Fluid filtration systems are common in both residential and industrial settings. Often, such systems include a disposable filter cartridge that removably mounts to a fixed base including fluid connections. When the disposable cartridge is spent, it can be removed from the base, discarded, and replaced with a fresh cartridge. There is an ongoing need to provide fluid filtration systems that offer enhanced performance and ease of mounting and removal.
Although filtration systems according to the present disclosure may be useful in any fluid filtration application, they may be particularly useful in the processing of chemical mechanical polishing/planarization (“CMP”) slurries for semiconductor manufacturing. In a typical CMP process, small particles suspended in the slurry are used to polish and/or planarize semiconductor wafers during their manufacture. The slurry is dispensed at a point of use (“POU”) for application to the wafer.
In order to attain consistent and even polishing, it can be important to strictly regulate the size of the particle in the slurry. A typical role of a filter in a CMP process is to allow passage of desirable particles while capturing larger agglomerated particles that can scratch the wafer or cause other defects. In order to achieve this function, a CMP filter must of course be plumbed into the CMP slurry fluid path at some point ahead of the POU. Typically, some amount of plumbing is present between the downstream side of the CMP filter and the POU.
To assist in regulating particle size, it can be desirable to reduce or eliminate areas of dead volume in the fluid paths upstream and/or downstream of the filter cartridge before the slurry reaches the POU. This is because dead volume can result in turbulence or eddies that can cause fluid to stagnate. Stagnating CMP fluid may cause particles to settle out of suspension. When such particles settle out of suspension, they can agglomerate, thus potentially creating large unwanted particulate masses in the fluid stream that can damage the wafer if allowed to reach the POU. Because a CMP filter is intended as a defense against such agglomerates reaching the POU, it can be especially important to reduce or eliminate slurry stagnation in the plumbing between the filter and the POU. Thus, the nature of the fluid connection between the CMP filter and the associated fluid paths can be important.
Filtration systems according to the present disclosure can reduce or eliminate stagnation of CMP slurries upstream and/or downstream of the filter cartridge by providing straight fluid paths into an/or out of the filter cartridge such that the CMP slurry need not follow a tortuous (i.e., stagnation prone) path upon entering and/or leaving the filter cartridge. One way some embodiments of the present disclosure accomplish this is to provide a filter cartridge comprising opposed first and second cartridge ends respectively comprising first and second cartridge ports aligned along—or at least oriented parallel to—a flow axis. In such embodiments, a fluid may flow into the filter cartridge and then and out of the filter cartridge along substantially linear flow paths. In order to accommodate such a filter cartridge, a filter manifold must comprise corresponding opposed first and second manifold ports to engage the opposed first and second cartridge ports.
In such embodiments, because the first and second cartridge ports must seal against or into the first and second manifold ports, the physical end-to-end length of the filter cartridge must be at least as large as the corresponding reception area in the filter manifold. This requirement may cause difficulties because a filter cartridge that is too short may not seal, while a filter cartridge that is too long may not fit within the space provided. Moreover, a filter cartridge that is precisely the correct length to both fit and seal may not be feasible since inevitable manufacturing tolerances in both the filter manifolds and filter cartridges can be difficult to control precisely enough to ensure a consistent fit.
In some embodiments, filtration systems according to the present disclosure can address the above problems by providing a filter cartridge wherein at least one of the first or second cartridge port comprises an extending portion moveable with respect to the cartridge body along the flow axis to a cartridge loading position and a cartridge service position. When in the cartridge loading position, the overall length of the filter cartridge is reduced such that the filter cartridge may be easily loaded into the filter manifold in the installation direction. Then, after loading, the extending portion(s) may be moved to the cartridge service position to fluidly connect the cartridge port(s) to the corresponding manifold port(s). These configurations can provide filtration systems and filter cartridges that can reduce or eliminate upstream and downstream fluid stagnation, do not require extremely precise manufacturing to control tight tolerances, can be easily fit and installed into a filter manifold, and can be reliably sealed into or against the filter manifold.
