Number | Name | Date | Kind |
---|---|---|---|
1791760 | Kline | Feb 1931 | |
2210030 | Ellis | Aug 1940 | |
3520300 | Flower, Jr. | Jul 1970 | |
3715192 | Wenz et al. | Feb 1973 | |
3935863 | Klinger | Feb 1976 | |
4193156 | Chauvier | Mar 1980 | |
4233029 | Columbus | Nov 1980 | |
4266581 | Wenander | May 1981 | |
4271119 | Columbus | Jun 1981 | |
4277966 | Rambauske | Jul 1981 | |
4525166 | Leclerc | Jun 1985 | |
4533352 | Van Beek et al. | Aug 1985 | |
4668558 | Barber | May 1987 | |
4677705 | Schuster | Jul 1987 | |
4747166 | Kuntz | May 1988 | |
4809396 | Houser | Mar 1989 | |
4826539 | Harpold | May 1989 | |
4871623 | Hoopman et al. | Oct 1989 | |
4906439 | Grenner | Mar 1990 | |
4921492 | Schultz et al. | May 1990 | |
4950549 | Rolando et al. | Aug 1990 | |
4966584 | Nguyen | Oct 1990 | |
5014389 | Ogilvie et al. | May 1991 | |
5069403 | Marentic et al. | Dec 1991 | |
5078925 | Rolando et al. | Jan 1992 | |
5133516 | Marentic et al. | Jul 1992 | |
5158557 | Noreen et al. | Oct 1992 | |
5175030 | Lu et al. | Dec 1992 | |
5200248 | Thompson et al. | Apr 1993 | |
5249359 | Schubert et al. | Oct 1993 | |
5437651 | Todd et al. | Aug 1995 | |
5440332 | Good | Aug 1995 | |
5450235 | Smith et al. | Sep 1995 | |
5457848 | Miwa | Oct 1995 | |
5514120 | Johnston et al. | May 1996 | |
5527588 | Camarda et al. | Jun 1996 | |
5534576 | Grot | Jul 1996 | |
5535478 | Thompson | Jul 1996 | |
5599330 | Rainin | Feb 1997 | |
5628735 | Skow | May 1997 | |
5651900 | Keller et al. | Jul 1997 | |
5655258 | Heintz | Aug 1997 | |
5691846 | Benson, Jr. et al. | Nov 1997 | |
5692263 | Sorenson | Dec 1997 | |
5728446 | Johnston et al. | Mar 1998 | |
5842787 | Kopf-Sill et al. | Dec 1998 | |
5885470 | Parce et al. | Mar 1999 | |
5932315 | Lum et al. | Aug 1999 |
Number | Date | Country |
---|---|---|
42 10 072 A1 | Mar 1993 | DEX |
1 418 635 | Dec 1975 | GBX |
WO 8904628 | Jun 1989 | WOX |
WO 9906589 | Feb 1999 | WOX |
Entry |
---|
Article: "Fabrication of Novel Three-Dimensional Microstructures by the Anisotropic Etching of (100) and (110) Silicon,"Ernest Bassous, IEEE Transactions on Electron Devices. vol. ED-25, No. 10, Oct. 1978. |
Article: "Microtechnology Opens Doors to the Universe of Small Space, "Peter Zuska, Medical Devices & Diagnostic Industry, Jan. 1997. |