Patent Grant
11391276
The present disclosure relates to a fluid control device that conveys a fluid in one direction.
Heretofore, a variety of fluid control devices equipped with a driving element, such as a piezoelectric element have been implemented.
Patent Document 1 discloses a cooling device (fluid control device) that includes a pump chamber. A piezoelectric pump described in Patent Document 1 causes a gas to flow out of a nozzle by generating inertia in a gas that flows into the piezoelectric pump from the outside.
Patent Document 1: Japanese Unexamined Patent Application Publication No. 2009-250132
However, with the structure of the fluid control device disclosed in Patent Document 1, backflow may occur when the gas is sucked in and the desired flow rate may not be obtained.
The present disclosure provides a fluid control device in which a flow rate is efficiently obtained for a fluid.
A fluid control device according to the present disclosure includes: a case including a case top plate having a first vent hole substantially at a center (the “substantially at the center” can deviate from the center less than 1% in length of the total length from one end to the other end of a main surface of the case top plate) thereof, a case side plate that is connected to the case top plate, and a case bottom plate that is connected to the case side plate and has a second vent hole substantially at a center (the “substantially at the center” can deviate from the center less than 1% in length of the total length from one end to the other end of a main surface of the case bottom plate) thereof; a pump body that is arranged inside a space enclosed by the case top plate, the case side plate, and the case bottom plate of the case; and a holding member that holds the pump body relative to the case. The pump body includes a first main plate, a second main plate having one main surface that faces one main surface of the first main plate, a side plate that connects the first main plate and the second main plate to each other, and a driving member that is arranged on the first main plate. The holding member connects the side plate and the case side plate to each other. The first main plate includes a plurality of first openings arranged in a ring shape. The second main plate is arranged at a side of the first main plate nearer the case top plate and has a second opening at a position that overlaps the first vent hole in a plan view.
With this configuration, a fluid can be made to flow into the pump body from the first openings, and therefore the amount of fluid flowing out from the second opening is increased and the flow rate of the fluid control device is increased.
The second main plate or the holding member of the fluid control device of the present disclosure may have a third opening that allows the first vent hole and the second vent hole to communicate with each other.
With this configuration, when the fluid is being discharged from the fluid control device, the fluid flowing in through the third opening is drawn in. This increases the flow rate of the fluid control device.
In the fluid control device of the present disclosure, the case top plate may include a third vent hole at a position that is separated from a center of the case top plate in a plan view of the case top plate (viewed in a direction perpendicular to a main surface of the case top plate), and the second main plate may have fourth openings that overlap the third vent hole in a plan view (viewed in a direction perpendicular to a main surface of the second main plate).
With this configuration, the fluid can be discharged through the third vent hole while the fluid is not being discharged from the first vent hole and the flow rate of the fluid control device is increased.
The second main plate of the fluid control device of the present disclosure may include a plurality of fifth openings that do not overlap the first vent hole and the third vent hole.
With this configuration, the flow rate of the fluid discharged from the second main plate of the pump body is increased and therefore the flow rate of the fluid is increased.
The fifth openings of the fluid control device of the present disclosure may be located between the second opening and the fourth openings in a plan view of the second main plate.
With this configuration, the flow rate of the fluid discharged from the second main plate of the pump body is increased and therefore the flow rate of the fluid is increased.
The fourth openings of the fluid control device of the present disclosure may be formed in a ring shape so as to overlap an antinode of vibration of the first main plate in accordance with a vibration order of the driving member.
With this configuration, the flow velocity of the discharge flow from the fourth openings is high, and therefore the surrounding fluid can be strongly drawn in, further increasing the flow of the fluid control device and further improving the pressure.
The fifth openings of the fluid control device of the present disclosure may be formed in a ring shape so as to overlap a node of vibration of the first main plate in accordance with a vibration order of the driving member.
With this configuration, backflow from the fifth openings can be suppressed and therefore the flow rate of the fluid control device is further increased and the pressure is further increased.
The first openings of the fluid control device of the present disclosure may be formed outside the driving member in a plan view of the first main plate.
With this configuration, the first main plate more easily vibrates due to the increased flexibility near the positions where the first openings are formed. In other words, it is easier for the fluid to flow into the device.
