Number | Name | Date | Kind |
---|---|---|---|
4215161 | Siebold et al. | Jul 1980 | |
4267211 | Yajima et al. | May 1981 | |
4321298 | Shaffer et al. | Mar 1982 | |
4696827 | Okamura et al. | Sep 1987 | |
4749631 | Haluska et al. | Jun 1988 | |
4756977 | Haluska et al. | Jul 1988 | |
4772516 | Mahone | Sep 1988 | |
4892790 | Gray | Jan 1990 | |
4915760 | Singh et al. | Apr 1990 | |
4923719 | Kazrasek et al. | May 1990 | |
4946713 | Sneddon et al. | Aug 1990 | |
5024979 | Debaig-Valade et al. | Jun 1991 |
Entry |
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Silicon Nitride from Organosilazane Cyclic and Linear Prepolymers Journal of the Electrochemical Society, vol. 133, (14 pp.) 1986. |