This invention relates in general to valves for controlling fluid flow and more particularly, to a fluid flow control assembly for controlling fluid flow in two directions of flow.
Valves are widely used for controlling the flow of a fluid from a source of pressurized fluid to a load device or from a load device to a low pressure reservoir. Frequently, a pump, or other device, is provided as the source of pressured fluid. The flow of the fluid is selectively controlled by a valve to control the operation of the load device.
One type of valve is a microvalve. A microvalve system is a MicroElectroMechanical System (MEMS) relating in general to semiconductor electromechanical devices.
MEMS is a class of systems that are physically small, having features with sizes in the micrometer range or smaller. A MEMS device is a device that at least in part forms part of such a system. These systems have both electrical and mechanical components. The term “micromachining” is commonly understood to mean the production of three-dimensional structures and moving parts of MEMS devices.
MEMS originally used modified integrated circuit (computer chip) fabrication techniques (such as chemical etching) and materials (such as silicon semiconductor material) to micromachine these very small mechanical devices. Today there are many more micromachining techniques and materials available.
The term “microvalve,” as used in this application, means a valve having features with sizes in the micrometer range or smaller, and thus by definition is at least partially formed by micromachining. The term “microvalve device,” as used in this application, means a device that includes a microvalve, and that may include other components. It should be noted that if components other than a microvalve are included in the microvalve device, these other components may be micromachined components or standard sized (larger) components, also known as macro sized components.
Various microvalve devices have been proposed for controlling fluid flow within a fluid circuit. A typical microvalve device includes a displaceable member or valve movably supported by a body and operatively coupled to an actuator for movement between a closed position and a fully open position. When placed in the closed position, the valve blocks or closes a first fluid port that is placed in fluid communication with a second fluid port, thereby preventing fluid from flowing between the fluid ports. When the valve moves from the closed position to the fully open position, fluid is increasingly allowed to flow between the fluid ports.
One type of microvalve is the micro spool valve. The micro spool valve typically consists of a micromachined spool disposed in a chamber formed in an intermediate layer of multilayer valve housing. A variety of ports through the layers of the housing provide fluid communication with the chamber. The micromachined spool is moveable in the chamber to selectively allow fluid communication though the chamber by blocking particular ports depending on the desired result. In operation, a differential pressure is exerted across the micromachined spool to move the micromachined spool into a desired position. Typically, the differential pressure is controlled by a pilot valve.
Another type of microvalve, often used as a pilot valve, consists of a beam resiliently supported by the body at one end. In operation, an actuator forces the beam to bend about the supported end of the beam. In order to bend the beam, the actuator must generate a force sufficient to overcome the spring force associated with the beam. As a general rule, the output force required by the actuator to bend or displace the beam increases as the displacement requirement of the beam increases.
In addition to generating a force sufficient to overcome the spring force associated with the beam, the actuator must generate a force capable of overcoming the fluid flow forces acting on the beam that oppose the intended displacement of the beam. These fluid flow forces generally increase as the flow rate through the fluid ports increases.
As such, the output force requirement of the actuator and in turn the size of the actuator and the power required to drive the actuator generally must increase as the displacement requirement of the beam increases and/or as the flow rate requirement through the fluid ports increases.
One specific type of microvalve system is the pilot operated microvalve. Typically, such a microvalve device includes a micro spool valve that is pilot operated by a microvalve of the type as described above. For example, U.S. Pat. Nos. 6,494,804; 6,540,203; 6,637,722; 6,694,998; 6,755,761; 6,845,962; and 6,994,115, the disclosures of which are herein incorporated by reference, disclose pilot operated microvalves and microvalves acting as pilot valves.
Microvalve devices have application in many fields for controlling the flow of fluids in systems such as hydraulic, pneumatic, and refrigerant systems, including the Heating, Ventilation, and Air Conditioning (HVAC) field. HVAC systems may include, without limitation, such systems as refrigeration systems, air conditioning systems, air handling systems, chilled water systems, etc. Many HVAC systems, including air conditioning and refrigeration systems operate by circulating a refrigerant fluid between a first heat exchanger (an evaporator), where the refrigerant fluid gains heat energy, and a second heat exchanger (a condenser), where heat energy in the refrigerant fluid is rejected from the HVAC system. One type of HVAC system is the heat pump system, which provides the ability to reverse flow of refrigerant through portions of the HVAC system. This allows the heat pump system to act as an air conditioning system in the summer, cooling air that flows through a first heat exchanger by absorbing the heat from the air into a refrigerant pumped through the first heat exchanger. The refrigerant then flows to a second heat exchanger, where the heat gained by the refrigerant in the first heat exchanger is rejected. However, during the winter, the flow of refrigerant between the first and second heat exchangers is reversed. Heat is absorbed into the refrigerant in the second heat exchanger, and the refrigerant flows to the first heat exchanger, where the heat is rejected from the refrigerant into the air flowing through the first heat exchanger, warming the air passing through the first heat exchanger.
This invention relates to an improved device for controlling fluid flow in a system, such as, but not limited to, a hydraulic, pneumatic, or HVAC system, and in particular to a reversible fluid flow control assembly.
The assembly may include a pilot valve responsive to a command signal for supplying a fluid at a command pressure to a pilot valve control port; and a pilot operated spool valve. The pilot operated spool valve may have a body having a first connector and a second connector, each of the first connector and the second connector being adapted for fluid communication with an external circuit. A spool may be disposed for sliding movement in the body. The spool may have a first end portion and a second end portion opposite the first end portion. The first end portion of the spool may be in fluid communication with the pilot valve control port such that the spool is urged to move in a first direction by the fluid at the command pressure. The spool may be movable to control a fluid flow between the first connector and the second connector through the body proportionally to the command pressure when the fluid flow is a forward flow from the first connector to the second connector and when the fluid flow is a reverse flow from the second connector to the first connector. The spool valve may use negative feedback in the form of fluid at a feedback pressure acting on the spool in a second direction, opposite the first direction, to position the spool in conjunction with the fluid at the command pressure. The spool valve may utilize unstable equilibrium of fluid forces to switch between controlling the forward flow and the reverse flow.
According to another aspect, the reversible fluid flow control assembly may include a spool valve with a body having a first connector and a second connector and a spool movable relative to the body for controlling flow between the first connector and the second connector. The reversible flow control assembly further may include a pilot valve device developing a single pressure command. The spool valve may be responsive to the single pressure command developed in said pilot valve device to control flow between the first connector and the second connector without regard to the direction of flow. The majority of forces acting on the spool to position the spool relative to the body when fluid is flowing through the valve may be fluid forces.
Various aspects of this invention will become apparent to those skilled in the art from the following detailed description of the preferred embodiment, when read in light of the accompanying drawings.
Preliminarily, it should be understood that in this description and in the claims, the use of the singular word “port”, “aperture”, “fluid conduit”, “passageway”, or words of similar import, should be considered to include the possibility of multiple ports (apertures, fluid conduits, passageways, etc.) with the same functionality attributed to the single port (apertures, fluid conduits, passageways, etc.) unless explicitly and definitely limited to the singular. Furthermore, the use of directional terms such as “left” and “right”, and words of similar import, should be interpreted in the context of the figure(s) under discussion, and should not be interpreted as limitations on orientation during use or the scope of the claims.
Referring now to the drawings, wherein like reference numbers and characters may represent like elements through out all of the figures, there is illustrated in
The spool valve 12 may include a body 20. Preferably the first connector 16 and the second connector 18 are at least partially formed in the body 20, as is the case in the embodiment illustrated in
The body 20 may have an interior wall surface 21 defining a bore 22 therethrough. The bore 22 may have a first end portion, indicated generally at 24, a second end portion, indicated generally at 26, and a central portion, indicated generally at 27. The first end portion 24 of the bore 22 may be enlarged and threaded as shown to accept a plug 28. Similarly, the second end portion 26 of the bore 22 may be enlarged and threaded as shown to accept another plug 28.
The spool valve 12 may further include a spool 29 disposed for sliding movement in the bore 22. The spool 29 may have a first end portion 29a and a second end portion 29b. As illustrated in
The spool 29 and the plug 28 in the first end portion 24 of the bore 22 cooperate with the body 20 to define a command chamber 30 in the first end portion 24 of the bore 22. The purpose of the command chamber 30 will be discussed below. A fluid conduit 31 is formed in the body 20 which may be in fluid communication with the command chamber 30 and, as will be discussed further below, in fluid communication with the pilot valve device 14. The spool 29 and the plug 28 in the second end portion 26 of the bore 22 cooperate with the body 20 to define a feedback chamber 32 in the second end portion 26 of the bore 22. The purpose of the feedback chamber 32 will be discussed below.
As illustrated in
The body 20 may define a fluid conduit 40 providing fluid communication between the second connector 18 and the third groove 38. The body 20 may also define a fluid conduit 42 providing fluid communication between the first connector 16 and both of the first groove 34 and the second groove 36. In the example illustrated in
The body 20 may also define a fluid conduit 46 providing fluid communication between the second connector 18 and the pilot valve 14 in a manner which will be discussed below. In the example illustrated in
Now referring additionally to
The spool 29 may have an internal axial passageway 58 defined therein. The axial passageway 58 may communicate with the opening 56 in the second axial end face 54. The axial passageway 58 may extend from the opening 56 into the central portion of the spool 29. The second end portion 29a may include a damping orifice 59 that restricts communication between the portion of the axial passageway in the central portion 50 of the spool 29 and the feedback chamber 32, in order to dampen movement of the spool 29 during operation. In the illustrated embodiment, the orifice 59 is formed as a threaded insert which is threadably fixed in the second end 29b of the spool 29. A slot 60 may be formed in the threaded orifice 59 to allow the use of a screwdriver or other tool to turn the threaded orifice 59 during installation. Of course, the orifice 59 may be affixed to the spool 29 in any suitable manner, or may be integrally formed with the spool 29, if a reduced diameter (compared to the diameter of the rest of the axial passageway 58) orifice is provided for damping at all.
