Eye-safe scanning LIDAR system

Information

  • Patent Grant
  • 11927694
  • Patent Number
    11,927,694
  • Date Filed
    Saturday, April 10, 2021
    3 years ago
  • Date Issued
    Tuesday, March 12, 2024
    2 months ago
  • Inventors
  • Original Assignees
    • OPSYS Tech Ltd.
  • Examiners
    • Ratcliffe; Luke D
    Agents
    • Rauschenbach Patent Law Group, PLLC
    • Rauschenbach; Kurt
Abstract
A LIDAR illuminator includes a plurality of laser sources, each comprising an electrical input that receives a modulation drive signal that causes each of the plurality of laser sources to generate an optical beam. A controller having a plurality of electrical outputs, where a respective one of the plurality of electrical outputs is connected to an electrical input of a respective one of the plurality of laser sources, generates a plurality of modulation drive signals that cause the plurality of laser sources to generate a plurality of optical beams that form a combined optical beam. A peak optical energy of the combined optical beam in a measurement aperture at a measurement distance is less than a desired value.
Description
INTRODUCTION

Light detection and ranging (LIDAR) systems are one of the most critical sensors enabling real-time measurements of object distances. LIDAR systems measure distances to objects by illuminating those objects with a laser light. In some cases, LIDAR systems are used to sense the surroundings on vehicles. In these and other applications, the illuminated objects may be people. As such, there is a chance that the laser light from the LIDAR system will illuminate a person's eye.


Laser light can be very dangerous to a person's eye. The coherence and small beam divergence angle of laser light, combined with the lens of the eye, results in the laser light being focused to an extremely small spot size on the retina. This small spot size, with high enough laser optical power, can result in burning of the retina, and permanent damage to the eye. As such, LIDAR systems that can operate with eye-safe levels of laser light energy are needed.





BRIEF DESCRIPTION OF THE DRAWINGS

The present teaching, in accordance with preferred and exemplary embodiments, together with further advantages thereof, is more particularly described in the following detailed description, taken in conjunction with the accompanying drawings. The skilled person in the art will understand that the drawings, described below, are for illustration purposes only. The drawings are not necessarily to scale, emphasis instead generally being placed upon illustrating principles of the teaching. The drawings are not intended to limit the scope of the Applicant's teaching in any way.



FIG. 1 illustrates a LIDAR system of the present teaching implemented on a vehicle.



FIG. 2 illustrates a diagram for determining Maximum Permissible Exposure (MPE) limits for a LIDAR system of the present teaching.



FIG. 3 illustrates an embodiment of a laser array for a LIDAR system illuminator of the present teaching.



FIG. 4A illustrates a chip comprising multiple cluster VCSEL devices arranged individually.



FIG. 4B illustrates a chip comprising multiple cluster VCSEL devices arranged in bars.



FIG. 4C illustrates a top-view of an anode metal contact pad of a chip comprising multiple cluster VCSEL devices of the present teaching.



FIG. 4D illustrates a bottom-view of a cathode metal contact pad of the chip comprising the multiple cluster VCSEL devices illustrated in FIG. 4C.



FIG. 5 illustrates a system block diagram of an embodiment of a compact VCSEL laser driver assembly for an eye-safe LIDAR system according to the present teaching.



FIG. 6A illustrates a schematic diagram of an embodiment of LIDAR illuminator of the present teaching using two arrays of VCSEL of different wavelengths with a first lens system.



FIG. 6B illustrates a schematic diagram of an embodiment of LIDAR illuminator of the present teaching using two arrays of VCSEL of different wavelengths with a second lens system.



FIG. 6C illustrates a schematic diagram of an embodiment of LIDAR illuminator of the present teaching using two arrays of VCSEL of different wavelengths with a third lens system.





DESCRIPTION OF VARIOUS EMBODIMENTS

The present teaching will now be described in more detail with reference to exemplary embodiments thereof as shown in the accompanying drawings. While the present teachings are described in conjunction with various embodiments and examples, it is not intended that the present teachings be limited to such embodiments. On the contrary, the present teachings encompass various alternatives, modifications and equivalents, as will be appreciated by those of skill in the art. Those of ordinary skill in the art having access to the teaching herein will recognize additional implementations, modifications, and embodiments, as well as other fields of use, which are within the scope of the present disclosure as described herein.


Reference in the specification to “one embodiment” or “an embodiment” means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the teaching. The appearances of the phrase “in one embodiment” in various places in the specification are not necessarily all referring to the same embodiment.


It should be understood that the individual steps of the methods of the present teachings can be performed in any order and/or simultaneously as long as the teaching remains operable. Furthermore, it should be understood that the apparatus and methods of the present teachings can include any number or all of the described embodiments as long as the teaching remains operable.


The present teaching relates to Light Detection and Ranging Systems (LIDAR) that measure distances to various objects or targets that reflect and/or scatter light. In particular, the present teaching relates to LIDAR systems that are able to provide LIDAR measurements with a high refresh rate, up to 1 KHz, over a long range, in excess of 70 m, and ensuring system operation consistent with a Class 1 eye-safety standard.


Systems of the present teaching may use laser light sources that include single emitters and/or multiple emitters. For example, light sources that use a single element VCSEL or a single edge-emitting laser device would be considered single emitters. Light sources that use multiple VCSEL elements or multiple edge-emitting laser sources arranged on one or more substrates are considered multiple emitter sources. The multi-element emitters may be configured in various array configurations, including one-dimensional and two-dimensional arrays. One skilled in the art will appreciate that the below description of the present teaching refers to various embodiments of eye-safe scanning LIDAR systems with single-emitter sources and/or multi-emitter laser sources. It will be apparent to those familiar with the art that the features of particular embodiments of LIDAR systems of the present teaching should not be considered limited to either single-emitter and/or multi-emitter laser sources, but rather should be more broadly construed to apply to both single-emitter and/or multi-emitter laser sources.



FIG. 1 illustrates the operation of a LIDAR system 100 of the present teaching implemented in a vehicle. The LIDAR system 100 includes a laser projector, which is sometimes referred to as an illuminator, that projects light beams 102 generated by a light source toward a target scene. The LIDAR system 100 also includes a receiver that receives the light 104 that reflects off an object, shown as a person 106, in that target scene. The LIDAR system 100 can also include a controller that computes the distance to the object 106 from the reflected light. In various embodiments, the controller can be a simple electrical circuit or a more complicated processor, depending on the particular LIDAR requirements. In addition, the LIDAR system 100 also include an element that can scan or provide a particular pattern of the light, which may be a static pattern, across a desired range and field-of-view (FOV). The receiver and controller are used to convert the received signal light into measurements that represent a pointwise three-dimensional (3D) map of the surrounding environment that falls within the LIDAR system range and FOV.


The illuminator that includes the laser source and optical beam projector, as well as the receiver, is sometimes located on the front side of a vehicle 108. A person 106, and/or another object, such as a car or light pole, will provide light reflected from the source back to the receiver. A range or distance to that object is determined by the LIDAR receiver from the reflected light. The LIDAR receiver calculates range information based on time-of-flight measurements of light pulses emitted from the light source.


In addition, information about the optical beam profile that illuminates the scene in a target plane associated with a particular range that is known from, for example, the particular design of the source and projector system, is used to determine location information about the reflecting surface in order to generate a complete x,y,z, or three-dimensional picture of the scene. In other words, the pointwise three-dimensional map of the surrounding environment represents a collection of measurement data that indicates position information from all the surfaces that reflect the illumination from the source to the receiver within the field-of-view of the LIDAR system. In this way, a three-dimensional representation of objects in the field-of-view of the LIDAR system is obtained. The pointwise three-dimensional data map may also be referred to as a measurement point cloud.


Various embodiments of LIDAR systems of the present teaching operate with various laser pulse durations and laser pulse repetition rates, depending on the desired performance. One example is the sampling rate required for one embodiment of an automotive LIDAR system. A car moving at 100 kilometers per hour (kph) is traveling at roughly 28 millimeters per millisecond (mm/msec). If two cars are approaching each other, then the relative distance will decrease at twice that rate, or 56 mm/msec. For a system that is accurate across the full field-of-view, with a distance accuracy of 50 mm (˜2 inches) for each measurement point, we need to be able to scan the complete FOV during that time. The eye-safe LIDAR systems of the present teaching may be applied to other types of LIDAR sensing applications, and are not restricted to sensing for a vehicle or automobile.


Multi-source and multi-wavelength LIDAR system have been proposed by the assignee of the present application. See, U.S. patent application Ser. No. 15/456,789, filed on Mar. 13, 2017 and entitled Multi-Wavelength LIDAR System. The entire contents of U.S. patent application Ser. No. 15/456,789 are incorporated herein by reference. For purposes of illustration, assume a multi-source LIDAR system using 1,000 laser clusters corresponding to particular desired three-dimensional pointwise measurement locations. In order to achieve positional accuracy across the full FOV, as described above, one would need to scan through all 1,000 lasers every millisecond. For a single-wavelength system, where we can only operate and detect one laser at a time, this means we have only one microsecond per laser to acquire the position information for that measurement point.


One feature of the multi-wavelength LIDAR system of the present teaching is that it provides a relatively high refresh rate. Refresh rate is sometimes referred to as frame rate. The refresh rate relates directly to how frequently the distance measurements of a three-dimensional or two-dimensional scene being sensed by the LIDAR are updated. Some embodiments of the present teaching provide a system refresh rate that is at least the same as current low-cost CMOS camera systems that typically have a refresh rate of 30 Hz. However, the refresh rate can be 1 kHz or higher. To understand why a high refresh rate is important, consider an automobile traveling at 100 km/hour. Under these conditions, the automobile will move about 3 meters in 0.1 seconds. So, if the refresh rate is only 10 Hz, objects in front of the car will move significantly in that time causing a significant loss of resolution.


For example, a LIDAR system of the present teaching that uses four wavelengths with 4,096 lasers that are being measured in one frame, and a pulse duration of one microsecond, the refresh rate would be 1 kHz for a single system. If multiple systems are used to cover the complete 360-degree field-of-view, then the refresh rate would still need to be 1 kHz. This assumes a single pulse per measurement. However, if multiple pulses per measurement are used, the refresh rate will be lower.


