {V_{\mathrm{gsteff},\mathrm{cv}}\left(A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}\right)}^2-\frac{1}{5}{\left(A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}\right)}^3\end{array}]$

0/100 Charge Partitioning: $Q_S=-\frac{W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxe}}}{2}·[\begin{array}{c}{V}_{\mathrm{gsteff},\mathrm{cv}}^3+\frac{1}{2}{A}_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}-\\ \frac{A_{\mathrm{bulk}}^{\mathrm{\prime 2}}{V}_{\mathrm{cveff}}^2}{12·\left(V_{\mathrm{gsteff},\mathrm{cv}}-A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}/2\right)}\end{array}]$$Q_D=-\frac{W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxe}}}{2}·[\begin{array}{c}{V}_{\mathrm{gsteff},\mathrm{cv}}^3-\frac{3}{2}{A}_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}+\\ \frac{A_{\mathrm{bulk}}^{\mathrm{\prime 2}}{V}_{\mathrm{cveff}}^2}{4·\left(V_{\mathrm{gsteff},\mathrm{cv}}-A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}/2\right)}\end{array}]$ capMod=2 $Q_{\mathrm{ace}}=W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxeff}}·V_{\mathrm{gbacc}}$$V_{\mathrm{gbacc}}=\frac{1}{2}·\left[V_0+\sqrt{V_0^2+0.08V_{\mathrm{fbzb}}}\right]$$V_0=V_{\mathrm{fbzb}}+V_{\mathrm{bseff}}-V_{\mathrm{gs}}-0.02$$V_{\mathrm{cveff}}=V_{\mathrm{dsat}}-\frac{1}{2}·\left(V_1+\sqrt{V_1^2+0.08V_{\mathrm{dsat}}}\right)$$V_1=V_{\mathrm{dsat}}-V_{\mathrm{ds}}-0.02$$V_{\mathrm{dsat}}=\frac{V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }}{A_{\mathrm{bulk}}^{\prime }}$${\phi }_{\delta }={\Phi }_s-2{\Phi }_B=v_t\ln \left(\frac{V_{\mathrm{gsteffCV}}·V_{\mathrm{gsteffCV}}+2K_{1\mathrm{ox}}\sqrt{2{\Phi }_B}}{\mathrm{MOIN}·K_{1\mathrm{ox}}^2{v}_t}\right)$$Q_{\mathrm{sub0}}=-W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{axeff}}·\frac{K_{1\mathrm{ox}}^2}{2}·\left[-1+\sqrt{1+\frac{4\left(V_{\mathrm{gse}}-V_{\mathrm{FBeff}}-V_{\mathrm{bseffs}}-V_{\mathrm{gsteff},\mathrm{cv}}\right)}{K_{1\mathrm{ox}}^2}}\right]$$Q_{\mathrm{inv}}=-W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxeff}}·\left[V_{\mathrm{gsteff}.\mathrm{cv}}-{\phi }_{\delta }-\frac{1}{2}{A}_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}+\frac{A_{\mathrm{bulk}}^{\mathrm{\prime 2}}{V}_{\mathrm{cveff}}^2}{12·\left(V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }-A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}/2\right)}\right]$$\delta Q_{\mathrm{sub}}=W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{axeff}}·\left[\frac{1-A_{\mathrm{bulk}}^{\prime }}{2}{V}_{\mathrm{cveff}}-\frac{\left(1-A_{\mathrm{bulk}}^{\prime }\right)·A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}^2}{12·\left(V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }-A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}/2\right)}\right]$

50/50 Partitioning: $Q_S=Q_D=-\frac{W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{axeff}}}{2}[V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }-\frac{1}{2}{A}_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}+\frac{A_{\mathrm{bulk}}^{\mathrm{\prime 2}}{V}_{\mathrm{cveff}}^2}{12·\left(V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }-A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}/2\right)}]$

40/60 Partitioning: $\begin{array}{c}{Q}_S=-\frac{W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxeff}}}{2{\left(V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }-\frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}}{2}\right)}^2}\\ \left[\begin{array}{c}{\left(V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }\right)}^3-\frac{4}{3}{\left(V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }\right)}^2{A}_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}+\\ \frac{2}{3}\left(V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }\right){\left(A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}\right)}^2-\frac{2}{15}{\left(A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}\right)}^3\end{array}\right]\\ Q_D=-\frac{W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxeff}}}{2{\left(V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }-\frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}}{2}\right)}^2}\\ \left[\begin{array}{c}{\left(V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }\right)}^3-\frac{5}{3}{\left(V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }\right)}^2{A}_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}+\\ \left(V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }\right){\left(A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}\right)}^2-\frac{1}{5}{\left(A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}\right)}^3\end{array}\right]\end{array}$

0/100 Partitioning: $\begin{array}{c}{Q}_S=-\frac{W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxeff}}}{2}·[V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }+\frac{1}{2}{A}_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}-\\ \frac{A_{\mathrm{bulk}}^{\prime 2}{V}_{\mathrm{cveff}}^2}{12·\left(V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }-\frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}}{2}\right)}]\\ Q_D=-\frac{W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxeff}}}{2}·[V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }-\frac{3}{2}{A}_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{cveff}}+\\ \frac{A_{\mathrm{bulk}}^{\prime 2}{V}_{\mathrm{cveff}}^2}{4·\left(V_{\mathrm{gsteff},\mathrm{cv}}-{\phi }_{\delta }-\frac{A_{\mathrm{bulk}}^{\prime }{V}_{\mathrm{dveff}}}{2}\right)}]\end{array}$ Fringe Capacitance Model $\begin{array}{cc}\mathrm{CF}=\frac{2·\mathrm{EPSROX}·{\varepsilon }_0}{\pi }·\log \left(1+\frac{4.0e-7}{\mathrm{TOXE}}\right)& \left(7.5\mathrm{.1}\right)\end{array}$ Bias-Dependent Overlap Capacitance Model