The spool 29 may have an exterior surface 62. The spool 29 may have a first port 64 at a first axial location in the central portion 50 of the spool 29 providing fluid communication between the exterior surface 62 and the axial passageway 58. The spool 29 may have a second port 66 in the central portion 50 of the spool 29 at a second axial location between the first axial location and the second end portion 29b of the spool 29 providing fluid communication between the axial passageway and the exterior surface 62 of the spool 29. In the illustrated embodiment, the first port 64 may be one of a plurality of ports spaced apart circumferentially about the spool 29 at the first axial location, and the second port 66 may be one of a plurality of ports spaced apart circumferentially about the spool 29 at the second axial location.
The spool 29 may have a circumferential groove 67 formed in the exterior surface 62 at an axial location between the first axial location and the first end portion 29a of the spool 29. The spool 29 may further have an aperture 68 providing fluid communication between the circumferential groove 67 and the axial passageway 58 formed in the spool 29. The aperture 68 allows fluid at feedback pressure existing in the axial passageway 58 during equilibrium conditions to be distributed about the spool 29 in the groove 67, which, as will become clearer during the discussion of operation below, minimizes the differential pressure between the command chamber 30 and the groove 67, and thus minimizes leakage out of the command chamber 30 between the surface 21 defining the bore 22 and the surface 62 of the spool 29.
The spool 29 may further be provided with a plurality of circumferentially extending grooves 69, which may be relatively shallow compared to the groove 67. The grooves 69 may be formed in the surface 62, for example, on either side of the groove 67, between the first axial location and the second axial location (i.e., between the first port 64 and the second port 66, and in the second end portion 29b). The grooves 69 are believed to help distribute any leakage that may occur between the outer surface 62 of the spool 29 and the surface 21 defining the bore 22 about the circumference of the spool 29, equalizing pressures and minimizing unequal radial loading on the spool 29 which might occur from circumferentially unequal leakage along the spool 29, thereby minimizing friction between the surface 21 and the surface 62.
Referring again to
A stop structure 74 may be provided that will limit motion of the spool 29 in a first direction toward the second end portion 26 of the bore 22. In particular, the stop structure 74 may be provided to prevent the spool 29 from traveling past a desired maximum travel position, shown in
Similarly, a stop structure 76 may be provided that will engage the spool 29, limiting motion of the spool 29 in a second direction toward the first end portion 24 of the bore 22, preventing the spool 29 from traveling past a desired maximum travel position, shown in
The springs 70 and 72 may urge the spool 29 to a shutoff position, between the first range of positions and the second range of positions of the spool 29, which is illustrated in
In the shutoff position, both the port 64 and the port 66 may be completely uncovered to communicate with the third groove 38; however, neither the port 64 nor the port 66 is in substantial direct fluid communication with either the first groove 34 or the second groove 36, and thus substantially no fluid communication exists between the axial passageway 58 in the spool 29 and either the first groove 34 or the second groove 36.
Referring to
The valve 80 may include a fluid conduit 84 extending between a first pilot connection port 86 and a second pilot connection port 88. The flow through the fluid conduit 84 may be regulated by two variable orifices in series arrangement in the fluid conduit 84. A variable first orifice 90 may be a normally closed orifice; that is the orifice may be closed in the absence of a command signal to the valve 80. A variable second orifice 92 may be a normally open orifice. A pilot valve control port 94 may be connected in fluid communication with the fluid conduit 84 between the first orifice 90 and the second orifice 92. The valve 80 may be a single valve or microvalve containing moving components acting as the first orifice 90 and the second orifice 92. Alternatively, the valve 80 may be embodied as a plurality of valves or microvalves acting as the first orifice 90 and the second orifice 92.
One and only one pressure command used for control of the spool valve 12 is developed in the pilot valve device 14. In the illustrated embodiment, for example, the pressure command is developed in the fluid conduit 84 between the first orifice 90 and the second orifice 92 when pressurized fluid is supplied to the valve 80. The pressure developed there is the command pressure, and fluid at the command pressure is conveyed from the pilot valve device 14 to the command chamber 30 of the spool valve 12. As illustrated herein, the pressure command may be conveyed to the command chamber 30 via a single fluid conduit via a single pilot valve control port 94 and a single fluid conduit 31. However, it is contemplated that multiple fluid paths may be used, perhaps even simultaneously, to convey the single pressure command between the point at which the pressure command is developed to the point at which the pressure command is utilized to control the operation of operation of the spool valve 12, and such should be considered within the scope of the claims.
If the valve 80 is a microvalve, the manifold 82 may be advantageously used to adapt the small package size of a microvalve to the large package size of the body 20. The valve 80 may be mounted by any suitable method (such as brazing, soldering, adhesively bonding, mechanically connection, etc.) on the manifold 82, or on the body 20 if the manifold 82 is omitted. The first pilot connection port 86 is connected in fluid communication with the fluid conduit 42, via the bore 42c, providing uninterrupted fluid communication between the normally closed orifice 90 and the first connection 16. The second pilot connection port 88 is connected in fluid communication with the fluid conduit 46, via the bore 46b, thus providing uninterrupted fluid communication between the normally open orifice 92 and the second connection 18. The pilot valve control port 94 is connected in fluid communication with the fluid conduit 31, and the pilot valve control port 94 is thus in uninterrupted fluid communication with the command chamber 30.
As seen in
Operation of the illustrated embodiment will now be discussed.
During operation, the reversible fluid flow control assembly 10 is installed in a system (not shown) via the first connection 16 and the second connection 18. During operation of the system, normally one of the first connection 16 and the second connection 18 will be supplied with a higher pressure (hereinafter “supply pressure”) and the other of the first connection 16 and the second connection 18 will be supplied with a lower pressure (hereinafter “return pressure”). During operation, when there are differences between supply pressure and return pressure, the components of the reversible fluid control assembly 10 operate to develop two separate fluid pressures acting in opposition across the spool 29. On one side, the left as drawn in
Both the command pressure and the feedback pressures will fall between supply pressure and return pressure in normal operation.
The feedback pressure is a pressure developed between the first port 64 and the second port 66 in the axial passageway 58. During forward flow, with the spool 29 in the first range of positions, flow of fluid through the spool valve 12 travels from the first connection 16, through the second port 66, through the axial passageway 58 of the spool 29, through the first port 64 and then out through the second connection 18, as illustrated in
The current concept is best explained by describing functionality around three points, the first position of the spool 29, which is illustrated in
In the first position with forward flow, the spool valve 12 is considered stable. Stability is defined herein as any state of operation of the spool valve 12 where a small deviation in command pressure results in movement of the spool 29 that generates a proportionate change in feedback pressure that tends to return operation of the spool valve 12 to an equilibrium condition with the spool 29 continuing to operate on the same side of the shutoff position as before the deviation in command pressure. Conversely, instability (or unstable condition) is defined as any state of operation of the spool valve where a small deviation in command pressure results in movement of the spool 29 that generates a feedback pressure that does not tend to return operation of the spool valve 12 to an equilibrium condition with the spool 29 continuing to operate on the same side of the shutoff position as before the deviation in command pressure.
