Certain embodiments of the present invention relate to a forming system.
In the related art, a forming apparatus in which a metal pipe is closed by a forming die and blow-formed is known. For example, a forming apparatus of the related art includes a forming die, and a gas supply unit which supplies gas into a metal pipe material. In this forming apparatus, the metal pipe material is formed into a shape corresponding to the shape of the forming die by disposing the metal pipe material in the forming die and expanding the metal pipe material by supplying gas from the gas supply unit to the metal pipe material in a state where the forming die is closed.
According to an embodiment of the present invention, there is provided a forming system which forms a metal pipe by expanding a metal pipe material, including: a main body part having a forming die for forming the metal pipe; an electrode causing an electric current to flow through the metal pipe material disposed in the forming die such that the metal pipe material is heated; a power supply unit which is disposed at a position separated from the main body part and supplies electric power to the electrode; and a power supply line which connects the power supply unit and the electrode, in which the power supply line includes a lower-side passing portion which passes through a lower side of a placing surface on which the main body part is placed, a first connection portion which is drawn to an upper side than the placing surface and connects the lower-side passing portion and the electrode, and a second connection portion which connects the lower-side passing portion and the power supply unit.
In the forming apparatus of the related art, the metal pipe material is heated by bringing each electrode into contact with the metal pipe material and performing energization. Therefore, a power supply line for supplying electric power from the power supply unit to the electrode is provided. However, since a large current (for example, several tens of thousands A) flows in the power supply line, there is a case where a leakage magnetic field is generated from the power supply line. There is a case where peripheral equipment in a forming system is affected by such a leakage magnetic field.
Therefore, it is desirable to provide a forming system in which the influence on peripheral equipment of a leakage magnetic field which is generated from a power supply line can be suppressed.
According to this forming system, the power supply line connects the electrode which energizes and heats the metal pipe material and the power supply unit which is disposed at a position separated from the main body part. The power supply line includes the lower-side passing portion which passes through the lower side of the placing surface on the main body part is placed, the first connection portion which is drawn to the upper side of the placing surface and connect the lower-side passing portion and the electrode, and the second connection portion which connects the lower-side passing portion and the power supply unit. In this manner, the power supply line passes through the lower side of the placing surface of the forming die at the lower-side passing portion between the first connection portion and the second connection portion while securing connectivity with the electrode at the first connection portion and securing connectivity with the power supply unit at the second connection portion. In this manner, the lower-side passing portion passes through the lower side of the placing surface, whereby the distance between equipment which is disposed on the placing surface and the lower-side passing portion is increased. Therefore, the influence of a leakage magnetic field from the lower-side passing portion on the equipment which is disposed on the placing surface can be suppressed. By the above, it is possible to suppress the influence on the peripheral equipment of the leakage magnetic field which is generated from the power supply line.
In this forming system, the power supply line may include a positive electrode line and a negative electrode line, and in the lower-side passing portion, the positive electrode line and the negative electrode line may be disposed in parallel at the lower side of the placing surface. In this way, it is possible to dispose the positive electrode line and the negative electrode line in a collected state. The direction of a magnetic field (the direction of a magnetic flux) which is generated by the positive electrode line and the direction of a magnetic field (the direction of a magnetic flux) which is generated by the negative electrode line are opposite to each other. Therefore, the positive electrode line and the negative electrode line are disposed in parallel, whereby it is possible to mutually cancel some magnetic fluxes and further suppress the influence of the leakage magnetic field on peripheral equipment.
In this forming system, a pair of the electrodes may be provided to face each other in a first direction in a horizontal direction so as to support both end sides of the metal pipe material, in a state of being disposed in the forming die, in a longitudinal direction, a die replacement carriage disposition part for allowing a die replacement carriage to advance and retreat may be provided on one side with respect to the main body part in a second direction orthogonal to the first direction in the horizontal direction, a handling unit which performs installation and removal of the metal pipe material with respect to the forming die may be provided on the other side with respect to the main body part in the second direction, and the first connection portion may be drawn to the upper side of the placing surface from a position other than an area on the one side with respect to the main bodypart in the second direction. In this way, it is possible to prevent the first connection portion from interfering with the die replacement carriage, the forming die, or the like at the time of die replacement.