According to the present disclosure, a fluid control device can be provided in which the flow rate of a fluid is efficiently obtained.
A fluid control device according to a first embodiment of the present disclosure will be described while referring to the drawings.
As illustrated in
The pump body 100 is connected to the inside of the case 200 by the holding member 300. A case top plate 220 includes a first nozzle 251 and second nozzles 252. More specific structures and connection methods will be described later. The first nozzle 251 corresponds to a first vent hole of the present disclosure and the second nozzles 252 correspond to a third vent hole of the present disclosure.
First, the structure of the pump body 100 will be described. The pump body 100 includes the first main plate 110, the second main plate 120, and a side plate 130. A driving member 115 is arranged on the first main plate 110.
As illustrated in
The side plate 130 is arranged between the first main plate 110 and the second main plate 120 and the side plate 130 connects the first main plate 110 and the second main plate 120 to each other so that the first main plate 110 and the second main plate 120 face each other. More specifically, in a plan view, the centers of the first main plate 110 and the second main plate 120 are aligned with each other. The side plate 130 connects the thus-arranged first main plate 110 and second main plate 120 to each other along the entire peripheries thereof.
As a result of having this configuration, the pump body 100 has a pump chamber 140 that is a cylindrical space enclosed by the first main plate 110, the second main plate 120, and the side plate 130.
The first main plate 110 includes a plurality of first openings 101. The first openings 101 penetrate through the first main plate 110. The first openings 101 are formed in a ring shape in a plan view of the first main plate 110. More specifically, the first openings 101 are formed outside the driving member 115 in a plan view of the first main plate 110 (viewed in a direction perpendicular to a main surface of the first main plate 110). This enables the flow channel resistance of the first openings 101 to be reduced. In addition, the occurrence of cracking of the driving member 115 is suppressed. The first main plate 110 vibrates more easily due to the increased flexibility in the vicinity of the positions where the first openings 101 are formed. In other words, an effect is exhibited that it is easier for a fluid to flow into the device.
The second main plate 120 includes a second opening 102. The second opening 102 penetrate through the second main plate 120. The second opening 102 is formed at a position at the center of the second main plate 120 in a plan view of the second main plate 120.
In addition, the second main plate 120 has a plurality of third openings 103, a plurality of fourth openings 104, and a plurality of fifth openings 105. The third openings 103 are formed in a ring shape in a plan view of the first main plate 110. The fourth openings 104 are formed in a ring shape in a plan view of the first main plate 110. The fifth openings 105 are formed in a ring shape in a plan view of the first main plate 110. The specific formation positions will be described later.
As illustrated in
The driving member 115 is arranged on a surface of the first main plate 110 that is on the opposite side from the second main plate 120. The driving member 115 has a piezoelectric element and is connected to a control unit, which is not illustrated. The control unit generates a driving signal for the piezoelectric element and applies the driving signal to the piezoelectric element. The piezoelectric element is displaced due to the driving signal and stress caused by this displacement acts on the first main plate 110. As a result, the first main plate 110 undergoes bending vibration. For example, the vibration of the first main plate 110 produces the shape of a Bessel function of the first kind.
The volume and pressure of the pump chamber 140 change as a result of the first main plate 110 undergoing bending vibration in this way.
Next, the structure of the case 200 will be described. The case 200 includes a case bottom plate 210, the case top plate 220, and a case side plate 230. The case bottom plate 210 has an inflow opening 260 at the center thereof. The inflow opening 260 corresponds to a second vent hole of the present disclosure.