Assume the spool valve 12 is operating in equilibrium with forward flow, and the spool 29 is at a position within the first range of positions, and more particularly, in a position intermediate the shutoff position and the first position (which, it will be recalled, are indicated as “S” and “1” on the graph of
Similarly, with the spool 29 positioned within the second range of positions, and the reversible fluid flow control assembly 10 operating with reverse flow (supply pressure supplied to the second connection 18, with return pressure at the first connection), the spool 29 will also be operating in a stable manner, as illustrated in
Assume spool 29 is at a position within the second range of positions, and more particularly, in a position intermediate the shutoff position and the second position (which are indicated as “S” and “2” on the graph of
Now assume it is desired to open the spool 29 more, that is, move the spool toward the second position to increase fluid flow through the spool valve 12. The command signal supplied to the pilot valve device 14 is increased. This causes the normally closed orifice 90 to open further, opening up the release path to return pressure at the first connection 16, and the normally open orifice 92 to close further, throttling the supply pressure supplied from the second connection 18. This causes the command pressure supplied to the command chamber to decrease. A decrease in command pressure causes the spool 29 to move in the second direction, toward the command chamber 30 (leftward as seen in
Now consider the possible scenarios in which the spool valve 12 is operating in an unstable operating region. As seen in
For the first scenario, consider the case in which command pressure is increased while the spool 29 is in the second range of positions during forward flow operation (for example, when forward flow is first initiated), as illustrated in
Assuming that the spool 29 is at equilibrium at the second position (that is, with feedback and command pressures exerting equal and opposite forces on the spool 29) with forward flow existing, increased command pressure causes the spool 29 to move in the first direction, away from the command chamber 30. As the spool 29 moves away from the command chamber 30, the first port 64 will become increasingly covered, throttling the flow path from the groove 34 (which is at supply pressure during forward flow) to the axial passageway 58. The release path through the second port 66 remains wide open, and feedback pressure will decrease as the pressure in the axial passageway 58 decreases. As feedback pressure decreases, the net force pushing the spool 29 in the first direction (the right as viewed in
For the second scenario, consider what would happen if all the conditions were the same as in the preceding scenario, but command pressure were reduced while the system was operating with forward flow and the spool 29 was in the second range of positions. Again, assume the spool valve 12 is initially at condition O1, which corresponds to spool position S1 in the second range of positions, with command and feedback pressures at P1. If the command pressure is lowered, the spool 29 is urged in the second direction by the imbalance of command pressure and feedback pressure. This causes the first port 62 to become more uncovered, increasing the cross-sectional flow area between the first groove 34, which is at supply pressure, and the axial passageway 58. This causes an increase in feedback pressure, further increasing the imbalance of command pressure and feedback pressure. There is no position on the operating curve between position S1 and the second position (indicated as “2” in
Command pressure may be raised above maximum feedback pressure in all operating modes, because, when the spool 29 is moved to the second position, the axial passageway 58 will be connected to return pressure either through the wide-open first port 64 or through the wide open second port 66 (see
For the third scenario, consider case where the spool 29 is in the first range of positions, and reverse flow exists, which describes the unstable region of the graph in the right half of
For the fourth scenario, consider the case the same initial unstable conditions as the third scenario and consider the response to an increase in command pressure. Any increase in command pressure causes an imbalance with feedback pressure which urges the spool to move in the first direction (to the right in
The shutoff position, illustrated in
The illustrated arrangement for the reversible flow control assembly 10 is particularly well suited for use of a microvalve in the pilot valve device 14, because the arrangement allows flow area through the spool valve 12 to be a function of the command pressure supplied by the pilot valve device 15, regardless of supply and return pressure, assuming stable operation of the spool valve 12. As described above, flow opening (the effective cross-sectional area of the flow path through the spool valve) is a function of feedback pressure. Since feedback pressure is developed in the spool valve 12 by throttling fluid flowing between supply and return pressure, feedback pressure is function of the relative pressure difference between supply and return pressure. A microvalve or series of microvalves that develop a “working pressure” between a series of orifices responsive to an electrical command supplied to the microvalve and arranged in a fluid conduit between a supply pressure and a return pressure also outputs a command pressure relative to the difference between supply and return pressure.
For the pilot valve 14, this may be expressed
where
For the spool valve 12, this may be expressed,
where
When the spool valve 12 is in equilibrium, then the following is true regardless of supply and return pressure, assuming the spool is in a stable position.
PF=PC Equation 3
and
AF=f(Ce) Equation 4
Command pressure PC is a percentage of the difference between supply pressure PS and return pressure PT. At full power (i.e., when maximum flow through the reversible flow control assembly 10 is demanded), the normally closed (NC) orifice 90 is full open and the normally open (NO) orifice 92 is closed, irrespective of whether flow through the reversible flow control assembly 10 is forward or reverse.
As illustrated in
Assuming command pressure PC is capable of any pressure between supply pressure PS and return pressure PT, the difference between maximum feedback pressure (Maximum PF) and maximum command pressure (Maximum PC) will be sufficiently large to overcome any factors negatively affecting operation of the spool valve 12 to enable transition, such as any leakage from the fluid conduit providing communication from the pilot valve control port 94 to the command chamber 30 (which would in essence reduce the command pressure), hysteresis due to friction, or other force.
The current discussion assumes equal size first port 64 and second port 66 for ease of explanation; they may be different sizes. Further, as will be further described below with respect to an alternate embodiment of a spool for the spool valve 12, it may be possible to utilize different sizes of ports with forward flow versus reverse flow.
As indicated above, the spring 70 and the spring 72 may be installed in the spool valve 12 to ensure the spool 29 stays centered in the shutoff position when the spool valve 12 is “off” (electrical command is zero), thereby minimizing leakage through the spool valve 12 between the first connection 16 and the second connection 18. As indicated above, the springs 70, 72 may provide minimal force in comparison to the axial forces due to fluid pressure acting on the axial end faces 53, 54 of the spool 29 when fluid is flowing through the spool valve 12.
With the implementation pictured in
Regardless of the flow direction through the spool valve 12, the following may be true: 1) Flow through the spool valve 12 may increase proportionally full scale, from zero flow to full flow, as the electrical command signal to the pilot valve device 14 changes by only half scale (0 to 50%, or 100% to 50%), assuming the spool 29 is operating in a stable region. 2) 100% pilot command (maximum electrical signal causing the normally closed (NC) orifice 90 to fully open and the normally open (NO) orifice 92 to fully close) generates a 100% pressure command (i.e., substantially equal to supply pressure) that forces the spool 29 into a stable region, regardless of initial position (again, without regard to the direction of flow through the spool valve 12).
It should be realized that in an alternate embodiment (not shown) where the normally open and normally closed states of the orifices 90 and 92 are reversed (i.e., if the orifice 90 were normally open, and the orifice 92 were normally closed), and all other components of the reversible fluid flow control assembly 10 were as shown and discussed above, then the control signal to the pilot valve device 14 could be inverted to achieve control of the system. In other words, in such case, a 0% pilot command (minimum or zero electrical signal causing such a normally open (NO) orifice 90 to fully open and such normally closed (NC) orifice 92 to fully close) generates a pressure command that forces the spool 29 into a stable region, regardless of initial position (again, without regard to the direction of flow through the spool valve 12).
Because the spool 29 may start in any position, especially if the springs 70, 72 are omitted, it would normally be expected that, at startup of the system in which the reversible fluid flow control assembly 10 is installed, a 100% pilot command would be momentarily initially applied to ensure the spool 29 is correctly moved into a stable region prior to resuming normal proportional control. Of course, it is expected that in most systems in which flow is reversed, such as a heat pump system, the system would be shut down in one direction, and then restarted in the opposite direction However, if the reversible fluid flow control assembly 10 were installed in a system in which fluid flow through the spool valve 12 and pilot valve device 10 could be reversed without shutting down the system first, provision could be made such that, upon reversing the flow in the system in which the reversible fluid flow control assembly 10 is installed, a 100% pilot command would be momentarily initially applied to ensure the spool 29 is correctly moved into a stable region prior to resuming normal proportional control.
An alternate embodiment of a spool, indicated generally at 129, is illustrated in
Thus, when the spool 129 is in the first range of positions, as illustrated in
Referring now to
The spool valve 312 and the pilot valve device 314 each may be in fluid communication with a second connector 318, by means of which the flow control assembly 300 may be connected in fluid communication with a second portion of the system which the flow control assembly 300 may be installed. The first connector 316 and the second connector 318 each may be any suitable structure by means of which the flow control assembly 300 may be connected for installation in the system, including without limitation, threaded connections, welded connections, brazed connections, press-fit connections, rolled connections, permanently deformable connections, adhesive connections, compression fitting connections, etc.
The spool valve 312 may include a body 320. Preferably the first connector 316 and the second connector 318 are at least partially formed in the body 320, as is the case in the embodiment illustrated in
The body 320 may have an interior wall surface 321 defining a bore 322 therethrough. The bore 322 may have a first end portion, indicated generally at 324, a second end portion, indicated generally at 326, and a central portion, indicated generally at 327. The first end portion 324 of the bore 322 may be provided with a plate 325 fixed to the body 320 to close the first end portion 324 of the bore 322 in a fluid tight manner. Similarly, the second end portion 326 of the bore 322 may be closed such as by a ball 328 disposed therein. The ball 328 may be pressed in the bore 322 to close the second end portion 326 of the bore 322 in a pressure tight manner.
The spool valve 312 may further include a spool 329 disposed for sliding movement in the bore 322. The spool 329 may have a first end portion 329a and a second end portion 329b. As illustrated in
The spool 329 and the plate 325 closing the first end portion 324 of the bore 322 cooperate with the body 320 to define a command chamber 330 in the first end portion 324 of the bore 322. The purpose of the command chamber 330 will be discussed below. A fluid conduit 331 is formed in the body 320 which may be in fluid communication with the command chamber 330 and, as will be discussed further below, in fluid communication with the pilot valve device 314. The spool 329 and the ball 328 in the second end portion 326 of the bore 322 cooperate with the body 320 to define a feedback chamber 332 in the second end portion 326 of the bore 322.
As illustrated in
The body 320 may define a fluid conduit 340 providing fluid communication between the second connector 318 and the second groove 336. The body 320 may also define a fluid conduit 342 providing fluid communication between the first connector 316 and the first groove 334.
A bore 344 is provided in fluid communication between the first connector 316 and the pilot valve device 314. The bore 344 may be formed, for example, by drilling through the body 320 from the surface of the body 320. A bore 346 is provided in fluid communication between the first connector 318 and the pilot valve device 314. The bore 346 may be formed, for example, by drilling through the body 320 from the surface of the body 320.
Referring now to
The spool 329 may have an internal axial passageway 358 defined therein. The axial passageway 358 may provide fluid communication from the opening 356 in the second axial end face 354 to a blind end in an interior portion of the first end portion 329a of the spool 329. In the illustrated embodiment, an insert 360 is fixed in the opening 356 in the second end 329b of the spool 329 by a suitable mechanism such as threaded engagement. The insert 360 may include a first bore 361 extending axially inwardly from the second axial face 354 and a damping orifice 359 that restricts communication between the axial passageway 358 of the spool 329 and the feedback chamber 332, in order to dampen movement of the spool 329 during operation. In the illustrated embodiment, the orifice 359 forms a reduced diameter bore between the bore 361 and the axial passageway 358.
