Number | Name | Date | Kind |
---|---|---|---|
3566829 | Hill | Mar 1971 | |
3583361 | Laudel, Jr. | Jun 1971 | |
3974059 | Murayama | Aug 1976 | |
4082636 | Takagi | Apr 1978 | |
4197814 | Takagi et al. | Apr 1980 | |
4217855 | Takagi | Aug 1980 | |
4286545 | Takagi et al. | Sep 1981 | |
4342631 | White et al. | Aug 1982 | |
4451499 | Morimoto et al. | May 1984 | |
4559096 | Friedman et al. | Dec 1985 | |
4559901 | Morimoto et al. | Dec 1985 | |
4676194 | Satou et al. | Jun 1987 | |
4685976 | Schachameyer et al. | Aug 1987 | |
4686022 | Rempt | Aug 1987 | |
4724106 | Morimoto et al. | Feb 1988 | |
4740267 | Knauer et al. | Apr 1988 |
Entry |
---|
T. Takagi et al., "New Developments in Ionized-Cluster Beam and Reactive Ionized-Cluster Beam Deposition Techniques," Thin Solid Films, 63, pp. 41-51, 1979. |
Hagena et al., "Formation and Detection of High-Energy Cluster Beam," Rarefied Gas Dynamics, vol. 51, Part II, Progress in Astronautics and Aeronautics, Technical paper selected from the 10th International Symposium on Rarefied Gas Dynamics, Jul. 1976. |