The case side plate 230 is arranged between the case bottom plate 210 and the case top plate 220 and connects the case bottom plate 210 and the case top plate 220 to each other so that the case bottom plate 210 and the case top plate 220 face each other. More specifically, the centers of the case bottom plate 210 and the case top plate 220 are aligned in a plan view. The case side plate 230 connects the thus-arranged case bottom plate 210 and case top plate 220 to each other along the entire peripheries thereof. Note that although it is sufficient that the case 200 be of such a size that the pump body 100 can be formed thereinside, the case 200 can have a similar shape to the pump body 100. For example, in one embodiment, each of the case top plate 220 and the case bottom plate 210 has a similar shape to the pump body 100 when viewed in a direction perpendicular to the second mail plate 120. When each of the case top plate 220 and the case bottom plate 210 has a circular shape similar to the circular shape of the second main plate 120, the case side plate 230 connecting the entire ends of the case top late 220 and the case bottom plate 210 has a circular shape when viewed in a direction perpendicular to the second mail plate 120. A diameter of each of the case top plate 220 and the case bottom plate 210 is wider than a diameter of an outer end of the holding member 300 when viewed in a direction perpendicular to the second mail plate 120. This improves the performance of the fluid control device 10.
The case top plate 220 includes the first nozzle 251. The first nozzle 251 is formed at a position at the center of the case top plate 220. The region of the case top plate 220 where first nozzle 251 is formed is thicker than the regions of the case top plate 220 where the first nozzle 251 is not formed. The first nozzle 251 is formed by forming a through hole in the center of this region where the first nozzle 251 is to be formed. The inside and the outside of the case 200 are connected by the first nozzle 251.
In addition, the case top plate 220 includes a plurality of second nozzles 252. The second nozzles 252 are formed between the first nozzle 251 and the case side plate 230 in a plan view of the case top plate 220. The specific formation positions will be described later. The regions of the case top plate 220 where the second nozzles 252 are formed are thicker than the regions of the case top plate 220 where the second nozzles 252 are not formed. The second nozzles 252 are formed by forming through holes in the centers of these regions where the second nozzles 252 are to be formed. The inside and the outside of the case 200 are connected by the second nozzles 252.
As described above, the pump body 100 and the case 200 are connected to each other by the holding member 300. More specifically, the holding member 300 connects the side plate 130 of the pump body 100 and the case side plate 230 of the case 200 to each other through the second main plate 120 and the second main plate 120 and the case top plate 220 are formed so as to be parallel to each other. In addition, the pump body 100 and the case 200 are formed so that the centers thereof overlap in a plan view. The holding member 300 may be formed so as to be integrated with the second main plate 120.
As described above, as a result of the pump body 100 and the case 200 having similar shapes to each other, a flow channel is formed between the case 200 and the pump body 100.
Next, a more specific positional relationship between the first openings 101, the second opening 102, the third openings 103, the fourth openings 104 and the fifth openings 105 and the first nozzle 251 and the second nozzles 252 will be described.
As illustrated in
First, the positions at which the first openings 101, the second opening 102, the third openings 103, the fourth openings 104, and the fifth openings 105 are formed in the pump body 100 will be described.
As described above, the first openings 101 are formed at positions that do not overlap the driving member 115, i.e., are formed at positions closest to the side plate 130 in a plan view of the first main plate 110. More specifically, the first openings 101 are formed at positions near the node N2, i.e., are formed at positions where displacement of the first main plate 110 is small.
The second opening 102 is formed at a position at the center of the second main plate 120 of the pump body 100. More specifically, the second opening 102 is formed at a position that overlaps the antinode A1.
The third openings 103 are formed at positions that overlap the node N2 in a plan view of the second main plate 120. In addition, the third openings 103 may be formed at positions that overlap the first openings 101 in a plan view. The first nozzle 251 and the inflow opening 260 are able to communicate with each other as a result of the third openings 103 being formed.
The fourth openings 104 are formed at positions that overlap the antinode A2 in a plan view of the second main plate 120.
The fifth openings 105 are formed at positions that overlap the node N1 in a plan view of the second main plate 120. More specifically, the fifth openings 105 are formed at positions interposed between the second opening 102 and the fourth openings 104 in a plan view of the second main plate 120 (viewed in a direction perpendicular to a main surface of the second main plate 120).
Therefore, the second opening 102, the fifth openings 105, the fourth openings 104, and the third openings 103 are formed in this order in a direction from a position at the center of the second main plate 120 toward the outer edge of the second main plate 120 (side plate 130).
Next, the specific positions at which the first nozzle 251 and the second nozzles 252 are formed in the case 200 will be described.