The present disclosure relates to a filtration system comprising a filter manifold and a filter cartridge. In one embodiment, the filter cartridge comprises a cartridge body comprising a flow axis and an installation direction orthogonal to the flow axis; a first cartridge port oriented parallel to the flow axis at a first cartridge end, the first cartridge port comprising a first extending portion moveable with respect to the cartridge body along the flow axis to a cartridge loading position and a cartridge service position; and a second cartridge port oriented parallel to the flow axis at a second cartridge end. In one embodiment, the filter manifold comprises a first manifold port to fluidly connect to the first cartridge port along the flow axis when the first extending portion is in the cartridge service position; and a second manifold port to fluidly connect to the second cartridge port.
In the above embodiments, the fluid connection between the first manifold port and the first cartridge port may comprise a piston seal.
In the above embodiments, the first manifold port may operate at an elevated pressure while the second manifold port operates near atmospheric pressure.
In the above embodiments, the filter manifold may comprise a first carriage moveable to a manifold loading position and a manifold service position, the first carriage to receive and carry the first extending portion in the installation direction when in the first carriage is in the manifold loading position and the first extending portion is in the cartridge loading position; wherein the first manifold port fluidly connects to the first cartridge port along the flow axis when the first carriage moves to the manifold service position to carry the first extending portion into the cartridge service position.
In the above embodiment, the first carriage may rotate to move to the manifold loading position and the manifold service position.
In the above embodiments, the second manifold port may fluidly connect to the second cartridge port in the installation direction.
In the above embodiments, the second cartridge port may comprise a second extending portion moveable with respect to the cartridge body along the flow axis to a cartridge loading position and a cartridge service position; wherein the second manifold port fluidly connects to the second cartridge port along the flow axis when the second extending portion is in the cartridge service position.
In the above embodiment, the fluid connection between the second manifold port and the second cartridge port may comprise a piston seal.
In the above embodiments, the filter manifold may comprise a second carriage moveable to a manifold loading position and a manifold service position, the second carriage to receive and carry the second extending portion in the installation direction when in the second carriage is in the manifold loading position and the second extending portion is in the cartridge loading position; wherein the second manifold port fluidly connects to the second cartridge port along the flow axis when the second carriage moves to the manifold service position to carry the second extending portion into the cartridge service position.
In the above embodiment, the second carriage may rotate to move to the manifold loading position and the manifold service position.
In the above embodiments, the first carriage and the second carriage may be movable in unison to the manifold loading position and the manifold service position.
In the above embodiments, the cartridge body may be rotatable with respect to the first extending portion, wherein rotation of the cartridge body with respect to the first extending portion about the flow axis urges the first extending portion into the cartridge service position.
In the above embodiments, the first extending portion and the filter manifold may each comprise a retention member, the retention members cooperating to prevent rotation of the first extending portion with respect to the filter manifold when the cartridge body is rotated about the flow axis.
In the above embodiments, the cartridge body may be rotatable with respect to the second extending portion, wherein rotation of the cartridge body with respect to the second extending portion about the flow axis urges the second extending portion into the cartridge service position.
In the above embodiment, the second extending portion and the filter manifold may each comprise a retention member, the retention members cooperating to prevent rotation of the second extending portion with respect to the filter manifold when the cartridge body is rotated about the flow axis.
In the above embodiments, the filter manifold may hold the cartridge body to allow the cartridge body to rotate about the flow axis but not allow the cartridge body to move along the flow axis.
The present disclosure further relates to a filter cartridge comprising a cartridge body comprising a flow axis and an installation direction orthogonal to the flow axis; a first cartridge port oriented parallel to the flow axis at a first cartridge end, the first cartridge port comprising a first extending portion moveable with respect to the cartridge body along the flow axis to a cartridge loading position and a cartridge service position; and a second cartridge port oriented parallel to the flow axis at a second cartridge end.
In the above embodiment, the first cartridge port may comprise one of a piston sealing member or a piston sealing surface.
In the above embodiments, the second cartridge port may comprise a second extending portion moveable with respect to the cartridge body along the flow axis to a cartridge loading position and a cartridge service position.
In the above embodiment, the second cartridge port may comprise one of a piston sealing member or a piston sealing surface.