The insert 360 may be affixed to the spool 329 in any suitable manner, or may be integrally formed with the spool 329, if a reduced diameter (relative to the diameter of the rest of the axial passageway 358) orifice is provided. It is anticipated that in some applications, no orifice providing damping will be needed at all, and the insert 360 may be omitted.
The spool 329 may have an exterior surface 362. The spool 329 may have a plurality of ports formed in the spool 329. In the illustrated embodiment, a first port 363 is formed at a first axial location in the spool 329 providing fluid communication between the exterior surface 362 and the axial passageway 358. Similarly, a second port 364 is formed at a second axial location, a third port 365 is formed at a third axial location, and a fourth port 366 is formed at a fourth axial location in the spool 329. Each of the ports 363, 364, 365, and 366 may be one of a plurality of ports spaced apart circumferentially about the spool 329 at the respective axial location of the ports 363, 364, 365, and 366.
The spool 329 may have a circumferential groove 367 formed in the exterior surface 362 at an axial location between the first port 363 and the first end portion 329a of the spool 329. The spool 329 may further have an aperture 368 providing fluid communication between the circumferential groove 367 and the axial passageway 358 formed in the spool 329. The aperture 368 allows fluid at feedback pressure existing in the axial passageway 358 during equilibrium conditions to be distributed about the spool 329 in the groove 367, which, as discussed above, minimizes the differential pressure between the command chamber 330 and the groove 367, and thus minimizes leakage into or out of the command chamber 330 between the surface 321 defining the bore 322 and the surface 362 of the spool 329.
Referring again to
The ball 328 defines a stop structure that will limit motion of the spool 329 in a first direction toward the second end portion 326 of the bore 322. In particular, the stop structure may prevent the spool 329 from travelling past a desired first maximum travel position, shown in
A first position of the spool 329 is shown in
A second position of the spool 329 is seen in
The springs 370 and 372 may urge the spool 329 to a centered or shut off position, between the first range of positions and the second range of positions of the spool 329. This centered position is illustrated in
In the centered position, both the port 365 and the port 366 may be partially uncovered to communicate with the second groove 336; however, neither the port 363 nor the port 364 is in substantial direct fluid communication with the first groove 334. There will be no fluid communication between the axial passageway 358 in the spool 329 and the first groove 334, and thus no fluid communication between the first connector 316 and the second connector 318.
Referring again to
The valve 380 may include a fluid conduit 384. The flow through the fluid conduit 384 may be regulated by two variable orifices in series arrangement in the fluid conduit 384. A variable first orifice 390 may be a normally closed orifice, that is, the first orifice 390 may be closed in the absence of a command signal to the valve 380. A variable second orifice 392 may be a normally open orifice. The fluid conduit 331 may be connected in fluid communication with the fluid conduit 384 between the first orifice 390 and the second orifice 392. The valve 380 may be a single valve or microvalve containing one or more moving components acting as the first orifice 390 and the second orifice 392. Alternatively, the valve 380 may be embodied as a plurality of valves or microvalves acting as the first orifice 390 and the second orifice 392. The first orifice 390 and the second orifice 392 may move inversely proportionally—that is, when one is open, the other is closed. As one opens, the other simultaneously closes, and when one is half open, the other is also half open (and half closed).
Referring now to
During operation, the reversible fluid flow control assembly 300 is installed in a system (not shown) via the first connection 316 and the second connection 318. During operation of the system, normally one of the first connection 316 and the second connection 318 will be supplied with a higher pressure (hereinafter “supply pressure”) and the other of the first connection 316 and the second connection 318 will be supplied with a lower pressure (hereinafter “return pressure”). During operation, when there are differences between supply pressure and return pressure, the components of the reversible fluid control assembly 300 operate to develop two separate fluid pressures acting in opposition across the spool 329.
On one side, to the right as drawn in
Feedback pressure in the feedback chamber 332 acting on the second axial end face 354 of the spool 329, urges the spool 329 in the second direction (rightward as seen in
Both the command pressure and the feedback pressures may fall between supply pressure and return pressure in normal operation, as described above.
The feedback pressure is a pressure developed between the first port 363 and the third port 365 in the axial passageway 358. During forward flow (illustrated in
In forward flow, the second groove 336 will be at return pressure, while the first groove 334 may be at supply pressure. As the first port 363 is progressively uncovered while moving from the shut off position illustrated in
Maximum flow through the valve 380, which occurs when both the orifice 390 and the orifice 392 are half open, as shown in
This feedback mechanism causes the feedback pressure P′2, in the passageway 358, to be equal to the command pressure P2. The command pressure P2 may be represented by the following equation:
Feedback pressure P2′ may be represented by the following equation:
where:
Equation 7 can be rearranged as:
Similarly, Equation 8 can be rearranged as:
Since the pressure forces acting on the spool valve 312 balance when the spool valve 312 is at equilibrium, the following is true when the spool valve 312 is at equilibrium:
P2=P′2 Equation 11
As indicated above, P1=P′1 since, in the illustrated embodiment, the pilot valve device 314 and the spool valve 314 are both fed fluid from a common source. Therefore, equation 10 can be rewritten as:
From Equation 9 and 12, therefore:
Equation 13 shows that the ratio of the cross-sectional flow area of the pilot downstream orifice to the cross-sectional flow area of the pilot upstream orifice is equal to the ratio of the outlet cross-sectional flow area out of the spool valve 312 to the inlet cross-sectional flow area into the spool valve 312. Equation 13 can be rewritten thusly:
Equation 14 shows that the ratio of the cross-sectional flow area of the pilot upstream orifice to the cross-sectional flow area of the pilot downstream orifice is equal to the ratio of the inlet cross-sectional flow area into the spool valve 312 to the outlet cross-sectional flow area out of the spool valve 312.
Thus it is clear from Equations 13 and 14 that the ratio of inlet and outlet cross-sectional flow areas of the spool valve 312 can be set by controlling the ratio of cross-sectional flow areas of the upstream and downstream orifices of the pilot valve device 314. This relationship can be used for developing control algorithms for the reversible flow control assembly 300. Trying to control the spool valve 312 using downstream pressure or flow as a direct feedback signal can be difficult in some applications, such as when a two phase fluid (a mixture of fluid and gas) is flowing through the spool valve. A specific example could be a refrigerant such as 1,1,1,2-tetrafluoroethane (R134a), which, at an appropriate temperature, could have some portion of liquid entering the spool valve 312 change to a gas due to the pressure drop experienced flowing through the spool valve 312. Slight movements of the spool 329, changing the pressure drop slightly, could result in significant changes in flow volume and pressure downstream of the spool valve 312 by changing the percentages of gas and liquid in the fluid stream downstream of the spool valve 312. Therefore, the reversible fluid flow control assembly 300 can advantageously set a desired cross-sectional flow area through the spool valve 312 utilizing the pilot valve device 314.
Other suitable parameters, which are not as unstable as downstream pressure and flow, and which are application specific, but which would be readily apparent to those of ordinary skill in the applicable art, may be used as part of the control algorithm controlling the pilot valve device 314. As an example, in a refrigeration system, where the reversible fluid flow control assembly 300 is used to supply an evaporator coil, the temperature of the refrigerant tubing at the outlet of the evaporator coil could be used as a parameter considered in controlling the operation of the reversible fluid flow control assembly 314. Other parameters which might alternatively, or additionally be utilized, and which would be apparent to those of ordinary skill in the art of refrigeration systems, might include the temperature change of the refrigerant tubing between the inlet and the outlet of the evaporator coil, degrees of superheat or subcooling of the refrigerant at the outlet of the evaporator coil, and energy content or temperature change of the fluid being cooled by the evaporator coil after passing through the evaporator coil.
In the embodiment illustrated in
If flow through the system is reversed, for example if a heat pump is switched from a cooling to a heating function, then the second connection 318 will be supplied with a higher pressure (supply pressure) and the first connection 316 will be supplied with a lower pressure (return pressure). The spool 329 will then operate in the second range of positions, i.e. the range of positions bounded by the position shown in
The spool valve 312 may operate in one or more metering positions. Assume, for example, that the spool 329 is positioned within the second range of positions at a first metering position as shown in
Now assume it is desired to open the spool 329 more, that is, to increase the cross-section flow area through the spool valve 312 by moving the spool 329 toward a second metering position illustrated in
More specifically, with the release path to return pressure through the port 366 opened up, and the cross-sectional flow area of the flow path from supply unchanged when moving from the first metering position illustrated in
The converse is also true with a decreasing command signal, which will generate an increased command pressure in the pilot valve device 314. This will cause the spool 329 to move in the first direction, so that the second port 364 will get increasingly covered, lowering the ratio of the cross-sectional flow area of the second port 364 (which is the port opening to return pressure) to the cross-sectional flow area of the fourth port 366 (which is the opening to supply pressure), raising the pressure in the axial passageway 358, and the spool 329 will come to rest in a new equilibrium position within the second range of positions, such as the first metering position shown in
It should be emphasized that the first metering position shown in
The spool valve 312, shown in
The spool valve 412, shown in
In the illustrated embodiment, all the ports 463, 464, 465, and 466 are of the same diameter; a greater cross-sectional flow area is achieved in the first and third axial locations by providing more ports 463 and 465 at the first and third axial locations, respectively, than the number of ports 464 and 466 at the second and fourth axial locations, respectively. However, a difference in cross-sectional flow areas may be achieved by any suitable arrangement. For example, a greater cross-sectional flow area could also be achieved in the first and third axial locations than at the second and fourth axial locations by providing the same number of ports 463, 464, 465, and 466 at the first, second, third, and fourth axial locations in the same number, but having the individual ports 463 and 465 be formed with greater diameter (greater individual cross-sectional flow area), than the ports 464 and 466. Such an arrangement is illustrated in the alternate embodiment illustrated in
Regarding the housing or body 320,
An alternate body 320′ may be provided, as best shown in
The spool shown in
In partial summary, among the advantages of the illustrated reversible fluid flow control assembly is the ability control flow in either direction proportional to a single pressure command from a pilot valve device, without using a spring as the primary spool closing force, and utilizing unstable equilibrium forces to switch between forward and reverse flow functionality.
