FLUID TRANSPORTATION ACTUATOR

Information

  • Patent Application
  • 20210363984
  • Publication Number
    20210363984
  • Date Filed
    May 07, 2021
    3 years ago
  • Date Published
    November 25, 2021
    2 years ago
Abstract
A fluid transportation actuator is disclosed and includes a silencing jet orifice plate, a chamber frame, an actuator, an insulation frame and a conductive frame. The silencing jet orifice plate includes a silencing plate, a suspension plate and a central aperture. The suspension plate is permitted to undergo a bending vibration. The central aperture is formed on a center of the suspension plate. The silencing plate is disposed and fixed in the central aperture disposed at the center of the suspension plate. The chamber frame is stacked on the suspension plate. The actuator is stacked on the chamber frame. The actuator generates the bending vibration in a reciprocating manner as a voltage is applied thereto. The actuator includes a piezoelectric-thin-plate pin. The insulation frame is stacked on the actuator. The conductive frame is stacked on the insulation frame and includes a conductive-frame pin.
Description
FIELD OF THE INVENTION

The present disclosure relates to a fluid transportation actuator, and more particularly to a fluid transportation actuator assembled and combined with different metal materials.


BACKGROUND OF THE INVENTION

In the prior art, fluid transportation actuators are mainly constructed by stacking conventional mechanical components, and each mechanical component is miniaturized or thinned to achieve the goal of miniaturization and thinning of the overall device. However, while the conventional mechanical components are miniaturized, it is not easy to control the dimensional accuracy, and the assembly accuracy is also difficult to control. It results in different product yields and even unstable fluid flow rates. In addition, while the mechanical components are miniaturized, the single-material fluid transportation actuator has the problem of insufficient structural toughness during being driven and easy to result in the problems of interference and unrecognizable of the driving point.


Furthermore, in the conventional fluid transportation actuator, the output fluid cannot be converged effectively or the element size is too small results in insufficient fluid propulsion force. It leads to the problem of insufficient amount of fluid transportation.


SUMMARY OF THE INVENTION

An object of the present disclosure is to provide a fluid transportation actuator. In accordance with an aspect of the present disclosure, the fluid transportation actuator includes a silencing jet orifice plate, a chamber frame, an actuator, an insulation frame and a conductive frame. The silencing jet orifice plate includes a silencing plate, a suspension plate and a central aperture. The suspension plate is permitted to undergo a bending vibration. The central aperture is formed on a center of the suspension plate. The silencing plate is disposed and fixed on the central aperture disposed at the center of the suspension plate. The chamber frame is carried and stacked on the suspension plate. The actuator is carried and stacked on the chamber frame. The actuator generates the bending vibration in a reciprocating manner as a voltage is applied thereto, and includes a piezoelectric-thin-plate pin. The insulation frame is carried and stacked on the actuator. The conductive frame is carried and stacked on the insulation frame, and includes a conductive-frame pin. A resonance chamber is collaboratively defined by the actuator, the chamber frame and the silencing jet orifice plate. When the silencing jet orifice plate is driven by the actuator in resonance, the suspension plate of the silencing jet orifice plate is vibrated and displaced in the reciprocating manner, so as to achieve fluid transportation.





BRIEF DESCRIPTION OF THE DRAWINGS

The above contents of the present disclosure will become more readily apparent to those ordinarily skilled in the art after reviewing the following detailed description and accompanying drawings, in which:



FIG. 1 is a perspective exploded view illustrating a fluid transportation actuator according to an embodiment of the present disclosure and taken from a first perspective;



FIG. 2 is a perspective exploded view illustrating the fluid transportation actuator according to the embodiment of the present disclosure and taken from a second perspective;



FIG. 3 is a top view illustrating the fluid transportation actuator according to the embodiment of the present disclosure;



FIG. 4 is a bottom view illustrating the fluid transportation actuator according to the embodiment of the present disclosure;



FIG. 5 is a schematic diagram showing the dimensions of the fluid transportation actuator shown in FIG. 3;



FIG. 6 is a schematic diagram showing the four corners of the fluid transportation actuator shown in FIG. 3;



FIG. 7 is a cross-sectional view illustrating the fluid transportation actuator along the dash line AA; and



FIG. 8 is a schematic exploded view showing the respective dimensions of the fluid transportation actuator shown in FIG. 6.





DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

The present disclosure will now be described more specifically with reference to the following embodiments. It is to be noted that the following descriptions of preferred embodiments of this disclosure are presented herein for purpose of illustration and description only. It is not intended to be exhaustive or to be limited to the precise form disclosed.


In all the accompanying drawings of the present disclosure, if corner's orientations (M, N, O, P) or edge's orientations (W, X, Y, Z) are marked on at the lower left, it is to define the orientations of the fluid transportation actuator, so as to define the described corner or the described edge accurately.


A fluid transportation actuator is provided in the present disclosure. Please refer to FIGS. 1 and 2. In the embodiment, the fluid transportation actuator 21 includes a silencing jet orifice plate 211, a chamber frame 212, an actuator 213, an insulation frame 214 and a conductive frame 215. The silencing jet orifice plate 211 includes a silencing plate 211a, a suspension plate 211b and a central aperture 211c. The suspension plate 211b is permitted to undergo a bending vibration. The central aperture 211c is formed on a center of the suspension plate 211b. The silencing plate 211a is disposed and fixed on the central aperture 211c formed at the center of the suspension plate 211b. The chamber frame 212 is carried and stacked on the suspension plate 211b. The actuator 213 is carried and stacked on the chamber frame 212. The actuator 213 generates the bending vibration in a reciprocating manner as a voltage is applied thereto, and includes a piezoelectric-thin-plate pin 213e. The insulation frame 214 is carried and stacked on the actuator 213. The conductive frame 215 is carried and stacked on the insulation frame 214, and includes a conductive-frame pin 215e. A resonance chamber is collaboratively defined by the actuator 213, the chamber frame 212 and the silencing jet orifice plate 211. When the silencing jet orifice plate 211 is driven by the actuator 213 in resonance, the suspension plate 211b of the silencing jet orifice plate 211 is vibrated and displaced in the reciprocating manner, so as to achieve fluid transportation. In the embodiment, the actuator 213 includes a piezoelectric thin plate 213a, a piezoelectric thick plate 213b and a piezoelectric element 213c. The piezoelectric thin plate 213a is carried and stacked on the chamber frame 212. Preferably but not exclusively, the piezoelectric-thin-plate pin 213e is a protrusion of the piezoelectric thin plate 213a. The piezoelectric thick plate 213b is carried and stacked on the piezoelectric thin plate 213a. The piezoelectric element 213c is carried and stacked on the piezoelectric thick plate 213b. When the voltage is applied to the piezoelectric element 213c, the piezoelectric thin plate 213a and the piezoelectric thick plate 213b are driven to generate the bending vibration in the reciprocating manner.


