Field emission display including a resistor

Information

  • Patent Grant
  • 6495966
  • Patent Number
    6,495,966
  • Date Filed
    Thursday, November 29, 2001
    23 years ago
  • Date Issued
    Tuesday, December 17, 2002
    22 years ago
Abstract
A resistor includes a mixture of at least one of a metal conductive oxide and a transition metal material with an insulating oxide. A method for producing such a resistor includes the steps of forming an electrode on one of an alumina substrate, a glass substrate and a glass tube; and flame-spraying a mixture of at least one of a metal conductive oxide and a transition metal material with an insulating oxide, thereby depositing the mixture on the one of the alumina substrate, the glass substrate and the glass tube.
Description




BACKGROUND OF THE INVENTION




1. Field of the Invention:




The present invention relates to a resistor having a high area resistance value usable in an image and video display device utilizing an electron source, for example, a cathode-ray tube (hereinafter, referred to as a “CRT”) or a field emission display (hereinafter, referred to as an “FED”), a method for producing such a resistor, a cathode-ray tube including such a resistor, and an FED including such a resistor.




2. Description of the Related Art:





FIG. 6

is a schematic cross-sectional view of a conventional CRT


600


used in a color display apparatus. As shown in

FIG. 6

, the CRT


600


includes a face plate


601


acting as a fluorescent screen and a neck


602


. The neck


602


accommodates a cathode


603


and an electronic lens system


607


. The electronic lens system


607


includes a triode section


604


and a main electronic lens section


605


formed of a plurality of metal cylinders


605


A and


605


B. The electronic lens system


607


is structured so as to project a crossover image of an electronic beam from the cathode section


603


on the face plate


601


using the main electronic lens section


605


. Reference numeral


606


represents a built-in division-type resistor.




In the electronic lens system


607


having such a structure, a diameter DS of a spot image on the face plate


601


is found by expression (1) using an electrooptic magnitude M and a spherical aberration coefficient CS0.








DS=[


(


M×dx+


(½)


M×CS


0×α0


3


)


2




+DSC




2


]


½


  (1),






where dx is a virtual crossover diameter, α0 is a divergence angle of the beam, and DSC is a divergence component of the beam caused by the repulsive effect of a spatial charge.




Recently, efforts have been made to minimize the spherical aberration coefficient CS0 of the main electronic lens section


605


in order to provide a high precision image by minimizing the spot diameter DS on the face plate


601


.




Japanese Laid-Open Publication No. 61-147442, for example, discloses a method for reducing the spherical aberration coefficient CS0 by a built-in division-type resistor. Japanese Laid-Open Publication Nos. 60-208027 and 2-276138, for example, each disclose a method for reducing the spherical aberration coefficient CS0 by forming a convergence electrode of a spiral resistor in the neck of the CRT instead of forming a convergence electrode of the main electronic lens including a plurality of metal cylinders.




The division-type resistor and the spiral resistor are formed in the following manner as described in, for example, Japanese Laid-Open Publication Nos. 61-224402 and 6-275211.




A film is formed of a stable suspension including ruthenium hydroxide (Ru(OH)


3


) and glass particles and excluding an organic binder. The film is formed on an inner surface of a glass tube (formed of, for example, low melting point lead glass having a softening point of 640° C.) by dipping. The film is dried, and then cut into a spiral pattern. Then, the film is baked at a temperature of 400° C. to 600° C. to form a resistor including ruthenium oxide (RuO


2


).




Japanese Laid-Open Publication Nos. 61-147442, 55-14627 and 6-275211 disclose another resistor having a high area resistance value, which is formed of RuO


2


and high melting point glass particles.




The resistor formed of RuO


2


and glass particles is formed in a zigzag pattern on an alumina (e.g., Al


2


O


3


) substrate by screen printing. Such a resistor (referred to as a “glaze resistor”) has a total resistance value of 300 MΩ to 1000 MΩ. The alumina used as the substrate has a thermal expansion coefficient of 75×10


−7


/°C. and a melting point of 2,050° C. Since a CRT requires a resistor which is highly reliable against a high voltage of about 30 kV and an electronic beam, the resistor formed of RuO


2


and glass particles is formed by baking at a relatively high temperature of 750° C. to 850° C.




Japanese Laid-Open Publication No. 7-309282, for example, discloses still another resistor formed of RuO


2


and low melting point glass. The low melting point glass is, for example, PbO—B


2


O


3


—SiO


2


—based glass and includes PbO at 65% or more by weight. The softening point of the low melting point glass is about 600° C. or less.




The above-described spiral or zigzag-pattern resistors are provided in the neck of the CRT in order to minimize the spot diameter on the fluorescent screen and the deflecting power. In addition, a double anode CRT is also developed in which the electronic lens system includes a high resistance layer in a funnel portion thereof.




A resistor used in the electronic lens system of the CRT provides a potential distribution between the anode electrode and a focus electrode, and thus needs to have a sufficiently high area resistance value of 1 GΩ/□ to 100 GΩ/□ (i.e., about 10


9


Ω/□ to about 10


11


Ω/□) in order to prevent a current flow sufficiently to avoid sparking and arc discharge.




