Number | Name | Date | Kind |
---|---|---|---|
4377616 | Ashcraft et al. | Mar 1983 | A |
4632869 | Park et al. | Dec 1986 | A |
5223346 | Lu | Jun 1993 | A |
5650451 | Yagi et al. | Jul 1997 | A |
5885721 | Su et al. | Mar 1999 | A |
5933930 | Rutz | Aug 1999 | A |
6048608 | Peet et al. | Apr 2000 | A |
6118218 | Yializis et al. | Sep 2000 | A |
6197430 | Asakura et al. | Mar 2001 | B1 |
6322883 | Williams | Nov 2001 | B1 |
6391404 | Rosenbaum et al. | May 2002 | B1 |
Entry |
---|
S. A. Pirzada, A. Yializis, W. Decker and R. E. Ellwanger, “Plasma Treatment of Polymer Films”, Society of Vacuum Coaters 42nd Annual Technical Conference Proceedings, Chicago, 1999, pp. 301-306. |