(i) Source Side $\begin{array}{cc}\frac{Q_{\mathrm{overlap},s}}{W_{\mathrm{active}}}=\mathrm{CGSO}·V_{\mathrm{gs}}+\mathrm{CGSL}(V_{\mathrm{gs}}-V_{\mathrm{gs},\mathrm{overlap}}-& \left(7.5\mathrm{.2}\right)\\ \frac{\mathrm{CKAPPAS}}{2}\left(-1+\sqrt{1-\frac{4V_{\mathrm{gs},\mathrm{overlap}}}{\mathrm{CKAPPAS}}}\right))& \\ \begin{array}{cc}{V}_{\mathrm{gs},\mathrm{overlap}}=\frac{1}{2}\left(V_{\mathrm{gs}}+{\delta }_1-\sqrt{{\left(V_{\mathrm{gs}}+{\delta }_1\right)}^2+4{\delta }_1}\right),& {\delta }_1=0.02V\end{array}& \left(7.5\mathrm{.3}\right)\end{array}$

(ii) Drain Side $\begin{array}{cc}\frac{Q_{\mathrm{overlap},d}}{W_{\mathrm{active}}}=\mathrm{CGDO}·V_{\mathrm{gd}}+\mathrm{CGDL}(V_{\mathrm{gd}}-V_{\mathrm{gd},\mathrm{overlap}}-& \left(7.5\mathrm{.4}\right)\\ \frac{\mathrm{CKAPPAD}}{2}\left(-1+\sqrt{1-\frac{4V_{\mathrm{gd},\mathrm{overlap}}}{\mathrm{CKAPPAD}}}\right))& \\ \begin{array}{cc}{V}_{\mathrm{gd},\mathrm{overlap}}=\frac{1}{2}\left(V_{\mathrm{gd}}+{\delta }_1-\sqrt{{\left(V_{\mathrm{gd}}+{\delta }_1\right)}^2+4{\delta }_1}\right),& {\delta }_1=0.02V\end{array}& \left(7.5\mathrm{.5}\right)\end{array}$

(iii) Gate Overlap Charge Q_overlap,g=−(Q_overlap,d+Q_overlap,s+(CGBO·L_active)·V_gb)  (7.5.6) Bias-Independent Overlap Capacitance Model

The gate-to-source overlap charge is expressed by Q_overlap,s=W_active·CGSO·V_gs

The gate-to-drain overlap charge is calculated by Q_overlap,d=W_active·CGDO·V_gd

The gate-to-substrate overlap charge is computed by Q_overlap,b=L_active·CGBO·V_gb Charge-Deficit Non-Quasi Static Model

The Transient Model $\begin{array}{cc}{Q}_{\mathrm{def}}\left(t\right)=V_{\mathrm{def}}\times C_{\mathrm{fact}}& \left(8.1\mathrm{.1}\right)\\ i_{D,G,S}\left(t\right)=I_{D,G,S}\left(\mathrm{DC}\right)+\frac{\partial Q_{d,g,s}\left(t\right)}{\partial t}& \left(8.1\mathrm{.2}\right)\\ Q_{\mathrm{def}}\left(t\right)=Q_{\mathrm{cheq}}\left(t\right)-Q_{\mathrm{ch}}\left(t\right)& \left(8.1\mathrm{.3}\right)\\ \frac{\partial Q_{\mathrm{def}}\left(t\right)}{\partial t}=\frac{\partial Q_{\mathrm{cheq}}\left(t\right)}{\partial t}-\frac{Q_{\mathrm{def}}\left(t\right)}{\tau }& \left(8.1\mathrm{.4}a\right)\\ \frac{\partial Q_{d,g,s}\left(t\right)}{\partial t}=D,G,S_{\mathrm{xpart}}\frac{Q_{\mathrm{def}}\left(t\right)}{\tau }& \left(8.1\mathrm{.4}b\right)\\ \frac{1}{R_{\mathrm{ii}}}=\mathrm{XRCRG1}·\left(\frac{I_{\mathrm{ds}}}{V_{\mathrm{dseff}}}+\mathrm{XRCRG2}·\frac{W_{\mathrm{eff}}{\mu }_{\mathrm{eff}}{C}_{\mathrm{oxeff}}{k}_{B}T}{q{L}_{\mathrm{eff}}}\right)& \left(8.1\mathrm{.5}\right)\end{array}$ The AC Model $\begin{array}{cc}\Delta Q_{\mathrm{ch}}\left(t\right)=\frac{\Delta Q_{\mathrm{cheq}}\left(t\right)}{1+j\omega \tau }& \left(8.1\mathrm{.6}\right)\\ G_m=\frac{G_{\mathrm{m0}}}{1+{\omega }^2{\tau }^2}+j\left(-\frac{G_{\mathrm{m0}}·\omega \tau }{1+{\omega }^2{\tau }^2}\right)& \left(8.1\mathrm{.7}\right)\\ C_{\mathrm{dg}}=\frac{C_{\mathrm{dg0}}}{1+{\omega }^2{\tau }^2}+j\left(-\frac{C_{\mathrm{dg0}}·\omega \tau }{1+{\omega }^2{\tau }^2}\right)& \left(8.1\mathrm{.8}\right)\end{array}$ Gate Electrode Electrode and Intrinsic-Input Resistance Model $\begin{array}{cc}\mathrm{Rgeltd}=\frac{\mathrm{RSHG}·\left(\mathrm{XGW}+\frac{W_{\mathrm{effcj}}}{3·\mathrm{NGCON}}\right)}{\mathrm{NGCON}·\left(L_{\mathrm{drawn}}-\mathrm{XGL}\right)·\mathrm{NF}}& \left(8.1\mathrm{.9}\right)\end{array}$ Charge-Deficit Non-Quasi Static Model