Displays utilizing an electron source, such as an FED, also require a high area resistance value provided between an anode and a cathode.




According to the method described in Japanese Laid-Open Publication Nos. 61-224402 and 6-275211, Ru(OH)


3


, which is an insulating substance, is thermally decomposed while being baked at a temperature of 400° C. to 600° C. By such thermal decomposition, RuO


2


, which is a conductive substance, is deposited, and the low melting point glass flows. As a result, fine particles of RuO


2


having a diameter of 0.01 to 0.03 μm are deposited around the glass particles, which form a resistor.




Such a method has the following problems in obtaining a high resistance value of 5 GΩ to 20 GΩ (area resistance value: 1 MΩ/□ to 4 MΩ/□): (i) the dependency of the area resistance value on the baking temperature increases (i.e., the area resistance value significantly changes when the baking temperature slightly changes); (ii) the temperature coefficient of resistance value (TCR) is increased in a negative direction; and (iii) the load characteristic over a long period of time is inferior. The expression “/□” refers to “per unit area”.




The method described in Japanese Laid-Open Publication Nos. 55-14527, 61-147442 and 6-275211 has a problem in that the resultant resistor cannot be formed on an inner surface of the low melting point glass (having a softening point of 640° C.) used for the CRT due to the high baking temperature of 750° C. to 850° C.




According to the method described in Japanese Laid-Open Publication No. 7-309282, the resistor can be formed on an inner surface of the CRT at a low temperature of 440° C. to 520° C. However, the resistor formed by this method has problems in that (i) the area resistance value significantly changes in accordance with the load characteristic (against application of a voltage of 30 kV at 70° C. at 10


−7


Torr) in the vacuum over a long period of time (5,000 hours); and (ii) the spot diameter on the fluorescent screen is increased due to the load since the TCR is negative.




A tungsten (W)-aluminium oxide-based cermet resistor having a high area resistance value has been developed for use in the electronic tube (see, for example, Japanese Publication for Opposition No. 56-15712). Such a resistor has problems in that (i) a high area resistance value of 10


9


Ω/□ or more is not obtained; and (ii) the TCR is negative and the absolute value thereof is excessively large.




A resistor having an area resistance value of 1 GΩ/□ to 100 GΩ/□ does not need to be shaped into a spiral or zigzag pattern, for use in a CRT. However, the conventional resistive materials have an area resistance value of 1 MΩ/□ to 100 MΩ/□. Since such a range of area resistance values is not sufficiently high, the resistor needs to be shaped into a spiral or zigzag pattern.




Attempts have been made to produce an electronic lens system using a high resistance ceramic cylinder without shaping the resistor into a spiral or zigzag pattern (see, for example, Japanese Laid-Open Publication No. 6-275211 and the Proceedings of the 14th International Display Research Conference, pp. 229 to 232 (1994)).




The resistive materials used for this type of electronic lens system include forsterite (2MgO•SiO


2


)-based and Al


2


O


3


—MnO


2


—Fe


2


O


3


—Nb


2


O


3


—based materials. The specific resistance value of these materials is 10


11


Ωcm (resistance value: 2.4 GΩ to 240 GΩ). However, it has been pointed out that when the power consumption of a display apparatus, for example, a TV is increased by the negative TCR, the current flowing in the resistive material rapidly increases and possibly thermal runaway occurs.




SUMMARY OF THE INVENTION




According to one aspect of the invention, a resistor includes a mixture of at least one of a metal conductive oxide and a transition metal material with an insulating oxide.




In one embodiment of the invention, the resistor is produced using a flame-spraying method.




In one embodiment of the invention, the flame-spraying method includes plasma flame-spraying.




In one embodiment of the invention, the flame-spraying method includes laser flame-spraying.




In one embodiment of the invention, the metal conductive oxide is at least one material selected from the group consisting of titanium oxide, rhenium oxide, iridium oxide, ruthenium oxide, vanadium oxide, rhodium oxide, osmium oxide, lanthanum titanate, SrRuO


3


, molybdenum oxide, tungsten oxide, and niobium oxide.




In one embodiment of the invention, the metal conductive oxide is at least one material selected from the group consisting of TiO, ReO


3


, IrO


2


, RuO


2


, VO, RhO


2


, OSO


2


, LaTiO


3


, SrRuO


3


, MoO


2


, WO


2


, and NbO.




In one embodiment of the invention, the transition metal material is at least one material selected from the group consisting of titanium, rhenium, vanadium, and niobium.




In one embodiment of the invention, the insulating oxide is at least one material selected from the group consisting of alumina, silicon oxide, zirconium oxide, and magnesium oxide.




In one embodiment of the invention, the insulating oxide is at least one material selected from the group consisting of Al


2


O


3


, SiO


2


, ZrO


2


, and MgO.




In one embodiment of the invention, the metal conductive oxide is TiO, and the insulating oxide is Al


2


O


3


.




