This specification describes examples of front-end modules that may be included in test instruments of a test system.
Test systems are configured to test the operation of electronic devices referred to as devices under test (DUTs). A test system may include test instruments to send signals, including digital and analog signals, to a DUT for testing.
An example front-end module includes a channel to connect to a device under test (DUT). The front-end module includes a transmission line between the DUT and the front-end module that is configured for bidirectional transmission of signals having oscillating amplitudes (referred to herein as “oscillating signals”) including test signals and response signals. The example front-end module includes in-phase and quadrature (IQ) circuitry configured to modulate a test signal for transmission over the transmission line to the DUT and to demodulate a response received over the transmission line from the DUT. The front-end module include at least four taps into the transmission line to obtain direct current (DC) voltage values based on amplitudes of the oscillating signals. Scattering (s) parameters of the channel are based on the DC voltage values. The front-end module includes at least six ports. The at least six ports include an input/output (I/O) port directed to signal circuitry, a DUT port directed to the DUT, and at least four ports corresponding to taps into the transmission line. The front-end module may include one or more of the following features, either alone or in combination.
The signal circuitry may include a signal source. The I/O port may be configured to receive a modulated version of the test signal. The signal circuitry may include a signal receiver. The I/O port may be configured to output the response signal towards circuitry of the signal receiver. The taps, which may include at least four taps, obtain DC voltage values based on oscillating signal amplitude at the tap.
The oscillating signals may be within a radio frequency (RF) range, a millimeter (mm) wave frequency range, or a centimeter (cm) wave frequency range. The oscillating signals may have frequencies of at least 55 gigahertz (GHz).
One or more of the at least four taps may include a diode connected to the transmission line and a capacitive-inductive filter in series with the diode, or any similar AC (alternating current) to DC circuit, to obtain a DC voltage value based on an oscillating signal on the transmission line. The transmission line dimensions may vary along its length to compensate the transmission line for impedance changes caused by diodes at the at least four taps. One or more of the at least four taps may include a sampling diode connected to the transmission line. The front-end module may include one or more additional diodes located physically proximate to the sampling diodes for measuring temperature of the sampling diodes.
The connection between the channel and the DUT may be unswitched. The IQ circuitry may include mixer circuitry. The mixer circuitry may include bidirectional circuitry. The mixer circuitry may include a double-balanced mixer. The mixer circuitry may include uni-directional mixers, each of which may be configured to operate in a different direction. The mixer circuitry may be configured to separate signals into two paths comprising a forward path and a reverse path.
The front-end module may be incorporated in a circuit that includes a triplexer to pass oscillating test signal to and from the DUT circuitry, along with a DC voltage, and digital control signals that were generated and/or received, and memory to store calibration values for calibrating. The triplexer is configured to separate and to combine digital control and data signals, oscillating test signal, and DC power. The memory may store s-parameter values associated with s-parameter measurements and calibration. The memory may store gain and phase values associated with the signal path(s). The memory may store temperature values associated with the at least four taps. The memory may store calibration values for the IQ circuitry. The memory may store calibration values to calibrate linearity of the IQ circuitry and to calibrate voltages from the at least four taps.
An example test system includes a front-end module as described previously and one or more processing devices to generate the s-parameters using the DC voltage values by making measurements and combining results mathematically. The one or more processing devices may be configured to generate calibration values during manufacturing. The one or more processing devices may be configured to generate calibration values prior to measuring a DUT.
An example test system includes a front-end module as described previously, a signal source to provide the test signal to the IQ circuitry, a signal receiver to receive the response signal from the IQ circuitry, where the signal source and the signal receiver include the signal circuitry, and an interface board to which the DUT is connected. The channel may be at least partly on the DIB. The front-end module may be an RF test instrument or may be a component of an RF test instrument. The channel may be partly on the interface board. An input to the front-end module may include one or more of an IQ-modulated baseband, an intermediate frequency, a local oscillator (LO) signal, a control signal, or a DC supply signal.
An example test system includes a front-end module that defines a channel to connect to a device under test (DUT). The front-end module includes a transmission line that is connectable to the DUT and configured for bidirectional transmission of oscillating signals including test signals and response signals, and circuitry configured to modulate a test signal for transmission over the transmission line to the DUT and to demodulate a response received over the transmission line from the DUT. The test system may include one or more processing devices to generate scattering (s) parameters for the channel based on direct current (DC) values obtained at different locations along the transmission line. The front-end module may include at least six ports. The at least six ports may include an input/output (I/) port directed to signal circuitry, a DUT port directed to the DUT, and at least four ports for accessing the transmission line at different locations to obtain the DC values. The test system may include one or more of the following features, either alone or in combination.
