Claims
- 1. A method of cleaning a filter clogged with flocculated materials, comprising:
adding a dispersing agent to break up said flocculated materials to form dispersed precipitates, and removing said dispersed precipitates from said filter.
- 2. The method of claim 1 wherein said flocculated materials clogging said filter comprises inorganic, organic or a mixture of inorganic and organic particles.
- 3. The method of claim 2 wherein said flocculated materials clogging said filter comprises CMP processing solids, alone or in combination with other wastes, iron hydroxide or oxide, surfactants.
- 4. The method of claim 1 wherein said dispersing agent comprises a polyacrylic acid or a derivative of polyacrylic acid including acidic types, sodium salts, ammonium salts, and amine salts.
- 5. The method of claim 1 wherein said dispersing agent is selected from a group consisting of hydroxy-ethylidene diphosphonic acid, sodium diisopropylnaphthalenesulfonate, and other water soluble dispersing agents.
- 6. The method of claim 5 wherein said dispersing agent is hydroxy-ethylidene diphosphonic acid.
- 7. The method of claim 1 wherein said dispersing agent is added at a concentration from 10 to 100 ppm.
- 8. The method of claim 1 wherein said dispersing agent is added in a mixture with an acid.
- 9. The method of claim 8 wherein said mixture has a pH from about 2 to 4.
- 10. The method of claim 1 wherein said dispersing agent is added in a mixture with an oxidizing agent.
- 11. A method of cleaning a filter clogged with flocculated materials, comprising the steps of:
determining nature of said flocculated materials clogged on said filter; adding a dispersing agent suitable to break up said flocculated materials to form dispersed precipitates; and removing said dispersed precipitates from said filter.
- 12. The method of claim 11 wherein said flocculated material is iron hydroxide or oxide and said dispersing agent is selected from a group consisting of hydroxy-ethylidene diphosphonic acid, sodium diisopropylnaphthalenesulfonate, and other water soluble dispersing agents.
- 13. The method of claim 12 wherein said flocculated material is iron hydroxide or oxide and said dispersing agent is hydroxy-ethylidene diphosphonic acid.
- 14. The method of claim 11 wherein said dispersing agent is added at a concentration from 10 to 100 ppm.
- 15. The method of claim 11 wherein said dispersing agent is added at pH from about 2 to 4.
PRIORITY DATA
[0001] This application claims the priority of U.S. provisional application Serial No. 60/235,783, filed Sep. 26, 2000, entitled “IMPROVED FILTER CLEANING METHOD”, the disclosure of which is hereby incorporated by reference.
Provisional Applications (1)
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Number |
Date |
Country |
|
60235783 |
Sep 2000 |
US |