Fluid mixing system

Abstract

An object of the present invention is to provide a fluid mixing system able to control the flow rates of different lines of fluid to mix them in any ratio, able to control the flow rate of even a pulsating fluid without problem, compact in configuration and able to be installed in a narrow space, and enabling easy pipe laying and pipe connection at the time of installation.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a view of the configuration schematically showing a first embodiment of the fluid mixing system of the present invention.

FIG. 2 is a vertical cross-sectional view of a flow rate measuring device.

FIG. 3 is a vertical cross-sectional view of a fluid control valve.

FIG. 4 is a view of the configuration schematically showing a second embodiment of the fluid mixing system of the present invention.

FIG. 5 is a vertical cross-sectional view of a shutoff valve.

FIG. 6 is a view of the configuration schematically showing a third embodiment of the fluid mixing system of the present invention.

FIG. 7 is a vertical cross-sectional view of a pressure regulating valve.

FIG. 8 is a view of the configuration schematically showing a fourth embodiment of the fluid mixing system of the present invention.

FIG. 9 is a view of the configuration schematically showing a fifth embodiment of the fluid mixing system of the present invention.

FIG. 10 is a vertical cross-sectional view of a manifold valve.

FIG. 11 is a view of the configuration schematically showing a sixth embodiment of the fluid mixing system of the present invention.

FIG. 12 is a perspective view schematically showing the channels of the flushing system of the present invention.

FIG. 13 is a vertical cross-sectional view along the line A-A of FIG. 12.

FIG. 14 is a plan view schematically showing a seventh embodiment of the fluid mixing system of the present invention.

FIG. 15 is a cross-sectional view along the line B-B of FIG. 14.

FIG. 16 is a plan view schematically showing an eighth embodiment of the fluid mixing system of the present invention.

FIG. 17 is a cross-sectional view along the line C-C of FIG. 16.

FIG. 18 is a cross-sectional view schematically showing a ninth embodiment of the fluid mixing system of the present invention.

FIG. 19 is a vertical cross-sectional view of another fluid control valve of a 10th embodiment of the fluid mixing system of the present invention.

FIG. 20 is a vertical cross-sectional view of another fluid control valve of an 11th embodiment of the fluid mixing system of the present invention.

FIG. 21 is a vertical cross-sectional view of another fluid control valve of a 12th embodiment of the fluid mixing system of the present invention.

FIG. 22 is a vertical cross-sectional view of another fluid control valve of a 13th embodiment of the fluid mixing system of the present invention.

FIG. 23 is a vertical cross-sectional view of another fluid control valve of a 14th embodiment of the fluid mixing system of the present invention.

FIG. 24 is a vertical cross-sectional view of another fluid control valve of a 15th embodiment of the fluid mixing system of the present invention.

FIG. 25 is a view of the configuration of a conventional flow rate control system.

Claims

1. A fluid mixing system mixing fluids flowing through at least two feed lines by any ratio, wherein each of said feed lines is provided with:a fluid control valve changing an opening area of a channel so as to control a flow rate of the fluid,a flow rate measuring device measuring an actual flow rate of the fluid, converting the measured value of said actual flow rate to an electrical signal, and outputting the same,a control unit outputting a command signal for controlling the opening area of the fluid control valve to the fluid control valve or equipment operating the fluid control valve based on said error between the measured value of the actual flow rate and a flow rate setting,a shutoff valve for opening up or cutting off the flow of fluid, anda pressure regulating valve for reducing fluctuations in the pressure of the fluid,a header of said feed lines being provided at downstream-most sides of the feed lines, said feed lines being provided with the shutoff valves right before said header, or said header being a manifold valve making said feed lines merge into a single channel.

2. A fluid mixing system as set forth in claim 1, further provided with a flushing system provided with: a main line provided with a shutoff valve connected to an upstream-most side of any single feed line among said feed lines andat least one other line provided with a shutoff valve connected to the upstream-most side of the other feed lines,the upstream side of the shutoff valve of the main line and the downstream side of the shutoff valve of the other line communicated through a shutoff valve.