In this forming system, the first connection portion may be drawn to the upper side of the placing surface from an area on the other side with respect to the main body part in the second direction. In this way, it is possible to prevent the first connection portion from interfering with the die replacement carriage, the forming die, or the like at the time of die replacement. Further, it is not necessary to cause the positive electrode line and the negative electrode line to be greatly branched, compared to a case where the first connection portions are drawn from areas on both sides with respect to the main body part in the first direction, and therefore, the path of the line can be shortened. In this way, it is possible to reduce the resistance of the positive electrode line and the negative electrode line.
In this forming system, the first connection portion may be drawn to the upper side of the placing surface from each of areas on both sides with respect to the main body part in the first direction. In this way, it is possible to prevent the first connection portion from interfering with the die replacement carriage, the forming die, or the like at the time of die replacement. Further, since it is possible to secure spaces at side portions on both sides of the main body part in the second direction, it is possible to dispose peripheral equipment (temperature measuring equipment for measuring the temperature of the die, cooling equipment for cooling the die, or the like) in the spaces.
In this forming system, a cover which covers a portion drawn to the upper side of the placing surface may be provided with respect to at least one of the first connection portion and the second connection portion. In this way, it is possible to suppress the influence of a leakage magnetic field which is generated from the portion of the power supply line, which is drawn to the upper side of the placing surface.
According to the forming system according to the embodiment of the present invention, the influence on peripheral equipment of a leakage magnetic field which is generated from the power supply line can be suppressed.
Hereinafter, a preferred embodiment of a forming system according to the present invention will be described with reference to the drawings. In each drawing, identical or corresponding portions are denoted by the same reference numerals, and overlapping description will be omitted.
<Configuration of Forming Apparatus>
The lower die 11 which is one side of the forming die 13 is fixed to a base 15. The lower die 11 is formed of a large steel block and is provided with, for example, a rectangular cavity (recessed portion) 16 on the upper surface thereof. A cooling water passage 19 is formed in the lower die 11, and the lower die 11 is provided with a thermocouple 21 inserted from below at substantially the center. The thermocouple 21 is supported by a spring 22 so as to be movable up and down.
Further, a space 11a is provided in the vicinity of each of the right and left ends (right and left ends in
Insulating materials 91 for preventing electric conduction are provided between the lower die 11 and the lower electrode 17, below the lower electrode 17, between the lower die 11 and the lower electrode 18, and below the lower electrode 18. Each insulating material 91 is fixed to an advancing and retracting rod 95 which is a movable portion of an actuator (not shown) configuring the pipe holding mechanism 30. The actuator is for moving the lower electrodes 17 and 18 and the like up and down, and a fixed portion of the actuator is held on the base 15 side together with the lower die 11.
The upper die 12 which is the other side of the forming die 13 is fixed to a slide 81 (described later) configuring the drive mechanism 80. The upper die 12 is formed of a large steel block and has a cooling water passage 25 formed in the interior thereof and, for example, a rectangular cavity (recessed portion) 24 provided on the lower surface thereof. The cavity 24 is provided at a position facing the cavity 16 of the lower die 11.
Similar to the lower die 11, a space 12a is provided in the vicinity of each of the right and left ends (right and left ends in
Insulating materials 101 for preventing electric conduction are provided between the upper die 12 and the upper electrode 17, above the upper electrode 17, between the upper die 12 and the upper electrode 18, and above the upper electrode 18. Each insulating material 101 is fixed to an advancing and retracting rod 96 which is a movable portion of the actuator configuring the pipe holding mechanism 30. The actuator is for moving the upper electrodes 17 and 18 and the like up and down, and a fixed portion of the actuator is held on the slide 81 side of the drive mechanism 80 together with the upper die 12.