In the above embodiments, the cartridge body may be rotatable with respect to the first extending portion, wherein rotation of the cartridge body with respect to the first extending portion about the flow axis urges the first extending portion into the cartridge service position.
In the above embodiment, the first extending portion may comprise a retention member, the retention member cooperating with a retention member on a compatible filter manifold to prevent rotation of the first extending portion with respect to the filter manifold when the cartridge body is rotated about the flow axis.
In the above embodiments, the cartridge body may be rotatable with respect to the second extending portion, wherein rotation of the cartridge body with respect to the second extending portion about the flow axis urges the second extending portion into the cartridge service position.
In the above embodiment, the second extending portion may comprise a retention member, the retention member cooperating with a retention member on a compatible filter manifold to prevent rotation of the second extending portion with respect to the filter manifold when the cartridge body is rotated about the flow axis.
In the above embodiments, the filter manifold may hold the cartridge body to allow the cartridge body to rotate about the flow axis but not allow the cartridge body to move along the flow axis.
The present disclosure further relates to a method of assembling a filtration system comprising a filter manifold and a filter cartridge. The filter cartridge comprises a cartridge body comprising a flow axis and an installation direction orthogonal to the flow axis; a first cartridge port oriented parallel to the flow axis at a first cartridge end, the first cartridge port comprising a first extending portion moveable with respect to the cartridge body along the flow axis to a cartridge loading position and a cartridge service position; and a second cartridge port oriented parallel to the flow axis at a second cartridge end. The filter manifold comprises a first manifold port to fluidly connect to the first cartridge port along the flow axis when the first extending portion is in the cartridge service position; and a second manifold port to fluidly connect to the second cartridge port. The method comprises loading the filter cartridge into the filter manifold in the installation direction while the first extending portion is in the cartridge loading position; and moving the first extending portion into the cartridge service position to fluidly connect the first cartridge port to the first manifold port.
In the above embodiment, fluidly connecting the first cartridge port to the first manifold may comprise engaging a piston seal.
In the above embodiments, the method may comprise operating the operating the first manifold port at an elevated pressure and the second manifold port at near atmospheric pressure.
In the above embodiments, the filter manifold may comprise a first carriage moveable to a manifold loading position and a manifold service position, the first carriage to receive and carry the first extending portion in the installation direction when in the first carriage is in the manifold loading position and the first extending portion is in the cartridge loading position. The method may comprise moving the first carriage from the manifold loading position to the manifold service position to carry the first extending portion into the cartridge service position.
In the above embodiment, moving the first carriage from the manifold loading position to the manifold service position may comprise rotating the first carriage.
In the above embodiments, the method may comprise fluidly connecting the second manifold port to the second cartridge port in the installation direction.
In the above embodiments, the second cartridge port may comprise a second extending portion moveable with respect to the cartridge body along the flow axis to a cartridge loading position and a cartridge service position. The method may comprise moving the second extending portion into the cartridge service position to fluidly connect the second cartridge port to the second manifold port.
In the above embodiments, fluidly connecting the second cartridge port to the second manifold may comprise engaging a piston seal.
In the above embodiments, the manifold may comprise a second carriage moveable to a manifold loading position and a manifold service position, the second carriage to receive and carry the second extending portion in the installation direction when in the second carriage is in the manifold loading position and the second extending portion is in the cartridge loading position. The method may comprise moving the second carriage from the manifold loading position to the manifold service position to carry the second extending portion into the cartridge service position.
In the above embodiment, moving the second carriage from the manifold loading position to the manifold service position may comprise rotating the second carriage.
In the above embodiments, the method may comprise moving the first carriage and the second carriage in unison to the manifold loading position and the manifold service position.
In the above embodiments, the cartridge body may be rotatable with respect to the first extending portion. The method may comprise rotating the cartridge body with respect to the first extending portion about the flow axis to urge the first extending portion into the cartridge service position.
In the above embodiment, the first extending portion and the filter manifold may each comprise a retention member. The method may comprise the retention members on the first extending portion and the filter manifold cooperating to prevent rotation of the first extending portion with respect to the filter manifold when the cartridge body is rotated about the flow axis.