In further partial summary, a device has been disclosed, including a pilot valve responsive to a command signal for supplying a fluid at a command pressure to a pilot valve control port; and a pilot operated spool valve. The pilot operated spool valve may have a body having a first connector and a second connector, each of the first connector and second connector being adapted for fluid communication with an external circuit; and a spool disposed for sliding movement in the body, the spool having a first end portion and a second end portion opposite the first end portion. The first end portion of the spool may be in fluid communication with the pilot valve control port such that the spool is urged to move in a first direction by the fluid at the command pressure. The spool may be movable to control a fluid flow between the first connector and the second connector through the body proportionally to the command pressure when the fluid flow is a forward flow from the first connector to the second connector and when the fluid flow is a reverse flow from the second connector to the first connector. The spool valve may use negative feedback in the form of fluid at a feedback pressure acting on the spool in a second direction, opposite the first direction, to position the spool in conjunction with the fluid at the command pressure. The spool valve may utilize unstable equilibrium of fluid forces to switch between controlling the forward flow and the reverse flow of fluid through the spool valve.
In further partial summary, a device has been disclosed that includes a pilot valve device responsive to a command signal for supplying a fluid at a command pressure to a pilot valve control port; and a pilot operated spool valve. The pilot operated spool valve may have a body having a first connector and a second connector, each of the first connector and second connector being adapted for fluid communication with an external circuit; and a spool disposed for sliding movement in the body. The spool may have a first end portion and a second end portion opposite the first end portion, the first end portion of the spool being in fluid communication with the pilot valve control port such that the spool is urged to move in a first direction by the fluid at the command pressure. The spool may be movable through a first range of positions to control, proportionally to the command pressure, the flow of a fluid when the fluid is flowing through the body in a forward direction from the first connector to the second connector. The spool may be movable through a second range of positions, offset from the first range of positions, to control, proportionally to the command pressure, the flow of the fluid when the fluid is flowing through the body in a reverse direction from the second connector to the first connector. A portion of the fluid flowing through the body may have a feedback pressure and acting on the spool in a second direction, opposite the first direction, to position the spool in conjunction with the fluid at the command pressure, the magnitude of the feedback pressure being generated at least in part as a function of the position of the spool. A portion of the fluid flowing through the body may develop the feedback pressure when flowing from the body into a passageway within the spool and be directed out of the spool into a feedback chamber to act on the spool in the second direction.
In further partial summary, a device has been disclosed that has a command chamber in fluid communication with the pilot valve control port to receive the fluid at the command pressure, a feedback chamber receiving the fluid having the feedback pressure; and a bore communicating at a first end portion with the command chamber and at a second end portion with the feedback chamber, the spool being disposed for sliding movement in the bore.
In further partial summary, a device has been disclosed in which the spool may further define an exterior surface, a first end portion, a second end portion, and a central portion between the first end portion and the second end portion. A first axial end face may be defined on the first end portion which is in fluid communication with the command chamber. A second axial end face may be defined on the second end portion which is in fluid communication with the feedback chamber and having an opening defined therein. An axial passageway may be defined communicating with the opening in the second axial end face, the axial passageway extending into the central portion of the spool. A first port at a first axial location in the central portion of the spool may provide communication between the exterior surface and the axial passageway. Finally, a second port in the central portion of the spool at a second axial location between the first axial location and the second end portion of the spool may provide communication between the exterior surface and the axial passageway.
In further partial summary, a device has been disclosed in which the body may define a first cavity communicating with the bore in the body at a first axial location along the bore. The body may also define a second cavity communicating with the bore in the body at a second axial location along the bore which is closer to the feedback chamber than the first axial location. The body may also define a third cavity communicating with the bore in the body at a third axial location along the bore. The third location may be located between the first axial location and the second axial location. The first connector may be in fluid communication with the first cavity and with the second cavity. The second connector may be in fluid communication with the third cavity. When the spool is in the first range of positions, a flow path for forward flow of fluid through the spool valve is established from the first connector, to the second cavity, through the spool via, sequentially the second port, the axial passageway, the first port, to the third cavity, and thence to the second connector, and such that when the spool is in the second range of positions, a flow path for reverse flow of fluid through the spool valve is established from the second connector, to the third cavity, through the spool via, sequentially the second port, the axial passageway, and the first port, to the first cavity, and thence to the second connector. Each of the first, second, and third cavities may be in the form of a circumferentially extending groove formed in the surface of the wall defining the bore in the body.
In further partial summary, a device has been disclosed the spool is movable to a shutoff position between the first range of positions and the second range of positions, where substantially no fluid communication exists between the axial passageway in the spool and either the first cavity or the second cavity.
In further partial summary, a device has been disclosed wherein the spool valve may further have a first spring urging the spool to move from the second range of positions toward the shutoff position, and may have a second spring urging the spool to move from the first range of positions toward the shutoff position.
In further partial summary, a device has been disclosed wherein the a circumferential groove may be formed in the exterior surface of the spool at a third axial location between the first axial location and the first end portion of the spool; and an aperture may be formed in the spool providing fluid communication between the circumferential groove in the exterior surface of the spool and the axial passageway formed in the spool.
In further partial summary, a device has been disclosed wherein the first port may be one of a plurality of ports spaced apart circumferentially about the spool at the first axial location. Furthermore the second port may be one of a plurality of ports spaced apart circumferentially about the spool at the second axial location.
In further partial summary, a device has been disclosed wherein the spool may further define a third port in the central portion of the spool at a third axial location spaced a first axial distance from the first axial location toward the first end portion of the spool. The third port may provide communication between the exterior surface and the axial passageway. Furthermore, the spool may also define a fourth port in the central portion of the spool at a fourth axial location spaced the first axial distance from the second axial location toward the first axial location. The fourth port may also provide communication between the exterior surface and the axial passageway. The body may further define a first cavity communicating with the bore in the body at a first axial location along the bore, a second cavity communicating with the bore in the body at a second axial location along the bore which is closer to the feedback chamber than the first axial location, a third cavity communicating with the bore in the body at a third axial location along the bore, the third location being between the first axial location and the second axial location. The first connector may be in fluid communication with the first cavity and with the second cavity. The second connector may be in fluid communication with the third cavity, such that, when the spool is in the first range of positions, a flow path for forward flow of fluid through the spool valve is established from the first connector, to the second cavity, through the spool via, sequentially the second port, the axial passageway, and the first port, to the third cavity, and thence to the second connector, and such that when the spool is in the second range of positions, a flow path for reverse flow of fluid through the spool valve is established from the second connector, to the third cavity, through the spool via, sequentially the fourth port, the axial passageway, and the third port, to the first cavity, and thence to the second connector.
In further partial summary, a device has been disclosed wherein the first and the second ports each have a first cross-sectional flow area, and wherein the third and the fourth ports each have a second cross-sectional flow area different than the first cross-sectional flow area.
In further partial summary, a device has been disclosed that wherein, when the spool is in the first range of positions, and fluid communication is established between the first connector and the second connector, through the second cavity, through the spool via the second port, the axial passageway, and the first port, and through the third cavity, the presence of fluid in the second connector at a pressure higher than that existing in the first connector results in an instability in flow such that any decrease in command pressure would cause the spool to move in the second direction toward the command chamber, resulting in decreased communication between the second cavity and the second port, resulting in an increase in pressure in the axial passageway and thus pressure in the feedback chamber, further urging the spool to move in the second direction toward the command chamber, resulting in the spool moving disproportionately to the change in command pressure, the spool moving out of the first range of positions toward the second range of positions.
In further partial summary, a device has been disclosed that may include a first stop structure limiting movement of the spool in the first direction at a position providing substantially the least resistance to flow through the body of any of the first range of positions, and a second stop structure limiting movement of the spool in the second direction at a position providing substantially the least resistance to flow through the body of any of the second range of positions.
In further partial summary, a device has been disclosed that may utilize a microvalve as a pilot valve device.
In further partial summary, a device has been disclosed wherein the pilot valve device may comprise a fluid conduit extending between a first pilot connection port and a second pilot connection port, the flow through which fluid conduit is regulated by two variable orifices in series, one of which is normally open and one of which is normally closed, the pilot valve control port being connected in fluid communication with the fluid conduit between the variable orifices.
In further partial summary, a device has been disclosed wherein the normally closed orifice may be connected in fluid communication with the first connector via the first pilot connection port and the normally open orifice is in fluid communication with the second connector via the second pilot connection port.