3. A fluid mixing system as set forth in claim 1, wherein said various valves and flow rate measuring device are directly connected without using any independent connecting means.

4. A fluid mixing system as set forth in claim 1, wherein said various valves and said flow rate measuring device are provided on a single base block.

5. A fluid mixing system as set forth in claim 1, wherein said various valves and said flow rate measuring device are provided housed in a single casing.

6. A fluid mixing system as set forth in claim 1, wherein each fluid control valve is comprised of a body having a valve chamber at its top and an inlet channel and outlet channel communicated with the valve chamber and providing at a center of a bottom of the valve chamber an opening to which the inlet channel is communicated, a cylinder provided with a through hole at the center of its bottom and a breathing port at its side surface and clamping and fastening a first diaphragm with the body, and a bonnet provided with a working fluid communication port at its top and clamping and fastening a peripheral edge of a second diaphragm with the cylinder, all integrally fastened; the first diaphragm comprised of a shoulder, a mount positioned above the shoulder and fitting with and fastening a bottom of a later explained rod, and connector positioned below the shoulder and to which a later explained valve element is fastened, a thin film part extending out from the shoulder in a radial direction, a thick part continuing from the thin film part, and a seal part provided at a peripheral edge of the thick part, all integrally formed, the connector having the valve element fastened to it so as to enter and exit from the opening of the valve chamber along with upward and downward movement of the later explained rod; on the other hand, the second diaphragm comprised of a center hole, a thick part around it, a thin film part extending from the thick part in the radial direction, and a seal part provided at the peripheral edge of the thin film part, all integrally formed, and clamped and fastened at its bottom by the diaphragm holder to the shoulder positioned at the top of the rod to which the mount of the first diaphragm is fastened while passing through the center hole; and further the rod being arranged with its lower part in a loosely fitting state in the through hole of the cylinder bottom being supported by a spring engaged in a state where movement in the radial direction is prevented between the step of the cylinder and the bottom surface of the shoulder of the rod.

7. A fluid mixing system as set forth in claim 1, wherein said fluid control valve is comprised of a flow rate control unit provided with an electrical drive unit having a motor unit enclosed by a top bonnet and bottom bonnet, a diaphragm having a valve element moved up and down by a stem connected to a shaft of the motor unit, and a body having an inlet channel and outlet channel separated by the diaphragm from the electrical drive unit and communicating with the valve chamber isolated from the electrical drive unit by a diaphragm.

8. A fluid mixing system as set forth in claim 1, wherein said fluid control valve is provided with a pipe member comprised of an elastic member, a cylinder body having an inside cylindrical part and a cylinder lid integrally provided at its top, a piston able to move up and down in the inside circumference of the cylindrical part and able to slide there in a sealed state and having a connector provided suspended down from the center so as to pass through a through hole provided at the center of the bottom surface of the cylinder body in a sealed state, a presser fastened to a bottom end of a connector of the piston and housed in an elliptical slit provided perpendicular to the channel axis at a bottom surface of the cylinder body, a body fit with and fastened to a bottom end face of the cylinder body provided with a first groove receiving the pipe member on the channel axis and second grooves, deeper than the first groove, further receiving connection member receivers at the two ends of the first groove, a pair of connection member receivers having engagement parts for engagement with the second grooves of the body at one ends, having connection member receiving holes at the insides of the other ends, and having through holes for receiving the pipe member, and a pair of air ports provided at the side surface of the circumference of the cylinder body and communicating a first space formed by the bottom surface and inside circumference of the cylindrical part and the bottom end face of the piston and a second space formed by the bottom end face of the cylinder lid, the inside circumference of the cylindrical part, and the top surface of the piston.

9. A fluid mixing system as set forth in claim 1, wherein said fluid control valve is provided with an electrical drive unit having a motor unit surrounded by a top bonnet and a bottom bonnet, a presser moved up and down by a stem connected to a shaft of the motor unit, a pipe member comprised of an elastic member, and a groove fastened joined to the bottom end face of the bottom bonnet and receiving the pipe member on the channel axis.