The Transient Model $\begin{array}{cc}{Q}_{\mathrm{def}}\left(t\right)=V_{\mathrm{def}}\times C_{\mathrm{fact}}& \left(8.1\mathrm{.1}\right)\\ i_{D,G,S}\left(t\right)=I_{D,G,S}\left(\mathrm{DC}\right)+\frac{\partial Q_{d,g,s}\left(t\right)}{\partial t}& \left(8.1\mathrm{.2}\right)\\ Q_{\mathrm{def}}\left(t\right)=Q_{\mathrm{cheq}}\left(t\right)-Q_{\mathrm{ch}}\left(t\right)& \left(8.1\mathrm{.3}\right)\\ \frac{\partial Q_{\mathrm{def}}\left(t\right)}{\partial t}=\frac{\partial Q_{\mathrm{cheq}}\left(t\right)}{\partial t}-\frac{Q_{\mathrm{def}}\left(t\right)}{\tau }& \left(8.1\mathrm{.4}a\right)\\ \frac{\partial Q_{d,g,s}\left(t\right)}{\partial t}=D,G,S_{\mathrm{xpart}}\frac{Q_{\mathrm{def}}\left(t\right)}{\tau }& \left(8.1\mathrm{.4}b\right)\\ \frac{1}{R_{\mathrm{ii}}}=\mathrm{XRCRG1}·\left(\frac{I_{\mathrm{ds}}}{V_{\mathrm{dseff}}}+\mathrm{XRCRG2}·\frac{W_{\mathrm{eff}}{\mu }_{\mathrm{eff}}{C}_{\mathrm{oxeff}}{k}_{B}T}{q{L}_{\mathrm{eff}}}\right)& \left(8.1\mathrm{.5}\right)\end{array}$ The AC Model $\begin{array}{cc}\Delta Q_{\mathrm{ch}}\left(t\right)=\frac{\Delta Q_{\mathrm{cheq}}\left(t\right)}{1+j\omega \tau }& \left(8.1\mathrm{.6}\right)\\ G_m=\frac{G_{\mathrm{m0}}}{1+{\omega }^2{\tau }^2}+j\left(-\frac{G_{\mathrm{m0}}·\omega \tau }{1+{\omega }^2{\tau }^2}\right)& \left(8.1\mathrm{.7}\right)\\ C_{\mathrm{dg}}=\frac{C_{\mathrm{dg0}}}{1+{\omega }^2{\tau }^2}+j\left(-\frac{C_{\mathrm{dg0}}·\omega \tau }{1+{\omega }^2{\tau }^2}\right)& \left(8.1\mathrm{.8}\right)\end{array}$ Gate Electrode Electrode and Intrinsic-Input Resistance Model $\begin{array}{cc}\mathrm{Rgeltd}=\frac{\mathrm{RSHG}·\left(\mathrm{XGW}+\frac{W_{\mathrm{effci}}}{3·\mathrm{NGCON}}\right)}{\mathrm{NGCON}·\left(L_{\mathrm{drawn}}-\mathrm{XGL}\right)·\mathrm{NF}}& \left(8.1\mathrm{.9}\right)\\ S_{\mathrm{id}}\left(f\right)=\frac{\mathrm{KF}·I_{\mathrm{ds}}^{\mathrm{AF}}}{C_{\mathrm{oxe}}{L}_{\mathrm{eff}}^2{f}^{\mathrm{EF}}}& \left(9.1\mathrm{.1}\right)\\ S_{\mathrm{id},\mathrm{lev}}\left(f\right)=\frac{k_B{\mathrm{Tq}}^2{\mu }_{\mathrm{eff}}{I}_{\mathrm{ds}}}{C_{\mathrm{oxe}}{L}_{\mathrm{eff}}^2{A}_{\mathrm{bulk}}{f}^{\mathrm{ef}}·{10}^{10}}\left(\mathrm{NOIA}\log \left(\frac{N_0+N^a}{N_1+N^a}\right)+\mathrm{NOIB}\left(N_0-N_1\right)+\frac{\mathrm{NOIC}}{2}\left(N_0^2-N_1^2\right)\right)+\frac{k_B{\mathrm{TI}}_{\mathrm{ds}}^2{\mathrm{\Delta L}}_{\mathrm{clm}}}{W_{\mathrm{eff}}·L_{\mathrm{eff}}^2{f}^{\mathrm{ef}}·{10}^{10}}·\frac{\mathrm{NOLA}+{\mathrm{NOIBN}}_i+{\mathrm{NOIGN}}_i^2}{{\left(N_i+N^a\right)}^2}& \left(9.1\mathrm{.2}\right)\\ N_0=C_{\mathrm{oxe}}·V_{\mathrm{gsteff}}/q& \left(9.1\mathrm{.3}\right)\\ N_l=C_{\mathrm{oxe}}·V_{\mathrm{gsteff}}·\left(1-\frac{A_{\mathrm{bulk}}{V}_{\mathrm{dseff}}}{V_{\mathrm{gsteff}}+2V_i}\right)/q& \left(9.1\mathrm{.4}\right)\\ N^a=k_{B}T·\left(C_{\mathrm{oxe}}+C_d+\mathrm{CIT}\right)/q^2& \left(9.1\mathrm{.5}\right)\\ {\mathrm{\Delta L}}_{\mathrm{clm}}=\mathrm{Litl}·\log \left(\frac{\frac{V_{\mathrm{ils}}-V_{\mathrm{dseff}}}{\mathrm{Litl}}+\mathrm{EM}}{E_{\mathrm{set}}}\right)E_{\mathrm{set}}=\frac{2\mathrm{VSAT}}{{\mu }_{\mathrm{eff}}}& \left(9.1\mathrm{.6}\right)\\ S_{\mathrm{id},\mathrm{subVt}}\left(f\right)=\frac{\mathrm{NOIA}·k_{B}T·I_{\mathrm{ds}}^2}{W_{\mathrm{eff}}{L}_{\mathrm{eff}}{f}^{\mathrm{EF}}{N}^{\mathrm{a2}}·{10}^{10}}& \left(9.1\mathrm{.7}\right)\\ S_{\mathrm{id}}\left(f\right)=\frac{S_{\mathrm{id},\mathrm{lav}}\left(f\right)\times S_{\mathrm{id},\mathrm{subvt}}\left(f\right)}{S_{\mathrm{id},\mathrm{subvt}}\left(f\right)+S_{\mathrm{id},\mathrm{lav}}\left(f\right)}& \left(9.1\mathrm{.8}\right)\end{array}$ Channel Thermal Noise $\begin{array}{cc}\stackrel{\_}{i_d^2}=\frac{4k_{B}T\Delta f}{R_{\mathrm{ds}}\left(V\right)+\frac{L_{\mathrm{eff}}^2}{{\mu }_{\mathrm{eff}}Q_{\mathrm{inv}}}}·\mathrm{NTNOI}& \left(9.2\mathrm{.1}\right)\\ Q_{\mathrm{inv}}=W_{\mathrm{active}}{L}_{\mathrm{active}}{C}_{\mathrm{oxeff}}·\mathrm{NF}·& \left(9.2\mathrm{.2}\right)\\ \left[V_{\mathrm{gsteff}}-\frac{A_{\mathrm{bulk}}{V}_{\mathrm{dseff}}}{2}+\frac{A_{\mathrm{bulk}}^2{V}_{\mathrm{dseff}}^2}{12·\left(V_{\mathrm{gsteff}}-\frac{A_{\mathrm{bulk}}{V}_{\mathrm{dseff}}}{2}\right)}\right]& \\ \stackrel{\_}{v_d^2}=4k_{B}T·{\theta }_{\mathrm{tnoi}}^2·\frac{V_{\mathrm{dseff}}\Delta f}{I_{\mathrm{ds}}}& \left(9.2\mathrm{.3}\right)\\ \stackrel{\_}{i_d^2}=4k_{B}T{\frac{V_{\mathrm{dseff}}\Delta f}{I_{\mathrm{ds}}}\left[G_{\mathrm{ds}}+{\beta }_{\mathrm{tnoi}}·\left(G_m+G_{\mathrm{mbs}}\right)\right]}^2-& \left(9.2\mathrm{.4}\right)\\ \stackrel{\_}{v_d^2}·{\left(G_m+G_{\mathrm{ds}}+G_{\mathrm{mbs}}\right)}^2& \\ {\theta }_{\mathrm{tnoi}}=0.37·\left[1+\mathrm{TNOIB}·L_{\mathrm{eff}}·{\left(\frac{V_{\mathrm{gsteff}}}{E_{\mathrm{sat}}{L}_{\mathrm{eff}}}\right)}^2\right]& \left(9.2\mathrm{.5}\right)\\ {\beta }_{\mathrm{tnoi}}=0.577·\left[1+\mathrm{TNOIA}·L_{\mathrm{eff}}·{\left(\frac{V_{\mathrm{gsteff}}}{E_{\mathrm{sat}}{L}_{\mathrm{eff}}}\right)}^2\right]& \left(9.2\mathrm{.6}\right)\end{array}$ Junction Diode IV Model