A semicircular arc-shaped concave groove 18a corresponding to the outer peripheral surface of the metal pipe material 14 is formed in each of the surfaces of the electrodes 18 and 18, which face each other, in the right side portion of the pipe holding mechanism 30 (refer to
A semicircular arc-shaped concave groove 17a corresponding to the outer peripheral surface of the metal pipe material 14 is formed in each of the surfaces of the electrodes 17 and 17, which face each other, in the left side portion of the pipe holding mechanism 30 (refer to
As shown in
The heating mechanism 50 includes a power supply unit 55, and a power supply line 52 which electrically connects the power supply unit 55 and the electrodes 17 and 18. The power supply unit 55 includes a direct-current power supply and a switch, and can energize the metal pipe material 14 through the power supply line 52 and the electrodes 17 and 18 in a state where the electrodes 17 and 18 are electrically connected to the metal pipe material 14. Here, the power supply line 52 is connected to the lower electrodes 17 and 18.
In the heating mechanism 50, the direct-current current output from the power supply unit 55 is transmitted by the power supply line 52 and input to the electrode 17. Then, the direct-current current passes through the metal pipe material 14 and is input to the electrode 18. Then, a direct-current current is transmitted by the power supply line 52 and input to the power supply unit 55.
Returning to
The gas supply unit 60 includes a gas source 61, an accumulator 62 for storing the gas supplied by the gas source 61, a first tube 63 extending from the accumulator 62 to the cylinder unit 42 of the gas supply mechanism 40, a pressure control valve 64 and a switching valve 65 provided in the first tube 63, a second tube 67 extending from the accumulator 62 to the gas passage 46 formed in the seal member 44, and a pressure control valve 68 and a check valve 69 provided in the second tube 67. The pressure control valve 64 plays a role of supplying a gas having an operating pressure adapted to a pressing force of the seal member 44 against the metal pipe material 14 to the cylinder unit 42. The check valve 69 plays a role of preventing the high-pressure gas from flowing backward in the second tube 67. The pressure control valve 68 provided in the second tube 67 plays a role of supplying a gas having an operating pressure for expanding the metal pipe material 14 to the gas passage 46 of the seal member 44 by the control of the control unit 70.
The control unit 70 can supply a gas having a desired operating pressure into the metal pipe material 14 by controlling the pressure control valve 68 of the gas supply unit 60. Further, the control unit 70 acquires temperature information from the thermocouple 21 from information which is transmitted from (A) shown in
The water circulation mechanism 72 includes a water tank 73 for storing water, a water pump 74 for pumping up the water stored in the water tank 73, pressurizing it, and sending it to the cooling water passage 19 of the lower die 11 and the cooling water passage 25 of the upper die 12, and a pipe 75. Although omitted, a cooling tower for lowering a water temperature or a filter for purifying water may be provided in the pipe 75.
<Method of Forming Metal Pipe using Forming Apparatus>
Next, a method of forming a metal pipe using the forming apparatus 10 will be described. First, the quenchable steel grade cylindrical metal pipe material 14 is prepared. The metal pipe material 14 is placed (loaded) on the electrodes 17 and 18 provided on the lower die 11 side by using, for example, a robot arm or the like. Since the concave grooves 17a and 18a are formed in the electrodes 17 and 18, the metal pipe material 14 is positioned by the concave grooves 17a and 18a.
Next, the control unit 70 controls the drive mechanism 80 and the pipe holding mechanism 30, thereby causing the pipe holding mechanism 30 to hold the metal pipe material 14. Specifically, the upper die 12, the upper electrodes 17 and 18, and the like held on the slide 81 side move to the lower die 11 side by the drive of the drive mechanism 80, and both end portions of the metal pipe material 14 are clamped from above and below by the pipe holding mechanism 30 by operating the actuator which allows the upper electrodes 17 and 18 and the like and the lower electrodes 17 and 18 and the like, which are included in the pipe holding mechanism 30, to advance and retreat. The clamping is performed in such an aspect as to be in close contact over the entire circumference in the vicinity of both end portions of the metal pipe material 14 due to the presence of the concave grooves 17a and 18a formed in the electrodes 17 and 18 and the concave grooves formed in the insulating materials 91 and 101.
At this time, as shown in
Subsequently, the control unit 70 controls the heating mechanism 50 to heat the metal pipe material 14. Specifically, the control unit 70 controls the power supply unit 55 of the heating mechanism 50 to supply electric power. Then, the electric power which is transmitted to the lower electrodes 17 and 18 through the power supply line 52 is supplied to the upper electrodes 17 and 18 clamping the metal pipe material 14 and the metal pipe material 14, and due to resistance which exists in the metal pipe material 14, the metal pipe material 14 itself generates heat by Joule heat. That is, the metal pipe material 14 is in the energized and heated state.