In the embodiment, the fluid transportation actuator 21 includes the silencing jet orifice plate 211, the chamber frame 212, the actuator 213, the insulation frame 214 and the conductive frame 215, which are sequentially stacked. The silencing jet orifice plate 211 includes a silencing plate 211a, a suspension plate 211b and a central aperture 211c. The suspension plate 211b has four piezoelectric-thin-plate corners (R1M, R1N, R1O and R1P). When the suspension plate 211b is driven by electricity, it is permitted to undergo a bending vibration. The central aperture 211c is formed on a center of the suspension plate 211b. The silencing plate 211a is disposed adjacent to and above the central aperture 211c disposed at the center of the suspension plate 211b. The chamber frame 212 has four chamber-frame corners (R2M, R2N, R2O and R2P). The chamber frame 212 is carried and stacked on the suspension plate 211b. The actuator 213 is carried and stacked on the chamber frame 212. In the embodiment, the actuator 213 includes a piezoelectric thin plate 213a, a piezoelectric thick plate 213b and a piezoelectric element 213c. When a voltage is applied to the actuator 213, the actuator 213 generates the bending vibration in a reciprocating manner. The actuator 213 further includes a piezoelectric-thin-plate pin 213e. Preferably but not exclusively, the piezoelectric-thin-plate pin 213e is a protrusion of the piezoelectric thin plate 213a for receiving the applied voltage. The piezoelectric thin plate 213a is carried and stacked on the chamber frame 212. The piezoelectric thick plate 213b is carried and stacked on the piezoelectric thin plate 213a. The piezoelectric element 213c is carried and stacked on the piezoelectric thick plate 213b. When the voltage is applied to the piezoelectric element 213c, the piezoelectric thin plate 213a and the piezoelectric thick plate 213b are driven to generate bending vibration in the reciprocating manner. In the embodiment, the insulation frame 214 has four insulation-frame corners (R4M, R4N, R4O and R4P). The insulation frame 214 is carried and stacked on the actuator 213. Preferably but not exclusively, the insulation frame 214 is carried and stacked on the piezoelectric thin plate 213a of the actuator 213. The conductive frame 215 is carried and stacked on the insulation frame 214, and includes a conductive-frame pin 215e. Preferably but not exclusively, the conductive-frame pin 215e is a protrusion of the conductive frame 215 for receiving the applied voltage. In the embodiment, a resonance chamber is collaboratively defined by the actuator 213, the chamber frame 212 and the silencing jet orifice plate 211. When the silencing jet orifice plate 211 is driven by the actuator 213 in resonance, the suspension plate 211b of the silencing jet orifice plate 211 is vibrated and displaced in the reciprocating manner, so as to achieve fluid transportation.


In the fluid transportation actuator 21 of the present disclosure, the piezoelectric thin plate 213a and the piezoelectric thick plate 213b are made of two metals having different thermal expansion coefficients, two different flexibilities and two different rigidities, and both are not stainless steel.


Notably, the piezoelectric thin plate 213a and the piezoelectric thick plate 213b are made of two metals having different thermal expansion coefficients. The actuator 213 made of metal materials having different thermal expansion coefficients can avoid to generate two adjacent resonance frequencies, so as to prevent the driving frequency offset result from the adjacent resonance frequencies. At the same time, the impedance (resistance and reactance) of the actuator 213 is reduced, so as to achieve effective electric driving and improve the working efficiency of the actuator 213. Moreover, comparing to the actuators made of a single material (such as stainless steel) in the prior art, when the micro-blower actuator of a single material is driven, the structural strength and toughness thereof is insufficient, and it is susceptible to interference. In the embodiment, the material of the piezoelectric thin plate 213a or the piezoelectric thick plate 213b is phosphor bronze. In another embodiment, the materials of the piezoelectric thin plate 213a and the piezoelectric thick plate 213b are both phosphor bronzes, but each phosphor bronze has different chemical composition, respectively. It is understandable that the two phosphor bronzes with different chemical compositions have different thermal expansion coefficients, different flexibilities and different rigidities.


Please refer to FIGS. 3 and 4, which are the views illustrating the assembly shown in FIGS. 1 and 2. Moreover, please refer to FIG. 5, which is a schematic diagram showing the dimensions of the fluid transportation actuator shown in FIG. 3. In the fluid transportation actuator 21 of the present disclosure, the piezoelectric thin plate 213a has at least one first side length L3aWY and at least one second side length L3aXZ. Preferably but not exclusively, the length of the at least one first side length L3aWY and the length of the at least one second side length L3aXZ are the same. The piezoelectric thick plate 213b has at least one third side length L3bWY and at least one fourth side length L3bXZ. Preferably but not exclusively, the length of the at least one third side length L3bWY and the length of the at least one fourth side length L3bXZ are the same. The piezoelectric element 213c has at least one fifth side length L3cWY and at least one sixth side length L3cXZ. Preferably but not exclusively, the length of the at least one fifth side length L3cWY and the length of the at least one sixth side length L3cXZ are the same.


