Claims
- 1. A process for manufacturing a field emission element comprising the steps of:
- depositing a first conductive material into electrodes including an emitter;
- subjecting the substrate to etching in both the depth direction and in directions parallel to the plane of the substrate while using the electrodes;
- forming a second conductive material on the substrate while using the electrodes as a mask so that the second conductive material has a film thickness smaller than the depth of the etching of the substrate; and
- working the second conductive material into a gate located between the electrodes.
- 2. A process as claimed in claim 1, in which the worked electrodes comprise an emitter and a collector.
- 3. A process as claimed in claim 1 oe claim 2, in which the worked electrodes comprise a plurality of emitters.
- 4. A process as claimed in any of claim 1 or 2, in which the worked electrodes are formed into an approximate configuration before the etching step and the formation of the second conductive material on the substrate, then precisely working the worked electrodes into a desired configuration prior to the formation of the gate.
- 5. A process as claimed in claim 2, in which at least one emitter is formed into a rectangular shape when viewed from above.
- 6. A process as claimed in claim 2, in which at least one emitter is formed into a serrated shape and its respective gate is formed into a corresponding shape, when viewed from above.
- 7. A process as claimed in claim 2, in which at least one emitter is formed into a pectinate shape when viewed from the above so that it is provided with rectangular projections at its distal end.
- 8. A process as claimed in claim 2, in which a phosphor layer is formed on the collector.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2-255053 |
Sep 1990 |
JPX |
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Parent Case Info
This is a division, of application Ser. No. 08/159,114, filed on Nov. 30, 1993, now U.S. Pat. No. 5,381,069, which is a contuation of Ser. No. 07/766,215 filed on Sep. 27, 1991, abandoned.
US Referenced Citations (6)
Non-Patent Literature Citations (1)
Entry |
U.S. application No. 08/194,465, filed Feb. 08, 1994. |
Divisions (1)
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Number |
Date |
Country |
Parent |
159114 |
Nov 1993 |
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Continuations (1)
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Number |
Date |
Country |
Parent |
766215 |
Sep 1991 |
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