Subsequently, the forming die 13 is closed to the heated metal pipe material 14 by the control of the drive mechanism 80 by the control unit 70. In this way, the cavity 16 of the lower die 11 and the cavity 24 of the upper die 12 are combined, and the metal pipe material 14 is disposed and sealed in the cavity portion between the lower die 11 and the upper die 12.
Thereafter, the both ends of the metal pipe material 14 are sealed by advancing the seal member 44 by operating the cylinder unit 42 of the gas supply mechanism 40. At this time, as shown in
The metal pipe material 14 is softened by being heated to a high temperature (about 950° C.), and therefore, the gas supplied into the metal pipe material 14 thermally expands. For this reason, for example, the gas to be supplied is set to be compressed air, and thus the metal pipe material 14 having a temperature of 950° C. can be easily expanded by the thermally expanded compressed air.
The outer peripheral surface of the blow-formed and expanded metal pipe material 14 is rapidly cooled in contact with the cavity 16 of the lower die 11 and at the same time, is rapidly cooled in contact with the cavity 24 of the upper die 12 (since the upper die 12 and the lower die 11 have large heat capacity and are controlled to a low temperature, if the metal pipe material 14 comes into contact with the upper die 12 and the lower die 11, the heat of the pipe surface is removed to the die side at once), and thus quenching is performed. Such a cooling method is called die contact cooling or die cooling. Immediately after the rapid cooling, austenite is transformed into martensite (hereinafter, the transformation of austenite to martensite is referred to as martensitic transformation). Since a cooling rate is reduced in the second half of the cooling, the martensite is transformed into another structure (troostite, sorbite, or the like) due to reheating. Therefore, it is not necessary to separately perform tempering treatment. Further, in this embodiment, instead of the die cooling or in addition to the die cooling, cooling may be performed by supplying a cooling medium into, for example, the cavity 24. For example, the martensitic transformation maybe generated by performing cooling by bringing the metal pipe material 14 into contact with the dies (the upper die 12 and the lower die 11) before a temperature at which the martensitic transformation begins, and then performing the die opening and blowing a cooling medium (cooling gas) to the metal pipe material 14.
As described above, the metal pipe material 14 is blow-formed and then cooled, and then the die opening is performed, thereby obtaining a metal pipe having, for example, a substantially rectangular tubular main body portion.
Next, a forming system 100 according to this embodiment will be described with reference to
In this embodiment, a direction in which the electrodes 17 and 18 face each other in the horizontal direction is set to be an “X-axis direction”, a direction orthogonal to the X-axis direction in the horizontal direction is set to be a “Y-axis direction”, and the up-down direction is set to be a “Z-axis direction”. Further, the electrode 18 side is set to be a positive side in the X-axis direction, and the electrode 17 side is set to be a negative side in the X-axis direction. One side in the Y-axis direction is set to be a positive side, and the other side in the Y-axis direction is set to be a negative side. The upper side is set to be a positive side in the Z-axis direction, and the lower side is set to be a negative side in the Z-axis direction. The X-axis direction corresponds to a “first direction” in the claims, and the Y-axis direction corresponds to a “second direction” in the claims.
As shown in
The handling unit 103 is a device for performing installation and removal of the metal pipe material 14 with respect to the forming die 13. The handling unit 103 is configured of, for example, a robot arm. The handling unit 103 is provided on the negative side with respect to the main body part 110 in the Y-axis direction.
The power supply unit 55 is disposed at a position separated from the main body part 110 and is a device for supplying electric power to the electrodes 17 and 18 through the power supply line 52. In this embodiment, the power supply line is configured of a bus bar. In a case where the electrode 17 is set to be a positive electrode and the electrode 18 is set to be a negative electrode, the power supply line 52 includes a positive electrode line 52A connecting the power supply unit 55 and the electrode 17, and a negative electrode line 52B connecting the power supply unit 55 and the electrode 18. However, there is no particular limitation on which of the electrode 17 and the electrode 18 is set as a positive electrode or a negative electrode. Therefore, the electrode 17 maybe set as a negative electrode and the electrode 18 maybe set as a positive electrode. In this case, the line 52A serves as a negative electrode line and the line 52B serves as a positive electrode line.