In one embodiment of the invention, the resistor has an area resistance value of at least of about 1 GΩ/□.




According to another aspect of the invention, a cathode ray tube includes the above-described resistor.




According to still another aspect of the invention, a method for producing a resistor includes the steps of forming an electrode on one of an alumina substrate, a glass substrate and a glass tube; and flame-spraying a mixture of at least one of a metal conductive oxide and a transition metal material with an insulating oxide, thereby depositing the mixture on the one of the alumina substrate, the glass substrate and the glass tube.




According to still another aspect of the invention, a field emission display includes an anode, a cathode, and a resistor provided between the anode and the cathode. The resistor includes a mixture of at least one of a metal conductive oxide and a transition metal material with an insulating oxide. The resistor is formed using a flame-spraying method. The resistor has an area resistance value of at least about 1 GΩ/□.




In one embodiment of the invention, the field emission display further includes a support provided between the anode and the cathode, wherein the support is covered with the resistor.




In one embodiment of the invention, the support includes at least one of glass and alumina.




In one embodiment of the invention, the metal conductive oxide is at least one material selected from the group consisting of titanium oxide, rhenium oxide, iridium oxide, ruthenium oxide, vanadium oxide, rhodium oxide, osmium oxide, lanthanum titanate, SrRuO


3


, molybdenum oxide, tungsten oxide, and niobium oxide.




In one embodiment of the invention, the metal conductive oxide is at least one material selected from the group consisting of TiO, ReO


3


, IrO


2


, RuO


2


, VO, RhO


2


, OsO


2


, LaTiO


3


, SrRuO


3


, MoO


2


, WO


2


, and NbO.




In one embodiment of the invention, the transition metal material is at least one material selected from the group consisting of titanium, rhenium, vanadium, and niobium.




In one embodiment of the invention, the insulating oxide is at least one material selected from the group consisting of alumina, silicon oxide, zirconium oxide, and magnesium oxide.




In one embodiment of the invention, the insulating oxide is at least one material selected from the group consisting of Al


2


O


3


, SiO


2


, ZrO


2


, and MgO.




In one embodiment of the invention, the metal conductive oxide is TiO, and the insulating oxide is Al


2


O


3


.




According to the present invention, a resistor having a satisfactorily high area resistance value, a satisfactory load characteristic in vacuum, and a positive and stable TCR is obtained without a baking process.




Such a resistor is obtained by flame-spraying a mixture of both or either of a metal conductive oxide or a transition metal material and an insulating oxide toward a substrate using plasma torch or laser. Usable metal conductive oxides include, for example, TiO, ReO


3


, IrO


2


, MoO


2


, WO


2


, RuO


2


, and LaTiO


2


. Usable transition metal materials include, for example, Ti, Re, V and Nb. Usable insulating oxides include, for example, SiO


2


, Al


2


O


3


, ZrO


2


, and MgO.




Since the particles of the metal conductive oxide or the transition metal material are dispersed among the particles of the insulating oxide, the resistor formed of the above-described mixture has a sufficiently high area resistance value.




The present inventors have found that (i) by using an appropriate metal conductive oxide and/or transition metal material and insulating oxide at an appropriate ratio and an appropriate flame-spraying method, a resistor having a high area resistance value of about 1 GΩ/□ to about 100 GΩ/□ is produced; (ii) the resultant resistor has a superior overtime load characteristic to the conventional resistors; and (iii) the TCR of the resultant resistor is small and stable.




Such a resistor does not need to be shaped into a spiral or zigzag pattern and can be easily formed on an alumina substrate of an inner surface of the funnel of a CRT.




Thus, the invention described herein makes possible the advantages of providing (1) a resistor having a satisfactorily high area resistance value produced without baking; (2) a resistor having a satisfactorily high load characteristic over a long period of time in vacuum; (3) a reliable resistor having a small TCR; (4) a method for producing such a resistor; (5) a CRT including such a resistor; and (6) an FED including such a resistor.




These and other advantages of the present invention will become apparent to those skilled in the art upon reading and understanding the following detailed description with reference to the accompanying figures.











BRIEF DESCRIPTION OF THE DRAWINGS





FIG. 1A

is a schematic view of a plasma flame-spraying apparatus used for producing a resistor in a first example according to the present invention;





FIG. 1B

is a flowchart illustrating a method for producing the resistor shown in

FIG. 1A

;





FIG. 2

is a schematic cross-sectional view of a CRT including the resistor shown in

FIG. 1A

;





FIG. 3A

is a schematic view of a laser flame-spraying apparatus used for producing a resistor in a second example according to the present invention;





FIG. 3B

is a flowchart illustrating a method for producing the resistor shown in

FIG. 3A

;





FIG. 4

is a schematic cross-sectional view of a CRT including the resistor shown in

FIG. 3A

;





FIG. 5A

is an isometric view of an FED in a third example according to the present invention;





FIG. 5B

is a cross-sectional view of the FED shown in

FIG. 5A

taken along surface A; and





FIG. 6

is a schematic cross-sectional view of a conventional CRT.