The oscillating signals may be between an RF frequency range and a millimeter (mm) wave frequency range inclusive. The oscillating signals may have frequencies of at least 55 gigahertz (GHz).
An example test system includes means for enabling bidirectional transmission of oscillating signals between a test instrument and a device under test (DUT), means for obtaining direct current (DC) values representing signal amplitudes of the oscillating signals at different points along the transmission line, and means for generating scattering (s) parameters based on the DC values. The means for obtaining may include at least one test channel. The at least one test channel may include at least six ports including ports through which the DC values are obtainable. The test system may include one or more of the following features, either alone or in combination.
The oscillating signals may be within an RF frequency range, within a millimeter (mm) wave frequency range, or within a centimeter (cm) wave frequency range. The oscillating signals may have frequencies of at least 55 gigahertz (GHz). The means for enabling may include a transmission line that is connected to the DUT through an unswitched connection. The means for enabling may include in-phase and quadrature (IQ) circuitry.
Any two or more of the features described in this specification, including in this summary section, may be combined to form implementations not specifically described in this specification.
At least part of the systems and apparatus described herein may be configured or controlled by executing, on one or more processing devices, instructions that are stored on one or more non-transitory machine-readable storage media. Examples of non-transitory machine-readable storage media include read-only memory, an optical disk drive, memory disk drive, and random access memory. At least part of the systems and apparatus described herein, or portions thereof, may be implemented as an apparatus, method, or a test system that may include one or more processing devices and computer memory to store executable instructions to implement control of the stated functions. The apparatus, systems, and/or components thereof described herein may be configured, for example, through design, construction, arrangement, placement, programming, operation, activation, deactivation, and/or control.
The details of one or more implementations are set forth in the accompanying drawings and the following description. Other features and advantages will be apparent from the description and drawings, and from the claims.
Like reference numerals in different figures indicate like elements.
An example front-end module includes DUT (Device Under Test)—facing circuitry that is configured to communicate over a test channel (“channel”), which may include a transmission line between the front-end module and the DUT. The transmission line may or may not include an electrical conductor. For example, a coaxial cable is a transmission line that is also a conductor (TEM), but a waveguide is a transmission line (TE11) that may not have a conductive piece of metal from its input to its output. Front-end modules commonly include separate transmit and receive circuitry for, respectively, transmitting signals to a DUT and for receiving signals from the DUT.
Described herein are examples of a front-end module, and variants thereof, that connect to, or includes part of, a channel between a DUT and the front-end module. Communications, including signals, between the DUT and the front-end module are exchanged over the channel. The channel may be bidirectional in that signals may be transmitted (or “sourced”) and received over the same channel. To support bidirectional signal exchanges over the same channel, the front-end module includes the same circuitry or set of circuits for transmitting and receiving signals over the bidirectional channel. At least part of the channel includes a transmission line that is between the DUT and the front-end module. The channel is configured for bidirectional transmission of signals having oscillating amplitudes (“oscillating signals”) including, but not limited to, radio frequency (RF) signals. The front-end module also includes in-phase (I) and quadrature (Q) (IQ) circuitry configured to modulate an oscillating test signal (“test signal”) for transmission over the transmission line towards the DUT and to demodulate an oscillating response signal (“response signal”) received over the transmission line from the DUT. In this example, the IQ circuitry includes the “same circuitry” described above that enables transmitting and receiving signals bidirectionally.
In some implementations of the front-end module, there are at least four (e.g., four or more) taps into the transmission line to obtain direct current (DC) voltage values based on amplitudes of the oscillating signals. Example taps include, but are not limited to, a resistor touching the transmission line on one side of the resistor and touching a diode on the other side of the resistor and a second transmission line coupled to the main transmission line and to a diode. Scattering (s) parameters of the channel are based on the DC voltage values obtained through the taps. Example s-parameters describe the electrical behavior of the DUT. Including the taps, there are at least six (e.g., six or more) ports on the front-end module. The six or more ports include an input/output (I/O) port directed to signal circuitry, a DUT port directed to the DUT, and at least four ports for the at least four taps. The I/O port may be directed to the signal circuitry in the sense that the I/O port is along an electrical pathway containing circuitry configured to transmit or to receive oscillating signals or data therefor. The DUT port may be directed to the DUT in the sense that the DUT port is along an electrical pathway over which communications with the DUT are exchanged.