In the embodiment, the piezoelectric thin plate 213a has four side lengths, which are two first side lengths L3aWY and two second side lengths L3aXZ, respectively. Notably, the piezoelectric thin plate 213a may be square, but not limited thereto. In other embodiments, the piezoelectric thin plate 213a may be ring-shaped, circular, rectangular or polygonal. In the embodiment, the piezoelectric thick plate 213b has four side lengths, which are two third side lengths L3bWY and two fourth side lengths L3bXZ, respectively. Notably, the piezoelectric thick plate 213b may be square, but the present disclosure is not limited thereto. In other embodiments, the piezoelectric thick plate 213b may be ring-shaped, circular, rectangular or polygonal. In the embodiment, the piezoelectric element 213c has four side lengths, which are two fifth side lengths L3cWY and two sixth side lengths L3cXZ, respectively. Notably, the piezoelectric element 213c may be square, but not limited thereto. In other embodiments, the piezoelectric element 213c may be ring-shaped, circular, rectangular or polygonal. In the embodiment, the conductive frame 215 excluding the protrusion (Namely, the conductive-frame pin 215e is excluded) has four side lengths, which are two ninth side lengths LSWYB and two eighth side lengths LSXZ, respectively. Notably, the conductive frame 215 has the longest side length, which includes the protrusion and is a seventh side length L5WYA.


Please refer to FIG. 6, which shows the four corners of the fluid transportation actuator shown in FIG. 3. In the fluid transportation actuator 21 of the present disclosure, the piezoelectric thin plate 213a includes at least one piezoelectric-thin-plate corner (R3aN, R3aO or R3aP). Preferably but not exclusively, the at least one piezoelectric-thin-plate conner (R3aN, R3aO or R3aP) is a rounded corner, and the rounded corner has a radius less then 2.0 mm. In the embodiment, the piezoelectric thin plate 213a includes at least another piezoelectric-thin-plate corner (R3aM), which is a non-rounded corner. In the fluid transportation actuator 21 of the present disclosure, the piezoelectric thick plate 213b includes at least one piezoelectric-thick-plate corner (R3bM, R3bN, R3bO or R3bP), the at least one piezoelectric-thick-plate corner (R3bM, R3bN, R3bO or R3bP) is a rounded corner, and the rounded corner has a radius less than 2.0 mm. In the fluid transportation actuator 21 of the present disclosure, the piezoelectric element 213c includes four piezoelectric-element corners (R3cM, R3cN, R3cO and R3cP), and the four piezoelectric-element corners (R3cM, R3cN, R3cO and R3cP) are square corners.


