This invention relates generally to antennas, and relates more particularly to flexible antennas and related apparatuses and methods.
Modern electronics technology has progressed to the level where myriad electronic devices can be designed and developed over substrates via semiconductor processes, and such devices often need antennas to serve as their “eyes,” “mouth,” and “ears” for communication with the rest of the world. Successful and efficient communication depends, in part, on the design and performance of such antennas. So far, however, such electronic devices have had to depend on couplings to distinct external and/or separate antennas, thereby increasing cost and complexity, and decreasing the reliability of the communications to and from the devices.
Accordingly, a need exists for antennas that can be coupled integrally over the substrate of such electronic devices, such as antennas that share a metallization layer with the electronic devices. The need may be further accentuated in developing fields such as in flexible electronics, where antennas may be required to flex along with flexible substrates without jeopardizing connectivity with respective electronic devices over the flexible substrates.
To facilitate further description of the embodiments, the following drawings are provided in which:
For simplicity and clarity of illustration, the drawing figures illustrate the general manner of construction, and descriptions and details of well-known features and techniques may be omitted to avoid unnecessarily obscuring the invention. Additionally, elements in the drawing figures are not necessarily drawn to scale. For example, the dimensions of some of the elements in the figures may be exaggerated relative to other elements to help improve understanding of embodiments of the present invention. The same reference numerals in different figures denote the same elements.
The terms “first,” “second,” “third,” “fourth,” and the like in the description and in the claims, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms “include,” and “have,” and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, device, or apparatus that comprises a list of elements is not necessarily limited to those elements, but may include other elements not expressly listed or inherent to such process, method, system, article, device, or apparatus.
The terms “left,” “right,” “front,” “back,” “top,” “bottom,” “over,” “under,” and the like in the description and in the claims, if any, are used for descriptive purposes and not necessarily for describing permanent relative positions. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein are, for example, capable of operation in other orientations than those illustrated or otherwise described herein.
The terms “couple,” “coupled,” “couples,” “coupling,” and the like should be broadly understood and refer to connecting two or more elements or signals, electrically, mechanically or otherwise. Two or more electrical elements may be electrically coupled, but not mechanically or otherwise coupled; two or more mechanical elements may be mechanically coupled, but not electrically or otherwise coupled; two or more electrical elements may be mechanically coupled, but not electrically or otherwise coupled. Coupling (whether mechanical, electrical, or otherwise) may be for any length of time, e.g., permanent or semi-permanent or only for an instant.
“Electrical coupling” and the like should be broadly understood and include coupling involving any electrical signal, whether a power signal, a data signal, and/or other types or combinations of electrical signals. “Mechanical coupling” and the like should be broadly understood and include mechanical coupling of all types. The absence of the word “removably,” “removable,” and the like near the word “coupled,” and the like does not mean that the coupling, etc. in question is or is not removable.
In one embodiment, an apparatus comprises a substrate and an antenna layer over the substrate. The substrate can be flexible and/or plastic, and the antenna layer can be configured to flex with the substrate. In the same or other embodiments, the apparatus can further comprise one or more semiconductor devices over a substrate having a dielectric material, and an antenna layer can comprise a portion of a structure or layer of at least one of the one or more semiconductor devices.
Turning to the drawings,
In the example of
Antenna 1110 is located over substrate 1200 as part of antenna layer 1100, and because substrate 1200 comprises a flexible material in the present example, antenna 1110 is configured to flex with substrate 1200 along with antenna layer 1100. Substrate 1200 can comprises a flexible plastic material, such as a polyethylene naphthalate (PEN) material similar to that available from Teijin DuPont Films of Tokyo, Japan under the trade name planarized “Teonex® Q65,” a polyethylene terephthalate (PET) material, a polyethersulfone (PES) material, a polyimide material, a polycarbonate material, a cyclic olefin copolymer, a liquid crystal polymer, and/or a polytetrafluoroethylene material similar to that available from Rogers Corporation of Chandler, Ariz. under the trade name RO3003, among others. In the same or other examples, substrate 1200 can be translucent and/or even substantially transparent. There can be examples where substrate 1200 comprises a thickness of approximately 0.1 millimeters (mm) to approximately 0.5 mm.