Source/Body Junction Diode

• • dioMod=0 $\begin{array}{cc}{I}_{\mathrm{bs}}=I_{\mathrm{sbs}}\left[\exp \left(\frac{{\mathrm{qV}}_{\mathrm{bs}}}{\mathrm{NJS}·k_B\mathrm{TNOM}}\right)-1\right]·f_{\mathrm{breakdown}}+V_{\mathrm{bs}}·G_{\min }& \left(10.1\mathrm{.1}\right)\\ I_{\mathrm{sbs}}=A_{\mathrm{seff}}{J}_{\mathrm{ss}}\left(T\right)+P_{\mathrm{seff}}{J}_{\mathrm{ssws}}\left(T\right)+W_{\mathrm{effcj}}·\mathrm{NF}·J_{\mathrm{sswgs}}\left(T\right)& \left(10.1\mathrm{.2}\right)\\ f_{\mathrm{breakdown}}=1+\mathrm{XJBVS}·\exp \left(-\frac{q·\left(\mathrm{BVS}+V_{\mathrm{bs}}\right)}{\mathrm{NJS}·k_B\mathrm{TNOM}}\right).& \left(10.1\mathrm{.3}\right)\end{array}$
  • dioMod=1 $\begin{array}{cc}{I}_{\mathrm{bs}}=I_{\mathrm{sbs}}\left[\exp \left(\frac{{\mathrm{qV}}_{\mathrm{bs}}}{\mathrm{NJS}·k_B\mathrm{TNOM}}\right)-1\right]+V_{\mathrm{bs}}·G_{\min }& \left(10.1\mathrm{.4}\right)\\ I_{\mathrm{bs}}=I_{\mathrm{sbs}}\left[\exp \left(\frac{{\mathrm{qV}}_{\mathrm{bs}}}{\mathrm{NJS}·k_B\mathrm{TNOM}}\right)-1\right]·f_{\mathrm{breakdown}}+V_{\mathrm{bs}}·G_{\min }& \left(10.1\mathrm{.5}\right)\end{array}$

Drain/Body Junction Diode

• • dioMod=0 $\begin{array}{cc}{I}_{\mathrm{bd}}=I_{\mathrm{sbd}}\left[\exp \left(\frac{{\mathrm{qV}}_{\mathrm{bd}}}{\mathrm{NJD}·k_B\mathrm{TNOM}}\right)-1\right]·f_{\mathrm{breakdown}}+& \left(10.1\mathrm{.6}\right)\\ V_{\mathrm{bd}}·G_{\min }& \\ I_{\mathrm{sbd}}=A_{\mathrm{deff}}{J}_{\mathrm{sd}}\left(T\right)+P_{\mathrm{deff}}{J}_{\mathrm{sswd}}\left(T\right)+W_{\mathrm{effcj}}·\mathrm{NF}·J_{\mathrm{sswgd}}\left(T\right)& \left(10.1\mathrm{.7}\right)\\ f_{\mathrm{breakdown}}=1+\mathrm{XJBVD}·\exp \left(-\frac{q·\left(\mathrm{BVD}+V_{\mathrm{bd}}\right)}{\mathrm{NJD}·k_B\mathrm{TNOM}}\right)& \left(10.1\mathrm{.8}\right)\end{array}$
  • dioMod=1 $\begin{array}{cc}{I}_{\mathrm{bd}}=I_{\mathrm{sbd}}\left[\exp \left(\frac{{\mathrm{qV}}_{\mathrm{bd}}}{\mathrm{NJD}·k_B\mathrm{TNOM}}\right)-1\right]+V_{\mathrm{bd}}·G_{\min }& \left(10.1\mathrm{.9}\right)\\ I_{\mathrm{bd}}=I_{\mathrm{sbd}}\left[\exp \left(\frac{{\mathrm{qV}}_{\mathrm{bd}}}{\mathrm{NJD}·k_B\mathrm{TNOM}}\right)-1\right]·f_{\mathrm{breakdown}}+& \left(10.1\mathrm{.10}\right)\\ V_{\mathrm{bd}}·G_{\min }& \end{array}$ Junction Diode CV Model