10. A fluid mixing system as set forth in claim 1, wherein said pressure regulating valve is provided with a body having a second cavity provided at its bottom center opening to the bottom, an inlet channel communicated with the second cavity, a first cavity provided at its top opened to the top surface and having a diameter larger than the diameter of the second cavity, an outlet channel communicated with the first cavity, and a communication hole communicating the first cavity and second cavity and having a smaller diameter than the diameter of the first cavity, the top surface of the second cavity made the valve seat; a bonnet having inside it a cylindrical cavity communicating with an air feed hole and exhaust hole provided at the side surface or top surface and provided with a step at the inside circumference of its bottom end;a spring holder inserted into the step of the bonnet and having a through hole at its center; a piston having a first connector of a diameter smaller than the through hole of the spring holder at its bottom end, provided with a flange at its top, and inserted into the cavity of the bonnet to be able to move up and down;a spring supported clamped between the bottom end face of the flange of the piston and the top end face of the spring holder;a first valve mechanism having a first diaphragm with a peripheral edge fastened clamped between the body and the spring holder and with a thick center forming a first valve chamber in a manner capping the first cavity of the body, a second connector at the center of the top surface fastened joined to the first connector of the piston through the through hole of the spring holder, and a third connector at the center of the bottom surface passing through the communication hole of the body;a second valve mechanism having a valve element positioned inside the second cavity of the body and provided in a larger diameter than the communication hole of the body, a fourth connector provided projecting out from the top end face of the valve element and fastened joined to the third connector of the first valve mechanism, a rod provided projecting out from the bottom end face of the valve element, and a second diaphragm provided extending out in the radial direction from the bottom end face of the rod; anda base plate positioned below the body, having at the center of its top a projection for fastening the peripheral edge of the second diaphragm of the second valve mechanism by clamping it with the body, provided with an inset recess at the top end of the projection, and provided with a breathing hole communicating with the inset recess;the opening area of the fluid control part formed by the valve element of the second valve mechanism and the valve seat of the body changing along with up and down movement of the piston.

11. A fluid mixing system as set forth in claim 1, wherein said pressure regulating valve is comprised of a body having inside it a first valve chamber, a step provided at the top of the first valve chamber, and an inlet channel communicating with the first valve chamber; a lid member having a second valve chamber and an outlet channel communicating with the same and joined to the top of the body; a first diaphragm with a peripheral edge joined to the peripheral edge of the top of the first valve chamber; a second diaphragm with a peripheral edge clamped between the body and the lid member; a sleeve joined to ring-shaped connectors provided at the centers of the first and second diaphragms and able to move in the axial direction; and a plug fastened to the bottom of the first valve chamber and forming a fluid control part with the bottom end of the sleeve; an air chamber is provided enclosed by the inside circumference of the step of the body and the first and second diaphragms; a pressure receiving area of the second diaphragm is formed larger than a pressure receiving area of the first diaphragm; and an air feed port communicating with said air chamber is provided in the body.

12. A fluid mixing system as set forth in claim 1, wherein said flow rate measuring device is an ultrasonic flow meter, Karman vortex flow meter, ultrasonic vortex flow meter, bladed wheel flow meter, electromagnetic flow meter, differential pressure flow meter, volume flow meter, hot wire type flow meter, or mass flow meter.

13. A fluid mixing system as set forth in claim 1, wherein at least two types of fluid comprising hydrofluoric acid or hydrochloric acid and pure water are mixed in a ratio of hydrofluoric acid or hydrochloric acid and pure water of 1:10 to 200.

14. A fluid mixing system as set forth in claim 1, wherein at least three types of fluid comprised of ammonia water or hydrochloric acid, hydrogen peroxide, and pure water are mixed in a ratio of ammonia water or hydrochloric acid, hydrogen peroxide, and pure water of 1 to 3:1 to 5:10 to 200.

15. A fluid mixing system as set forth in claim 1, wherein at least three types of fluid comprised of hydrofluoric acid, ammonium fluoride, and pure water are mixed in a ratio of hydrofluoric acid, ammonium fluoride, and pure water of 1:7 to 10:50 to 100.