In the embodiment, the piezoelectric element 213c has four corners, which are the piezoelectric-element corner R3cM, the piezoelectric-element corner R3cN, the piezoelectric-element corner R3cO and the piezoelectric-element corner R3 cP, respectively. All four corners of the piezoelectric element 213c are square corners. Notably, the four corners of the piezoelectric element 213c are adjustable according to the practical requirements. For example, part or all of the corners of the piezoelectric element 213c can be changed into square corners, bevel corners (single-edge corners) or polygonal corners. In the embodiment, the piezoelectric thick plate 213b has four corners, which are the piezoelectric-thick-plate corner R3bM, the piezoelectric-thick-plate corner R3bN, the piezoelectric-thick-plate corner R3bO and the piezoelectric-thick-plate corner R3bP, respectively. All four corners of the piezoelectric thick plate 213b are rounded corners, and the rounded corner has a radius less than 2.0 min. Notably, the four corners of the piezoelectric thick plate 213b are adjustable according to the practical requirements. For example, part or all of the corners of the piezoelectric thick plate 213b can be changed into square corners, bevel corners (single-edge corners) or polygonal corners. In the embodiment, the piezoelectric thin plate 213a has four corners, which are the piezoelectric-thin-plate corner R3aM, the piezoelectric-thin-plate corner R3aN, the piezoelectric-thin-plate corner R3aO and the piezoelectric-thin-plate corner R3aP. Notably, the piezoelectric-thin-plate corner R3aM of the piezoelectric thin plate 213a is a bevel corner. The piezoelectric-thin-plate conner R3aN, the piezoelectric-thin-plate conner R3aO and the piezoelectric-thin-plate corner R3aP of the piezoelectric thin plate 213a are rounded corners, and the rounded corner has a radius less then 2.0 mm. The four corners of the piezoelectric thin plate 213a are adjustable according to the practical requirements. For example, part or all of the corners of the piezoelectric thin plate 213a can be changed into rounded corners, bevel corners (single-edge corners) or polygonal corners. In the embodiment, the conductive frame 215 has four corners, which are the conductive-frame corner RSM, the conductive-frame corner RSN, the conductive-frame corner R50 and the conductive-frame corner RSP, respectively. Notably, the conductive-frame corner R5M of the conductive frame 215 is a bevel corner. The conductive-frame corner RSN, the conductive-frame corner R50 and the conductive-frame corner R5P of the conductive frame 215 are rounded corners, and the rounded corner has a radius less then 2.0 mm. The four corners of the conductive frame 215 are adjustable according to the practical requirements. For example, part or all of the corners of the conductive frame 215 can be changed into rounded corners, bevel corners (single-edge corners) or polygonal corners.


Please refer to FIG. 7, which is a cross-sectional view taken along the dash line AA in FIG. 6. Please refer to FIG. 8, which shows the respective dimensions of the piezoelectric thin plate 213a, the piezoelectric thick plate 213b and the piezoelectric element 213c in FIG. 6. In the fluid transportation actuator 21 of the present disclosure, the length of the first side length L3aWY is greater than the length of the third side length L3bWY. The length of the first side length L3aWY is greater than the length of the fifth side length L3cWY. The length of the third side length L3bWY is greater than or equal to the length of the fifth side L3cWY. In the fluid transportation actuator 21 of the present disclosure, the length of the first side length L3aWY and the length of the second side length L3aXZ range from 5.0 mm to 16.0 mm. In the fluid transportation actuator 21 of the present disclosure, the length of the third side length L3bWY and the length of the fourth side length L3bXZ range from 3.5 mm to 9.5 mm. In the fluid transportation actuator 21 of the present disclosure, the length of the fifth side length L3cWY and the length of the sixth side length L3cXZ range from 2.95 mm to 9.0 mm.


In the embodiment, the length of the first side length L3aWY of the piezoelectric thin plate 213a is greater than the length of the third side length L3bWY of the piezoelectric thick 213b. The length of the first side length L3aWY of the piezoelectric thin plate 213a is greater than or equal to the length of the fifth side length L3cWY of the piezoelectric element 213c. Notably, preferably but not exclusively, in the embodiment, the length of the first side length L3aWY and the length of the second side length L3aXZ of the piezoelectric thin plate 213a are the same, the length of the third side length L3bWY and the length of the fourth side length L3bXZ of the piezoelectric thick plate 213b are the same, the length of the fifth side length L3cWY and the length of the sixth side length L3cXZ of the piezoelectric element 213c are the same, and the length of the ninth side length LSWYB and the length of the eighth side length LSXZ of the conductive frame 215 are the same, but not limited thereto. In other embodiments, the length of the first side length L3aWY and the length of the second side length L3aXZ of the piezoelectric thin plate 213a are different, the length of the third side length L3bWY and the length of the fourth side length L3bXZ of the piezoelectric thick plate 213b are different, the length of the fifth side length L3cWY and the length of the sixth side length L3cXZ of the piezoelectric element 213c are different, and the length of the ninth side length L5WYB and the length of the eighth side length L5XZ of the conductive frame 215 are different. Preferably but not exclusively, the length of the third side length L3bWY and the length of the fourth side length L3bXZ of the piezoelectric thick plate 213b are 8.40 mm. Preferably but not exclusively, the length of the first side length L3aWY and the length of the second side length L3aXZ of the piezoelectric thin plate 213a are 12.80 mm. Preferably but not exclusively, the length of the seventh side length L5WYA is 15.20 mm, but not limited thereto. In other embodiments, the lengths of the first side length L3aWY, the second side length L3aXZ, the third side length L3bWY, the fourth side length L3bXZ, the fifth side length L3cWY, the sixth side length L3cXZ, the seventh side length L5WYA, the eighth side length L5XZ and the ninth side length L5WYB are adjustable according to the practical requirements.