In further partial summary, a device has been disclosed with a spool having first, second, third, and fourth ports formed in the spool at first, second, third, and fourth axial locations along the spool, respectively, each of the ports communicating with an axial passageway in the spool, each of the ports having the same cross-sectional flow area, and wherein there are more of one of the first, second, third, and fourth ports at the associated one of the first, second, third, and fourth axial locations than at another of the first, second, third, and fourth axial locations, whereby the device forms an asymmetric valve.
In further partial summary, a device has been disclosed with a spool having first, second, third, and fourth ports formed in the spool at first, second, third, and fourth axial locations along the spool, respectively, each of the ports communicating with an axial passageway in the spool, wherein at least one the first, second, third, and fourth ports has a different cross-sectional flow area from another of the first, second, third, and fourth ports at a different one of the first, second, third, and fourth axial locations, whereby the device forms an asymmetric valve.
In further partial summary, a device has been disclosed including a body having a first connector and a second connector, each of the first connector and second connector being adapted for fluid communication with an external circuit; and a spool disposed for sliding movement in the body. The spool has a first end portion and a second end portion opposite the first end portion, the first end portion of the spool being in fluid communication with a pilot valve producing a command pressure such that the spool is urged to move in a first direction by the command pressure, the spool being movable through a first range of positions to control, proportionally to the command pressure, the flow of a fluid when the fluid is flowing through the body in a forward direction from the first connector to the second connector, the spool being movable through a second range of positions, offset from the first range of positions, to control, proportionally to the command pressure, the flow of the fluid when the fluid is flowing through the body in a reverse direction from the second connector to the first connector, a portion of the fluid flowing through the body having a feedback pressure and acting on the spool in a second direction, opposite the first direction, to position the spool in conjunction with the fluid at the command pressure, the magnitude of the feedback pressure being generated at least in part as a function of the position of the spool. The body may further define a command chamber in fluid communication with the pilot valve control port to receive the fluid at the command pressure; a feedback chamber receiving the fluid having the feedback pressure; and a bore communicating at a first end portion with the command chamber and at a second end portion with the feedback chamber, the spool being disposed for sliding movement in the bore. The spool may further define an exterior surface; a central portion between the first end portion and the second end portion; a first axial end face on the first end portion which is in fluid communication with the command chamber; a second axial end face on the second end portion which is in fluid communication with the feedback chamber and having an opening defined therein; an axial passageway communicating with the opening in the second axial end face, the axial passageway extending into the central portion of the spool; a first port at a first axial location in the central portion of the spool providing communication between the exterior surface and the axial passageway; a second port in the central portion of the spool at a second axial location between the first axial location and the second end portion of the spool providing communication between the exterior surface and the axial passageway; a third port in the central portion of the spool at a third axial location spaced a first axial distance from the first axial location toward the first end portion of the spool, the third port providing communication between the exterior surface and the axial passageway; and a fourth port in the central portion of the spool at a fourth axial location spaced the first axial distance from the second axial location toward the first axial location and, the fourth port providing communication between the exterior surface and the axial passageway. The body may further define a first cavity communicating with the bore in the body at a first axial location along the bore, the first connector being in fluid communication with the first cavity; and a second cavity communicating with the bore in the body at a second axial location along the bore which is closer to the feedback chamber than the first axial location the second connector being in fluid communication with the second cavity, such that when the spool is in the first range of positions, a flow path for forward flow of fluid through the spool valve is established from the first connector, to the first cavity, through the spool via, sequentially the first port, the axial passageway, and the third port, to the second cavity, and thence to the second connector, and such that when the spool is in the second range of positions, a flow path for reverse flow of fluid through the spool valve is established from the second connector, to the second cavity, through the spool via, sequentially the fourth port, the axial passageway, and the second port, to the first cavity, and thence to the first connector. The device may have a greater maximum cross-sectional flow area when controlling one of forward flow and reverse flow, than when controlling the other one of forward flow and reverse flow. In further partial summary, this difference in maximum cross-sectional flow area might be achieved in a device in which, the first, second, third, and fourth ports each has the same cross-sectional flow area, and wherein there more of one of the first, second, third, and fourth ports at the associated one of the first, second, third, and fourth axial locations than at another of the first, second, third, and fourth axial locations, whereby the device forms an asymmetric valve. In further partial summary, another way in which this difference in maximum cross-sectional flow area might be achieved is in a device in which at least one the first, second, third, and fourth ports has a different cross-sectional flow area from another of the first, second, third, and fourth ports at a different one of the first, second, third, and fourth axial locations, whereby the device forms an asymmetric valve.
In further partial summary, a device has been disclosed that may include a spool valve including a body having a first connector and a second connector and a spool movable relative to the body for controlling flow between the first connector and the second connector. The reversible flow control assembly further may include a pilot valve device developing a single pressure command. The spool valve may be responsive to the single pressure command developed in the pilot valve device to control flow between the first connector and the second connector without regard to the direction of flow. The majority of forces acting on the spool in opposition to the pressure command to position the spool relative to the body when fluid is flowing through the valve may be fluid forces.
The principle and mode of operation of this invention have been explained and illustrated in its preferred embodiment. However, it must be understood that this invention may be practiced otherwise than as specifically explained and illustrated without departing from its spirit or scope.
This application claims the benefit of U.S. Provisional Application No. 61/120,412 filed Dec. 6, 2008.
Filing Document | Filing Date | Country | Kind | 371c Date |
---|---|---|---|---|
PCT/US2009/066675 | 12/4/2009 | WO | 00 | 7/14/2011 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO2010/065804 | 6/10/2010 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
668202 | Nethery | Feb 1901 | A |
886045 | Ehrlich et al. | Apr 1908 | A |
1886205 | Lyford | Nov 1932 | A |
1926031 | Boynton | Sep 1933 | A |
2412205 | Cook | Dec 1946 | A |
2504055 | Thomas | Apr 1950 | A |
2651325 | Lusignan | Sep 1953 | A |
2840107 | Campbell | Jun 1958 | A |
2875779 | Campbell | Mar 1959 | A |
3031747 | Green | May 1962 | A |
3729807 | Fujiwara | May 1973 | A |