Source/Body Junction Diode C_bs=A_seffC_jbs+P_seffC_jbasw+W_effcj·NF·C_jbsswg  (10.2.1)

If Vbs<0, use equn. 10.2.2, otherwise use equn. 10.2.3 $\begin{array}{cc}{C}_{\mathrm{jbs}}=\mathrm{CJS}\left(T\right)·{\left(1-\frac{V_{\mathrm{bs}}}{\mathrm{PBS}\left(T\right)}\right)}^{-\mathrm{MJS}}& \left(10.2\mathrm{.2}\right)\\ C_{\mathrm{jbs}}=\mathrm{CJS}\left(T\right)·\left(1+\mathrm{MJS}·\frac{V_{\mathrm{bs}}}{\mathrm{PBS}\left(T\right)}\right)& \left(10.2\mathrm{.3}\right)\end{array}$

If Vbs<0, use equn. 10.2.4, otherwise use equn. 10.2.5 $\begin{array}{cc}{C}_{\mathrm{jbssw}}=\mathrm{CJSWS}\left(T\right)·{\left(1-\frac{V_{\mathrm{bs}}}{\mathrm{PBSWS}\left(T\right)}\right)}^{-\mathrm{MJSWS}}& \left(10.2\mathrm{.4}\right)\\ C_{\mathrm{jbssw}}=\mathrm{CJSWS}\left(T\right)·\left(1+\mathrm{MJSWS}·\frac{V_{\mathrm{bs}}}{\mathrm{PBSWS}\left(T\right)}\right)& \left(10.2\mathrm{.5}\right)\end{array}$

If Vbs<0, use equn. 10.2.6, otherwise use equn. 10.2.7 $\begin{array}{cc}{C}_{\mathrm{jbsswg}}=\mathrm{CJSWGS}\left(T\right)·{\left(1-\frac{V_{\mathrm{bs}}}{\mathrm{PBSWGS}\left(T\right)}\right)}^{-\mathrm{MJSWGS}}& \left(10.2\mathrm{.6}\right)\\ C_{\mathrm{jbsswg}}=\mathrm{CJSWGS}\left(T\right)·{\left(1-\frac{V_{\mathrm{bs}}}{\mathrm{PBSWGS}\left(T\right)}\right)}^{-\mathrm{MJSWGS}}& \left(10.2\mathrm{.7}\right)\end{array}$ Drain/Body Junction Diode C_bd=A_deffC_jbd+P_deffC_jbdsw+W_effcj·NF·C_jbdswg  (10.2.8)

If Vbd<0, use equn. 10.2.9, otherwise use equn. 10.2.10 $\begin{array}{cc}{C}_{\mathrm{jbd}}=\mathrm{CJD}\left(T\right)·{\left(1-\frac{V_{\mathrm{bd}}}{\mathrm{PBD}\left(T\right)}\right)}^{-\mathrm{MJD}}& \left(10.2\mathrm{.9}\right)\\ C_{\mathrm{jbd}}=\mathrm{CJD}\left(T\right)·\left(1+\mathrm{MJD}·\frac{V_{\mathrm{bd}}}{\mathrm{PBD}\left(T\right)}\right)& \left(10.2\mathrm{.10}\right)\end{array}$

If Vbd<0, use equn. 10.2.11, otherwise use equn. 10.2.12 $\begin{array}{cc}{C}_{\mathrm{jbdsw}}=\mathrm{CJSWD}\left(T\right)·{\left(1-\frac{V_{\mathrm{bd}}}{\mathrm{PBSWD}\left(T\right)}\right)}^{-\mathrm{MJSWD}}& \left(10.2\mathrm{.11}\right)\\ C_{\mathrm{jbdsw}}=\mathrm{CJSWD}\left(T\right)·\left(1+\mathrm{MJSWD}·\frac{V_{\mathrm{bd}}}{\mathrm{PBSWD}\left(T\right)}\right)& \left(10.2\mathrm{.12}\right)\end{array}$

If Vbd<0, use equn. 10.2.13, otherwise use equn. 10.2.14 $\begin{array}{cc}{C}_{\mathrm{jbdswg}}=\mathrm{CJSWGD}\left(T\right)·{\left(1-\frac{V_{\mathrm{bd}}}{\mathrm{PBSWGD}\left(T\right)}\right)}^{-\mathrm{MJSWGD}}& \left(10.2\mathrm{.13}\right)\\ C_{\mathrm{jbdswg}}=\mathrm{CJSWGD}\left(T\right)·\left(1+\mathrm{MJSWGD}·\frac{V_{\mathrm{bd}}}{\mathrm{PBSWGD}\left(T\right)}\right)& \left(10.2\mathrm{.14}\right)\end{array}$ Layout Dependent Parasitic Models

Gate Electrode Resistance $\begin{array}{cc}\mathrm{Rgeltd}=\frac{\mathrm{RSHG}·\left(\mathrm{XGW}+\frac{W_{\mathrm{effcj}}}{3·\mathrm{NGCON}}\right)}{\mathrm{NGCON}·\left(L_{\mathrm{drawn}}-\mathrm{XGL}\right)·\mathrm{NF}}& \left(11.2\mathrm{.1}\right)\end{array}$ Temperature Dependence Model