Next, schematic disposition of the power supply line 52 will be described with reference to
The first connection portions 122A and 122B are drawn to the upper side of the placing surface 105a. The second connection portions 123A and 123B are drawn to the upper side of the placing surface 105a. With respect to the first connection portions 122A and 122B, a cover 140 which covers the whole or a part of the portion which is drawn to the upper side of the placing surface 105a is provided. In
Next, the detailed configurations of the positive electrode line 52A and the negative electrode line 52B of the power supply line 52 will be described with reference to
As shown in
Specifically, the lower-side passing portions 121A and 121B include straight portions 121Aa and 121Ba, bent portions 121Ab and 121Bb, and bent portions 121Ac and 121Bc. The straight portions 121Aa and 121Ba are portions which extend straight in the X-axis direction. The bent portions 121Ab and 121Bb are portions which are bent from the end portions on the positive side in the X-axis direction of the straight portions 121Aa and 121Ba to the positive side in the Y-axis direction toward the main body part 110. The bent portions 121Ac and 121Bc are portions which are bent from the end portions on the negative side in the X-axis direction of the straight portions 121Aa and 121Ba to the positive side in the Y-axis direction toward the power supply unit 55. The straight portion 121Aa is disposed further on the positive side in the Y-axis direction than the straight portion 121Ba. The bent portion 121Ab is disposed further on the negative side in the X-axis direction than the bent portion 121Bb. The bent portion 121Ac is disposed further on the positive side in the X-axis direction than the bent portion 121Bc.
The first connection portions 122A and 122B extend upward from the end portions of the lower-side passing portions 121A and 121B, extend toward the positive side in the Y-axis direction toward the main body part 110, are branched from each other on the front side of the main body part 110, and are connected to the electrode 17 and the electrode 18, respectively. Specifically, the first connection portions 122A and 122B include rising portions 122Aa and 122Ba, straight portions 122Ab and 122Bb, branched portions 122Ac and 122Bc, and connection portions 122Ad and 122Bd. The rising portions 122Aa and 122Ba are portions which extend straight upward from the end portions on the positive side in the Y-axis direction of the bent portions 121Ab and 121Bb of the lower-side passing portions 121A and 121B. The rising portions 122Aa and 122Ba extend to the height positions of the electrodes 17 and 18. The straight portions 122Ab and 122Bb extend straight from the upper end portions of the rising portions 122Aa and 122Ba to the front side of the forming die 13 toward the positive side in the Y-axis direction. The first connection portions 122A and 122B are branched so as to extend in the opposite directions to each other at the branch portions 122Ac and 122Bc. That is, the branch portion 122Ac extends from the end portion on the positive side in the Y-axis direction of the straight portion 122Ab to the negative side in the X-axis direction. The connection portion 122Ad extends from the end portion on the negative side in the X-axis direction of the branch portion 122Ac to the positive side in the Y-axis direction and is connected to the electrode 17. The branch portion 122Bc extends from the end portion on the positive side in the Y-axis direction of the straight portion 122Bb to the positive side in the X-axis direction. The connection portion 122Bd extends from the end portion on the positive side in the X-axis direction of the branch portion 122Bc to the positive side in the Y-axis direction and is connected to the electrode 18. The branch portions 122Ac and 122Bc branch at positions closer to the electrode 17. Therefore, the length of the branch portion 122Bc is longer than that of the branch portion 122Ac.
The second connection portions 123A and 123B extend upward from the end portions of the lower-side passing portions 121A and 121B, extend toward the positive side in the Y-axis direction toward the power supply unit 55, and are connected to the power supply unit 55. Specifically, the second connection portions 123A and 123B include rising portions 123Aa and 123Ba, and connection portions 123Ab and 123Bb. The rising portions 123Aa and 123Ba extend to the height positions of the electrodes 17 and 18. The connection portions 123Ab and 123Bb extend from the upper end portions of the rising portions 123Aa and 123Ba toward the positive side in the Y-axis direction and are connected to the power supply unit 55.
