Number | Name | Date | Kind |
---|---|---|---|
5446298 | Kojima | Aug 1995 | |
5500816 | Kobayashi | Mar 1996 | |
5504358 | Hong | Apr 1996 | |
5514902 | Kawasaki et al. | May 1996 | |
5516707 | Loh et al. | May 1996 | |
5557122 | Shrivastava et al. | Sep 1996 | |
5610084 | Solo de Zaldivar | Mar 1997 | |
5672521 | Barsan et al. | Sep 1997 | |
5689459 | Chang et al. | Nov 1997 | |
5750435 | Pan | May 1998 | |
5834351 | Chang et al. | Nov 1998 | |
5837585 | Wu et al. | Nov 1998 | |
5888870 | Gardner et al. | Mar 1999 | |
5940325 | Chang et al. | Aug 1999 | |
5972783 | Arai et al. | Oct 1999 | |
5998828 | Ueno et al. | Dec 1999 |
Entry |
---|
Novel NICE (Nitrogen Implantation inot CMOS Gate Electrode and Source-Drain) Structure for High Reliability and High Performance 0.26 um Dual Gate CMOS, T. Kuroi et al., IDEM Dec. 1993 pp. 325-328. |