Examples of oscillating signals that may be transmitted and received using the front-end modules described herein include oscillating alternating electric current and/or voltage signals. Example oscillating signals include, but are not limited to, signals that are within the RF range, the centimeter (cm) wave frequency range, and/or the millimeter (mm) wave frequency range. In an example definition, an RF signal has a frequency range of about 20 kilohertz (kHz) to about 3 gigahertz (GHz). In an example definition, a centimeter-wave signal has a frequency range of about 3 GHz to about 30 GHz. In an example definition, a mm-wave signal has a frequency range of about 30 GHz to about 300 GHz. In an example definition, a mm-wave signal has a frequency range of about 110 GHz to about 300 GHz. In some implementations, the frequency range of the oscillating signals is between an RF frequency range and a mm-wave frequency range inclusive. The definitions of RF, mm-wave, and centimeter-wave may change over time and in different jurisdictions. As such, signals labeled herein as RF, mm-wave or centimeter-wave are not limited to the preceding numerical frequency ranges. Other examples of signals that may be transmitted and received using the example front-end modules described herein include, but are not limited to signals have frequencies of at least 55 GHz (that is, 55 GHz and over).
In some implementations, the front-end module described herein may be a test instrument, such as an RF test instrument, that is part of a test system or the front-end module may be included in a test instrument that also performs other functions.
In this example, IQ circuitry 12 is configured to modulate a high-frequency carrier signal (a local oscillator) with an information signal (baseband I and Q signals in this example) received from ATE 14 or based on signals received from ATE 14. This information signal may represent, or be based on, a test signal that is used for testing the DUT. IQ circuitry 12 is also configured to demodulate a response signal into a high-frequency carrier signal and an information signal. This information signal may include test results provided from a DUT that are based on test performed using the test signal.
Referring to
IQ circuitry 12 includes mixer circuitry 26a, 26b (“mixer” or “mixers”). In an example, mixer circuitry 26a, 26b is configured to separate signals on the same physical transmission line into two paths, including the forward path and the reverse path described previously. Mixer circuitry 26a, 26b includes bidirectional circuitry such as a double-balanced mixer. In some implementations, this bidirectional circuitry includes two (or more) uni-directional mixers, each of which configured to operate in a different direction. For example, one uni-directional mixer may be configured to operate in the forward path and one uni-directional mixer may be configured to operate in the reverse path.
In an example implementation, IQ circuitry 12 includes modulator modules 27a, 27b, which may include mixers 26a, 26b of the type described previously and associated local oscillator circuitry 28 for generating a local oscillator signal. Module 27a is described. Module 27b includes counterpart circuitry labeled “b” instead of “a”.
In module 27a, DAC 19a is configured to drive a bias-T circuit 29a (or other type of AC-signal blocking circuit), which is comprised of an inductor and a capacitor, to add offsets for calibration (the calibration values noted below) to IQ modulator mixer 26a if needed. DAC 19a may be configured using one or more calibration values stored, for example, in non-volatile memory 32 labeled “CAL”. Memory 32 is loaded by generating a signal, measuring the signal, and adjusting the DAC for ideal mixer performance, which may include local oscillator rejection. The resulting values are then stored in memory 32 and may be reused at a future time. If direct current (DC)-coupling is required to interface (IF) port 34, the inductor and capacitor can be substituted in the bias-T circuit 29a with resistors or other combining circuitry 29b (
DACs 20a, 20b are configured to drive I port 24 and Q port 25, respectively, when sourcing signals. In this configuration, switches 38a and 38b are controlled to connect mixers 26a, 26b to the modulator modules and each DAC 20a, 20b receives data from source memory (SMEM) 40a, 40b. Arbitrary waveform generators 41a, 41b may be configured to generate modulating signals for the data.