Laser eye-safety regulations have been established to set standards for the allowable amount of laser radiation that enters the eye without causing eye damage. The standards ensure that products emitting laser light are labeled in such a fashion that consumers understand the safety risks associated with a particular product. The most commonly referenced standard worldwide is IEC 60825-1, published by the International Electrotechnical Commission (IEC), which has been adopted in Europe as EN 60825-1. In the US, laser products are covered by CDRH 21 CFR 1040.10. Compliance with EN 60825-1 has been established as acceptable to meet the U.S. federal standard.


Laser eye-safety standards have different safety categories that are classified by wavelength and maximum output power. The standards define the maximum permissible exposure (MPE), which is specified as the optical power or energy that can pass through a fully open pupil, without causing any damage. The MPE is a function of energy so it is related to the laser pulse duration and repetition rate in a system where the laser pulsed (i.e. not operated continuously).


A Class 1 laser is safe under all conditions of normal use. The maximum permissible exposure (MPE) cannot be exceeded in a Class 1 product. It is highly desired for an automotive LIDAR system to be Class 1 eye safe. In a Class 1 rated LIDAR system, the laser light produced by the LIDAR system will not exceed the MPE in all cases where exposure to a human eye is possible.


Care must be taken in LIDAR systems to ensure Class 1 eye safety while also providing the highest system performance. System performance may include parameters such as angular resolution, refresh rate, field-of-view and range. Many of these performance parameters are linked directly to the laser power and/or the intensity of an optical beam produced at a target plane of the LIDAR system. For example, in order to have the best possible signal-to-noise ratio in the receiver, and also to provide a long maximum distance range, it is desired to have the highest peak optical power for the transmitted laser pulses. However, Class 1 eye safety restricts the maximum peak optical power of each pulse.


For example, calculating from the International Electrotechnical Commission (IEC) standard IEC 60825-1 that for an exposure duration between 10 psec and 5 μsec, the allowable exposure energy for a 903-nm laser will be 0.392 μJoules. For a single laser pulse of duration of 5 nsec, transmitted every 5 μsec, assuming a square pulse shape with zero rise and fall times, the maximum peak power of this pulse would be 78.4 W. For a square pulse with a 50-nsec duration transmitted every 5 μsec, the maximum peak power would be ten times less, or 7.84 W.


The exposure energy is the energy calculated to pass through a fully open pupil of the eye. The International Electrotechnical Commission (IEC) standard includes instructions on how this should be measured, and for a system with wavelength of 400 nm to 1,400 nm wavelength, there are two conditions that apply. Condition 1 applies to a beam collimated by a telescope or binoculars so that the hazard is increased where the aperture stop equals 50 mm at 2,000 mm. Condition 3 applies to determining irradiation relevant for the unaided eye, for scanning beams that define an aperture stop/limiting aperture of 7 mm at 100 mm. The reference point for scanned emission is the scanning vertex (pivot point of the scanning beam). A LIDAR system according to the present teaching with a 100 meter range would nominally fire pulses every microsecond to maximize the refresh rate. In this example, the optical peak power is constrained so that a pulse every one microsecond would need to be five times less in magnitude then if a pulse was fired every five microseconds.


One aspect of the present teaching is that LIDAR systems that use a plurality of lasers can be operated such that the lasers are energized in a way that reduces, or substantially eliminates, the overlap in optical power of the plurality of optical beams so as to create an eye safe system. As described herein, MPE provides a maximum energy measured at any fixed 7-mm aperture at a distance of 100 mm from the laser array, as well as at 50 mm at a distance of 2,000 mm. The added power at particular measurement points from the overlap of the plurality of optical beams will affect the maximum powers allowed for each optical beam. However, the performance, e.g. signal-to-noise, for each measurement point will be limited by this maximum power. FIG. 2 illustrates this concept.



FIG. 2 illustrates a diagram for determining MPE limits for a LIDAR system illuminator 200 of the present teaching. It is desirable for some applications to operate with each beam generated by a particular laser at the MPE limit for a Class 1 standard. In these embodiments, if two beams are operating simultaneously and overlap, the energy will exceed the MPE limit in the region of optical beam overlap. In these embodiments, one solution according to the present teaching to the problem of overlapping optical beams is to energize, or fire, the lasers that generate the overlapping optical beams at separate times. In this way, the energy of both beams is not simultaneously provided in an overlapping section of the two optical beams. This allows both beams to operate at the full energy level allowed by the MPE, without the chance that the system would exceed the eye-safe limit in the overlapping beam region.


The LIDAR system illuminator 200 is designed such that at a distance of 100 mm 202 from the laser array 204, the four beams 206 corresponding to discrete lasers 208, are spaced further apart then 7 mm. Said another way, none of the optical beams 206 are closer than 7 mm at the 100 mm distance so they do not overlap at 100 mm. In this optical configuration, all four lasers 206 could be fired simultaneously without any two of the optical beams combining to form a combined beam that has more optical power than any of the individual optical beams in a manner that impacts eye safety. This is true regardless of whether each laser emits an optical beam with a unique wavelength or whether at least two of the optical beams emit optical beams with the same wavelength. Various embodiments of the scanning LIDAR system of the present teaching utilize illuminators comprising lasers or laser arrays operating at a single wavelength and illuminators comprising lasers or laser arrays operating at multiple wavelengths.


In some embodiments of the LIDAR system illuminators of the present teaching that utilize numerous lasers, such as hundreds of lasers, it is likely that the optical beams from some lasers would overlap at the eye safety measurement aperture, and some would not. In such systems, the sequence of firing of the lasers cannot be totally random in order to prevent overlapping beams that could present an eye safety danger. Thus, one aspect of the present teaching uses a pseudorandom sequence of firing of the lasers. The pattern of firing satisfies a set of mathematical rules which results in an allowed sequence of firing that meets the eye safety limit.


Another aspect of the present teaching is to select preferred firing sequences that would maximize the refresh rate of the system while maintaining an eye safe environment. For example, a non-random firing pattern can be determined which would maximize the overall pulse rate, while maintaining an eye-safe environment. Such a firing pattern could be implemented through a set of rules established in, for example, the firmware of the controller that fires the lasers.


In different embodiments of the LIDAR illuminators of the present teaching, each laser source generates an optical beam with a particular energy based on the pulse width, repetition rate, and peak power of the optical pulses. It is understood by those skilled in the art that the optical beam generated by each laser source has a particular energy density as a function of position in a plane located at the measurement distance. The energy density of the light produced from multiple laser sources in the plane located at the measurement distance is the sum of the individual energy densities as a function of position in the plane resulting from the combination of optical beams. An eye-safe classification is met, for example, if the combined energy density of the combined optical beam as a function of position results in a peak energy, sampled in a 7-mm aperture diameter across the plane at a 100-mm measurement distance, which does not exceed the MPE.


By controlling the pattern of electrical signals that fire the plurality of laser sources, it is possible to control the energy density produced in a plane by the combined optical beams of those plurality of lasers. In particular, it is possible to produce a combined optical beam from the plurality of laser sources wherein a peak optical energy of the combined optical beam in a measurement aperture at a particular measurement distance is less than a desired value. In some embodiments, the measurement aperture is the 7-mm aperture defined by the International Electrotechnical Commission, the measurement distance is 100 mm, and the peak optical energy is the MPE as defined by the International Electrotechnical Commission and based on the particular laser wavelength.



FIG. 3 illustrates an embodiment of a laser array 300 for a LIDAR system illuminator of the present teaching. The laser array 300 consists of thirty individual laser emitters 302 in a configuration of three bars 304 each with two different wavelengths 306. In this configuration, the laser emitters 302 that are immediately adjacent to each other would generate optical beams that overlap in a particular eye-safety measurement aperture. Optical beams generated by laser emitters 302 that are not immediately adjacent would not overlap. The refresh rate can be maximized without impacting eye safety by using a rule that adjacent lasers cannot be fired simultaneously, but non-adjacent lasers of different wavelength can be fired simultaneously.


In this firing rule, lasers 302 on bars 304 labeled B1 in FIG. 3 could not be operated when lasers 302 on bars 304 labeled A1 and A2 in FIG. 3 are operated. In addition, lasers 302 on bars 304 labeled A2 could not be operated when lasers 302 on bars 304 labeled B1 and B2 are operated. Also, lasers 302 on bars 304 labeled A1 may be operated simultaneously lasers 302 on bars 304 labeled B2. In this way, a system of firing rules that allows simultaneous operation of non-adjacent bars at the maximum pulse rate of the system, but ensure that the resulting energy in the optical beams in the eye safety measurement aperture is below the Maximum Permissible Exposure (MPE) limit. This ensures Class 1 eye safety of the overall LIDAR system.


In some embodiments of the scanning LIDAR system of the present teaching, the rules for firing patterns for lasers are generated based on monitoring the illumination pattern that is emitted from the illuminator. That is, a monitor would determine the peak energy in a particular aperture at a particular distance, and a firing pattern would be determined that ensured the peak energy in a particular aperture at a particular distance was less than a particular value. In some embodiments, a rule for the firing pattern of the lasers would be no lasers that produce two or more optical beams that overlap in any eye-safety measurement aperture associate with the illuminator are operated simultaneously. This rule would apply to a system in which each laser generated an optical beam that produced the maximum energy allowed within the eye-safety measurement aperture.


Another aspect of the present teaching is that various operating specifications, such as laser power operating variations and the mechanical tolerances for positioning the optical beams in the illuminator can be achieved by appropriate choice of the rules for firing (energizing or activating) patterns for the lasers.


Various embodiments of the LIDAR systems of the present teaching utilize multiple cluster VCSEL devices on a single chip. FIG. 4A illustrates an array 400 comprising multiple cluster VCSEL devices 402. In particular, FIG. 4A illustrates a twenty-five cluster VCSEL devices 402 in a two-dimensional array. The array is formed with contacts 404 for twenty-five individual cluster VCSEL devices 402 that can be individually biased.



FIG. 4B illustrates an array 450 comprising multiple cluster VCSEL devices 452. FIG. 4B illustrates that the array is arrange to include five cluster VCSEL devices 452 connected with contacts 454 that form five bars with each bar including five cluster VCSEL devices 452. It will be evident to those familiar with the art that a single monolithic 2D VCSEL array can be produced as well.



FIG. 4C illustrates a top-view of an anode metal contact pad 470 of a chip 472 comprising multiple cluster VCSEL devices 474 in a 2D monolithic VCSEL array. The chip illustrated in FIG. 4C is a top-side illuminating VCSEL array. All the anodes of all VCSEL in a single column are connected together with a single metal contact.