3747628 | Holster et al. | Jul 1973 | A |
3860949 | Stoeckert et al. | Jan 1975 | A |
4005454 | Froloff et al. | Jan 1977 | A |
4019388 | Hall, II et al. | Apr 1977 | A |
4023725 | Ivett et al. | May 1977 | A |
4100236 | Gordon et al. | Jul 1978 | A |
4152540 | Duncan et al. | May 1979 | A |
4181249 | Peterson et al. | Jan 1980 | A |
4298023 | McGinnis | Nov 1981 | A |
4341816 | Lauterbach et al. | Jul 1982 | A |
4354527 | McMillan | Oct 1982 | A |
4372486 | Tomioka et al. | Feb 1983 | A |
4434813 | Mon | Mar 1984 | A |
4476893 | Schwelm | Oct 1984 | A |
4543875 | Imhof | Oct 1985 | A |
4548047 | Hayashi et al. | Oct 1985 | A |
4581624 | O'Connor | Apr 1986 | A |
4593719 | Leonard et al. | Jun 1986 | A |
4628576 | Giachino et al. | Dec 1986 | A |
4647013 | Giachino et al. | Mar 1987 | A |
4661835 | Gademann et al. | Apr 1987 | A |
4687419 | Suzuki et al. | Aug 1987 | A |
4772935 | Lawler et al. | Sep 1988 | A |
4821997 | Zdeblick | Apr 1989 | A |
4824073 | Zdeblick | Apr 1989 | A |
4826131 | Mikkor | May 1989 | A |
4828184 | Gardner et al. | May 1989 | A |
4852364 | Seener et al. | Aug 1989 | A |
4869282 | Sittler et al. | Sep 1989 | A |
4938742 | Smits | Jul 1990 | A |
4943032 | Zdeblick | Jul 1990 | A |
4946350 | Suzuki et al. | Aug 1990 | A |
4959581 | Dantlgraber | Sep 1990 | A |
4964567 | Heffner et al. | Oct 1990 | A |
4966646 | Zdeblick | Oct 1990 | A |
4978062 | Lange, Sr. | Dec 1990 | A |
5029805 | Albarda et al. | Jul 1991 | A |
5037778 | Stark et al. | Aug 1991 | A |
5050838 | Beatty et al. | Sep 1991 | A |
5052192 | Drucker | Oct 1991 | A |
5054522 | Kowanz et al. | Oct 1991 | A |
5058856 | Gordon et al. | Oct 1991 | A |
5061914 | Busch et al. | Oct 1991 | A |
5064165 | Jerman | Nov 1991 | A |
5065978 | Albarda et al. | Nov 1991 | A |
5066533 | America et al. | Nov 1991 | A |
5069419 | Jerman | Dec 1991 | A |
5074629 | Zdeblick | Dec 1991 | A |
5082242 | Bonne et al. | Jan 1992 | A |
5096643 | Kowanz et al. | Mar 1992 | A |
5116457 | Jerman | May 1992 | A |
5131729 | Wetzel | Jul 1992 | A |
5133379 | Jacobsen et al. | Jul 1992 | A |
5142781 | Mettner et al. | Sep 1992 | A |
5161774 | Engelsdorf et al. | Nov 1992 | A |
5169472 | Goebel | Dec 1992 | A |
5176358 | Bonne et al. | Jan 1993 | A |
5177579 | Jerman | Jan 1993 | A |
5178190 | Mettner | Jan 1993 | A |
5179499 | MacDonald et al. | Jan 1993 | A |
5180623 | Ohnstein | Jan 1993 | A |
5197517 | Perera | Mar 1993 | A |
5209118 | Jerman | May 1993 | A |
5215244 | Buchholz et al. | Jun 1993 | A |
5216273 | Doering et al. | Jun 1993 | A |
5217283 | Watanabe | Jun 1993 | A |
5222521 | Kihlberg | Jun 1993 | A |
5238223 | Mettner et al. | Aug 1993 | A |
5244537 | Ohnstein | Sep 1993 | A |
5267589 | Watanabe | Dec 1993 | A |
5271431 | Mettner et al. | Dec 1993 | A |
5271597 | Jerman | Dec 1993 | A |
5309943 | Stevenson et al. | May 1994 | A |
5323999 | Bonne et al. | Jun 1994 | A |
5325880 | Johnson et al. | Jul 1994 | A |
5333831 | Barth et al. | Aug 1994 | A |
5336062 | Richter | Aug 1994 | A |
5355712 | Petersen et al. | Oct 1994 | A |
5368704 | Madou et al. | Nov 1994 | A |
5375919 | Furuhashi | Dec 1994 | A |
5400824 | Gschwendtner et al. | Mar 1995 | A |
5417235 | Wise et al. | May 1995 | A |
5445185 | Watanabe et al. | Aug 1995 | A |
5458405 | Watanabe | Oct 1995 | A |
5524819 | Heffner et al. | Jun 1996 | A |
5543349 | Kurtz et al. | Aug 1996 | A |
5553790 | Findler et al. | Sep 1996 | A |
5566703 | Watanabe et al. | Oct 1996 | A |
5577533 | Cook, Jr. | Nov 1996 | A |
5589422 | Bhat | Dec 1996 | A |
5611214 | Wegeng et al. | Mar 1997 | A |
5785295 | Tsai | Jul 1998 | A |
5810325 | Carr | Sep 1998 | A |
5838351 | Weber | Nov 1998 | A |
5848605 | Bailey et al. | Dec 1998 | A |
5856705 | Ting | Jan 1999 | A |
5873385 | Bloom et al. | Feb 1999 | A |
5909078 | Wood et al. | Jun 1999 | A |
5926955 | Kober | Jul 1999 | A |
5941608 | Campau et al. | Aug 1999 | A |
5954079 | Barth et al. | Sep 1999 | A |
5955817 | Dhuler et al. | Sep 1999 | A |
5964244 | Hiramatsu et al. | Oct 1999 | A |
5970998 | Talbot et al. | Oct 1999 | A |
5994816 | Dhuler et al. | Nov 1999 | A |
5996609 | Akimoto et al. | Dec 1999 | A |
6019437 | Barron et al. | Feb 2000 | A |
6023121 | Dhuler et al. | Feb 2000 | A |
6038928 | Maluf et al. | Mar 2000 | A |
6041650 | Swindler et al. | Mar 2000 | A |
6076366 | Takano et al. | Jun 2000 | A |
6096149 | Hetrick et al. | Aug 2000 | A |
6105737 | Weigert et al. | Aug 2000 | A |
6114794 | Dhuler et al. | Sep 2000 | A |
6116863 | Ahn et al. | Sep 2000 | A |
6123316 | Biegelsen et al. | Sep 2000 | A |
6124663 | Haake et al. | Sep 2000 | A |
6171972 | Mehregany et al. | Jan 2001 | B1 |
6182742 | Takahashi et al. | Feb 2001 | B1 |
6224445 | Neukermans et al. | May 2001 | B1 |
6255757 | Dhuler et al. | Jul 2001 | B1 |
6279606 | Hunnicutt et al. | Aug 2001 | B1 |
6283441 | Tian | Sep 2001 | B1 |
6386507 | Dhuler et al. | May 2002 | B2 |
6390782 | Booth et al. | May 2002 | B1 |
6408876 | Nishimura et al. | Jun 2002 | B1 |
6418741 | Nungesser et al. | Jul 2002 | B1 |
6494804 | Hunnicutt et al. | Dec 2002 | B1 |
6505811 | Barron et al. | Jan 2003 | B1 |
6520197 | Deshmukh et al. | Feb 2003 | B2 |
6523560 | Williams et al. | Feb 2003 | B1 |
6533366 | Barron et al. | Mar 2003 | B1 |
6540203 | Hunnicutt | Apr 2003 | B1 |
6581640 | Barron | Jun 2003 | B1 |
6637722 | Hunnicutt | Oct 2003 | B2 |
6662581 | Hirota et al. | Dec 2003 | B2 |
6694998 | Hunnicutt | Feb 2004 | B1 |
6724718 | Shinohara et al. | Apr 2004 | B1 |
6755761 | Hunnicutt et al. | Jun 2004 | B2 |
6761420 | Maluf et al. | Jul 2004 | B2 |
6845962 | Barron et al. | Jan 2005 | B1 |
6872902 | Cohn et al. | Mar 2005 | B2 |
6902988 | Barge et al. | Jun 2005 | B2 |
6948514 | Kramer et al. | Sep 2005 | B1 |
6958255 | Khuri-Yakub et al. | Oct 2005 | B2 |
6966329 | Liberfarb | Nov 2005 | B2 |
7011378 | Maluf et al. | Mar 2006 | B2 |
7063100 | Liberfarb | Jun 2006 | B2 |
7104283 | Ino et al. | Sep 2006 | B2 |
7210502 | Fuller et al. | May 2007 | B2 |
7372074 | Milne et al. | May 2008 | B2 |
7449413 | Achuthan et al. | Nov 2008 | B1 |
8113448 | Keating | Feb 2012 | B2 |
8113482 | Hunnicutt | Feb 2012 | B2 |
8151583 | Douglas | Apr 2012 | B2 |
8156962 | Luckevich | Apr 2012 | B2 |
8157184 | Hayashi et al. | Apr 2012 | B2 |
8393344 | Hunnicutt | Mar 2013 | B2 |
20020014106 | Srinivasan et al. | Feb 2002 | A1 |
20020029814 | Unger et al. | Mar 2002 | A1 |
20020096421 | Cohn et al. | Jul 2002 | A1 |
20020174891 | Maluf et al. | Nov 2002 | A1 |
20030061889 | Tadigadapa et al. | Apr 2003 | A1 |
20030098612 | Maluf et al. | May 2003 | A1 |
20030159811 | Nurmi | Aug 2003 | A1 |
20030206832 | Thiebaud et al. | Nov 2003 | A1 |
20040115905 | Barge et al. | Jun 2004 | A1 |
20050121090 | Hunnicutt | Jun 2005 | A1 |
20050200001 | Joshi et al. | Sep 2005 | A1 |
20050205136 | Freeman | Sep 2005 | A1 |
20060017125 | Lee et al. | Jan 2006 | A1 |
20060067649 | Tung et al. | Mar 2006 | A1 |
20060218953 | Hirota | Oct 2006 | A1 |
20070251586 | Fuller et al. | Nov 2007 | A1 |
20070289941 | Davies | Dec 2007 | A1 |
20080047283 | Pham et al. | Feb 2008 | A1 |
20080072977 | George et al. | Mar 2008 | A1 |
20080196773 | Franconi | Aug 2008 | A1 |
20080271788 | Matsuzaki et al. | Nov 2008 | A1 |
20090020716 | Hokazono et al. | Jan 2009 | A1 |
20090123300 | Uibel | May 2009 | A1 |
20090186466 | Brewer | Jul 2009 | A1 |
20100019177 | Luckevich | Jan 2010 | A1 |
20100038576 | Hunnicutt | Feb 2010 | A1 |
20100225708 | Peng et al. | Sep 2010 | A1 |
20120000550 | Hunnicutt et al. | Jan 2012 | A1 |
Number | Date | Country |
---|---|---|
101617155 | Mar 2012 | CN |
2215526 | Oct 1973 | DE |
2930779 | Feb 1980 | DE |
3401404 | Jul 1985 | DE |
4101575 | Jul 1992 | DE |
4417251 | Nov 1995 | DE |
4422942 | Jan 1996 | DE |
250948 | Jan 1988 | EP |
261972 | Mar 1988 | EP |
1024285 | Aug 2000 | EP |
2238267 | May 1991 | GB |
SHO 39-990 | Feb 1964 | JP |
04-000003 | Jan 1992 | JP |
06-117414 | Apr 1994 | JP |
2001184125 | Jul 2001 | JP |
2003-049933 | Feb 2003 | JP |
SHO 63-148062 | Jul 2003 | JP |
2006-080194 | Mar 2006 | JP |
9916096 | Apr 1999 | WO |
9924783 | May 1999 | WO |
0014415 | Mar 2000 | WO |
0014415 | Jul 2000 | WO |
2005084211 | Sep 2005 | WO |
2005084211 | Jan 2006 | WO |
2006076386 | Jul 2006 | WO |
2008076388 | Jun 2008 | WO |
2008076388 | Aug 2008 | WO |
2008121365 | Oct 2008 | WO |
2008121369 | Oct 2008 | WO |
2010019329 | Feb 2010 | WO |
2010019329 | Feb 2010 | WO |
2010019665 | Feb 2010 | WO |
2010019665 | Feb 2010 | WO |
2010065804 | Jun 2010 | WO |
2011022267 | Feb 2011 | WO |
2011022267 | Feb 2011 | WO |