DESCRIPTION OF THE EMBODIMENTS




Hereinafter, the present invention will be described by way of illustrative examples with reference to the accompanying drawings.




EXAMPLE 1




A resistor produced by a plasma flame-spraying method in a first example according to the present invention will be described with reference to

FIGS. 1A

,


1


B and


2


.





FIG. 1A

is a schematic view of a plasma flame-spraying apparatus


100


used for producing a resistor in the first example.

FIG. 1B

is a flowchart illustrating a method for producing the resistor in the first example.




As shown in

FIG. 1A

, the plasma flame-spraying apparatus


100


includes a negative electrode


101


, a positive electrode


102


, a power supply


103


, a spray nozzle


107


, and a powder supply port


109


for supplying a resistive material


108


. Reference numeral


104


represents a DC arc, and reference numeral


105


represents operation gas. Reference numeral


106


represents an arc plasma jet


106


. Reference numeral


110


represents an alumina (e.g., Al


2


O


3


) substrate, and reference numeral


111


represents an electrode (for example, focus electrode and anode electrode). Reference numeral


112


represents a resistor produced by the plasma flame-spraying apparatus


100


. A glass substrate maybe used instead of the alumina substrate


110


.




With reference to

FIG. 1B

, a method for producing the resistor


112


will be described. Refer to

FIG. 1A

for the reference numeral of each element.




In step S


101


, a silver paste, for example, is screen-printed on the alumina substrate


110


and then baked, thereby forming the electrodes


111


.




Then, in step S


102


, an electric field is applied between the negative electrode


101


and the positive electrode


102


using the power supply


103


to generate the DC arc


104


. The operation gas


105


(e.g., argon-hydrogen mixture gas or nitrogen-hydrogen mixture gas) is caused to flow along a surface of the negative electrode


101


to generate the arc plasma jet


106


.




In step S


103


, the resistive material


108


including, for example, a mixture powder including TiO at about 30% by weight and Al


2


O


3


at about 70% by weight is supplied from the powder supply port


109


. While the spray nozzle


107


is moved toward the alumina substrate


110


to a thickness of about 20 μm, thereby forming the resistor


112


on the alumina substrate


110


. In the case where the resistive material


108


needs to be flame-sprayed under a low pressure atmosphere of about 0.1 to about 10 Torr, the plasma flame-spraying apparatus


100


is entirely accommodated in a low pressure chamber before the production.




Then, Al


2


O


3


is sprayed toward the resistor


112


to a thickness of about 40 μm, thereby forming a protective film (not shown). Al


2


O


3


is not sprayed to the electrodes


111


. Thus, a resistor section


113


including the TiO—Al


2


O


3


—based resistor


112


, the alumina substrate


110


and the electrodes


111


is formed.




The TiO—Al


2


O


3


—based resistor


112


, which is produced without a baking process, has a high area resistance value of about 1 GΩ/□ or more and also a satisfactory heat-resistant load characteristic as described below. Furthermore, the TiO—Al


2


O


3


—based resistor


112


has a positive and stable TCR.





FIG. 2

is a schematic cross-sectional view of a CRT


200


including the resistor section


113


. Identical elements previously discussed with respect to

FIG. 6

bear identical reference numerals and the descriptions thereof will be omitted.




The resistor section


113


, as described above with reference to

FIG. 1A

, includes the TiO—Al


2


O


3


—based resistor


112


, the alumina substrate


110


and the electrodes


111


.




The CRT


200


including the TiO—Al


2


O


3


—based resistor


112


enjoys the above-described advantages of the TiO—Al


2


O


3


—based resistor


112


.




The present invention is not limited to the TiO—Al


2


O


3


—based resistor


112


. Usable instead of TiO are both or either of a metal conductive oxide or a transition metal material. Usable instead of Al


2


O


3


is an insulating oxide.




EXAMPLE 2




A resistor produced by a laser flame-spraying method in a second example according to the present invention will be described with reference to

FIGS. 3A

,


3


B and


4


.





FIG. 3A

is a schematic view of a laser flame-spraying apparatus


300


used for producing a resistor in the second example.

FIG. 3B

is a flowchart illustrating a method for producing the resistor in the second example.




As shown in

FIG. 3A

, the laser flame-spraying apparatus


300


includes a spray nozzle


201


, a powder supply port


202


for supplying a resistive material (not shown), and a laser light collection lens system


204


. The powder supply port


202


is formed so as to run throughout the spray nozzle


201


. Reference numeral


203


represents laser light. Reference numeral


205


represents a glass tube of a CRT, and reference numeral


206


represents an electrode. Reference numeral


207


represents a resistor produced by the laser flame-spraying apparatus


300


.




With reference to

FIG. 3B

, a method for producing the resistor


207


will be described. Refer to

FIG. 3A

for the reference numeral of each element.




In step S


301


, the electrodes


206


(for example, anode electrode and focus electrode) are formed on an inner surface of the glass tube


205


of the CRT. The electrodes


206


can be formed of the same material and in the same manner as those of the electrodes


111


described in the first example.




