Film forming composition

Abstract

A film forming composition comprises a compound having a cage structure and a thermally decomposable compound, an insulating film is formed by using the film forming composition and an electronic device comprises the insulating film.

Description

Claims

1. A film forming composition comprising; a compound having a cage structure; anda thermally decomposable compound.

2. The film forming composition according to claim 1, wherein the thermally decomposable compound is at least one compound selected from compounds having a structure represented by any one of formulas (A-1) to (A-3) and compounds having a composite structure of formulas (A-2) and (A-3):

3. The film forming composition according to claim 1, wherein the cage structure is selected from adamantane, biadamantane, diamantane, triamantane, and tetramantane.

4. The film forming composition according to claim 1, wherein the compound having the cage structure is a polymer of a monomer having a cage structure.

5. The film forming composition according to claim 4, wherein the monomer having the cage structure has a carbon-carbon double bond or carbon-carbon triple bond.

6. The film forming composition according to claim 4, wherein the monomer having the cage structure is selected from the group consisting of monomers represented by formulas (I) to (VI):

7. The film forming composition according to claim 4, which is obtained by polymerizing the monomer having the cage structure in the presence of a transition metal catalyst or a radical initiator.

8. The film forming composition according to claim 1, wherein the compound having the cage structure has a solubility of 3 mass % or greater in cyclohexanone or anisole at 25° C.

9. The film forming composition according to claim 1, further comprising an organic solvent.

10. An insulating film formed by using the film forming composition according to claim 1.

11. An electronic device comprising the insulating film according to claim 10.