In the lower-side passing portions 121A and 121B, the positive electrode line 52A and the negative electrode line 52B are disposed in parallel at the lower side of the placing surface 105a. That is, in the lower-side passing portions 121A and 121B, the straight portions 121Aa and 121Ba, the bent portions 121Ab and 121Bb, and the bent portions 121Ac and 121Bc are disposed to extend in parallel with a predetermined gap therebetween. Also in the first connection portions 122A and 122B, the rising portions 122Aa and 122Ba and the straight portions 122Ab and 122Bb are disposed to extend in parallel with a predetermined gap therebetween.
Here, as described above, the die replacement carriage disposition part 102 is disposed at an area on the positive side with respect to the main body part 110 in the Y-axis direction. The area is set to be an area E1 between both the end portions 110a and 110b in the X-axis direction of the main body part 110 (in
Next, the operation and effects of the forming system 100 according to this embodiment will be described.
According to the forming system 100 of this embodiment, the power supply line 52 connects the electrodes 17 and 18 which energize and heat the metal pipe material 14 and the power supply unit 55 which is disposed at a position separated from the main body part 110. The power supply line 52 includes the lower-side passing portions 121A and 121B which pass through the lower side of the placing surface 105a on which the main body part 110 is placed, the first connection portions 122A and 122B which are drawn to the upper side of the placing surface 105a and connect the lower-side passing portions 121A and 121B and the electrodes 17 and 18, and the second connection portions 123A, 123B which connect the lower-side passing portions 121A and 121B and the power supply unit 55. In this manner, the power supply line 52 passes through the lower side of the placing surface 105a of the forming die 13 at the lower-side passing portions 121A and 121B between the first connection portions 122A and 122B and the second connection portions 123A and 123B while securing connectivity with the electrodes 17 and 18 at the first connection portions 122A and 122B and securing connectivity with the power supply unit 55 at the second connection portions 123A and 123B. In this manner, the lower-side passing portions 121A and 121B pass through the lower side of the placing surface 105a, whereby the distance between equipment which is disposed on the placing surface 105a and the lower-side passing portions 121A and 121B is increased. Therefore, the influence of a leakage magnetic field from the lower-side passing portions 121A and 121B on the equipment which is disposed on the placing surface 105a can be suppressed. By the above, it is possible to suppress the influence on the peripheral equipment of the leakage magnetic field which is generated from the power supply line.
Further, the power supply line 52 has the lower-side passing portions 121A and 121B, whereby the space above the placing surface 105a can be widely used. Further, the movement of a worker also becomes easy.
In the forming system 100, the power supply line 52 includes the positive electrode line 52A and the negative electrode line 52B, and in the lower-side passing portions 121A and 121B, the positive electrode line 52A and the negative electrode line 52B are disposed in parallel at the lower side of the placing surface 105a. In this way, it is possible to dispose the positive electrode line 52A and the negative electrode line 52B in a collected state. The direction of a magnetic field (the direction of a magnetic flux) which is generated by the positive electrode line 52A and the direction of a magnetic field (the direction of a magnetic flux) which is generated by the negative electrode line 52B are opposite to each other. Therefore, the positive electrode line 52A and the negative electrode line 52B are disposed in parallel, whereby it is possible to mutually cancel some magnetic fluxes and further suppress the influence of the leakage magnetic field on the peripheral equipment.
In the forming system 100, the electrodes 17 and 18 are provided in a pair to face each other in the X-axis direction so as to support both end sides in the longitudinal direction of the metal pipe material 14 in a state of being disposed in the forming die 13, the die replacement carriage disposition part 102 for allowing the die replacement carriage 111 to advance and retreat is provided on the positive side with respect to the main body part 110 in the Y-axis direction, the handling unit 103 which performs installation and removal of the metal pipe material 14 with respect to the forming die 13 is provided on the negative side with respect to the main body part 110 in the Y-axis direction, and the first connection portions 122A and 122B are drawn to the upper side of the placing surface 105a from positions other than the area El on the positive side with respect to the main body part 110 in the Y-axis direction. In this way, it is possible to prevent the first connection portions 122A and 122B from interfering with the die replacement carriage 111, the forming die 13, or the like at the time of die replacement.