Then, in step S


302


, the laser light


203


is collected by the laser light collection lens system


204


. Instep S


303


, a resistive material (not shown) including, for example, a mixture powder including TiO at about 10% by weight and Al


2


O


3


at about 90% by weight is supplied from the power supply port


202


. While the spray nozzle


201


is moved toward the glass tube


205


, the resistive material is flame-sprayed toward the glass tube


205


to a thickness of about 20 μm, thereby forming resistor


207


on the glass tube


205


. Since the resistor


207


is formed on the inner surface of the glass tube


205


, it is not necessary to form a protective film as is necessary in the first example.




The TiO—Al


2


O


3


—based resistor


207


, which is produced without a baking process, has a high resistance value of about 1 GΩ and also a satisfactory heat-resistant load characteristic as described below. Furthermore, the TiO—Al


2


O


3


—based resistor


207


has a positive and stable TCR.





FIG. 4

is a schematic cross-sectional view of a CRT


400


including the TiO—Al


2


O


3


—based resistor


207


.




The CRT


400


includes the TiO—Al


2


O


3


—based resistor


207


provided on the inner surface of the glass tube


205


, and the electrodes


206


. An inner surface


401


of the CRT


400


is coated with a paste of graphite, RuO


2


or the like.




The CRT


400


including the TiO—Al


2


O


3


—based resistor


207


enjoys the above-described advantages of the TiO—Al


2


O


3


—based resistor


207


.




The present invention is not limited to the TiO—Al


2


O


3


—based resistor


207


. Usable instead of TiO are both or either of a metal conductive oxide or a transition metal material. Usable instead of Al


2


O


3


is an insulating oxide.




EXAMPLE 3




In a third example, an FED


500


including a resistor according the present invention will be described with reference to

FIGS. 5A and 5B

.





FIG. 5A

is an isometric view of the FED


500


.

FIG. 5B

is a cross-sectional view of the FED


500


taken along surface A in FIG.


5


A.




As shown in

FIGS. 5A and 5B

, the FED


500


includes an anode


501


, a cathode


502


, an FED array


503


provided on an inner surface of the cathode


502


, a cathode drawing electrode


504


connected to the cathode


502


, an anode drawing electrode


505


connected to the anode


501


, a fluorescent body


508


provided on an inner surface of the anode


501


, and a power supply


507


.




Supports


506


are provided between the anode


501


and the cathode


502


for preventing the anode


501


and the cathode


502


from contacting each other in vacuum. The supports


506


are formed of glass, alumina or any other insulating material.




The supports


506


are covered with the TiO—Al


2


O


3


—based resistor


112


described in the first example or the TiO—Al


2


O


3


—based resistor


207


in the second example.




Without such a resistor, the following inconvenience occurs. When a high voltage of several kilovolts to several tens of kilovolts is applied between the anode drawing electrode


504


and the cathode drawing electrode


505


, electrons are accumulated in the supports


506


since the supports


506


are formed of an insulating material. When the electrons are accumulated in the supports


506


, arc or spark is generated from the supports


506


. As a result, an image on a screen of the FED


500


is disturbed or the fluorescent body


508


is damaged.




In the FED


500


including the above-described resistor, the electrons accumulated in the supports


506


are removed by causing a slight amount of current to flow in the supports


506


. Accordingly, the electrons are not accumulated, which prevents generation of arc or spark from the supports


506


or damages on the fluorescent body


508


.




SPECIFIC EXAMPLES




TiO and Al


2


O


3


-based resistors are produced with various ratios of TiO and Al


2


O


3


. Resistors including both or either of a metal conductive oxide or a transition metal material (e.g., ReO


3


, IrO


2


, MoO


2


, WO


2


, RuO


2


, LaTiO


3


, or TiO


2−x


(0<×<1)), and an insulating oxide (e.g., SiO


2


, ZrO


2


, or MgO) are also produced with various ratios.




The resistors are produced by a plasma flame-spraying method or a laser flame-spraying method.




The resultant resistors are each attached to an electronic gun of the CRT


200


(

FIG. 2

) or the CRT


400


(FIG.


4


), or provided on the supports


506


of the FED


500


(FIGS.


5


A and


5


B).




An accelerated test of the CRT


200


can be performed by applying a voltage of about 30 kV to about 40 kV to the anode electrode (e.g., electrode


111


in

FIG. 1A

) and applying a voltage of about 5 kV to about 10 kV to the focus electrode (e.g., electrode


111


in FIG.


1


A). In this example, a voltage of about 30 kV is applied to the anode electrode for about 5,000 hours for testing the life of the CRT


200


(test of actual life). A voltage of about 45 kV is applied to the anode electrode for about 10 hours for testing the life of the CRT


200


when an excessive load is applied (test of life against short-time application of excessive load).




An accelerated test of the CRT


400


can be performed by applying a voltage of about 10 kV to about 30 kV between the electrodes


206


. In this example, a voltage of about 30 kV is applied between the electrodes


206


for about 5,000 hours for testing the life of the CRT


400


(test of actual life). A voltage of about 45 kV is applied to the anode between the electrodes


206


for about 10 hours for testing the life of the CRT


400


when an excessive load is applied (test of life against short-time application of excessive load).




