Field-emission electron source apparatus

Abstract

A field-emission electron source apparatus includes a vacuum container that receives a field-emission electron source array, a target and an auxiliary electrode, and a getter pump that is disposed in the vacuum container and absorbs and removes excess gas. An electron beam emitted from the field-emission electron source array passes through a plurality of through holes formed in the auxiliary electrode and reaches the target. A space containing the field-emission electron source array and a space containing the target and the getter pump are separated substantially by the auxiliary electrode so that gas generated from the target is absorbed by the getter pump without passing through the space containing the field-emission electron source array. This makes it possible to provide a highly-reliable field-emission electron source apparatus in which the influence of gas and ions on the field-emission electron source array is eliminated or reduced.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a sectional view showing a field-emission electron source apparatus according to Embodiment 1 of the present invention.

FIG. 2 is a schematic perspective view showing an auxiliary electrode used in the field-emission electron source apparatus according to Embodiment 1 of the present invention.

FIG. 3 is a partially enlarged perspective view showing through holes formed in a trimming portion of the auxiliary electrode used in the field-emission electron source apparatus according to Embodiment 1 of the present invention.

FIG. 4 is a partially enlarged sectional view taken along a thickness direction showing the trimming portion of the auxiliary electrode used in the field-emission electron source apparatus according to Embodiment 1 of the present invention.

FIG. 5 is an exploded perspective view showing the field-emission electron source apparatus according to Embodiment 1 of the present invention.

FIG. 6 is a sectional view showing an example of a field-emission electron source array in the field-emission electron source apparatus according to Embodiment 1 of the present invention.

FIG. 7 is a partially enlarged sectional view showing the field-emission electron source apparatus according to Embodiment 1 of the present invention.

FIG. 8 is a sectional view showing another field-emission electron source apparatus according to Embodiment 1 of the present invention.

FIG. 9 is a sectional view showing another field-emission electron source apparatus according to Embodiment 1 of the present invention.

FIG. 10 is a sectional view showing a field-emission electron source apparatus according to Embodiment 2 of the present invention.

FIG. 11 is a sectional view showing a field-emission electron source apparatus according to Embodiment 3 of the present invention.

FIG. 12 is a perspective view showing a wall part in the field-emission electron source apparatus according to Embodiment 3 of the present invention.

FIG. 13 is a sectional view showing a conventional field-emission electron source apparatus using a field-emission electron source array.

FIG. 14 is a sectional view showing another conventional field-emission electron source apparatus using a field-emission electron source array.

Claims

1. A field-emission electron source apparatus comprising: a field-emission electron source array;a target for performing a predetermined operation using an electron beam emitted from the field-emission electron source array; andan auxiliary electrode that is disposed between the field-emission electron source array and the target and provided with a plurality of through holes through which the electron beam emitted from the field-emission electron source array passes;wherein the field-emission electron source apparatus further comprises a vacuum container that receives the field-emission electron source array, the target and the auxiliary electrode, anda getter pump that is disposed in the vacuum container and absorbs and removes excess gas, anda space containing the field-emission electron source array and a space containing the target and the getter pump are separated substantially by the auxiliary electrode so that gas generated from the target is absorbed by the getter pump without passing through the space containing the field-emission electron source array.

2. The field-emission electron source apparatus according to claim 1, further comprising a substrate on which the field-emission electron source array is formed, wherein the auxiliary electrode has a spacer portion that is formed as one piece with the auxiliary electrode and spaces out the field-emission electron source array and openings of the plurality of through holes from each other, andthe auxiliary electrode is provided on the substrate via the spacer portion.

3. The field-emission electron source apparatus according to claim 2, wherein the spacer portion and the substrate are joined using an electrically conductive material, and a voltage is supplied to at least part of the auxiliary electrode from the substrate via the electrically conductive material.