| Number | Name | Date | Kind |
|---|---|---|---|
| 4356979 | Dobler | Nov 1982 | |
| 4545530 | Hofmann et al. | Oct 1985 | |
| 4907748 | Gardner et al. | Mar 1990 |
| Entry |
|---|
| "Silicon Microstructures: Merging Mechanics with Electronics" by Margherita Zanini and Paul Stevenson of Ford Motor Co., Society of American Engineers, Special Publication No. 903, pp. 7-14, 1992. |