• • • • • Temperature Dependence of Threshold Voltage $\begin{array}{cc}\begin{array}{c}{V}_{\mathrm{sh}}\left(T\right)=V_{\mathrm{th}}\left(\mathrm{TNOM}\right)+\\ \left(\mathrm{KT1}+\frac{\mathrm{KT1L}}{L_{\mathrm{eff}}}+\mathrm{KT2}·V_{\mathrm{bseff}}\right)·\left(\frac{T}{\mathrm{TNOM}}-1\right)\end{array}& \left(12.1\mathrm{.1}\right)\end{array}$

Temperature Dependence of Mobility U0(T)=U0(TNOM)·(T/TNOM)^UTE  (12.2.1) UA(T)=UA(TNOM)+UA1(T/TNOM−1)  (12.2.2) UB(T)=UB(TNOM)+UB1·(T/TNOM−1)  (12.2.3) UC(T)=UC(TNOM)+UC1·(T/TNOM−1)  (12.2.4)

Temperature Dependency of Saturation Velocity VSAT(T)=VSAT(TNOM)−AT·(T/TNOM−1)  (12.3.1)

Temperature Dependency of LDD Resistance

• • rdsMod=0 RDSW(T)=RDSW(TNOM)+PRT·(T/TNOM−1)  (12.4.1) RDSWMIN(T)=RDSWMIN(TNOM)+PRT·(T/TNOM−1)  (12.4.2)
  • rdsMod=1 RDW(T)=RDW(TNOM)+PRT·(T/TNOM−1)  (12.4.3) RDWMIN(T)=RDWMIN(TNOM)+PRT·(T/TNOM−1)  (12.4.4) RSW(T)=RSW(TNOM)+PRT·(T/TNOM−1)  (12.4.5) RSWMIN(T)=RSWMIN(TNOM)+PRT·(T/TNOM−1)  (12.4.6) Temperature Dependence of Junction Diode IV I_sbs=A_seffJ_ss(T)+P_seffJ_ssws(T)+W_effcj·NF·J_sswgs(T)  (12.5.1) $\begin{array}{cc}{I}_{\mathrm{sbs}}=A_{\mathrm{seff}}{J}_{\mathrm{ss}}\left(T\right)+P_{\mathrm{seff}}{J}_{\mathrm{ssws}}\left(T\right)+W_{\mathrm{effcj}}·\mathrm{NF}·J_{\mathrm{sswgs}}\left(T\right)& \left(12.5\mathrm{.1}\right)\\ J_{\mathrm{ss}}\left(T\right)=\mathrm{JSS}\left(\mathrm{TNOM}\right)·\exp \left(\frac{\frac{E_g\left(\mathrm{TNOM}\right)}{v_t\left(\mathrm{TNOM}\right)}-\frac{E_g\left(T\right)}{v_t\left(T\right)}+\mathrm{XTIS}·\ln \left(\frac{T}{\mathrm{TNOM}}\right)}{\mathrm{NJS}}\right)& \left(12.5\mathrm{.2}\right)\\ J_{\mathrm{ssws}}\left(T\right)=\mathrm{JSSWS}\left(\mathrm{TNOM}\right)·\exp \left(\frac{\frac{E_g\left(\mathrm{TNOM}\right)}{v_t\left(\mathrm{TNOM}\right)}-\frac{E_g\left(T\right)}{v_t\left(T\right)}+\mathrm{XTIS}·\ln \left(\frac{T}{\mathrm{TNOM}}\right)}{\mathrm{NJS}}\right)& \left(12.5\mathrm{.3}\right)\\ J_{\mathrm{sswgs}}\left(T\right)=\mathrm{JSSWGS}\left(\mathrm{TNOM}\right)·\exp \left(\frac{\frac{E_g\left(\mathrm{TNOM}\right)}{v_t\left(\mathrm{TNOM}\right)}-\frac{E_g\left(T\right)}{v_t\left(T\right)}+\mathrm{XTIS}·\ln \left(\frac{T}{\mathrm{TNOM}}\right)}{\mathrm{NJS}}\right)& \left(12.5\mathrm{.4}\right)\end{array}$ drain side diode I_sbd=A_deffJ_sd(T)+P_deffJ_sswd(T)+W_effcj·NF·J_sswgd(T)  (12.5.5) $\begin{array}{cc}{I}_{\mathrm{sbd}}=A_{\mathrm{deff}}{J}_{\mathrm{sd}}\left(T\right)+P_{\mathrm{deff}}{J}_{\mathrm{sswd}}\left(T\right)+W_{\mathrm{effcj}}·\mathrm{NF}·J_{\mathrm{sswgd}}\left(T\right)& \left(12.5\mathrm{.5}\right)\\ J_{\mathrm{sd}}\left(T\right)=\mathrm{JSD}\left(\mathrm{TNOM}\right)·\exp \left(\frac{\frac{E_g\left(\mathrm{TNOM}\right)}{v_t\left(\mathrm{TNOM}\right)}-\frac{E_g\left(T\right)}{v_t\left(T\right)}+\mathrm{XTID}·\ln \left(\frac{T}{\mathrm{TNOM}}\right)}{\mathrm{NJD}}\right)& \left(12.5\mathrm{.6}\right)\\ J_{\mathrm{sswd}}\left(T\right)=\mathrm{JSSWD}\left(\mathrm{TNOM}\right)·\exp \left(\frac{\frac{E_g\left(\mathrm{TNOM}\right)}{v_t\left(\mathrm{TNOM}\right)}-\frac{E_g\left(T\right)}{v_t\left(T\right)}+\mathrm{XTID}·\ln \left(\frac{T}{\mathrm{TNOM}}\right)}{\mathrm{NJD}}\right)& \left(12.5\mathrm{.7}\right)\\ J_{\mathrm{sswgd}}\left(T\right)=\mathrm{JSSWGD}\left(\mathrm{TNOM}\right)·\exp \left(\frac{\frac{E_g\left(\mathrm{TNOM}\right)}{v_t\left(\mathrm{TNOM}\right)}-\frac{E_g\left(T\right)}{v_t\left(T\right)}+\mathrm{XTID}·\ln \left(\frac{T}{\mathrm{TNOM}}\right)}{\mathrm{NJD}}\right)& \left(12.5\mathrm{.8}\right)\end{array}$ Temperature Dependence of Junction Diode CV
  • source side diode CJS(T)=CJS(TNOM)·[1+TCJ·(T−TNOM)]  (12.6.1) CJSWS(T)=CJSWS(TNOM)+TCJSW·(T−TNOM)  (12.6.2) CJSWGS(T)=CJSWGS(TNOM)·[1+TCJSWG·(T−TNOM)]  (12.6.3) PBS(T)=PBS(TNOM)−TPB·(T−TNOM)  (12.6.4) PBSWS(T)=PBSWS(TNOM)−TPBSW·(T−TNOM)  (12.6.5) PBSWGS(T)=PBSWGS(TNOM)−TPBSWG·(T−TNOM)  (12.6.6) drain side diode CJD(T)=CJD(TNOM)·[1+TCJ·(T−TNOM)]  (12.6.7) CJSWD(T)=CJSWD(TNOM)+TCJSW·(T−TNOM)  (12.6.8) CJSWGD(T)=CJSWGD(TNOM)·[1+TCJSWG·(T−TNOM)]  (12.6.9) PBD(T)=PBD(TNOM)−TPB·(T−TNOM)  (12.6.10) PBSWD(T)=PBSWD(TNOM)−TPBSW·(T−TNOM)  (12.6.11) PBSWGD(T)=PBSWGD(TNOM)−TPBSWG·(T−TNOM)  (12.6.12) Temperature Dependences of Eg and ni Drain Saturation Current Parameters $\begin{array}{cc}{E}_g\left(\mathrm{TNOM}\right)=1.16-\frac{7.02\times {10}^{-4}{\mathrm{TNOM}}^2}{\mathrm{TNOM}+1108}& \left(12.7\mathrm{.1}\right)\\ E_g\left(T\right)=1.16-\frac{7.02\times {10}^{-4}{T}^2}{T+1108}& \left(12.7\mathrm{.2}\right)\\ n_i=1.45e10·\frac{\mathrm{TNOM}}{300.15}·\sqrt{\frac{\mathrm{TNOM}}{300.15}}·\exp \left[21.5565981-\frac{{\mathrm{qE}}_g\left(\mathrm{TNOM}\right)}{2·k_{B}T}\right]& \left(12.7\mathrm{.3}\right)\\ A_{\mathrm{bulk}}=\left\{1-\frac{d{V}_{T,\mathrm{Long}\perp }}{d{V}_{\mathrm{BS},\mathrm{eff}}}\times \left[\frac{\mathrm{A0}·L_{\mathrm{eff}}}{L_{\mathrm{eff}}+2\sqrt{\mathrm{XJ}·X_{\mathrm{dep}}}}\times \left(1-\mathrm{AGS}·{V_{\mathrm{GST},\mathrm{eff}}\left(\frac{L_{\mathrm{eff}}}{L_{\mathrm{eff}}+2\sqrt{\mathrm{XJ}·X_{\mathrm{dep}}}}\right)}^2\right)+\frac{\mathrm{B0}}{W_{\mathrm{eff}}+\mathrm{B1}}\right]\right\}\times \frac{1}{1+\mathrm{KETA}·V_{\mathrm{BS},\mathrm{eff}}}\mathrm{where}\frac{d{V}_{T,\mathrm{Long}\perp }}{d{V}_{\mathrm{BS},\mathrm{eff}}}=\sqrt{1+\frac{\mathrm{LPEB}}{L_{\mathrm{eff}}}}\times \frac{\mathrm{K1}}{2\sqrt{2{\Phi }_f-V_{\mathrm{BS},\mathrm{eff}}}}\frac{\mathrm{TOXE}}{\mathrm{TOXM}}+\mathrm{K2}\frac{\mathrm{TOXE}}{\mathrm{TOXM}}-\mathrm{K3}\times \frac{\mathrm{TOXE}}{W_{\mathrm{eff}}+\mathrm{W0}}2{\Phi }_f& 14.1\end{array}$