Antenna layer 1100 can be placed over substrate 1200 as part of a semiconductor manufacturing process in some examples. For instance, the semiconductor manufacturing process can overlay one or more layers of materials to form semiconductor devices such as thin film transistors (TFT) and/or antennas like antenna 1110 over a flexible substrate. As an example, to form TFTs in one such process, the flexible substrate can be coated with a planarizing layer and/or a silicon nitride layer. A gate metal, such as molybdenum, can be deposited and patterned over the substrate. A gate dielectric for the TFT can comprise silicon nitride, and an active layer can comprise hydrogenated amorphous silicon deposited with plasma enhanced chemical vapor deposition. A nitride passivation step can be performed before the contacts are etched. Source/drain metal can be sputtered on as an N+ amorphous silicon/aluminum bilayer. Depending on the application, another metallization step using materials such as indium tin oxide (ITO) and/or molybdenum can be carried out. Inter-level dielectrics can be silicon nitride with an optional planarizing layer between the aluminum and indium tin oxide metallization layers. The devices can be annealed after fabrication at, for example, 180° C. in a nitrogen atmosphere for 3 hours to simulate thermal cycling. There can be examples where a process such as the one described above can be used to manufacture flexible displays over the substrate defined and/or controlled by the TFTs.
Using the process described above, or other similar ones, one or more TFTs forming part of antenna apparatus 1000 can be developed to comprise a portion of a metallization layer deposited, printed, formed, or otherwise coupled over substrate 1200. In turn, antenna layer 1100 can be configured to comprise at least a portion of such metallization layer, such that antenna 1110 can be formed as part of one of the steps normally used to generate a portion of the one or more TFTs. In some examples, the metallization layer, and thus antenna layer 1200, can comprise at least one of an aluminum material, a molybdenum material, and/or a tantalum material. There can be examples where antenna layer 1200 can comprise a thickness of approximately 500 Angstroms to approximately 3000 angstroms. For instance, antenna layer 1200 can comprise a thickness of approximately 1000 Angstroms in some embodiments. As seen in
In the present example, as seen in
Antenna apparatus 1000 also comprises other possible components in the present example over substrate 1200, such as power source 4400, processing circuitry 4200, and transceiver 4100. There can be other embodiments where transceiver 4100 comprises a transmitter and a receiver structurally and/or diagrammatically separate from each other. Other embodiments may also comprise all or part of transceiver 4100 as part of processing circuitry 4200. In some implementations, one or more of processing circuitry 4200, power source 4400, and/or transceiver 4100 can be formed over substrate 1200 using a semiconductor process such as described above for the TFT's. Other implementations may comprise one or more components of antenna apparatus 1000 mounted over, rather than formed over, substrate 110. As an example, processing circuitry 4200, power source 4400, and/or transceiver 4100, can comprise one or more unpackaged bare dice mounted over substrate 1200. In the same or other examples, such similar unpackaged bare dice can be thinned before mounting over substrate 1200. There can be embodiments where a bare die mounted over substrate 110 can comprise commercial off the shelf (COTS) circuits and/or application specific integrated circuits (ASICs). There can be examples where at least some of the components described above can be configured to be flexible along with substrate 1200.
In the present embodiment, referring back to
Development of the present embodiment of antenna 1110 focused on a target frequency of approximately 7 gigahertz to approximately 7.5 gigahertz. In the present example, as seen in
As seen in
Continuing with the figures,
Block 9100 of method 9000 comprises providing a flexible substrate. In some examples, the flexible substrate can be suitable for use in a semiconductor manufacturing process, and can be similar to substrate 1200 (
Block 9200 of method 9000 comprises providing an antenna layer over the substrate of block 9100 to define the antenna and to flex with the substrate. There can be examples where the antenna layer can be similar to antenna layer 1100 as described for
Block 9300 of method 9000 comprises providing one or more semiconductor devices over the substrate. In some embodiments, providing the one or more semiconductor devices can comprise forming at least a portion of one or more semiconductor devices over the substrate of block 9100. In the same or other embodiments, block 9300 could comprise coupling a portion of the one or more semiconductor devices to the substrate, such as by mounting one or more of the semiconductor devices as bare dice to the substrate. In such examples, the bare dice can be thinned before being coupled to the substrate, such that the bare dice can flex along with the substrate if needed.