In the above embodiments, the cartridge body may be rotatable with respect to the second extending portion. The method may comprise rotating the cartridge body with respect to the second extending portion about the flow axis to urge the second extending portion into the cartridge service position.
In the above embodiment, the second extending portion and the filter manifold may each comprise a retention member. The method may comprise the retention members on the second extending portion and the filter manifold cooperating to prevent rotation of the second extending portion with respect to the filter manifold when the cartridge body is rotated about the flow axis.
In the above embodiments, the filter manifold may hold the cartridge body to allow the cartridge body to rotate about the flow axis but not allow the cartridge body to move along the flow axis.
These and other aspects of the invention will be apparent from the detailed description below. In no event, however, should the above summaries be construed as limitations on the claimed subject matter, which subject matter is defined solely by the attached claims, as may be amended during prosecution.
Throughout the specification, reference is made to the appended drawings, where like reference numerals designate like elements, and wherein:
As shown in the appended Figures, the filtration system 10 may comprise a filter manifold 100 and a filter cartridge 200. In one embodiment, the filter cartridge 200 comprises a cartridge body 202 comprising a flow axis 201 and an installation direction 203 orthogonal to the flow axis 201. The filter cartridge 200 may comprise a filtration media 260 disposed inside the cartridge body 202. Typically, the filtration media 260 surrounds a central core 262. In use, a fluid to be filtered flows into the first cartridge port 210, through the outer surface of the filtration media 260, into the central core 262, and out of the second cartridge port 220. The fluid is supplied to the filter cartridge 200 from the fluid source 116 and is carried away from the filter cartridge 200 through the fluid exit 126, both of which are disposed in the filter manifold 100.
In some embodiments, the cartridge body 202 is generally cylindrical and the flow axis 201 is coaxial or at least parallel with the axis of the cylinder. Of course, other cartridge body 202 shapes are envisioned provided they are suitable for the operating conditions and any other design constraints of the particular application. Typically, the installation direction 203 is orthogonal to the flow axis 201, as shown in
In one embodiment, the filter cartridge 200 comprises a first cartridge port 210 oriented parallel to the flow axis 201 at a first cartridge end 211. It is envisioned that the first cartridge port 210 may be coaxial with the flow axis 201, or may be offset from (but oriented parallel to) the flow axis 201. As shown throughout the appended Figures, the first cartridge port 210 comprises a first extending portion 230 moveable with respect to the cartridge body 202 along the flow axis 201 to a cartridge loading position 234 and a cartridge service position 236.
The filter cartridge 200 further comprises a second cartridge port 220 oriented parallel to the flow axis 201 at a second cartridge end 221. As with the first cartridge port 210, it is envisioned that the second cartridge port 220 may be coaxial with the flow axis 201, or may be offset from (but oriented parallel to) the flow axis 201.
In some embodiments, such as those shown in
It should be understood that, while several features and advantages are discussed below with respect to embodiments of the first extending portion 230, such features and advantages are equally applicable to embodiments of the second extending portion 240, in the event one is provided on the second manifold port 120. For purposes of simplifying the present disclosure, the term “extending portion 230, 240” is used herein to describe features of either or both of the first extending portion 230 and the second extending portion 240. Similarly, the term “cartridge port 210, 220” is used herein to describe features of either or both of the first cartridge port 110 and the second cartridge port 220. Also, the term “manifold port 110, 120” is used herein to describe features of either or both of the first manifold port 110 and the second manifold port 120.
In some embodiments, such as the ones shown in
In one embodiment, not explicitly shown in the Figures, the extending portion 230, 240 comprises a rotating portion that rotates upon a thread or cam to slide toward and away from the cartridge body 202. In such embodiments, the rotating portion typically comprises one or more internal seals 232 to allow the rotating portion to remain fluid tight against the filter cartridge 200 as it rotates and slides to move back and forth between the cartridge loading position 234 and the cartridge service position 236.
In some embodiments, such as those shown in
In some embodiments, such as those shown in
While the possibility of using either a face seal 93 or a piston seal 90 is envisioned for both the first cartridge port 210 and the second cartridge port 220, it should be understood that piston seals may have certain advantages over face seals, depending on the desired application.