DAC 20A and 20b may also be calibrated using calibration data from memory 32 above to correct, if needed, a gain of I(f), a gain of Q(f), a phase of I(f), and/or a phase of Q(f) to improve operation of IQ circuitry 12. This can be done by modifying the samples or digital signal processing or programmable analog elements such as 35a, 36a. The same is true for 47a and 47b, only the other direction. In general, this correction would be applied over the entire signal modulation bandwidth.
In some implementations, programmable gain block 35a and phase block 36a in module 27a (and their counterparts in module 27b), are driven by stored calibration values, which were created during a calibration setup operation to adjust for ideal IQ modulator performance. Calibration may be performed, for example, to account for signal degradation above the 55 GHz frequency band. For example, the calibration values may calibrate linearity of the IQ circuitry and/or calibrate voltage values obtained from the taps. The calibration setup may be performed in order to reduce or to minimize local oscillator signal leakage, balanced sidebands, and residual sidebands. In some implementations, the stored calibration values are generated by a computing device, which may include one or more processing devices or other computing devices described herein, during manufacture of the front-end module Like the modulator modules, the demodulator modules have corresponding constructions. Module 45a is described. Module 45b includes counterpart circuitry labeled “b” instead of “a”. In this regard, analog-to-digital (ADC) converters 47a, 47b are configured to digitize signals from port 34 when switches 38a, 38 connect mixers 26a, 26b to the demodulator modules. Digital signals from the demodulator modules can then sent to a digital signal processor (DSP) or other appropriate processing device or circuitry internal or external to the signal receiver to perform demodulation and to obtain various signal quality measurements such as error vector magnitude (EVM) and adjacent channel leakage ratio (ACLR). The remaining components of the demodulator modules are similar to those described herein with respect to the modulator modules 27a, 27b.
Synth block 50 include one or more synthesizers configured to generate local oscillator signals used to drive mixers 26a, 26b. This is optimally represented by a sub-20 GHz synthesizer input 50a in the example of
Referring to
The taps maybe loosely electrically coupled to the transmission line via capacitance in the tap and inductance in the transmission line. For example, referring to
One or more (for example, all) of taps 62 to 67 may include a diode such as diode 75 (
The diodes described previously may be sampling diodes. A sampling diode may be configured—for example, biased—to detect (that is, to sample) portions of a signal on the transmission line, as described previously. Front-end module 10 may also include one or more measuring diodes 80 (
As explained previously, s-parameters of the channel may be determined based on the DC voltage values obtained via the taps. For example, the ATE, an example of which is described below, may include one or more processing devices to generate the s-parameters using the DC voltage values.
ATE 14 includes a test head 135 and a control system 136. The control system may include a computing system that includes one or more microprocessors or other appropriate processing devices as described herein.
DIB 138 is or includes a printed circuit board (PCB) that is connected to test head 135 and that includes mechanical and electrical interfaces to one or more DUTs that are being tested or are to be tested by the ATE. The DIB includes sites 141, which may include pins, ball grid arrays (BGAs), conductive traces, or other points of electrical and mechanical connection to which the DUTs may connect. Test signals, response signals, voltage signals, and other signals pass through test channels over the sites between the DUTs and test instruments. DIB 138 may also include, among other things, connectors, conductive traces, and circuitry for routing signals between the test instruments, DUTs connected to sites 141, and other circuitry. In this example, DIB 138 includes one or more connectors for connection to signal transmission lines or coaxial cables for transmitting signals between one or more test instruments and one or more DUTs. DIB 138 also includes one or more transmission lines having structures such as those described herein to transmit signals to and from the DUT.
Control system 136 communicates with components of the test head to control testing. For example, control system 136 may download test program sets to test instruments 140A to 140N in the test head. The test instruments include hardware devices that may include one or more processing devices and other circuitry. Test instruments 140A to 140N may run the test program sets to test DUTs in communication with the test instruments. Control system 136 may also send, to test instruments in the test head, instructions, test data, and/or other information that are usable by the test instruments to perform appropriate tests on DUTs interfaced to the DIB. In some implementations, this information may be sent via a computer or other type of network or via a direct electrical path. In some implementations, this information may be sent via a local area network (LAN) or a wide area network (WAN).
A test program generates a test flow to provide to the DUT. The test flow is written to output signals to elicit a response from the DUT, for example. The test flow may be written to output signals including RF signals, microwave signals, and/or mm-wave signals to one or more DUTs, to receive responses to those signals from the DUTs, and to analyze the response to determine if a device passed or failed testing.