In some implementations, block 9300 can comprise one or more sub-blocks.
As an example, block 9300 can comprise sub-block 9310 for providing a flexible display comprising one or more thin film transistors over the substrate. In some examples, the flexible display can be similar to flexible display 4300 as described above with respect to
Method 9000 can also comprise blocks 9400, 9500, and/or 9600 in some embodiments, where block 9400 comprises providing a transmitter over the substrate coupled to the antenna layer, block 9500 comprises providing a receiver over the substrate coupled to the antenna layer, and block 9600 comprises providing a processor over the substrate coupled to at least one of the transmitter or the receiver. There can be examples where the transmitter of block 9400 comprises a portion of transceiver 4100, as described above for
In some examples, one or more of the different blocks of method 9000 can be combined into a single block or performed simultaneously, and/or the sequence of such blocks can be changed. For example, in some embodiments, block 9200 could be carried out as part of, or simultaneously with, block 9300. Similarly, blocks 9400 and 9500 can be combined into a single step and/or can be performed simultaneously. In the same or other examples, some of the steps of method 9000 can be subdivided into several sub-steps. For example, sub-block 9310 could be further subdivided into several further sub-blocks for providing different layers of material used to form a structure of the one or more semiconductor devices. There can also be examples where method 9000 can comprise further or different procedures. As an example, method 9000 could comprise another sub-block for block 9100 for providing a dielectric layer over a body of the flexible substrate, such as the silicon nitrate layer shown in
Although the flexible antennas and related apparatuses and methods have been described herein with reference to specific embodiments, various changes may be made without departing from the spirit or scope of the present disclosure. For example, in some embodiments, antenna layer 1100 could be a part of a stack of layers for other components of antenna apparatus 1000, such as transceiver 4100, processing circuitry 4200, power source 4400, and/or flexible display 4300 (
All elements claimed in any particular claim are essential to the embodiment claimed in that particular claim. Consequently, replacement of one or more claimed elements constitutes reconstruction and not repair. Additionally, benefits, other advantages, and solutions to problems have been described with regard to specific embodiments. The benefits, advantages, solutions to problems, and any element or elements that may cause any benefit, advantage, or solution to occur or become more pronounced, however, are not to be construed as critical, required, or essential features or elements of any or all of the claims.
Moreover, embodiments and limitations disclosed herein are not dedicated to the public under the doctrine of dedication if the embodiments and/or limitations: (1) are not expressly claimed in the claims; and (2) are or are potentially equivalents of express elements and/or limitations in the claims under the doctrine of equivalents.
This application is a continuation of PCT Application No. PCT/US2010/034984, filed May 14, 2010, which claims the benefit of (a) U.S. Provisional Patent Application No. 61/252,105, filed Oct. 15, 2009, and (b) U.S. Provisional Patent Application No. 61/180,592, filed May 22, 2009. PCT Application No. PCT/US2010/034984, U.S. Provisional Patent Application No. 61/252,105, and U.S. Provisional Patent Application No. 61/180,592 are incorporated herein by reference.
At least part of the disclosure herein was funded with government support under grant number W911NF-04-2-0005, awarded by the Army Research Laboratory, and grant number W911W6-06-D-0002, awarded by the Army Aviation Technology Directorate. The United States Government may have certain rights in this invention.
Number | Date | Country | |
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61252105 | Oct 2009 | US | |
61180592 | May 2009 | US |
Number | Date | Country | |
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Parent | PCT/US10/34984 | May 2010 | US |
Child | 13298504 | US |