An accelerated test of the FED


500


is performed by applying a voltage of about 15 kV between the anode drawing electrode


504


and the cathode drawing electrode


505


. An area resistance value, temperature characteristic of resistance value (TCR), and overtime change in the area resistance value, and the like are evaluated.




The conditions for producing the resistors are shown in Tables 1 through 4. The evaluation results are shown in Tables 5 and 6. Samples 15 through 19 in Table 2 are conventional resistors.















TABLE 1













Materials and ratio








(% by weight)


















Metal












conductive




Insulating




Method for






Pattern of






Sample




oxide




oxide




film formation




Substrate




Use




resistor






















1




TiO




(30) 




Al


2


O


3






(70)




Plasma flame-spraying




Alumina




Division-type




Plain











spraying




(Al


2


O


3


)




resistor











(Ar—H


2


gas)






2




TiO




(5)




Al


2


O


3






(95)




Plasma flame-spraying




Alumina




Division-type




Plain











(N


2


—H


2


gas)




(Al


2


O


3


)




resistor






3




TiO




(3)




Al


2


O


3






(97)




Laser flame-spraying




Alumina




Division-type




Plain












(Al


2


O


3


)




resistor






4




ReO


3






(5)




SiO


2






(95)




Laser flame-spraying




Alumina




Division-type




Plain












(Al


2


O


3


)




resistor






5




IrO


2






(5)




ZrO


2






(95)




Plasma flame-spraying




Alumina




Division-type




Plain











(N


2


—H


2


gas)




(Al


2


O


3


)




resistor






6




RuO


2






(3)




MgO




(97)




Plasma flame-spraying




Alumina




Division-type




Plain











(Ar—H


2


gas)




(Al


2


O


3


)




resistor






7




VO




(5)




Al


2


O


3






(95)




Plasma flame-spraying




Alumina




Division-type




Plain











(Ar—H


2


gas)




(Al


2


O


3


)




resistor






8




RhO


2






(4)




Al


2


O


3






(96)




Laser flame-spraying




CRT glass




Inner surface




Plain












tube




of CRT






9




LaTiO


3






(5)




Al


2


O


3






(95)




Plasma flame-spraying




CRT glass




Inner surface




Plain











(N


2


—H


2


gas)




tube




of CRT






10




SrRuO


3






(5)




Al


2


O


3






(95)




Plasma flame-spraying




CRT glass




Inner surface




Plain











(N


2


—H


2


gas)




tube




of CRT

























TABLE 2













Materials and ratio (% by weight)



















Metal conductive oxide












(except for samples





Method for






Pattern of






Sample




17, 18 and 19)




Insulating oxide




film formation




Substrate




Use




resistor






















11 




MoO


2






(5)




Al


2


O


3






(95)




Plasma flame-spraying




Alumina




Division-type




Plain











(N


2


—H


2


gas)




(Al


2


O


3


)




resistor






12 




WO


2






(5)




Al


2


O


3






(95)




Plasma flame-spraying




Alumina




Division-type




Plain











(N


2


—H


2


gas)




(Al


2


O


3


)




resistor






13 




NbO




(5)




SiO


2






(95)




Plasma flame-spraying




Alumina




Division-type




Plain











(N


2


—H


2


gas)




(Al


2


O


3


)




resistor






14 




OsO


2






(5)




SiO


2






(95)




Plasma flame-spraying




Alumina




Division-type




Plain











(N


2


—H


2


gas)




(Al


2


O


3


)




resistor






15*




RuO


2






(3)




Lead-based glass




(97)




Paste is screen-printed




Alumina




Division-type




Zigzag









(PbO—SiO


2


—B


2


O


3


—Al


2


O


3


)





and baked at 800° C.




(Al


2


O


3


)




resistor






16*




RuO


2






(3)




Lead-based glass




(97)




Paste is screen-printed




CRT glass




Inner surface




Zigzag









(PbO—SiO


2


—B


2


O


3


—Al


2


O


3


)





and baked at 450° C.




tube




of CRT















17*




Al


2


O


3


—MnO


2


—Fe


2


O


3


—Nb


2


O


3


-based ceramic




Baked




Cylinder in CRT




Zigzag



















18*




W




(20) 




Al


2


O


3






(80)




Sputtered and baked




Alumina




Division-type




Plain











at 850° C. in vacuum




(Al


2


O


3


)




resistor






19*




Mo




(20) 




Al


2


O


3






(80)




Sputtered and baked




Alumina




Division-type




Plain











at 850° C. in vacuum




(Al


2


O


3


)




resistor











*Samples 15 through 19: conventional resistors
























TABLE 3













Materials and ratio (% by weight)



















Metal conductive oxide or





Method for






Pattern of






Sample




transition metal material




Insulating oxide




film formation




Substrate




Use




resistor






















20




TiO




(10) 




Al


2


O


3






(90)