Claims

1. A method for extracting semiconductor device model parameters, comprising: obtaining terminal current data corresponding to various bias conditions in a set of test devices; extracting Vth related parameters based on the terminal current data; and extracting Igb related parameters based on the terminal current data and the extracted Vth related parameters.

2. The method of claim 1, wherein the terminal current data comprises one or more Ig v. Vbs curves, and wherein extracting Igb related parameters comprises: extracting Aigbacc, Bigbacc, and Cigbacc using non-linear square fit and the one or more Ig v. Vbs curves; and extracting Nigbacc using said extracted Aigbacc, Bigbacc, and Cigbacc and linear interpolation using maximum slope position in the one or more Ig vs. Vbs curves.

3. The method of claim 1, wherein the terminal current data comprises one or more Ib v. Vgs curves, and wherein extracting Igb related parameters comprises: extracting Aigbinv, Biginv, and Ciginv using non-linear square fit and the one or more Ib v. Vgs curves; and extracting NIgbinv and Eigbinv using the extracted Aigbinv, Bigbinv, and Cigbinv and mathematical optimization.

4. A method for extracting semiconductor device model parameters, comprising: obtaining terminal current data corresponding to various bias conditions in a set of test devices; extracting Vth related parameters; and extracting Igidl related parameters based on the terminal current data and the Vth related parameters.

5. The method of claim 3, wherein the terminal current data comprises Ib v. Vgs curves, and wherein extracting Igidl related parameters further comprises: extracting CGIDL based on the Ib vs Vgs curves for varying Vds; extracting AIGDL and BIGDL using non-linear square fit; and optimizing said AIGDL and said BIGDL to extract EGIDL.

6. A method for extracting semiconductor device model parameters comprising: obtaining terminal current data corresponding to various bias conditions in a set of test devices; extracting Vth related parameters; and extracting Igd and Igs related parameters based on the terminal current data and the extracted Vth related parameters.

