Claims
- 1. A module having fluid flow channels therein in fluid communication with a diaphragm valve, said module, comprising first, second and third interfacially superposed sheets of adhesiveless self-bondable thermoset polyimide directly bonded to one another without an adhesive, at least one fluid flow channel formed at the interface of said first and second sheets, said fluid flow channel being in fluid communication with a valve region on an outer surface of at least one of said first and second sheets, said third polyimide sheet being superposed over said valve region, the portion of said polyimide sheet overlying said valve region being capable of functioning as said diaphragm valve.
- 2. The module of claim 1 wherein said polyimide sheets contain an organotin compound.
- 3. The module of claim 1 wherein said third polyimide sheet is sufficiently flexible that the portion of said sheet overlying said valve region is capable of functioning as a valve and said third sheet is bonded to said outside surface except at said valve region.
- 4. The module of claim 1 wherein said module additionally includes a valve actuator operatively associated with said third polyimide sheet at said valve region for selectively flexing said sheet and thereby opening and closing said valve.
- 5. The module of claim 1 wherein said module includes a feed channel, a sensor channel, and valve regions operatively associated with said feed channel and said sensor channel for selectively opening and closing communication between said feed channel and said sensor channel, and a sensor disposed in said sensor channel to detect the presence or concentration of an analyte in said sensor channel.
- 6. The module of claim 1 wherein said first, second and third polyimide sheets are bonded together without an adhesive to form a monolithic structure.
- 7. The module of claim 5 wherein said feed channel includes a feed channel bore extending upwardly through said first polyimide sheet and terminating at the outer surface of said first polyimide sheet, a sensor channel bore extending upwardly through said first polyimide sheet and terminating at said outer surface of said first polyimide sheet approximate said feed channel bore, said valve region extends over said feed channel bore and said sensor channel bore and a valve actuator for pressing said third polyimide sheet over said feed channel bore and said sensor channel bore to block communication therebetween and for relaxing said third polyimide sheet for opening communication therebetween.
- 8. The module of claim 7 wherein said sensor is an electrochemical sensor.
- 9. The module of claim 7 wherein said sensor is an optical sensor.
- 10. The module of claim 7 wherein said sensor is an electrochemical sensor.
- 11. The module of claim 1 wherein said module is a microfluidic analyzer module.
- 12. The module of claim 7 further including a fourth layer overlying said third polyimide sheet, said fourth layer providing a concave surface in operative association with said valve region.
- 13. The module of claim 12 wherein said valve actuator comprises a pressure source communicating with said concave surface portion.
- 14. The module of claim 1 wherein said channels are up to approximately 0.015" wide and up to approximately 0.015" deep.
CROSS-REFERENCE TO RELATED APPLICATIONS
This application is a continuation-in-part of U.S. Ser. No. 08/897,744 filed Jul. 21, 1997, now U.S. Pat. No. 5,932,799, Aug. 3, 1999.
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Continuation in Parts (1)
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