Plasma flame-spraying




Glass support




Charge prevention




Plain











(Ar—H


2


gas)




in FED




(Arc and spark prevention)






21




TiO


1.5






(5)




Al


2


O


3






(95)




Plasma flame-spraying




Glass support




Charge prevention




Plain











(N


2


—H


2


gas)




in FED




(Arc and spark prevention)






22




TiO


1.2






(3)




Al


2


O


3






(97)




Laser flame-spraying




Glass support




Charge prevention




Plain












in FED




(Arc and spark prevention)






23




ReO


3






(5)




SiO


2






(95)




Laser flame-spraying




Glass support




Charge prevention




Plain












in FED




(Arc and spark prevention)






24




IrO


2






(5)




ZrO


2






(95)




Plasma flame-spraying




Glass support




Charge prevention




Plain











(N


2


—H


2


gas)




in FED




(Arc and spark prevention)






25




RuO


2






(5)




MgO




(95)




Plasma flame-spraying




Glass support




Charge prevention




Plain











(Ar—H


2


gas)




in FED




(Arc and spark prevention)






26




VO




(10) 




Al


2


O


3






(90)




Plasma flame-spraying




Glass support




Charge prevention




Plain











(Ar—H


2


gas)




in FED




(Arc and spark prevention)

























TABLE 4













Materials and ratio (% by weight)



















Metal conductive oxide or





Method for






Pattern






Sample




transition metal material




Insulating oxide




film formation




Substrate




Use




resistor






















27




RhO


2






(5)




Al


2


O


3






(95)




Laser flame-spraying




CRT glass




Inner surface




Plain












tube




of CRT






28




Ti




(5)




Al


2


O


3






(95)




Plasma flame-spraying




CRT glass




Inner surface




Plain











(N


2


—H


2


gas)




tube




of CRT






29




Re




(5)




Al


2


O


3






(95)




Plasma flame-spraying




CRT glass




Inner surface




Plain











(N


2


—H


2


gas)




tube




of CRT






30




V




(5)




Al


2


O


3






(95)




Plasma flame-spraying




Glass support




Charge prevention




Plain











(N


2


—H


2


gas)




in FED




(Arc and spark prevention)






31




Nb




(5)




Al


2


O


3






(95)




Plasma flame-spraying




Glass support




Charge prevention




Plain











(N


2


—H


2


gas)




in FED




(Arc and spark prevention)



























TABLE 5













10


−7


Torr




45 kV:









Temperature




70° C.




change in









characteristic




30 kV: change




area








Area




of resistance




in area




resistance






Sam-




Thick-




resistance




value (TCR)




resistance value




value after






ple




ness




value




(PPm/° C.)




after 5000 hrs.




10 hrs.











 1




20 μm




 1 GΩ




−150




0.3%




−0.5%






 2




20 μm




10 GΩ




−350




0.25% 




−0.5%






 3




35 μm




100 GΩ 




−300




0.2%




−0.6%






 4




40 μm




15 GΩ




+1500 




0.5%




−0.7%






 5




30 μm




50 GΩ




+1500 




0.3%




−0.8%






 6




30 μm




 1 GΩ




 +35




0.3%




−0.7%






 7




30 μm




 5 GΩ




 −45




0.5%




−1.2%






 8




30 μm




 3 GΩ




+200




0.4%




−1.0%






 9




30 μm




10 GΩ




 −30




0.5%




−1.5%






10




30 μm




 4 GΩ




 −55




0.3%




−1.3%






11




30 μm




 1 GΩ




 −20




−0.8% 




−1.2%






12




30 μm




 2 GΩ




 −35




−0.7% 




−1.5%






13




30 μm




10 GΩ




 −18




−0.5% 




−1.0%






14




30 μm




 3 GΩ




+1500 




+0.8% 




−0.8%






15




 5 μm




 1 GΩ




+340




−1.2% 




 −15%






16




 5 μm




10 GΩ




+420




−1.5% 




 −20%



























TABLE 6













10


−7


Torr




45 kV:









Temperature




70° C.




change in









characteristic




30 kV: change




area








Area




of resistance




in area




resistance






Sam-




Thick-




resistance




value (TCR)




resistance value




value after






ple




ness




value




(PPm/° C.)




after 5000 hrs.




10 hrs.