FIG. 4D illustrates a bottom-view of a cathode metal contact pad 476 of the chip 472 comprising the multiple cluster VCSEL devices illustrated in FIG. 4C. All the cathodes in a single row are connected together with a single metal contact in a manner that reduces the number of electrical connections. With this pattern of metallization, individual VCSEL devices 474 (FIG. 4C) can be operated by biasing each row and column contact at the desired bias level. In general, when the anodes of one group of laser emitters are connected to one contact, and the cathodes of a second group of laser emitters are connected to a second contact, only those individual lasers belonging to both the first and second group of laser emitters, i.e. those that have an anode and a cathode connected, will be energized when the first and second contacts are appropriately biased.


For the particular confirmation shown in FIG. 4D with 5 rows and 5 columns, only 10 electrical connections are required versus 25 electrical connections if the VCSEL devices 474 were individually connected. One skilled in the art will appreciate that the configuration shown in FIG. 12D, is one of numerous possible electrical addressing configurations and that the present teaching is not limited to any particular row and column configuration or geometries for the emitters. It's important to note that this advantage in reducing the number of electrical connections is greater as the size of the 2D VCSEL array increases.


The use of one contact connected to anodes of one group of laser emitters and a second contact connected to cathodes of a second group of laser emitters can be used to energize one laser emitter, or groups of laser emitters, for a particular bias condition, depending on the configuration of the connections. The anodes connections of various lasers to various contacts and the cathodes connections of various lasers connected to various contacts determine the rules for firing patterns. For example, the known pattern of individual laser emitters, or groups of laser emitters, that are energized together, and the energy the optical beams these lasers generate at a particular eye-safety measurement aperture, are all accounted in a fire control scheme when determining which individual lasers or groups are allowed to fire simultaneously.



FIG. 5 illustrates a system block diagram of an embodiment of a compact VCSEL laser driver assembly 500 for a multi-wavelength LIDAR of the present teaching. In this embodiment, the pulse generation chain 502 is generated locally on the same carrier of the VCSEL assembly 504. The pulse generation chain 502 comprises a pulse controller 506, memory 508, pulse pattern generator 510, and a laser driver 512. The laser driver 512 is connected to a VCSEL laser 514, as shown. In some embodiments, the laser driver is connected to a common contact used to drive multiple VCSEL lasers. In some embodiments, pulse shapes might be stored in a local memory or generated by a combination of the controller and pattern generator.


The system processor 516 is connected via a digital input/output connection 518. The system processor 516 generates a set of instructions that instructs the laser to fire and for how long. These instructions will determine the firing pattern type. But, the firing pattern generation and biasing of the lasers is done locally on the VCSEL assembly. Generating the laser driver pulse patterns locally on the VCSEL assembly greatly simplifies the required interface to the overall LIDAR system. In some embodiments, the pulse controller 506, memory 508, pulse pattern generator 510 and laser driver 512 functions are all contained within a single IC package. In various embodiments, the VCSEL devices can be hermetically packaged or non-hermetically packaged.


The rules for firing the lasers can be stored in various places in the scanning LIDAR system. In some embodiments, the rules for firing the lasers are stored in memory 508. In some embodiments, the rules for firing the lasers are input via the digital I/O 518. In yet other embodiments, the rules for firing the lasers are generated in the system processor based on operating parameters of the LIDAR system. In yet other embodiments, the rules for firing the lasers are generated in the controller based on operating parameters of the LIDAR system. In yet other embodiments, the rules for firing the lasers change over time based on changes in output power, pulse widths, and repetition rates provided by the laser driver assembly 500.


One feature of the present teaching is that a combination of the spacing of the transmitter elements and/or the transmitter arrays, the firing pattern of the transmitter elements, and the optics used for projection and/or collimation determine if and where in space laser beams will overlap. In addition, separate arrays with separate wavelengths may be used. FIG. 6A illustrates a schematic diagram of an embodiment of LIDAR illuminator 600 of the present teaching using two arrays of VCSEL of different wavelengths with a first lens system. The two VCSEL arrays 602, 604 are offset by a distance 606 of ˜8 mm. It can be seen that in some cases, the individual laser beams 608, 610 from each array of VCSEL will combine in space, while in other cases the lasers beams 612, 614 will not combine. A geometrical relationship exists that determines the criterion under which the beams 608, 610, 612, 614 will combine or not. For example, with an 8 mm offset distance 606 between arrays 602, 604, beams that are projected at the same nominal angle (i.e. beams 608, 614 and beams 612, 610 from the two separate arrays) will not combine spatially to exceed the eye safety limit at a 7 mm aperture 616 that is positioned at a distance 618 of 100 mm. If we were to take only the 7 mm aperture 616 into account, a simple rule that would allow simultaneous firing of VCSEL from both arrays 602, 604 would be to choose the same position within each array under the assumption that the lens systems for each array are nominally identical.


However, if the beams are highly collimated, then we need to consider the other eye safety criteria corresponding to use of binoculars. FIG. 6B illustrates a schematic diagram of an embodiment of LIDAR illuminator 630 of the present teaching using two arrays 632, 634 of VCSEL of different wavelengths with a second lens system that produces highly collimated beams. Two beams with the same projection angle when highly collimated will combine in a 50 mm aperture at 2,000 mm. In order for the beams to not combine in a 50 mm aperture at 2,000 mm, the beams must differ by ˜1.4° relative to each other. Thus, in the embodiment shown in FIG. 6B, the laser beams 636, 638 from the two arrays 632, 634 are projecting at an angle 640 of 1.4° relative to each other so that the laser eye safety rule will be met for the condition of use of binoculars. The laser beams 636, 638 do not overlap in a 50 mm aperture 642 at a distance 644 of 2000 mm. In some embodiments, the lens system of FIG. 6B is the same as the lens system in the embodiment described in connection with FIG. 6A, and the projection angles that determine whether or not the beams combine is based on the firing pattern of the laser elements in the VCSEL arrays. In some embodiments, the projection angles are also affected by the configuration of the lens system. Regardless of the mechanism by which the projection angles are determined, the condition for non-overlapping beams that meet a laser eye safety rule is a projection at an angle 640 of 1.4° relative to each other.



FIG. 6C illustrates a schematic diagram of an embodiment of LIDAR illuminator 660 of the present teaching using two arrays 662, 664 of VCSEL of different wavelengths with a third lens system 666. The two arrays 662, 664 are separated by a distance 668 of ˜8 mm. The range of angles excluded from the 7 mm aperture 670 at 100 mm distance 672 is shown in FIG. 6C. Here we can see that a range from 0° to −9.5° needs to be avoided for the upper array laser beam relative to the lower array laser beam. Thus, when combining the two safety conditions in some embodiments, the system utilizes a relative projection angle between an upper beam and a lower beam that is outside the range from 1.4° to −9.5° in order to perform simultaneous firing of the lasers.


EQUIVALENTS

While the Applicant's teaching are described in conjunction with various embodiments, it is not intended that the Applicant's teaching be limited to such embodiments. On the contrary, the Applicant's teaching encompass various alternatives, modifications, and equivalents, as will be appreciated by those of skill in the art, which may be made therein without departing from the spirit and scope of the teaching.