2011094300 | Aug 2011 | WO |
2011094300 | Aug 2011 | WO |
2011094302 | Aug 2011 | WO |
2011094302 | Aug 2011 | WO |
Entry |
---|
Biography, Ohio State University Website [online], [retrieved Dec. 31, 2000]. Retrieved from the Internet <URL: http://www.chemistry.ohio-state.edu/resource/pubs/brochure/madou.htm>. |
Madou, Marc, “Fundamentals of Microfabrication”, Boca Raton: CRC Press, 1997, 405-406. |
Ayon et al., “Etching Characteristics and Profile Control in a Time Multiplexed ICP Etcher,” Proc. of Solid State Sensor and Actuator Workshop Technical Digest, Hilton Head SC, (Jun. 1998) 41-44. |
Bartha et al., “Low Temperature Etching of Si in High Density Plasma Using SF6/02,” Microelectronic Engineering, and Actuator Workshop Technical Digest, Hilton Head SC, (Jun. 1998) 41-44. |
Booth, Steve and Kaina, Rachid, Fluid Handling—Big Gains from Tiny Valve, Appliance Design (Apr. 2008), pp. 46-48. |
Controls Overview for Microstaq Silicon Expansion Valve (SEV), Rev. 1, Dec. 2008 [online], [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.microstaq.com/pdf/SEV—controls.pdf>. |
Copeland, Michael V., Electronic valves promise big energy savings, FORTUNE, Sep. 9, 2008 [online], [retrieved Sep. 9, 2008]. Retrieved from the internet <URL: http://techland.blogs.fortune.cnn.com/2008/09/09/electronic-valves-promise-big-energy-savings>. |
Fung et al., “Deep Etching of Silicon Using Plasma” Proc. of the Workshop on Micromachining and Micropackaging of Transducers, (Nov. 7-8, 1984) pp. 159-164. |
Gui, C. et al, “Selective Wafer Bonding by Surface Roughness Control”, Journal of the Electrochemical Society, 148 (4) G225-G228 (2001). |
Gui, C. et al., “Fusion bonding of rough surfaces with polishing technique for silicon micromachining”, Microsystem Technologies (1997) 122-128. |
Günther, Götz, “Entwicklung eines pneumatischen 3/2-Wege-Mikroventils”, O + P Olhydraulik Und Pneumatik, Vereinigte Fachverlage, Mainz, DE, vol. 42, No. 6, Jun. 1, 1998, pp. 396-398, XP000831050, ISSN: 0341-2660. |
Higginbotham, Stacey, Microstaq's Tiny Valves Mean Big Energy Savings [online], [retrieved Dec. 8, 2008]. Retrieved from the Internet <URL: http//earth2tech.com/2008/09/09/microstaqs-tiny-valves-mean-big-energy savings (posted Sep. 9, 2008)>. |
J. Mark Noworolski, et al.,“Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators”, Sensors and Actuators A 55 (1996); pp. 65-69. |
Jonsmann et al., “Compliant Electra-thermal Microactuators”, IEEE Technical Digest , Twelfth IEEE International Conference on Micro Electro Mechanical Systems Jan. 17-21, 1999, Orlando, Florida, pp. 588-593, IEEE Catalog No. 99CH36291C. |
K.R. Williams et al., “A Silicon Microvalve for the Proportional Control of Fluids”, Transducers '99, Proc. 10th International Conference on Solid State Sensors and Actuators, held Jun. 7-10, 1999, Sendai, Japan, pp. 18-21. |
Keefe, Bob, Texas firm says value-replacing chip can drastically cut energy use, Atlanta Metro News, Sep. 10, 2008 [online], [retrieved Sep. 10, 2008]. Retrieved from the Internet <URL: http://www.ajc.com/search/content/shared/money/stories/2008/09/microstaq10—cox-F9782.html>. |
Klaassen et al., “Silicon Fusion Bonding and Deep Reactive Ion Etching; A New Technology for Microstructures,” Proc., Transducers 95 Stockholm Sweden, (1995) 556-559. |
Linder et al., “Deep Dry Etching Techniques as a New IC Compatible Tool for Silicon Micromachining,” Proc, Transducers, vol. 91, (Jun. 1991) pp. 524-527. |
Luckevich, Mark, MEMS microvlaves: the new valve world, Valve World (May 2007), pp. 79-83. |
MEMS, Microfluidics and Microsystems Executive Review [online], Posted Apr. 16, 2009. [retrieved May 17, 2010]. Retrieved from the Internet <URL: http:www.memsinvestorjournal.com/2009/04/mems-applications-for-flow-control-.html>. |
Microstaq Announces High Volume Production of MEMS-Based Silicon Expansion Valve [onlne], [retrieved Jan. 27, 2010]. Retrieved from the Internet <URL: http://www.earthtimes.org/articles/printpressstory.php?news+1138955 (posted Jan. 27, 2010)>. |
Microstaq Product Descriptions, SEV, CPS-4, and PDA-3 [online], Published 2009, [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.microstaq.com/products/index.html>. |
Microstaq Product Description, Proportional Direct Acting Silicon Control Valve (PDA-3) [online], Published 2008, [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.microstaq.com/products/pda3.html>. |
Microstaq Product Description, Proportional Piloted Silicon Control Valve (CPS-4) [online], Published 2008, [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.microstaq.com/products/cps4.html>. |
Microstaq Technology Page [online], Published 2008, [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.microstaq.com/technology/index.html>. |
Petersen et al. “Surfaced Micromachined Structures Fabricated with Silicon Fusion Bonding” Proc., Transducers 91, (Jun. 1992) pp. 397-399. |
Press Release, Freescale and Microstaq Join Forces on Smart Superheat Control System for HVAC and Refrigeration Efficiency (posted Jan. 22, 2008) [online], [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.microstaq.com/pressReleases/prDetail—04.html>. |
Press Release, Microstaq Unveils Revolutionary Silicon Expansion Valve at Demo 2008 [online], [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.microstaq.com/pressReleases/prDetail—05.html (posted Sep. 8, 2008)>. |
Press Release, Microstaq Mastering Electronic Controls for Fluid-Control Industry (posted May 5, 2005) [online], [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.microstaq.com/pressReleases/prDetail—02.html>. |
Press Release, Nanotechnology Partnerships, Connections Spur Innovation for Fluid Control Industries (posted Jun. 9, 2005) [online], [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.microstaq.com/pressReleases/prDetail—03.html>. |
Product Review, greentechZONE Products for the week of May 18, 2009 [online], [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.en-genius.net/site/zones/greentechZONE/product—reviews/grnp—051809>. |
SEV Installation Instructions [online], [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.microstaq.com/pdf/SEV—Instruction—sheet.pdf>. |
Silicon Expansion Valve Information Sheet [online], [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.microstaq.com/pdf/SEV—Infosheet—2—0.pdf>. |
Silicon Expansion Valve (SEV)—for Heating, Cooling, and Refrigeration Applications [online], [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.microstaq.com/pdf/SEV—Quicksheet.pdf>. |
Silicon Expansion Valve Data Sheet [online], [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.microstaq.com/pdf/SEV—Datasheet—1—8.pdf>. |
SMIC Announces Successful Qualification of a MEMS Chip for Microstaq (posted Oct. 26, 2009) [online], [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.prnewswire.com/news-releases/smic-announces-successful-qualification-of-a-mems-chip-for-microstaq-65968252.html (posted Oct. 26, 2009)>. |
SMIC quals Microstaq MEMS chip for fluid control (posted Oct. 26, 2009) [online], [retrieved May 17, 2010]. Retrieved from the Internet <URL: http://www.electroiq.com/ElectroiQ/en-us/index/display/Nanotech—Article—Tools—Template.articles.small-times.nanotechmems.mems.microfluidics.2009.10.smic-quals—microstaq.html>. |
Tiny Silicon Chip Developed by Microstaq Will Revolutionize Car Technology (posted May 19, 2005) [online], [retrieved May 19, 2005]. Retrieved from the Internet <URL: http://www.nsti.org/press/PRshow.html?id=160>. |
Turpin, Joanna R., Soft Economy, Energy Prices Spur Interest in Technologies [online], Published Dec. 8, 2008. [retrieved May 18, 2010]. Retrieved from the Internet <URL: http://www.achrnews.com/copyright/BNP—GUID—9-5-2006—A—10000000000000483182>. |
Uibel, Jeff, The Miniaturization of Flow Control (Article prepared for the 9th International Symposium on Fluid Control Measurement and Visualization (FLUCOME 2007)), Journal of Visualization (vol. 11, No. 1, 2008), IOS Press. |
Yunkin et al., “Highly Anisotropic Selective Reactive Ion Etching of Deep Trenches in Silicon,” Microelectronic Engineering, Elsevier Science B.V., vol. 23, (1994) pp. 373-376. |
Zhixiong Liu et al., “Micromechanism fabrication using silicon fusion bonding”, Robotics and Computer Integrated Manufacturing 17 (2001) 131-137. |
English Translation of Chinese Office Action, Application No. 200980156187 dated Jun. 28, 2013. |
Number | Date | Country | |
---|---|---|---|
20120000550 A1 | Jan 2012 | US |
Number | Date | Country | |
---|---|---|---|
61120412 | Dec 2008 | US |