The first nozzle 251 is formed at a position at the center of the case 200. As described above, the center of the pump body 100 and the center of the case 200 overlap. In other words, the first nozzle 251 is formed at a position (antinode A1) that overlaps the second opening 102 in a plan view.
The second nozzles 252 are formed at positions that overlap the fourth openings 104 in a plan view. In other words, the second nozzles 252 are formed at positions that overlap the antinode A2.
Therefore, a fluid is discharged from both the first nozzle 251 and the second nozzles 252 and the flow rate is increased.
Next, the fluid flow in the fluid control device 10 will be described using
As illustrated in
On the other hand, as illustrated in
As described above, when the first main plate 110 and the second main plate 120 are close to each other at the antinode A1 (
Similarly, as described above, when the first main plate 110 and the second main plate 120 are separated from each other at the antinode A1 and the pump chamber 140 is expanded at antinode A1 (
The fluid steadily flows into the pump chamber 140 through the first openings 101 for the following reason. A steady high-velocity drawn-in flow is generated between the second main plate 120 and the case top plate 220. However, a drawn-in flow is not generated outside the first openings 101. Therefore, as expressed by Bernoulli's theorem, inflow of the fluid from the first openings 101 into the pump chamber 140 occurs because the pressure outside the first openings 101, which have a lower flow velocity, is higher than the pressure in the space between the second main plate 120 and the case top plate 220, which has a higher flow velocity.
In the fluid control device 10 according to the first embodiment as described above, a flow from the inflow opening 260 to the first nozzle 251 can be generated.
Furthermore, since the discharge timing alternates between the first nozzle 251 and the second nozzles 252, constant discharge is possible. In other words, the flow rate is increased in the fluid control device 10. For example, the pressure that can be generated in the fluid control device 10 is 8 kPa and the flow rate is 6 L/min.
A fluid control device according to a second embodiment of the present disclosure will be described while referring to the drawings.
The fluid control device 10A of the second embodiment differs from the fluid control device 10 of the first embodiment in that the third openings 103 are not formed. The rest of the configuration of the fluid control device 10A is the same as that of the fluid control device 10 and description of these identical parts is omitted.
Drawn-in flows from the third openings 103 are not generated in this embodiment. However, there are drawn-in flows from the fifth openings 105 and therefore a similar effect to as in the first embodiment is obtained.
A fluid control device according to a third embodiment of the present disclosure will be described while referring to the drawings.
As illustrated in
As illustrated in
As illustrated in
As illustrated in
The second opening 102 is formed at a position in the center of the second main plate 120B of the pump body 100B. More specifically, the second opening 102 is formed at a position that overlaps the antinode A1.
The third openings 103 are formed at positions that overlap the first openings 101 in a plan view of the second main plate 120B. More specifically, the third openings 103 are formed at positions near the node N1.
Next, the fluid flow in the fluid control device 10B will be described using
As illustrated in
As illustrated in
The fluid steadily flows into the pump chamber 140B through the first openings 101 for the following reason. A steady high-velocity drawn-in flow is generated between the second main plate 120B and the case top plate 220B. However, a drawn-in flow is not generated outside the first openings 101. Therefore, as expressed by Bernoulli's theorem, the pressure outside the first openings 101, which have a lower flow velocity, is higher than the pressure in the space between the second main plate 120B and the case top plate 220B, which has a higher flow velocity. That is, the fluid flows into the pump chamber 140B through the first openings 101.
In the fluid control device 10B according to the third embodiment as described above, a flow from the inflow opening 260 toward the first nozzle 251 can be generated.
Furthermore, the configuration of the fluid control device 10B is simpler and lower in cost due to the fourth openings 104, the fifth openings 105, and the second nozzles 252 not being formed.
In the present embodiment, the vibration order of the first main plate 110 is described as a first order vibration. However, the same effect would be obtained with a second order vibration.
A fluid control device according to a fourth embodiment of the present disclosure will be described while referring to the drawings.
As illustrated in
As illustrated in
With this configuration as well, a flow from the inflow opening 260 toward the first nozzle 251 can be generated, similarly to as in the third embodiment. For example, the pressure that can be generated in the fluid control device 10C is 5 kPa and the flow rate is 3 L/min.
