Number | Name | Date | Kind |
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4356979 | Dobler | Nov 1982 | |
4545530 | Hofmann et al. | Oct 1985 | |
4907748 | Gardner et al. | Mar 1990 |
Entry |
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"Silicon Microstructures: Merging Mechanics with Electronics" by Margherita Zanini and Paul Stevenson of Ford Motor Co., Society of American Engineers, Special Publication No. 903, pp. 7-14, 1992. |