For example, a piston sealing member 91 seals by sliding along a piston sealing surface 92 in a direction parallel to the flow axis 201. Consequentially, any slight axial movement or variation in location of the piston sealing member 91 with respect to the piston sealing surface 92 during operation of the filtration system 10 does not result in disruption of the piston seal 90. Therefore, relative axial movement is tolerated and forceful axial compression of the piston seal 90 is therefore not necessary.
In contrast, when a face seal 93 configuration is employed—i.e., wherein a seal is created by axial force on a face sealing member 94 against a face sealing surface 95 oriented perpendicular to the flow axis 201—care must be taken to avoid any relative separating axial movement. In such a face seal 93 configuration, any such movement would tend to disrupt or break the seal, allowing fluid bypass. In such face seal 93 configurations, especially where elevated fluid pressure may be encountered, forceful axial compression of the face seal 93 may be required.
Thus, while it is envisioned that a face seal 93 may be employed within the scope of the present disclosure, piston seals may be preferred in some embodiments because they can result in a more forgiving connection.
In the CMP slurry filtration application described above, for example, the upstream side of the filter cartridge 200 (i.e., at the first cartridge port 210) typically operates at an elevated pressure, while the downstream side (i.e., at the second cartridge port 220) operates at near atmospheric pressure. By “elevated pressure,” we mean greater than or equal to about 10 psi (about 6.895e+004 newtons/square meter), typically in a range from about 10 psi (about 6.895e+004 newtons/square meter) to about 50 psi (about 3.447e+005 newtons/square meter), and even more typically in a range from about 15 psi (about 1.034e+005 newtons/square meter) to about 25 psi (about 1.724e+005 newtons/square meter), including any range or combination of ranges therein. By “near atmospheric pressure,” we mean in a range from about 0 psi (about 0 newton/square meter) to about 5 psi (about 3.447e+004 newtons/square meter), typically in a range from about 0 psi (about 0 newton/square meter) to about 2 psi (about 1.379e+004 newtons/square meter), and even more typically in a range from about 0 psi (about 0 newton/square meter) to about 1 psi (about 6895 newtons/square meter), including any range or combination of ranges therein. Because of this pressure gradient across the filter cartridge 200, it may be advantageous to provide at least the first cartridge port 210 with a piston seal 90, while a face seal 93 may suffice for the second cartridge port 220.
However, it is envisioned that a face seal 93 may be employed even on the first cartridge port 210 at elevated pressure, as in the embodiments shown in
In some embodiments, such as those shown in
In embodiments where the second cartridge port 220 comprises a second extending portion 240 moveable to a cartridge loading position 234 and a cartridge service position 236, the filter manifold 100 may further comprise a second carriage 132 moveable to a manifold loading position 134 and a manifold service position 136, as shown in
Similarly, although the second carriage 132 may or may not move along the flow axis 201, it can carry the second extending portion 240 along the flow axis 201 to properly fluidly connect with the second manifold port 120. For example, in embodiments where there is a piston seal 90 between the second cartridge port 220 and the second manifold port 120, the second cartridge port 220 typically must move in along the flow axis 201 in order to properly fluidly connect.
It should be understood that, while several features and advantages are discussed below with respect to embodiments of the first carriage 130, such features and advantages are equally applicable to embodiments of the second carriage 132, in the event one is provided. For purposes of simplifying the present disclosure, the term “carriage 130,132” is used herein to describe features of either or both of the first carriage 130 and second carriage 132.