Claims
  • 1. A LIDAR illuminator comprising: a) a laser array comprising a plurality of laser sources that each generate an optical beam when energized at an electrical input, the plurality of laser sources being arranged such that the generated optical beams from at least some of the plurality of laser sources overlap spatially at a target in an eye-safety measurement aperture and at least some other of the generated optical beams do not overlap spatially at the target; andb) a controller having an output that is electrically connected to an input of a laser driver, the laser driver comprising a plurality of electrical outputs, one of the plurality of electrical outputs being electrically connected to one of the plurality of laser sources, the controller being configured to energize the plurality of laser sources based on a firing pattern rule such that the generated optical beams from at least some of the plurality of laser sources that overlap spatially at the target are not energized at a same time and being configured to energize the plurality of laser sources so that an optical power generated by the laser array does not exceed a Maximum Permissible Exposure (MPE) limit in the eye-safety measurement aperture at the target.
  • 2. The LIDAR illuminator of claim 1 wherein a respective one of the plurality of electrical outputs of the laser driver is connected to an electrical input of a respective one of the plurality of laser sources.
  • 3. The LIDAR illuminator of claim 1 wherein one of the plurality of electrical outputs of the laser driver is electrically connected to inputs of at least two of plurality of laser sources.
  • 4. The LIDAR illuminator of claim 1 wherein one of the plurality of electrical outputs of the laser driver is electrically connected to a common contact used to drive multiple VCSEL lasers.
  • 5. The LIDAR illuminator of claim 1 wherein the controller is further configured to energize the plurality of laser sources based on a firing pattern rule such that at least some of the other of the generated optical beams that do not overlap spatially at the target are energized at a same time.
  • 6. The LIDAR illuminator of claim 1 wherein the firing pattern rule is a mathematical rule.
  • 7. The LIDAR illuminator of claim 1 wherein the firing pattern rule is a set of mathematical rules.
  • 8. The LIDAR illuminator of claim 1 wherein the firing pattern rule is chosen so as to result in an allowed sequence of firing that meets an eye safety limit.
  • 9. The LIDAR illuminator of claim 1 wherein the firing pattern rule is chosen so as to result in an allowed sequence of firing that meets a performance metric.
  • 10. The LIDAR illuminator of claim 1 wherein the firing pattern rule comprises a pseudo-random sequence.
  • 11. The LIDAR illuminator of claim 1 wherein the laser array comprises a vertical cavity surface emitting laser (VCSEL) array.
  • 12. The LIDAR illuminator of claim 1 wherein at least one VCSEL in the VCSEL array comprises a cluster VCSEL.
  • 13. The LIDAR illuminator of claim 1 wherein the eye-safety measurement aperture is about 7 mm at the target.
  • 14. The LIDAR illuminator of claim 1 wherein the plurality of laser sources in the laser array are positioned in a plurality of rows.
  • 15. The LIDAR illuminator of claim 14 wherein at least some of the generated optical beams from at least some of the plurality of laser sources in adjacent rows of the plurality of rows overlap spatially at the target and at least some other of the generated optical beams from the plurality of laser sources in non-adjacent rows of the plurality of rows do not overlap spatially at the target.
  • 16. The LIDAR illuminator of claim 15 wherein the firing pattern rule comprises a firing rule that allows simultaneous energizing of laser sources in non-adjacent rows.
  • 17. The LIDAR illuminator of claim 15 wherein the firing pattern rule comprises a firing rule that prohibits simultaneous energizing of laser sources in adjacent rows.
  • 18. The LIDAR illuminator of claim 1 wherein the laser array further comprises at least one single metal contact that connects the electrical inputs of at least two of the plurality of laser sources in the laser array.
  • 19. The LIDAR illuminator of claim 1 wherein the laser array further comprises at least one single metal contact that connects the electrical inputs of a plurality of laser sources in the laser array that are position in a row.
  • 20. The LIDAR illuminator of claim 1 wherein the laser array further comprises at least one single metal contact that connects the electrical inputs of a plurality of laser sources in the laser array that are position in a column.
  • 21. A LIDAR illuminator comprising: a) a laser array comprising a plurality of laser sources that each generate an optical beam when energized at an electrical input, the plurality of laser sources being arranged such that the generated optical beams from at least some of the plurality of laser sources overlap spatially at a target in an eye-safety measurement aperture and at least some other of the generated optical beams do not overlap spatially at the target; andb) a processor comprising a digital output;c) a controller having a digital input that is electrically connected to the digital output of the processor, and an output,d) a laser driver having an input that is electrically connected to the output of the controller and a plurality of electrical outputs, each ene of the plurality of electrical outputs being electrically connected to one of the plurality of laser sources, the controller being configured to energize the plurality of laser sources based on a firing pattern rule such that the generated optical beams from at least some of the plurality of laser sources that overlap spatially at the target are not energized at a same time and being configured to energize the plurality of laser sources so that an optical power generated by the laser array does not exceed a Maximum Permissible Exposure (MPE) limit in the eye-safety measurement aperture at the target.
  • 22. The LIDAR illuminator of claim 21 wherein the processor includes the controller.
  • 23. The LIDAR illuminator of claim 21 further comprising a pattern generator.
  • 24. The LIDAR illuminator of claim 23 wherein the pattern generator and the laser driver are formed within a single integrated circuit.
  • 25. The LIDAR illuminator of claim 21 further comprising a memory that is electrically connected to the controller, the memory storing pulse shapes.
  • 26. The LIDAR illuminator of claim 25 wherein the memory and the laser driver are formed within a single integrated circuit.
  • 27. The LIDAR illuminator of claim 21 wherein a respective one of the plurality of electrical outputs of the laser driver is connected to an electrical input of a respective one of the plurality of laser sources.
  • 28. The LIDAR illuminator of claim 21 wherein one of the plurality of electrical outputs of the laser driver is electrically connected to inputs of at least two of plurality of laser sources.
  • 29. The LIDAR illuminator of claim 21 wherein the controller is further configured to energize the plurality of laser sources based on a firing pattern rule such that at least some of the other of the generated optical beams that do not overlap spatially at the target are energized at a same time.
  • 30. The LIDAR illuminator of claim 21 wherein the firing pattern rule is a mathematical rule.
  • 31. The LIDAR illuminator of claim 21 wherein the firing pattern rule is chosen so as to result in an allowed sequence of firing that meets an eye safety limit.
  • 32. The LIDAR illuminator of claim 21 wherein the plurality of laser sources in the laser array are positioned in a plurality of rows and at least some of the generated optical beams from at least some of the plurality of laser sources in adjacent rows of the plurality of rows overlap spatially at the target and at least some other of the generated optical beams from the plurality of laser sources in non-adjacent rows of the plurality of rows do not overlap spatially at the target.
  • 33. The LIDAR illuminator of claim 32 wherein the firing pattern rule comprises a firing rule that allows simultaneous energizing of laser sources in non-adjacent rows.
  • 34. The LIDAR illuminator of claim 32 wherein the firing pattern rule comprises a firing rule that prohibits simultaneous energizing of laser sources in adjacent rows.
  • 35. A LIDAR illuminator comprising: a) a laser array comprising a plurality of laser sources positioned in a plurality of rows such that each of the plurality of laser sources generate an optical beam when energized at an electrical input, the plurality of laser sources being arranged such that the generated optical beams from at least some of the plurality of laser sources overlap spatially at a target and at least some other of the generated optical beams do not overlap spatially at the target; andb) a controller having an output that is electrically connected to an input of a laser driver, the laser driver comprising a plurality of electrical outputs, one of the plurality of electrical outputs being electrically connected to one of the plurality of laser sources, the controller being configured to energize the plurality of laser sources based on a firing pattern rule such that at least some of the generated optical beams from at least some of the plurality of laser sources in adjacent rows of the plurality of rows overlap spatially at the target and at least some other of the generated optical beams from the plurality of laser sources in non-adjacent rows of the plurality of rows do not overlap spatially at the target.
  • 36. The LIDAR illuminator of claim 35 wherein the controller is further configured such that the generated optical beams from at least some of the plurality of laser sources that overlap spatially at the target are not energized at a same time.
  • 37. The LIDAR illuminator of claim 35 wherein the firing pattern rule comprises a firing rule that allows simultaneous energizing of laser sources in non-adjacent rows.
  • 38. The LIDAR illuminator of claim 35 wherein the firing pattern rule comprises a firing rule that prohibits simultaneous energizing of laser sources in adjacent rows.
  • 39. A LIDAR illuminator comprising: a) a laser array comprising a plurality of laser sources positioned in a plurality of rows such that each of the plurality of laser sources generate an optical beam when energized at an electrical input, the plurality of laser sources being arranged such that at least some of the generated optical beams from at least some of the plurality of laser sources in adjacent rows of the plurality of rows overlap spatially at the target and at least some other of the generated optical beams from the plurality of laser sources in non-adjacent rows of the plurality of rows do not overlap spatially at the target;b) a processor comprising a digital output;c) a controller having a digital input that is electrically connected to the digital output of the processor and having an output; andd) a laser driver having an input that is electrically connected to the output of the controller and a plurality of electrical outputs, each of the plurality of electrical outputs being electrically connected to one of the plurality of laser sources, the controller being configured to energize the plurality of laser sources based on a firing pattern rule such that the generated optical beams from at least some of the plurality of laser sources that overlap spatially at the target are not energized at a same time.
  • 40. The LIDAR illuminator of claim 39 wherein the firing pattern rule comprises a firing rule that allows simultaneous energizing of laser sources in non-adjacent rows.
  • 41. The LIDAR illuminator of claim 39 wherein the firing pattern rule comprises a firing rule that prohibits simultaneous energizing of laser sources in adjacent rows.
CROSS REFERENCE TO RELATED APPLICATIONS

The present application is a continuation of U.S. patent application Ser. No. 15/915,840, filed on filed on Mar. 8, 2018, entitled “Eye-Safe Scanning LIDAR System”, which claims benefit of U.S. Provisional Patent Application Ser. No. 62/470,827, entitled “Eye-Safe Scanning LIDAR System”, filed on Mar. 13, 2017. The entire contents of U.S. patent application Ser. No. 15/915,840, and U.S. Provisional Patent Application Ser. No. 62/470,827 are all herein incorporated by reference.