The rigidity of the holding member 300C is reduced by the third openings 103C. This makes it more difficult for the vibration of the pump body 100C to leak into the case 200C. Therefore, the vibrational energy of the first main plate 110 can be more efficiently utilized.
A fluid control device according to a fifth embodiment of the present disclosure will be described while referring to the drawings.
As illustrated in
With this configuration as well, a flow from the inflow opening 260 toward the first nozzle 251 can be generated, similarly to as in the first embodiment.
In this configuration, the rigidity of the holding member 300D is reduced by the third openings 103D and therefore it is more difficult for the vibration of the pump body 100D to leak into a case 200D. Therefore, the vibrational energy of the first main plate 110 can be more efficiently utilized.
In the configurations described above, nozzles are provided in the case top plate, but it is optional to provide nozzles. For example, the same effect can be achieved by simply providing vent holes having the same thickness as the case top plate.
In the configurations described above, the vibration orders of the diaphragm have been described as secondary and primary vibrations, but the vibration orders are not limited to secondary and primary vibrations. For example, the same effect can be achieved by matching the positions of the openings with the antinodes and nodes of the vibration in the case where the vibration is of the third order or higher.
In addition, in the first, second, and fifth embodiments, the second opening 102 and the first nozzle 251 do not necessarily have to be formed. In this case, the discharge flow rate from the second nozzles 252 can be obtained and therefore the same effect can be obtained.
In all of the above configurations, a particularly high flow rate is obtained when the vibration frequency f of the diaphragm lies in the range shown in the following formula. In the following formula, c is the acoustic velocity of the fluid, a is the radius of a circle enclosed by the first openings 101, and k0 is a constant that satisfies J0(k0)=0. For example, under conditions of air at room temperature, c is 340 m/s and k0 is 2.40, 5.52, 8.65 etc.
In this case, a pressure standing wave is generated inside the pump chamber and pressure changes caused by vibrations of the diaphragm are amplified. This results in a particularly large flow rate being achieved because pressure vibrations having a large amplitude are generated inside the pump chamber.
The vibration frequency f of the diaphragm can be obtained by measuring the vibration of the diaphragm using a laser Doppler displacement meter or the like. Since the vibration frequency f also coincides with the fundamental frequency of an AC voltage input to the piezoelectric element, the vibration frequency f can also be obtained by measuring the voltage input to the piezoelectric element or the current flowing in the circuit.
| Number | Date | Country | Kind |
|---|---|---|---|
| JP2018-102092 | May 2018 | JP | national |
This is a continuation of International Application No. PCT/JP2019/015015 filed on Apr. 4, 2019 which claims priority from Japanese Patent Application No. 2018-102092 filed on May 29, 2018. The contents of these applications are incorporated herein by reference in their entireties.
| Number | Name | Date | Kind |
|---|---|---|---|
| 20130071269 | Fujisaki et al. | Mar 2013 | A1 |
| 20160348666 | Tanaka | Dec 2016 | A1 |
| 20170209655 | Morrison | Jul 2017 | A1 |
| 20180187672 | Tanaka et al. | Jul 2018 | A1 |
| 20200340469 | Tanaka | Oct 2020 | A1 |
| 20200370544 | Tanaka | Nov 2020 | A1 |
| 20210025379 | Tanaka | Jan 2021 | A1 |
| 20210143084 | Ganti | May 2021 | A1 |
| Number | Date | Country |
|---|---|---|
| 102459899 | May 2012 | CN |
| 2009-250132 | Oct 2009 | JP |
| 2017-521181 | Aug 2017 | JP |
| 2010139918 | Dec 2010 | WO |
| 2011040320 | Apr 2011 | WO |
| 2014024608 | Feb 2014 | WO |
| 2017038565 | Mar 2017 | WO |
| 2019230189 | Dec 2019 | WO |
| Entry |
|---|
| International Search Report for PCT/JP2019/015015 dated Jul. 2, 2019. |
| Written Opinion for PCT/JP2019/015015 dated Jul. 2, 2019. |
| Number | Date | Country | |
|---|---|---|---|
| 20210025379 A1 | Jan 2021 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | PCT/JP2019/015015 | Apr 2019 | US |
| Child | 17069967 | US |