In the fluid transportation actuator 21 of the present disclosure, a ratio of the length of the fifth side length L3cWY to the length of the third side length L3bWY is in a range of 1:1 to 1:1.5. Namely, the length of the fifth side length L3cWY of the piezoelectric element 213c is less than or equal to the length of the third side length L3bWY of the piezoelectric thick plate 213b.


In the fluid transportation actuator 21 of the present disclosure, the piezoelectric thick plate 213b has a piezoelectric-thick-plate thickness T3b, and the piezoelectric-thick-plate thickness T3b ranges from 0.05 mm to 0.5 mm. In the fluid transportation actuator 21 of the present disclosure, the piezoelectric thin plate 213a has a piezoelectric-thin-plate thickness T3a, and the piezoelectric-thin-plate thickness T3a ranges from 0.05 mm to 0.2 mm. The thickness of the actuator 213 is a combination of the piezoelectric-thin-plate thickness T3a of the piezoelectric thin plate 213a, the piezoelectric-thick-plate thickness T3b of the piezoelectric thick plate 213b and the piezoelectric-element thickness T3c of the piezoelectric element 213c. Preferably but not exclusively, the piezoelectric-thick-plate thickness T3b ranges from 0.05 to 0.5 mm, the piezoelectric-thin-plate thickness T3a ranges from 0.05 to 0.2, and the piezoelectric-thick-plate thickness T3b is thicker than the piezoelectric-thin-plate thickness T3a.


In summary, the present disclosure provides a fluid transportation actuator. Through the design of the piezoelectric thin plate and piezoelectric thick plate of the actuator made of metals with different thermal expansion coefficients, different flexibilities and different rigidities, the driving impedance of the conventional single-material fluid transportation actuator is improved. It prevents the driving frequency from offset result from the adjacent resonance frequencies. The structural strength and toughness is enhanced by utilizing the material of phosphor bronze. Moreover, with the design of the rounded corners in the piezoelectric thick plate, the physical damage to the piezoelectric thin plate is also reduced.


While the disclosure has been described in terms of what is presently considered to be the most practical and preferred embodiments, it is to be understood that the disclosure needs not be limited to the disclosed embodiments. On the contrary, it is intended to cover various modifications and similar arrangements included within the spirit and scope of the appended claims which are to be accorded with the broadest interpretation so as to encompass all such modifications and similar structures.