US Referenced Citations (249)
Number Name Date Kind
5157257 Geiger Oct 1992 A
5552893 Akasu Sep 1996 A
5909296 Tsacoyeanes Jun 1999 A
6057909 Yahav et al. May 2000 A
6061001 Sugimoto May 2000 A
6244712 Smith et al. Jun 2001 B1
6246708 Thornton et al. Jun 2001 B1
6353502 Marchant et al. Mar 2002 B1
6680788 Roberson et al. Jan 2004 B1
6717972 Steinle et al. Apr 2004 B2
6775480 Goodwill Aug 2004 B1
6788715 Leeuwen et al. Sep 2004 B1
6829439 Sidorovich et al. Dec 2004 B1
6860350 Beuhler et al. Mar 2005 B2
6888871 Zhang et al. May 2005 B1
7065112 Ghosh et al. Jun 2006 B2
7110183 von Freyhold et al. Sep 2006 B2
7544945 Tan et al. Jun 2009 B2
7652752 Fetzer et al. Jan 2010 B2
7702191 Geron et al. Apr 2010 B1
7746450 Willner et al. Jun 2010 B2
7773204 Nelson Aug 2010 B1
7969558 Hall Jun 2011 B2
8072581 Breiholz Dec 2011 B1
8115909 Behringer et al. Feb 2012 B2
8247252 Gauggel et al. Aug 2012 B2
8301027 Shaw et al. Oct 2012 B2
8576885 van Leeuwen et al. Nov 2013 B2
8675181 Hall Mar 2014 B2
8675706 Seurin et al. Mar 2014 B2
8783893 Seurin et al. Jul 2014 B1
8824519 Seurin et al. Sep 2014 B1
9038883 Wang et al. May 2015 B2
9048633 Gronenbom et al. Jun 2015 B2
9268012 Ghosh et al. Feb 2016 B2
9285477 Smith et al. Mar 2016 B1
9348018 Eisele et al. May 2016 B2
9360554 Retterath et al. Jun 2016 B2
9378640 Mimeault et al. Jun 2016 B2
9392259 Borowski Jul 2016 B2
9516244 Borowski Dec 2016 B2
9520696 Wang et al. Dec 2016 B2
9553423 Chen et al. Jan 2017 B2
9560339 Borowski Jan 2017 B2
9574541 Ghosh et al. Feb 2017 B2
9575184 Gilliland et al. Feb 2017 B2
9658322 Lewis May 2017 B2
9674415 Wan et al. Jun 2017 B2
9791557 Wyrwas et al. Oct 2017 B1
9841495 Campbell et al. Dec 2017 B2
9857468 Eichenholz et al. Jan 2018 B1
9933513 Dussan et al. Apr 2018 B2
9946089 Chen et al. Apr 2018 B2
9989406 Pacala et al. Jun 2018 B2
9989629 LaChapelle Jun 2018 B1
9992477 Pacala et al. Jun 2018 B2
10007001 LaChapelle et al. Jun 2018 B1
10063849 Pacala et al. Aug 2018 B2
10191156 Steinberg et al. Jan 2019 B2
10295660 McMichael et al. May 2019 B1
10488492 Hamel et al. Nov 2019 B2
10514444 Donovan Dec 2019 B2
10761195 Donovan Sep 2020 B2
10928486 Donovan Feb 2021 B2
11016178 Donovan May 2021 B2
11061234 Zhu et al. Jul 2021 B1
11320538 Donovan et al. May 2022 B2
20020117340 Stettner Aug 2002 A1
20020195496 Tsikos Dec 2002 A1
20030043363 Jamieson et al. Mar 2003 A1
20030147652 Green et al. Aug 2003 A1
20040120717 Clark et al. Jun 2004 A1
20040228375 Ghosh et al. Nov 2004 A1
20050025211 Zhang et al. Feb 2005 A1
20050180473 Brosnan Aug 2005 A1
20050232628 von Freyhold et al. Oct 2005 A1
20060132752 Kane Jun 2006 A1
20060231771 Lee et al. Oct 2006 A1
20060244978 Yamada et al. Nov 2006 A1
20070024849 Carrig et al. Feb 2007 A1
20070071056 Chen Mar 2007 A1
20070091960 Gauggel et al. Apr 2007 A1
20070131842 Emst Jun 2007 A1
20070177841 Dazinger Aug 2007 A1
20070181810 Tan et al. Aug 2007 A1
20070219720 Trepagnier et al. Sep 2007 A1
20080074640 Walsh et al. Mar 2008 A1
20080186470 Hipp Aug 2008 A1
20090027651 Pack et al. Jan 2009 A1
20090140047 Yu et al. Jun 2009 A1
20090161710 Hoashi et al. Jun 2009 A1
20090273770 Bauhahn et al. Nov 2009 A1
20090295986 Topliss et al. Dec 2009 A1
20100046953 Shaw et al. Feb 2010 A1
20100215066 Mordaunt et al. Aug 2010 A1
20100271614 Alburquerque et al. Oct 2010 A1
20100302528 Hall Dec 2010 A1
20110176567 Joseph Jul 2011 A1
20110216304 Hall Sep 2011 A1
20120038903 Weimer Feb 2012 A1
20130163626 Seurin et al. Jun 2013 A1
20130163627 Seurin et al. Jun 2013 A1
20130206967 Shpunt et al. Aug 2013 A1
20130208256 Mamidipudi et al. Aug 2013 A1
20130208753 van Leeuwen et al. Aug 2013 A1
20130278151 Lear Oct 2013 A1
20140043309 Go et al. Feb 2014 A1
20140049610 Hudman et al. Feb 2014 A1
20140071427 Last Mar 2014 A1
20140104051 Breed Apr 2014 A1
20140111812 Baeg et al. Apr 2014 A1
20140139467 Ghosh et al. May 2014 A1
20140160341 Tickoo et al. Jun 2014 A1
20140218898 Seurin et al. Aug 2014 A1
20140247841 Seurin et al. Sep 2014 A1
20140267701 Aviv et al. Sep 2014 A1
20140303829 Lombrozo et al. Oct 2014 A1
20140312233 Mark et al. Oct 2014 A1
20140333995 Seurin et al. Nov 2014 A1
20140350836 Stettner et al. Nov 2014 A1
20140376092 Mor Dec 2014 A1
20150055117 Pennecot et al. Feb 2015 A1
20150069113 Wang et al. Mar 2015 A1
20150097947 Hudman et al. Apr 2015 A1
20150103358 Flascher Apr 2015 A1
20150109603 Kim et al. Apr 2015 A1
20150123995 Zavodny et al. May 2015 A1
20150131080 Retterath et al. May 2015 A1
20150160341 Akatsu et al. Jun 2015 A1
20150219764 Lipson Aug 2015 A1
20150255955 Wang et al. Sep 2015 A1
20150260830 Ghosh et al. Sep 2015 A1
20150260843 Lewis Sep 2015 A1
20150311673 Wang et al. Oct 2015 A1
20150316368 Moench et al. Nov 2015 A1
20150340841 Joseph Nov 2015 A1
20150362585 Ghosh et al. Dec 2015 A1
20150377696 Shpunt et al. Dec 2015 A1
20150378023 Royo Royo et al. Dec 2015 A1
20160003946 Gilliland et al. Jan 2016 A1
20160006914 Neumann Jan 2016 A1
20160025842 Anderson et al. Jan 2016 A1
20160025993 Mor et al. Jan 2016 A1
20160033642 Fluckiger Feb 2016 A1
20160072258 Seurin et al. Mar 2016 A1
20160080077 Joseph et al. Mar 2016 A1
20160119611 Hall et al. Apr 2016 A1
20160161600 Eldada et al. Jun 2016 A1
20160164261 Warren Jun 2016 A1
20160254638 Chen et al. Sep 2016 A1
20160259038 Retterath et al. Sep 2016 A1
20160266242 Gilliland et al. Sep 2016 A1
20160274223 Imai Sep 2016 A1
20160282468 Gruver et al. Sep 2016 A1
20160291156 Hjelmstad Oct 2016 A1
20160306358 Kang et al. Oct 2016 A1
20160335778 Smits Nov 2016 A1
20160348636 Ghosh et al. Dec 2016 A1
20170003392 Bartlett et al. Jan 2017 A1
20170026633 Riza Jan 2017 A1
20170059838 Tilleman Mar 2017 A1
20170115497 Chen et al. Apr 2017 A1
20170131387 Campbell et al. May 2017 A1
20170131388 Campbell et al. May 2017 A1
20170139041 Drader et al. May 2017 A1
20170153319 Villeneuve et al. Jun 2017 A1
20170168162 Jungwirth Jun 2017 A1
20170176579 Niclass et al. Jun 2017 A1
20170181810 Tennican Jun 2017 A1
20170219426 Pacala et al. Aug 2017 A1
20170256915 Ghosh et al. Sep 2017 A1
20170269209 Hall et al. Sep 2017 A1
20170285169 Holz Oct 2017 A1
20170289524 Pacala et al. Oct 2017 A1
20170299722 Cuiling et al. Oct 2017 A1
20170307736 Donovan Oct 2017 A1
20170307758 Pei et al. Oct 2017 A1
20170350982 Lipson Dec 2017 A1
20170353004 Chen et al. Dec 2017 A1
20170356740 Ansari et al. Dec 2017 A1
20180045816 Jarosinski et al. Feb 2018 A1
20180058923 Lipson et al. Mar 2018 A1
20180059222 Pacala et al. Mar 2018 A1
20180062345 Bills et al. Mar 2018 A1
20180068458 Wan et al. Mar 2018 A1
20180074198 Von Novak et al. Mar 2018 A1
20180107221 Droz et al. Apr 2018 A1
20180113200 Steinberg et al. Apr 2018 A1
20180113208 Bergeron et al. Apr 2018 A1
20180120441 Elooz et al. May 2018 A1
20180128920 Keilaf et al. May 2018 A1
20180136335 Kare et al. May 2018 A1
20180152691 Pacala et al. May 2018 A1
20180164408 Hall et al. Jun 2018 A1
20180167602 Pacala et al. Jun 2018 A1
20180180720 Pei et al. Jun 2018 A1
20180180721 Pei et al. Jun 2018 A1
20180180722 Pei et al. Jun 2018 A1
20180203247 Chen et al. Jul 2018 A1
20180209841 Pacala et al. Jul 2018 A1
20180217236 Pacala et al. Aug 2018 A1
20180259623 Donovan Sep 2018 A1
20180259624 Kiehn et al. Sep 2018 A1
20180259645 Shu et al. Sep 2018 A1
20180269646 Welford et al. Sep 2018 A1
20180275248 Bailey et al. Sep 2018 A1
20180299552 Shu et al. Oct 2018 A1
20180301872 Burroughs et al. Oct 2018 A1
20180301874 Burroughs et al. Oct 2018 A1
20180301875 Burroughs et al. Oct 2018 A1
20180364334 Xiang et al. Dec 2018 A1
20180364356 Eichenholz et al. Dec 2018 A1
20190003429 Miyashita Jan 2019 A1
20190004156 Niclass et al. Jan 2019 A1
20190011561 Pacala et al. Jan 2019 A1
20190011567 Pacala et al. Jan 2019 A1
20190018115 Schmitt et al. Jan 2019 A1
20190036308 Carson et al. Jan 2019 A1
20190049662 Thomsen et al. Feb 2019 A1
20190056497 Pacala et al. Feb 2019 A1
20190094346 Dumoulin et al. Mar 2019 A1
20190098233 Gassend et al. Mar 2019 A1
20190137607 Kostamovaara May 2019 A1
20190146071 Donovan May 2019 A1
20190170855 Keller et al. Jun 2019 A1
20190178974 Droz Jun 2019 A1
20190179018 Gunnam et al. Jun 2019 A1
20190293954 Lin et al. Sep 2019 A1
20190302246 Donovan et al. Oct 2019 A1
20200018835 Cepton Jan 2020 A1
20200041614 Donovan et al. Feb 2020 A1
20200081101 Donovan Mar 2020 A1
20200124732 Sutherland et al. Apr 2020 A1
20200200874 Donovan Jun 2020 A1
20200209355 Pacala et al. Jul 2020 A1
20200278426 Dummer et al. Sep 2020 A1
20200326425 Donovan et al. Oct 2020 A1
20200379088 Donovan et al. Dec 2020 A1
20200386868 Donovan et al. Dec 2020 A1
20200408908 Donovan Dec 2020 A1
20210033708 Fabiny Feb 2021 A1
20210041567 Milgrome et al. Feb 2021 A1
20210157000 Imaki May 2021 A1
20210181311 Donovan Jun 2021 A1
20210231806 Donovan et al. Jul 2021 A1
20210234342 Donovan Jul 2021 A1
20210278540 Maayan et al. Sep 2021 A1
20210321080 Jeong et al. Oct 2021 A1
20220146680 Donovan et al. May 2022 A1
Foreign Referenced Citations (177)
Number Date Country
1512946 Jul 2004 CN
101013030 Aug 2007 CN
101080733 Nov 2007 CN
101545582 Sep 2009 CN
102771020 Nov 2012 CN
103633557 Mar 2014 CN
104898125 Sep 2015 CN
105705964 Jun 2016 CN
106464366 Feb 2017 CN
109073757 Dec 2018 CN
107728156 Nov 2019 CN
110402398 Nov 2019 CN
110914702 Mar 2020 CN
111356934 Jun 2020 CN
111919137 Nov 2020 CN
112543875 Mar 2021 CN
113692540 Nov 2021 CN
113906316 Jan 2022 CN
113924506 Jan 2022 CN
114096882 Feb 2022 CN
114174869 Mar 2022 CN
