Claims
- 1. A solid-state rotational rate sensor device, comprising:
a first actuator element that generates a first force proportional to a first electrical drive signal; a second actuator element that generates a second force proportional to a second electrical drive signal; and a mass coupled to the first and second actuator elements; wherein motion of the mass along a first direction is in proportion to sum of the first force and the second force, and motion of the mass along a second direction is in proportion to difference between the first force and the second force.
- 2. The solid-state rotational rate sensor device of claim 1, further comprising:
a first sensor element that generates a first electrical motion signal proportional to motion of the mass along the first direction; a second sensor element that generates a second electrical motion signal proportional to motion of the mass along the second direction.
- 3. The solid-state rotational rate sensor device of claim 2 wherein each of the actuator elements and each of the sensor elements are comprised of piezoelectric capacitors.
- 4. The solid-state rotational rate sensor device of claim 2 wherein each of the actuator elements and each of the sensor elements are comprised of a differential pair of piezoelectric capacitors.
- 5. The solid-state rotational rate sensor device of claim 4 wherein each of the differential pair of piezoelectric capacitors is comprised of:
a shared common lower conductive electrode; a shared common plate of piezoelectric material; an upper conductive electrode; and means for connecting the differential pair of piezoelectric capacitors to electronic circuitry.
- 6. The solid-state rotational rate sensor device of claim 2, further comprising:
a first reference electrical signal; a second reference electrical signal; and an electrical control circuit that generates the first and second electrical drive signals; wherein the electrical control circuit adjusts sum of the first and second electrical drive signals so as to make a first electrical motion signal equal to the first reference electrical signal and adjusts difference between the first and second electrical drive signals so as to make a second electrical motion signal equal to the second reference electrical signal.
CROSS-REFERENCE TO RELATED APPLICATION(S)
[0001] The present utility patent application claims priority of U.S. Provisional Patent Application, Serial No. 60/468,785, filed May 8, 2003; subject matter of which is incorporated herewith by reference.
Provisional Applications (1)
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Number |
Date |
Country |
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60468785 |
May 2003 |
US |