Number | Name | Date | Kind |
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5360749 | Anjum et al. | Nov 1994 | |
5470794 | Anjum et al. | Nov 1995 | |
5593907 | Anjum et al. | Jan 1997 |
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"An approach using a subamorphizing threshold dose silicon implant of optimal energy to achieve shallower junctions", Akif Sultan and Sanjay Banerlee, Journal of Applied Physics, vol. 83, No. 12, 1998 American Institute of Physics, Jun. 15, 1998, pp. 8046-8050. |