197 17 399 Jun 1999 DE
10103861 Aug 2001 DE
102007004609 Aug 2007 DE
102014216390 Feb 2016 DE
102019005059 Feb 2020 DE
1160540 Dec 2001 EP
1444696 Mar 2005 EP
1569007 Aug 2005 EP
2656099 Dec 2011 EP
2656106 Dec 2011 EP
2775316 Sep 2014 EP
3168641 Apr 2016 EP
3497477 Aug 2016 EP
2656100 Oct 2016 EP
3526625 Nov 2016 EP
3 159 711 Apr 2017 EP
3446153 Feb 2019 EP
3596492 Jan 2020 EP
3658949 Jun 2020 EP
3710855 Sep 2020 EP
3775979 Feb 2021 EP
3830602 Jun 2021 EP
3953727 Feb 2022 EP
3977159 Apr 2022 EP
3980808 Apr 2022 EP
3990943 May 2022 EP
4004587 Jun 2022 EP
2816264 May 2002 FR
5-243552 Sep 1993 JP
7-253460 Oct 1995 JP
8-280173 Oct 1996 JP
10-126007 May 1998 JP
2000-147604 May 2000 JP
2002-214361 Jul 2002 JP
2003258359 Sep 2003 JP
2003-536061 Dec 2003 JP
2004-078255 Mar 2004 JP
2004-94115 Mar 2004 JP
2004-361315 Dec 2004 JP
2005-331273 Dec 2005 JP
2006-162386 Jun 2006 JP
2007-214564 Aug 2007 JP
2008-015434 Jan 2008 JP
4108478 Jun 2008 JP
2008-180719 Aug 2008 JP
2009-103529 May 2009 JP
2009-170870 Jul 2009 JP
2009-204691 Sep 2009 JP
2010-91855 Apr 2010 JP
2010-256291 Nov 2010 JP
2011-003748 Jan 2011 JP
2012-504771 Feb 2012 JP
5096008 Dec 2012 JP
2013-050310 Mar 2013 JP
2013-113669 Jun 2013 JP
2014-059302 Apr 2014 JP
2014-077658 May 2014 JP
2016-146417 Aug 2016 JP
2016-176721 Oct 2016 JP
2016-188808 Nov 2016 JP
2016-540189 Dec 2016 JP
2017-053833 Mar 2017 JP
2017-134814 Aug 2017 JP
2018-025632 Feb 2018 JP
2019-060652 Apr 2019 JP
2019-68528 Apr 2019 JP
2019-509474 Apr 2019 JP
2019-516101 Jun 2019 JP
2020-510208 Apr 2020 JP
2021-503085 Feb 2021 JP
2021-507260 Feb 2021 JP
6839861 Mar 2021 JP
6865492 Apr 2021 JP
2021-073462 May 2021 JP
2021-073473 May 2021 JP
2021-105613 Jul 2021 JP
2021-519926 Aug 2021 JP
2021-139918 Sep 2021 JP
2021-532368 Nov 2021 JP
2022-001885 Jan 2022 JP
6995413 Jan 2022 JP
2022-022361 Feb 2022 JP
2022-036224 Mar 2022 JP
7037830 Mar 2022 JP
2022-526998 May 2022 JP
2022-534500 Aug 2022 JP
10-2000-0053620 Aug 2000 KR
10-2009-0016499 Feb 2009 KR
10-2012-0053045 May 2012 KR
10-2012-0061033 Jun 2012 KR
10-2013-0140554 Dec 2013 KR
10-2014-0138724 Dec 2014 KR
10-2015-0045735 Apr 2015 KR
10-2016-0101140 Aug 2016 KR
10-2018-0049937 May 2018 KR
10-2018-0064969 Jun 2018 KR
10-2018-0128447 Dec 2018 KR
10-2019-0076725 Jul 2019 KR
10-2019-0117418 Oct 2019 KR
10-2019-0120403 Oct 2019 KR
10-2020-0011351 Feb 2020 KR
10-2020-0075014 Jun 2020 KR
10-2020-0096632 Aug 2020 KR
10-2020-0128435 Nov 2020 KR
10-2021-0021409 Feb 2021 KR
102218679 Feb 2021 KR
10-2021-0029831 Mar 2021 KR
10-2021-0065207 Jun 2021 KR
10-2021-0137584 Nov 2021 KR
10-2021-0137586 Nov 2021 KR
102326493 Nov 2021 KR
102326508 Nov 2021 KR
10-2022-0003600 Jan 2022 KR
10-2022-0017412 Feb 2022 KR
102364531 Feb 2022 KR
10-2022-0024177 Mar 2022 KR
10-2022-0025924 Mar 2022 KR
10-2022-0038691 Mar 2022 KR
10-2398080 May 2022 KR
99-42856 Aug 1999 WO
2002065153 Aug 2002 WO
2006044758 Apr 2006 WO
2006083349 Aug 2006 WO
2013107709 Jul 2013 WO
2014014838 Jan 2014 WO
2015040671 Mar 2015 WO
2015040671 Mar 2015 WO
2015059705 Apr 2015 WO
2017112416 Jun 2017 WO
2017132704 Aug 2017 WO
2017184336 Oct 2017 WO
2018028795 Feb 2018 WO
2018082762 May 2018 WO
2018169758 Sep 2018 WO
2018166609 Sep 2018 WO
2018166610 Sep 2018 WO
2018166611 Sep 2018 WO
2018169758 Sep 2018 WO
2018180391 Oct 2018 WO
2018181250 Oct 2018 WO
2018191495 Oct 2018 WO
2019010320 Jan 2019 WO
2019022941 Jan 2019 WO
2019-064062 Apr 2019 WO
2019115148 Jun 2019 WO
2019195054 Oct 2019 WO
2019221776 Nov 2019 WO
2020028173 Feb 2020 WO
2020210176 Oct 2020 WO
2020242834 Dec 2020 WO
2020251891 Dec 2020 WO
2020263735 Dec 2020 WO
2021021872 Feb 2021 WO
2021150860 Jul 2021 WO
2021236201 Nov 2021 WO
2022103778 May 2022 WO
Non-Patent Literature Citations (162)
Entry
Final Office Action received for JP Patent Application No. 2019-549550, dated Aug. 27, 2021, 7 pages (5 pages of English Translation and 2 pages of Official Copy).
“Notice of Grant” for Korean Patent Application No. 10-2019-7029980, 2 pages, dated Aug. 6, 2021, the Korean Intellectual Property Office, South Korea.
“Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration” for International Patent Application No. PCT/US2020/043979, dated Nov. 10, 2020, 9 pages, ISA/KR, Korean Intellectual Property Office, Daejeon, Republic of Korea.
“Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration” for International Patent Application No. PCT/US2021/014564, dated May 17, 2021, 10 pages, ISA/KR, Korean Intellectual Property Office, Daejeon, Republic of Korea.
Communication pursuant to Article 94(3) EPC received for EP Patent Application Serial No. 17786325.5 dated Dec. 17, 2021, 5 pages.
Notification of Reason for Refusal received for Korean Patent Application Serial No. 10-2021-7036648 dated Dec. 17, 2021, 8 pages. (Including English Translation).
Decision to Grant a Patent received for Korean Patent Application Serial No. 10-2020-7016928 dated Nov. 16, 2021, 3 pages (Including English Translation).
Final Office Action received for U.S. Appl. No. 16/168,054 dated Jan. 26, 2022, 46 pages.
Notice of Final Rejection received for Korean Patent Application Serial No. 10-2021-7006391 dated Oct. 22, 2021, 5 pages. (Including English Translation).
International Preliminary Report on Patentability received for PCT Application Serial No. PCT/US2020/033630 dated Dec. 9, 2021, 8 pages.
International Preliminary Report on Patentability received for PCT Application Serial No. PCT/US2020/036634 dated Dec. 23, 2021, 6 pages.
International Search Report and Written Opinion received for PCT Application Serial No. PCT/US2021/058687 dated Mar. 3, 2022 , 11 pages.
Notice of Preliminary Rejection received for Korean Patent Application Serial No. 10-2018-7030512 dated Dec. 23, 2021, 6 pages. (Including English Translation).
Decision to Grant a Patent received for Japanese Patent Application Serial No. 2021-14376 dated Mar. 22, 2022, 05 pages. (Including English Translation).
Non-Final Office Action received for U.S. Appl. No. 17/164,773 dated Apr. 21, 2022, 87 pages.
Decision to Grant a Patent received for chinese Patent Application Serial No. 201880047615.6 dated Mar. 23, 2022, 3 pages. (Including English Translation).
Decision to Grant a Patent received for Korean Patent Application Serial No. 10-2018-7030512 dated Mar. 18, 2022, 4 pages (Including English Translation).
Decision to Grant a Patent received for Korean Patent Application Serial No. 10-2021-7036648 dated May 19, 2022, 4 pages (Including English Translation).
Decision to Grant a Patent received for Japanese Patent Application Serial No. 2019-549550 dated Feb. 25, 2022, 5 pages (Including English Translation).
“Office Action” for Japanese Patent Application No. 2021-0020502, dated Apr. 13, 2022, 10 pages, Japanese Patent Office, Japan.
Notice of Allowance received for U.S. Appl. No. 17/227,300 dated Aug. 2, 2022, 39 pages.
International Search Report and Written Opinion received for PCT Application Serial No. PCT/US2021/020749 dated Jan. 3, 2022, 9 pages.
International Preliminary Report on Patentability received for PCT Application Serial No. PCT/US2020/038927 dated Jan. 6, 2022, 9 pages.
Notification of Reason for Refusal received for Korean Application Serial No. 10-2020-7029872 dated Jan. 19, 2022, 30 pages (Including English Translation).
Extended European Search Report received for European Patent Application Serial No. 19843301.3 dated Feb. 18, 2022, 10 pages.
International Preliminary Report on Patentability received for PCT Application Serial No. PCT/US2020/043979 dated Feb. 1, 2022, 05 pages.
Notice of Final Rejection received for Korean Application Serial No. 10-2020-7029872 dated May 24, 2022, 05 pages (Including English Translation).
Decision to Grant a Patent received for Korean Patent Application Serial No. 10-2021-7006391 dated Feb. 9, 2022, 04 pages (Including English Translation).
Restriction Requirement received for U.S. Appl. No. 16/366,729 dated Jun. 3, 2022, 06 pages.
Office Action received for Japanese Patent Application Serial No. 2021-100687, dated Jul. 1, 2022, 09 pages. (6 pages of English Translation and 3 pages of Official Copy).
Restriction Requirement received for U.S. Appl. No. 16/523,459, dated Jun. 16, 2022, 05 pages.
Notice of Allowance received for U.S. Appl. No. 16/841,930, dated Jun. 29, 2022, 10 pages.
Non-Final Office Action received for U.S. Appl. No. 16/878,140, dated Jun. 22, 2022, 24 pages.
Non-Final Office Action received for U.S. Appl. No. 16/907,732, dated Jul. 13, 2022, 20 pages.
International Preliminary Report on Patentability received for PCT Application Serial No. PCT/US2021/014564, dated Aug. 4, 2022, 06 pages.
Notice of Allowance received for U.S. Appl. No. 16/895,588, dated Aug. 3, 2022, 9 pages.
Non-Final Office Action received for U.S. Appl. No. 16/366,729, dated Aug. 26, 2022, 09 pages.
International Search Report and Written Opinion received for PCT Patent Application No. PCT/US2018/057026, dated Dec. 16, 2019, 9 pages.
Office Action received for Japanese Patent Application Serial No. 2021-168642, dated Aug. 25, 2022, 4 pages (2 pages of English Trasnlation and 2 pages of Official Copy).
Office Action received for Japanese Patent Application Serial No. 2020-526502, dated Aug. 24, 2022, 10 pages (5 pages of English Translation and 5 pages of Official Copy).
Notice of Allowance received for U.S. Appl. No. 16/805,733, dated Aug. 22, 2022, 13 pages.