In one embodiment, as shown in
As shown in
In one embodiment, as best shown in
In some such embodiments, the carriage 130, 132 or the filter manifold 100 may comprise a locking member 133 to lock the carriage 130, 132 into the manifold service position 136. Provision of such a locking member 133 may be desirable in certain circumstances, for example, where fluid pressure at the fluid source 116 could otherwise act upon the first cartridge port 110 to separate the first cartridge port 110 from the first manifold port 110. In one embodiment, the locking member 133 comprises a pin and a detent into which the pin can lock. For example, as shown in
In one embodiment, not explicitly shown in the appended Figures, the carriage 130, 132 rotates to move to the manifold loading position 134 and the manifold service position 136. In doing so, the rotating cartridge 130, 132 can move the extending portion 230, 240 to the cartridge loading position 234 and the cartridge service position 236, respectively. In one embodiment, the carriage 130, 132 rotates about the flow axis 201. Rotational engagement between the carriage 130, 132 and the extending portion 230, 240 may comprise, for example, threads, cams, or other cooperating geometry that allows rotation of one part to cause translation of the cooperating part. In one embodiment, the carriage 130, 132 and the extending portion 230, 240 are coaxial such that rotation of the carriage 130, 132 about, or parallel to, the flow axis 201 causes translation of the extending portion 230, 240 along, or parallel to, the flow axis 201. In another embodiment, the carriage 130, 132 and the extending portion 230, 240 are not coaxial such that rotation of the carriage 130, 132 about an axis spaced from the flow axis 201 causes translation of the extending portion 230, 240 along the flow axis 201.
Although not shown in the Figures, it is envisioned that a locking member 133 as described above may be employed when using a rotating carriage 130, 132 in order to secure the extending portion 230, 240 into the cartridge service position 236. For example, a spring-loaded pin may be configured to lock into a detent when the carriage 130, 132 is rotated into the manifold service position 136, the pin being releasable from the detent to allow rotation of the carriage 130, 132 back into the manifold loading position 134.
Turning now to
In some embodiments, as shown in
Rotational engagement between the cartridge body 202 and the extending portion 230, 240 may comprise, for example, threads, cams, or other cooperating geometry that allows rotation of the cartridge body 202 to cause translation of the extending portion 230, 240. In such embodiments, one or both of the cartridge body 202 or the extending portion 230, 240 typically comprises one or more internal seals 232, 242 to allow the extending portion 230, 240 to remain fluid tight against the filter cartridge 200 as it rotates and slides to move back and forth between the cartridge loading position 234 and the cartridge service position 236.
In such embodiments, such as those shown in
In the embodiments shown, the extending portion 230, 240 comprises male retention members 98, while the manifold port 110, 120 comprises female retention members 98. In that embodiment, the retention members 98 can serve dual roles. First, they can properly align the filter cartridge 200 with the filter manifold 100 as it is loaded in the installation direction 203. This is accomplished by the tips of the male retention members 98 on the extending portion 230, 240 translating in the installation direction 203 through the channels formed by the female retention members 98 on the manifold port 110, 120. Second, once the filter cartridge 200 is loaded and the cartridge body 202 begins to rotate about the flow axis 201, the retention member 98 can cooperate to prevent rotation of the extending portion 230, 240, while guiding the extending portion 230, 240 along the flow axis 201 to fluidly connect with the manifold port 110, 120.
In the above embodiments, the filter manifold 100 may hold the cartridge body 202 to allow the cartridge body 202 to rotate about the flow axis 201 but not allow the cartridge body 202 to move along the flow axis 201. For example, an arm or cradle (not shown) may project from the filter manifold 100 to engage the cartridge body 202 to fix movement along the flow axis 201 while allowing free rotation. Such a mechanism can hold the extending portion 230, 240 the correct distance from the manifold port 110, 120 during loading of the filter cartridge 200 while then allowing the extending portion 230, 240 to move along the flow axis 201 to accurately fluidly connect to the manifold port 110, 120.
As shown in
In some embodiments, such as the one shown in
It should be noted that the embodiments shown in the appended Figures are not exhaustive of the embodiments described under the present disclosure. As earlier described, different combinations of the disclosed cartridge ports 210, 220, extending portions 230, 240, manifold ports 110, 120, and carriages 130, 132 are envisioned within the scope of the present disclosure. For example, the first cartridge end 211 and first manifold port 110 may comprise any disclosed configuration, while the second cartridge end 221 and second manifold port 120 may comprise the same or different configuration, so long as they are compatible and useful for a given application.
Various modifications and alterations of the invention will be apparent to those skilled in the art without departing from the spirit and scope of the invention. It should be understood that the invention is not limited to illustrative embodiments set forth herein.
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/US2011/026440 | 2/28/2011 | WO | 00 | 4/24/2013 |
Number | Date | Country | |
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61415616 | Nov 2010 | US |