17




 5 μm




100 GΩ 




+1500




  5.2%




 −15%






18




 5 μm




 1 GΩ




+11000 




 −15%




Cracks in











substrate






19




 5 μm




 2 GΩ




+10000 




 −19%




Cracks in











substrate






20




20 μm




 8 GΩ




 +50




 0.3%




−0.6%






21




20 μm




10 GΩ




 −103




−0.35% 




−0.5%






22




20 μm




100 GΩ 




 −305




−0.3%




−0.6%






23




20 μm




 5 GΩ




 +105




−0.5%




−0.8%






24




20 μm




10 GΩ




 +10




−0.2%




−0.7%






25




20 μm




15 GΩ




 +10




 0.3%




−1.0%






26




20 μm




150 GΩ 




−1500




−0.8%




−1.2%






27




20 μm




18 GΩ




 −150




−0.3%




−1.0%






28




20 μm




52 GΩ




 −450




−0.5%




−1.5%






29




20 μm




30 GΩ




 −520




−0.7%




−1.3%






30




20 μm




180 GΩ 




−1550




−0.8%




−1.2%






31




20 μm




205 GΩ 




−1630




−0.9%




−1.2%














It is appreciated from Tables 1 through 6 that compared to a conventional RuO


2


-glass-based resistor, a conventional ceramic resistor, or a conventional cermet resistor including Mo (molybdenum) or W (tungsten) and an insulating oxide, the resistors including both or either of a metal conductive oxide or a transition metal material, and an insulating oxide have a higher area resistance value, exhibit a smaller change in the TCR, and change less in the area resistance value against a load at an area identical resistance value (i.e., have a higher durability against application of a high voltage).




When a high load of about 45 kV is applied, the conventional resistors are significantly damaged since the TCR is negative.




As described above, a resistor according to the present invention is formed of a mixture of both or either of a metal conductive oxide or a transition metal material, and an insulating oxide, and is formed on alumina or glass by a plasma flame-spraying method or a laser flame-spraying method. Such a resistor has a sufficiently high area resistance value and is obtained without a baking process.




Since the particles of the metal conductive oxide or the transition metal material are dispersed among the particles of the insulating oxide, the resistor formed of the above-described mixture has a sufficiently high area resistance value.




The resistor according to the present invention is stable due to a superior load characteristic in vacuum and a small TCR.




The metal conductive oxides usable in the resistor include, for example, titaniumoxide, rhenium oxide, iridium oxide, ruthenium oxide, vanadium oxide, rhodium oxide, osmium oxide, lanthanum titanate, SrRuO


3


, molybdenum oxide, tungsten oxide, and niobium oxide. These oxides can be used independently or in combination of two or more.




Preferably, TiO, ReO


3


, IrO


2


, RuO


2


, VO, RhO


2


, OSO


2


, LaTiO


3


, SrRuO


3


, MoO


2


, WO


2


, and NbO are used.




The transition metal materials usable in the resistor include, for example, titanium, rhenium, vanadium niobium. These materials can be used independently or in combination of two or more.




The insulating oxides usable in the resistor include, for example, alumina, silicon oxide, zirconium oxide, and magnesium oxide. These materials can be used independently or in combination of two or more.




Preferably, Al


2


O


3


, SiO


2


, ZrO


2


, and MgO are used.




Various other modifications will be apparent to and can be readily made by those skilled in the art without departing from the scope and spirit of this invention. Accordingly, it is not intended that the scope of the claims appended hereto be limited to the description as set forth herein, but rather that the claims be broadly construed.



Claims
  • 1. A field emission display, comprising:an anode; a cathode; and a resistor provided between the anode and the cathode, wherein: the resistor includes a mixture of at least one of a metal conductive oxide and a transition metal material with an insulating oxide, the resistor is formed using a flame-spraying method, and the resistor has an area resistance value of at least about 1 GΩ/□.
  • 2. The field emission display according to claim 1, further comprising a support provided between the anode and the cathode, wherein the support is covered with the resistor.
  • 3. The field emission display according to claim 2, wherein the support includes at least one of glass and alumina.
  • 4. The field emission display according to claim 1, wherein the metal conductive oxide is at least one material selected from the group consisting of titanium oxide, rhenium oxide, iridium oxide, ruthenium oxide, vanadium oxide, rhodium oxide, osmium oxide, lanthanum titanate, SrRuO3, molybdenum oxide, tungsten oxide, and niobium oxide.
  • 5. The field emission display according to claim 1, wherein the metal conductive oxide is at least one material selected from the group consisting of TiO, ReO3, IrO2, RuO2, VO, RhO2, OsO2, LaTiO3, SrRuO3, MoO2, WO2, and NbO.
  • 6. The field emission display according to claim 1, wherein the transition metal material is at least one material selected from the group consisting of titanium, rhenium, vanadium, and niobium.
  • 7. The field emission display according to claim 1, wherein the insulating oxide is at least one material selected from the group consisting of alumina, silicon oxide, zirconium oxide, and magnesium oxide.
  • 8. The field emission display according to claim 1, wherein the insulating oxide is at least one material selected from the group consisting of Al2O3, SiO2, ZrO2, and MgO.
  • 9. The field emission display according to claim 1, wherein the metal conductive oxide is TiO, and the insulating oxide is Al2O3.
CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional application of U.S. patent application Ser. No. 09/391,999, filed Sep. 8, 1999.

US Referenced Citations (5)
Number Name Date Kind
4527147 Arakawa Jul 1985 A
4937928 Van Der Zel Jul 1990 A
5989647 Remy et al. Nov 1999 A
6030514 Dunlop et al. Feb 2000 A
6342754 Kuroda et al. Jan 2002 B1
Foreign Referenced Citations (3)
Number Date Country
2028576 Mar 1980 GB
09204109 Aug 1981 GB
99117578.5 Aug 1997 JP