U.S. Appl. No. 17/164,773, filed Feb. 1, 2021, USPTO.
U.S. Appl. No. 17/155,626, filed Jan. 22, 2021, USPTO.
U.S. Appl. No. 17/191,641, filed Mar. 3, 2021, USPTO.
Plant, et al., 256-Channel Bidirectional Optical Interconnect Using VCSELs and Photodiodes on CMOS, IEEE Journal of Lightwave Technology, Aug. 2001, pp. 1093-1103, vol. 19, No. 8.
Knodl, et al., Bipolar Cascade VCSEL with 130% Differential Quantum Efficiency, Annual Report 2000, Optoelectronics Department, University of ULM, pp. 11-14.
R.A. Morgan, et al., Two-Dimensional Matrix Addressed Vertical Cavity Top-Surface Emitting Laser Array Display, IEEE Photonics Technology Letters, Aug. 1994, pp. 913-917, vol. 6, No. 8.
M. Orenstein, et al., Matrix Addressable Vertical Cavity Surface Emitting Laser Array, Electronics Letters, Feb. 28, 1991, pp. 437-438, vol. 27, No. 5.
K.M. Geib, et al., Fabrication and Performance of Two-Dimensional Matrix Addressable Arrays of Integrated Vertical-Cavity Lasers and Resonant Cavity Photodetectors, IEEE Journal of Selected Topics in Quantum Electronics, Jul./Aug. 2002, pp. 943-947, vol. 8, No. 4.
Moench, et al., VCSEL Based Sensors for Distance and Velocity, Vertical Cavity Surface-Emitting Lasers XX, Edited by K. Choquette, J. Guenter, Proc of SPIE, 2016, 11 pages, vol. 9766, 07660A.
“Notice of Preliminary Rejection” for South Korean Patent Application No. 10-2019-7029980, 4 pages, Korean Intellectual Property Office, South Korea.
Non-Final Office Action received for U.S. Appl. No. 15/456,789 dated Sep. 25, 2019, 58 pages.
Notice of Allowance received for U.S. Appl. No. 15/456,789 dated Apr. 29, 2020, 45 pages.
Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, for International Application No. PCT/US2017/026109, dated Jun. 19, 2017, 15 pages, International Search Authority/Korean Intellectual Property Office, Daejeon, Republic of Korea.
Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration for International Patent Application No. PCT/US2018/021553, dated Jun. 20, 2018, 13 pages, International Searching Authority, Korean Intellectual Property Office, Daejeon, Republic of Korea.
Notification Concerning Transmittal of International Preliminary Report on Patentability (Chapter 1 of the Patent Cooperation Treaty) for International Patent Application No. PCT/US2017/026109, dated Nov. 1, 2018, 13 Pages, the International Bureau of WIPO, Geneva, Switzerland.
Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration for International Patent Application No. PCT/US2018/041021, dated Nov. 5, 2018, 13 Pages, Korean Intellectual Property Office, Daejeon, Republic of Korea.
Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration for International Patent Application No. PCT/US2019/024343, Jul. 12, 2019, 15 Pages, ISA/KR, Korean Intellectual Property Office, Daejeon, Republic of Korea.
Notification Concerning Transmittal of International Preliminary Report on Patentability (Chapter I of the Patent Cooperation Treaty) for International Patent Application No. PCT/US2018/021553, dated Sep. 26, 2019, 9 Pages, the International Bureau of WIPO, Geneva, Switzerland.
Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration for International Patent Application No. PCT/US2019/043674, dated Nov. 15, 2019, 16 pages, International Searching Authority/KR, Daejeon, Republic of Korea.
“Supplementary European Search Report” for European Patent Application No. 17786325.5, dated Nov. 7, 2019, 17 pages, European Patent Office, Munich, Germany.
Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration for International Patent Application No. PCT/US2018/057026, dated Dec. 16, 2019, 11 pages, International Searching Authority, Korean Intellectual Property Office, Daejeon, Republic of Korea.
Notification Concerning Transmittal of International Preliminary Report on Patentability (Chapter I of the Patent Cooperation Treaty) for International Application No. PCT/US18/041021, dated Feb. 6, 2020, 10 pages, the International Bureau of WIPO, Geneva, Switzerland.
“Extended European Search Report” for European Patent Application No. 17786325.5, dated Mar. 11, 2020, 22 pages, European Patent Office, Munich, Germany.
Written Opinion of the International Searching Authority for International Patent Application No. PCT/EP2016/077499 dated Feb. 14, 2017, 7 pages, the International Searching Authority (Including English Translation).
Search Report for International Patent Application No. PCT/EP2016/077499, 2 pages, International Searching Authority/ EPO, Rijswijk, the Netherlands (Including English Translation).
“Notice of Allowance” for Japanese Patent Application No. 2018-555665, dated Dec. 2, 2020, 05 pages, Japanese Patent Office, Japan (Including English Translation).
Notification of Reason for Refusal received for JP Patent Application No. 2021-014376, dated Sep. 27, 2021, 16 pages (Including English Translation).
Non-Final Office Action received for U.S. Appl. No. 15/915,840 dated May 7, 2020, 100 pages.
Notice of Allowance received for U.S. Appl. No. 15/915,840 dated Jan. 19, 2021, 40 pages.
Extended Search Report for European Patent Application No. 18767885.9, dated Nov. 18, 2020, 10 pages, European Patent Office, Munich, Germany.
“Japanese Office Action” for Japanese Patent Application No. 2019-549550, dated Mar. 22, 2021, 2 pages, Japanese Patent Office, Japan (Including English Translation).
Notice of Allowance received for U.S. Appl. No. 16/028,774 dated Aug. 21, 2019, 56 pages.
Non-Final Rejection received for U.S. Appl. No. 16/686,163 dated Apr. 16, 2020, 99 pages.
Notice of Allowance received for U.S. Appl. No. 16/686,163 dated Oct. 16, 2020, 30 pages.
“Office Action” for Korean Patent Application No. 10-2020-7005082, May 8, 2020, 9 pages, Korean Intellectual Property Office, South Korea (Including English Translation).
“Notice of Reasons for Rejection” for Japanese Patent Application No. 2020-504014, dated Sep. 2, 2020, 2 pages, Japanese Patent Office, Japan (Including English Translation).
“Notice of Grant” for Korean Patent Application No. 10-2020-7005082,dated Nov. 24, 2020, 3 pages, the Korean Intellectual Property Office, South Korean (Including English Translation).
“First Office Action” for Chinese Patent Application No. 201880047615.6, dated Jan. 18, 2021, 8 pages, China National Intellectual Property Administration, Beijing, China (Including English Translation).
“Notice of Allowance” for Japanese Patent Application No. 2020-504014, dated Feb. 15, 2021, 3 pages, Japanese Patent Office (Including English Translation).
“Extended European Search Report” for European Patent Application No. 18839499.3, dated Mar. 4, 2021, 10 pages, European Patent Office, Munich, Germany.
“Notice of Preliminary Rejection” for South Korean Patent Application No. 10-2021-7004589, dated Mar. 10, 2021, 5 pages, Korean Intellectual Property Office, South Korea (Including English Translation).
“Office Action” for Japanese Patent Application No. 2021-056628, dated Jun. 14, 2021, 2 pages, Japanese Patent Office, Japan (Including English Translation).
“Notice of Grant” for Korean Patent Application No. 10-2021-7004589, 2 pages, dated Aug. 6, 2021, The Korean Intellectual Property Office, South Korea (Including English Translation).
Second Office Action received for Chinese Patent Application Serial No. 201880047615.6 dated Aug. 25, 2021, 14 pages (Including English Translation).
Decision to Grant a Patent received for Japanese Patent Application Serial No. 2021-056628 dated Nov. 2, 2021, 5 pages. (Including English Translation).
Non-Final Office Action received for U.S. Appl. No. 16/168,054 dated Jun. 1, 2021, 102 pages.
“Notification Concerning Transmittal of International Preliminary Report on Patentability (Chapter I of the Patent Cooperation Treaty)” for PCT/US2018/057026, dated May 28, 2020, 7 pages, the International Bureau of WIPO, Geneva, Switzerland.
Extended European Search Report received for European Patent Application No. 18918938.4, dated Jul. 6, 2021, 9 pages, European Patent Office, Munich, Germany.
“Notice of Preliminary Rejection” for Korean Patent Application 10-2020-7016928, dated Jul. 16, 2021, 6 pages, Korean Intellectual Property Office, Daejeon, South Korea (Including English Translation).
Notification Concerning Transmittal of International Preliminary Report on Patentability {Chapter I of the Patent Cooperation Treaty) for International Patent Application No. PCT/US2019/024343, dated Oct. 15, 2020, 9 pages, the International Bureau of WIPO, Geneva, Switzerland.
“Notice of Preliminary Rejection” for Korean Patent Application No. 10-2020-7029872, dated Jul. 19, 2021, 10 pages, Korean Intellectual Property Office (Including English Translation).
Extended European Search Report received for European Patent Application Serial No. 19781037.7 dated Oct. 25, 2021, 9 pages.
“Office Action” South Korean Patent Application No. 10-2021-7006391, dated May 14, 2021, 8 pages, Korean Intellectual Property Office, South Korea (Including English Translation).
International Preliminary Report on Patentability received for PCT Application Serial No. PCT/US2019/043674 dated Feb. 18, 2021, 10 pages.
“Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration” for International Patent Application No. PCT/US2020/026964, dated Jul. 28, 2020, 10 pages, ISA/KR, Korean Intellectual Property Office, Daejeon, Republic of Korea.