Claims
  • 1. A fluid transportation actuator, comprising: a silencing jet orifice plate, comprising; a silencing plate;a suspension plate permitted to undergo a bending vibration; anda central aperture formed on a center of the suspension plate, wherein the silencing plate is disposed and fixed on the central aperture disposed at the center of the suspension plate;a chamber frame carried and stacked on the suspension plate;an actuator carried and stacked on the chamber frame, wherein the actuator generates the bending vibration in a reciprocating manner as a voltage is applied thereto;an insulation frame carried and stacked on the actuator; anda conductive frame carried and stacked on the insulation frame, and comprising a conductive-frame pin, wherein a resonance chamber is collaboratively defined by the actuator, the chamber frame and the silencing jet orifice plate, wherein when the silencing jet plate orifice is driven by the actuator in resonance, the suspension plate of the silencing jet orifice plate is vibrated and displaced in the reciprocating manner, so as to achieve fluid transportation.
  • 2. The fluid transportation actuator according to claim 1, wherein the actuator comprises: a piezoelectric thin plate carried and stacked on the chamber frame;a piezoelectric thick plate carried and stacked on the piezoelectric thin plate; anda piezoelectric element is carried and stacked on the piezoelectric thick plate, wherein the piezoelectric element drives the piezoelectric thin plate and the piezoelectric thick plate as the voltage applied, and generates the bending vibration in the reciprocating manner.
  • 3. The fluid transportation actuator according to claim 2, wherein the piezoelectric thin plate and the piezoelectric thick plate are made of two metals having different thermal expansion coefficients, two different flexibilities and two different rigidities, and both are not stainless steel.
  • 4. The fluid transportation actuator according to claim 3, wherein the piezoelectric thin plate has at least one first side length and at least one second side length, and the length of the at least one first side length and the length of the at least one second side length are the same; wherein the piezoelectric thick plate has at least one third side length and at least one fourth side length, and the length of the at least one third side length and the length of the at least one fourth side length are the same;wherein the piezoelectric element has at least one fifth side length and at least one sixth side length, and the length of the at least one fifth side length and the length of the at least one sixth side length are the same.
  • 5. The fluid transportation actuator according to claim 4, wherein the length of the at least one first side length is greater than the length of the at least one third side length, the length of the at least one first side length is greater than the length of the at least one fifth side length, and the length of the at least one third side length is greater than or equal to the length of the at least one fifth side.
  • 6. The fluid transportation actuator according to claim 5, wherein a ratio of the length of the at least one fifth side length to the length of the at least one third side length is in a range of 1:1 to 1:1.5.
  • 7. The fluid transportation actuator according to claim 5, wherein the length of the at least one first side length and the length of the at least one second side length range from 5.0 mm to 16.0 mm.
  • 8. The fluid transportation actuator according to claim 5, wherein the length of the at least one third side length and the length of the at least one fourth side length range from 3.5 mm to 9.5 mm.
  • 9. The fluid transportation actuator according to claim 5, wherein the length of the at least one fifth side length and the length of the at least one sixth side length range from 2.95 mm to 9.0 mm.
  • 10. The fluid transportation actuator according to claim 3, wherein the piezoelectric thin plate comprises at least one piezoelectric-thin-plate corner, the at least one piezoelectric-thin-plate corner is a rounded corner, and the rounded corner has a radius less than 2.0 mm, wherein the piezoelectric thin plate comprises at least another piezoelectric-thin-plate corner, which is a non-rounded corner.
  • 11. The fluid transportation actuator according to claim 3, wherein the piezoelectric thick plate comprises at least one piezoelectric-thick-plate corner, the at least one piezoelectric-thick-plate corner is a rounded corner, and the rounded corner has a radius less than 2.0 mm.
  • 12. The fluid transportation actuator according to claim 11, wherein the piezoelectric thick plate has a piezoelectric-thick-plate thickness, and the piezoelectric-thick-plate thickness ranges from 0.05 mm to 0.5 mm.
  • 13. The fluid transportation actuator according to claim 3, wherein the piezoelectric element comprises four piezoelectric-element corners, and the four piezoelectric-element corners are square corners.
  • 14. The fluid transportation actuator according to claim 13, wherein the piezoelectric thin plate has a piezoelectric-thin-plate thickness, and the piezoelectric-thin-plate thickness ranges from 0.05 mm to 0.2 mm.
Priority Claims (1)
Number Date Country Kind
109116602 May 2020 TW national