Claims
- 1. In a method for optically or visually inspecting a material for surface defects with a fluorescent detecting agent, the improvement comprising using as said fluorescent detecting agent an agent comprising at least one compound selected form the group consisting of a naphthalene compound of formula (I) and a pyrazoline compound of formula (II) ##STR5## wherein R.sup.1 and R.sup.2 may be the same or different and each represents an alkyl group of 4 to 8 carbon atoms, ##STR6## wherein R.sup.3 and R.sup.4 may be the same or different and each represents hydrogen, an alkoxy group of 1 to 8 carbon atoms or an alkyl group of 4to 8 carbon atoms, provided that at least one of R.sup.3 and R.sup.4 represents an alkyl group of 4to 8 carbon atoms.
- 2. In a method for optically or visually inspecting a material for surface defects with a fluorescent detecting agent, the improvement comprising using as said fluorescent detecting agent an agent comprising at least one naphthalene compound of formula (I) ##STR7## wherein R.sup.1 and R.sup.2 may be the same or different and each represents an alkyl group of 4to 8 carbon atoms.
- 3. In a method for optically or visually inspecting a material for surface defects with a fluorescent detecting agent, the improvement comprising using as said fluorescent detecting agent an agent comprising at least one pyrazoline compound of formula (II) ##STR8## wherein R.sup.3 and R.sup.4 may be the same or different and each represents hydrogen, an alkoxy group of 1 to 8 carbon atoms or an alkyl group of 4to 8 carbon atoms, provided that at least one of R.sup.3 and R.sup.4 represents an alkyl group of 4 to 8 carbon atoms.
- 4. In a method for optically or visually inspecting an applied pattern or finished circuit in the field of photoresists with a fluorescent detecting agent, the improvement comprising using as said fluorescent detecting agent an agent comprising at least one compound selected from the group consisting of a naphthalene compound of formula (I) and a pyrazoline compound of formula (II) ##STR9## wherein R.sup.1 and R.sup.2 may be the same or different and each represents an alkyl group of 4to 8 carbon atoms, ##STR10## wherein R.sup.3 and R.sup.4 may be the same or different and each represents hydrogen, an alkoxy group of 1 to 8 carbon atoms or an alkyl group of 4 to 8 carbon atoms, provided that at least one of R.sup.3 and R.sup.4 represents an alkyl group of 4to 8carbon atoms.
- 5. The method according to claim 4, wherein the fluorescent detecting agent is used in combination with a UV-screening agent.
- 6. The method of claim 4, wherein at least one compound of said formula (I) is used.
- 7. The method of claim 4, wherein at least one compound of said formula (II) is used.
Parent Case Info
This is a division of application Ser. No. 08/172,909 filed on Dec. 27, 1993, now abandoned.
Foreign Referenced Citations (1)
| Number |
Date |
Country |
| 1059687 |
Feb 1967 |
GBX |
Non-Patent Literature Citations (2)
| Entry |
| Chemical Abstract citation 120:206812w, Jun. 27, 1993, JP 05-160532. |
| Chemical Abstract citation 121:144998w, Jan. 11, 1994; JP 06/3291. |
Divisions (1)
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Number |
Date |
Country |
| Parent |
172909 |
Dec 1993 |
|