International Preliminary Report on Patentability received for PCT Patent Application No. PCT/US2020/026964, dated Oct. 21, 2021, 7 pages.
Non-Final Office Action received for U.S. Appl. No. 17/227,300 dated Jun. 30, 2021, 82 pages.
“Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration” for Internatonal Patent Application No. PCT/US2020/033630, dated Sep. 9, 2020, 10 pages, International Searching Authority, Korean Intellectual Property Office, Daejeon, Republic of Korea.
“Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration” for PCT/US2020/036634, dated Sep. 21, 2020, 9 pages, ISA/KR, Korean Intellectual Property Office, Daejeong, Republic of Korea.
“Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration” for International Application No. PCT/US2020/038927, 14 pages, ISA/KR, International Searching Authority, Daejeong, Republic of Korean.
Decision to Grant a Patent received for Korean Patent Application Serial No. 10-2023-7013943, dated Sep. 25, 2023, 3 pages (1 page of English Translation and 2 pages of Official Copy).
Office Action received for Korean Patent Application No. 10-2023-7007292, dated Apr. 17, 2023, 19 pages (10 pages of English Translation and 9 pages of Official Copy).
Decision to Grant a Patent received for Korean Patent Application Serial No. 10-2023-7009114, dated May 16, 2023, 3 pages (1 page of English Translation and 2 pages of Official Copy).
Office Action for Japanese Patent Application No. 2021-572877, dated May 12, 2023, 12 pages (8 pages of English Translation and 4 pages of Official Copy).
Office Action received for Japanese Patent Application No. 2021-559434, dated May 26, 2023, 17 pages (11 pages of English Translation and 6 pages of Official Copy).
Extended European Search Report received for European Patent Application No. 20831915.2, dated Jun. 2, 2023, 9 pages.
International Preliminary Report on Patentability received for PCT Application Serial No. PCT/US2021/058687, dated May 25, 2023 , 7 pages.
Notice of Allowance received for Chinese Patent Application Serial No. 201780024892.0, dated May 30, 2023, 2 pages (Official Copy Only).
Notice of Allowance received for U.S. Appl. No. 16/805,733, dated May 8, 2023, 5 pages.
Non-Final Office Action received for U.S. Appl. No. 18/183,748, dated Aug. 21, 2023, 9 pages.
Extended European Search Report received for European Patent Application No. 20822328.9, dated May 4, 2023, 34 pages.
Notice of Allowance received for Japanese Patent Application No. 2021-020502, dated Jun. 30, 2023, 3 pages (Official Copy only).
Decision to Grant received for Korean Patent Application No. 10-2021-7016081, dated Jul. 14, 2023, 3 pages (1 page of English Translation and 2 pages of Official Copy).
Office Action received for Japanese Patent Application No. 2021-168642, dated Mar. 15, 2023, 5 pages (Previously cited Office Action, now resubmitting along with English Translation; 3 pages of English Translation and 2 pages of Official Copy).
Office Action received for Korean Patent Application No. 10-2022-7036873, dated Mar. 29, 2023, 22 pages (12 pages of English Translation and 10 pages of Official Copy).
Notice of Allowance received for Japanese Patent Application Serial No. 2021-100687, dated Aug. 31, 2023, 03 pages of Official Copy.
Office Action received for Japanese Patent Application Serial No. 2023-000154, dated Sep. 1, 2023, 9 pages (6 pages of English Translation and 3 pages of Official Copy).
Notice of Allowance received for Chinese Patent Application Serial No. 201880017776.0, dated Sep. 27, 2023, 4 pages of Official Copy Only.
Non-Final Office Action received for U.S. Appl. No. 18/183,748, dated Jun. 12, 2023, 8 pages.
Non-Final Office Action received for U.S. Appl. No. 16/523,459, dated Sep. 13, 2022, 11 pages.
International Preliminary Report on Patentability received for PCT Application Serial No. PCT/US2021/020749, dated Sep. 15, 2022, 8 pages.
Notice of Allowance received for U.S. Appl. No. 16/805,733, dated Nov. 10, 2022, 5 pages.
Notice of Allowance received for U.S. Appl. No. 16/841,930, dated Oct. 3, 2022, 8 pages.
Non-Final Office Action received for U.S. Appl. No. 16/168,054, dated Oct. 20, 2022, 16 pages.
Notice of Allowance received for U.S. Appl. No. 17/164,773, dated Nov. 2, 2022, 8 pages.
Notice of Allowance received for U.S. Appl. No. 16/805,733, dated Jan. 25, 2023, 5 pages.
Office Action received for Chinese Patent Application Serial No. 201780024892.0, dated Sep. 2, 2022, 28 pages (11 pages of English Translation and 17 pages of Official Copy).
Extended European Search Report received in European Application No. 20787345.6, dated Dec. 5, 2022, 8 pages.
Final Office Action received for U.S. Appl. No. 16/878,140, dated Feb. 1, 2023, 26 pages.
Notice of Allowance received for U.S. Appl. No. 17/164,773, dated Feb. 1, 2023, 8 pages.
Notice of Allowance received for U.S. Appl. No. 16/841,930, dated Jan. 30, 2023, 9 pages.
International Search Report and Written Opinion received for PCT Patent Application No. PCT/US2022/028297, dated Mar. 13, 2023, 11 pages.
Restriction Requirement received for U.S. Appl. No. 16/941,896, dated Jan. 24, 2023, 06 pages.
Partial European Search Report received for European Patent Application No. 22178999.3, dated Oct. 10, 2022, 22 pages.
Decision to Grant received for Korean Patent Application Serial No. 10-2022-7021139, dated Dec. 14, 2022, 3 pages (1 page of English Translation and 2 pages of Official Copy).
Office Action received for Japanese Patent Application No. 2021-020502, dated Jan. 23, 2023, 6 pages (4 pages of English Translation and 2 pages of Official Copy).
Office Action received for Korean Patent Application No. 10-2021-7016081, dated Oct. 25, 2022, 4 pages (2 pages of English Translation and 2 pages of Official Copy).
Office Action received for Japanese Patent Application Serial No. 2021-199077, dated Dec. 23, 2022, 9 pages (6 pages of English Translation and 3 pages of Official Copy).
Office Action received for Korean Patent Application No. 10-2022-7028820, dated Dec. 15, 2022, 12 pages (6 pages of English Translation and 6 pages of Official Copy).
Extended European Search Report received for European Patent Application No. 20815113.4, dated Jan. 31, 2023, 14 pages.
Partial European Search Report received for European Patent Application No. 20822328.9, dated Feb. 6, 2023, 20 pages.
Office Action received for Korean Patent Application No. 10-2022-7004969, dated Jan. 9, 2023, 11 pages (6 pages of English Translation and 5 pages of Official Copy).
Office Action received for Japanese Patent Application Serial No. 2020-552870, dated Nov. 29, 2022, 11 pages (7 pages of English Translation and 4 pages of Official Copy).
Office Action received for Japanese Patent Application Serial No. 2022-002790, dated Dec. 26, 2022, 10 pages (7 pages of English Translation and 3 pages of Official Copy).
Decision to Grant received for Korean Patent Application Serial No. 10-2020-7029872, dated Nov. 28, 2022, 3 pages (1 page of English Translation and 2 pages of Official Copy).
Office Action received for Korean Patent Application No. 10-2022-7015754, dated Dec. 12, 2022, 21 pages (11 pages of English Translation and 10 pages of Official Copy).
Notice of Allowance received for U.S. Appl. No. 16/366,729, dated Mar. 8, 2023, 7 pages.
Extended European Search Report received for European Patent Application No. 22178999.3, dated Mar. 6, 2023, 25 pages.
International Search Report and Written Opinion received for PCT Patent Application No. PCT/US2022/019054, dated Feb. 20, 2023, 13 pages.
Office Action received for Korean Application Serial No. 10-2021-7036300, dated Feb. 9, 2023, 14 pages (7 pages of English Translation and 7 pages of Official Copy).
Decision to Grant received for Korean Patent Application Serial No. 10-2021-7040665, dated Feb. 23, 2023, 3 pages (1 page of English Translation and 2 pages of Official Copy).
Office Action received for Chinese Patent Application Serial No. 201880017776.0, dated Feb. 16, 2023, 22 pages (10 pages of English Translation and 12 pages of Official Copy).
Office Action received for Chinese Patent Application Serial No. 201880074279.4, dated Mar. 1, 2023, 23 pages (9 pages of English Translation and 14 pages of Official Copy).
Notice of Allowance received for U.S. Appl. No. 17/164,773, dated Apr. 5, 2023, 8 pages.
Office Action received for Japanese Patent Application Serial No. 2021-100687, dated Mar. 14, 2023, 05 pages. (3 pages of English Translation and 2 pages of Official Copy).
Office Action received for Japanese Patent Application No. 2020-526502, dated Mar. 14, 2023, 8 pages (5 pages of English Translation and 3 pages of Official Copy).
Office Action received for Japanese Patent Application No. 2021-168642, dated Mar. 15, 2023, 2 pages.
Office Action received for Japanese Patent Application No. 2022-80688, dated Mar. 17, 2023, 11 pages (7 pages of English Translation and 4 pages of Official Copy).
Non-Final Office Action received for U.S. Appl. No. 17/155,626, dated Apr. 12, 2023, 24 pages.
Notice of Allowance received for U.S. Appl. No. 16/841,930, dated Apr. 17, 2023, 9 pages.
Final Office Action received for U.S. Appl. No. 16/523,459, dated Apr. 14, 2023, 13 pages.
Related Publications (1)
Number Date Country
20210231779 A1 Jul 2021 US
Provisional Applications (1)
Number Date Country
62470827 Mar 2017 US
Continuations (1)
Number Date Country
Parent 15915840 Mar 2018 US
Child 17227295 US