7. The method of claim 5, wherein the terminal current data comprises Id v. Vgs and Is v. Vgs curves measured with Vds=0 and Vbs=0 on one or more devices having a maximum Ldrawn*Wdrawn among the set of test devices, and wherein extracting Igc related parameters further comprises: extracting AIGSD, BIGSD, and CIGSD using non-linear square fit method and the Id v. Vgs and Is v. Vgs curves.

8. The method of claim 6, wherein extracting Igd and Igs related parameters further comprises: setting POXEDGE, TOXREF, and NTOX to their default values and setting DLCIG equal to 0.7 *Xj before extracting AIGSD, BIGSD, and CIGSD; and extracting DLCIG after extracting AIGSD, BIGSD, and CIGSD.

9. The method of claim 5, further comprising extracting Igc related parameters by: obtaining Ig v. Vgs curves for devices having a maximum Ldrawn*Wdrawn among the set of test devices; removing Igs and Igd effects from the Ig v Vgs curves using the extracted Igd and Igs related parameters; extracting AIGC, BIGC, and CIGC using non-linear square fit and the Ig v. Vgs curves; and extracting NIGC at Vgs=Vth using linear interpolation. and dividing Igc into its two components, Igcs and Igcd.

10. A method for extracting semiconductor device model parameters comprising: loading measurement data; extracting Vth related parameters; using the extracted Vth related parameters to extract Leff, Rd and Rs related parameters; using the extracted Vth related parameters to extract mobility and Weff related parameters; using the extracted Vth, Leff, mobility, and Weff related parameters to extract Vth geometry related parameters; using the extracted Vth, Leff, Rd Rs, mobility, and Weff related parameters to extract sub-threshold region related parameters; using the extracted Vth related parameters to extract drain induced barrier lower related parameters; using the extracted Vth, Leff, Rd, Rs, mobility, Weff, sub-threshold region, and drain induced barrier lower related parameters to extract Idsat related parameters; and extracting additional DC related parameters.

11. The method of claim 9, wherein the Leff, Rd and Rs related parameters, the Vth geometry related parameters, the subthreshold region related parameters, and the drain induced barrier lower related parameters are extracted using linear region Id v. Vgs curves constructed based on the measurement data.

12. The method of claim 9, wherein the Idsat related parameters are extracted using saturation region Id v. Vds curves constructed based on the measurement data.

13. The method of claim 9, wherein extracting additional DC parameters further comprises: extracting Iii related parameters; and extracting junction related parameters.

14. The method of claim 12, wherein the Iii related parameters are extracted using linear region Id v. Vgs curves constructed based on the measurement data and the junction related parameters are extracted using Cbs V. Vbs curves and Cbd v. Vbs curves constructed based on the measurement data.

15. A method of extracting Igidl related parameters for modeling a MOSFET device, comprising: obtaining terminal current data corresponding to various bias conditions in a set of test devices, the terminal current data including Ib vs Vgs curves measured on the set of test devices; extracting CGIDL using the Ib vs Vgs curves; extracting AIGDL and BIGDL using non-linear square fit; and optimizing said AIGDL and said BIGDl to extract EGIDL.

16. A method for extracting semiconductor device model parameters comprising: obtaining terminal current data corresponding to various bias conditions in a set of test devices; extracting Igb related parameters, Igidl related parameters, Igd and Igs related parameters, and Igc related parameters from the terminal current data; modifying the terminal current data using the Igb related parameters, Igidl related parameters, Igd and Igs related parameters, and Igc related parameters; and extracting additional DC parameters using the modified terminal current data.

17. The method of claim 15, wherein extracting additional DC parameters further comprises: extracting Leff, Rd and Rs related parameters; extracting mobility and Weff related parameters; using the extracted Leff, mobility and Weff related parameters to extract Vth geometry parameters; using the extracted Leff, Rd and Rs, mobility and Weff related parameters to extract sub-threshold region related parameters; extracting DIBL related parameters; and using the extracted Leff, Rd and Rs, mobility and Weff Vth geometry, sub-threshold region and DIBL related parameters to extract Idsat related parameters

18. The method of claim 16, wherein extracting additional DC parameters further comprising: extracting Iii related parameters; and extracting junction related parameters.

19. A computer readable medium comprising computer executable program instructions that when executed cause a digital processing system to perform a method for extracting semiconductor device model parameters, the method comprising: obtaining terminal current data corresponding to various bias conditions in a set of test devices; extracting Igb related parameters, Igidl related parameters, Igd and Igs related parameters, and Igc related parameters from the terminal current data; modifying the terminal current data using the extracted Idiode related parameters and Ibjt related parameter extracting Igb related parameters, Igidl related parameters, Igd and Igs related parameters, and Igc related parameters; and extracting additional DC parameters from the modified terminal current data.

20. A system for extracting semiconductor device model parameters, comprising: a central processing unit (CPU); a port or I/O device communicating with the central processing unit to provide terminal current data to the CPU corresponding to various bias conditions in a set of test devices; a memory communicating with the CPU and storing therein program instructions executable by the CPU to extract Igb related parameters, Igidl related parameters, Igd and Igs related parameters, and Igc related parameters from said terminal current data, to modify said terminal current data based on the extracted Igb related parameters, Igidl related parameters, Igd and Igs related parameters, and Igc related parameters, and to extract DC parameters based on said modified terminal current data.

21. The system according to claim 19, wherein said memory also stores program instructions executable by the CPU to: extract Vth related parameters; use the extracted Vth related parameters to extract Leff, Rd and Rs related parameters; use the extracted Vth related parameters to extract mobility and Weff related parameters; use the extracted Vth, Leff, Rd, Rs, mobility and Weff related parameters to extract sub-threshold region related parameters; use the extracted Vth related parameters to extract drain induced barrier lower related parameters; and use the extracted Vth, Leff, Rd, Rs, mobility, Weff, sub-threshold region, and drain induced barrier lower related parameters to extract Idsat related parameters.