In the forming system 100, the first connection portions 122A and 122B are drawn to the upper side of the placing surface 105a from the area on the negative side with respect to the main body part 110 in the Y-axis direction. In this way, it is possible to prevent the first connection portions 122A and 122B from interfering with the die replacement carriage 111, the forming die 13, or the like at the time of die replacement. Further, it is not necessary to cause the positive electrode line 52A and the negative electrode line 52B to be greatly branched, compared to a case where the first connection portions 122A and 122B are drawn from areas on both sides with respect to the main body part 110 in the X-axis direction, as shown in
In the forming system 100, the covers 140 and 141 which cover the portions drawn to the upper side of the placing surface 105a are provided with respect to the first connection portions 122A and 122B and the second connection portions 123A and 123B. In this way, it is possible to suppress the influence of the leakage magnetic field which is generated from the portion of the power supply line 52, which is drawn to the upper side of the placing surface 105a.
The present invention is not limited to the embodiments described above.
For example, a power supply line 152 as shown in
Further, for example, a power supply line 252 as shown in
The power supply unit 55 is disposed at a position separated from the main body part 110 to the positive side in the Y-axis direction. Further, the power supply unit 55 is not provided on the placing surface 105a of the placing table 105 and is disposed at a position separated from an end portion 105b on the positive side in the Y-axis direction of the placing table 105. Therefore, the second connection portions 323A and 323B are not drawn to the upper side of the placing surface 105a and are drawn straight from the lower-side passing portions 321A and 321B through the end portion 105b. In this manner, the second connection portions 323A and 323B may not be drawn to the upper side of the placing surface 105a. In a case where the power supply unit 55 is close to the end portion 105b of the placing table 105, the second connection portions 323A and 323B are also disposed below the placing surface 105a. In this case, the second connection portions 323A and 323B may be regarded as simultaneously configuring the lower-side passing portions. Further, the first connection portion 322A is drawn to the upper side of the placing surface 105a from an area on the negative side in the X-axis direction with respect to the main body part 110 and is connected to the electrode 17. The first connection portion 322A includes a rising portion 322Aa extending upward, and a connection portion 322Ab which extends from the rising portion 322Aa to the electrode 17 side and is connected to the electrode 17. The first connection portion 322B is drawn to the upper side of the placing surface 105a from an area on the positive side in the X-axis direction with respect to the main body part 110 and is connected to the electrode 18. The first connection portion 322B includes a rising portion 322Ba extending upward, and a connection portion 322Bb which extends from the rising portion 322Ba to the electrode 18 side and is connected to the electrode 18.
With such a configuration, the lower-side passing portions 321A and 321B are branched from the second connection portions 323A and 323B, then greatly bypass, and are connected to the first connection portions 322A and 322B, respectively. The lower-side passing portion 321A includes a branch portion 321Aa which extends from the second connection portion 323A to the negative side in the X-axis direction, a bent portion 321Ab which is bent from the branch portion 321Aa and extends to the negative side in the Y-axis direction, and a connection portion 321Ac which extends from the bent portion 321Ab to the positive side in the X-axis direction and is connected to the first connection portion 322A. The lower-side passing portion 321B includes a branch portion 321Ba which extends from the second connection portion 323B to the positive side in the X-axis direction, a bent portion 321Bb which is bent from the branch portion 321Ba and extends to the negative side in the Y-axis direction, and a connection portion 321Bc which extends from the bent portion 321Bb to the negative side in the X-axis direction and is connected to the first connection portion 322B.
In the power supply line 252 shown in
It should be understood that the invention is not limited to the above-described embodiment, but may be modified into various forms on the basis of the spirit of the invention. Additionally, the modifications are included in the scope of the invention.
Number | Date | Country | Kind |
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2017-068336 | Mar 2017 | JP | national |
The contents of Japanese Patent Application No. 2017-068336, filed Mar. 30, 2017, and of International Patent Application No. PCT/JP2018/012991, filed Mar. 28, 2018, on the basis of each of which priority benefits are claimed in an accompanying application data sheet, are in their entirety incorporated herein by reference.
Number | Date | Country | |
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Parent | PCT/JP2018/012991 | Mar 2018 | US |
Child | 16512492 | US |