In the example of
In some examples, ATE 14 includes a connection interface 141 that connects test instrument test channels 147 to DIB 138. Connection interface 144 may include connectors 146 or other devices for routing signals between the test instruments and DIB 138. For example, the connection interface may include one or more circuit boards or other substrates on which such connectors are mounted. Conductors that are included in the test channels may be routed through the connection interface and the DIB.
In some implementations, the front-end module and its variants described herein may reduce signal loss relative to its conventional counterparts. In some examples, signal loss may be reduced by 20 decibels (dB) by the elimination of the usual signal path circuitry needed for a VNA (variable noise amplifier). In some implementations, the front-end module and its variants described herein implement traditional ATE channel functionality using simplified circuitry configured for RF, centimeter-wave, and mm-wave applications. This architecture may simplify the ATE channel's signal path, which may reduce total signal losses to the DUT. In some examples, these features can be particularly advantageous in centimeter-wave and mm-wave applications, where cables and PCB (printed circuit board) dielectrics introduce large signal losses (e.g., 10+dB versus about 3 dB below 8 GHz), which reduces maximum output power deliverable to the DUT, degrades s-parameter measurement, and decreases the system SNR.
The architecture may also reduce cost in comparison with more traditional ATE channels that involve switching among multiple paths and separate source and measure conversions when configured to use a single bidirectional conversion path. Vector s-parameters may be determined in this architecture using a scalar circuit (known as a “6-port”), which may reduce cost, signal loss, switching, and signal routing when used in an ATE context. Reduced circuit complexity can be integrated into a SiP (system-in-package) or MCM (multi-chip module) device. Reduced size enable closer placement to the DUT (e.g., on a DIB or probe interface board (PIB) or membrane) to further reduce losses between the instrument channel and the DUT. As such, the front-end module reduce channel cost and increase our count while improving achievable performance, particularly at higher frequencies.
All or part of the test systems and processes described in this specification and their various modifications may be configured or controlled at least in part by one or more computers such as control system 136 using one or more computer programs tangibly embodied in one or more information carriers, such as in one or more non-transitory machine-readable storage media. A computer program can be written in any form of programming language, including compiled or interpreted languages, and it can be deployed in any form, including as a stand-alone program or as a module, part, subroutine, or other unit suitable for use in a computing environment. A computer program can be deployed to be executed on one computer or on multiple computers at one site or distributed across multiple sites and interconnected by a network.
Actions associated with configuring or controlling the voltage source, the test system, and processes described herein can be performed by one or more programmable processors executing one or more computer programs to control all or some of the well formation operations described previously. All or part of the test systems and processes can be configured or controlled by special purpose logic circuitry, such as, an FPGA (field programmable gate array) and/or an ASIC (application-specific integrated circuit).
Processors suitable for the execution of a computer program include, by way of example, both general and special purpose microprocessors, and any one or more processors of any kind of digital computer. Generally, a processor will receive instructions and data from a read-only storage area or a random access storage area or both. Elements of a computer include one or more processors for executing instructions and one or more storage area devices for storing instructions and data. Generally, a computer will also include, or be operatively coupled to receive data from, or transfer data to, or both, one or more machine-readable storage media, such as mass storage devices for storing data, such as magnetic, magneto-optical disks, or optical disks. Non-transitory machine-readable storage media suitable for embodying computer program instructions and data include all forms of non-volatile storage area, including by way of example, semiconductor storage area devices, such as EPROM (erasable programmable read-only memory), EEPROM (electrically erasable programmable read-only memory), and flash storage area devices; magnetic disks, such as internal hard disks or removable disks; magneto-optical disks; and CD-ROM (compact disc read-only memory) and DVD-ROM (digital versatile disc read-only memory).
Any “electrical connection” as used herein may include a direct physical connection or a wired or wireless connection that includes or does not include intervening components but that nevertheless allows electrical signals to flow between connected components. Any “connection” involving electrical circuitry that allows signals to flow, unless stated otherwise, is an electrical connection and not necessarily a direct physical connection regardless of whether the word “electrical” is used to modify “connection”.
Elements of different implementations described may be combined to form other implementations not specifically set forth previously. Elements may be left out of the systems described previously without adversely affecting their operation or the operation of the system in general. Furthermore, various separate elements may be combined into one or more individual elements to perform the functions described in this specification.
Other implementations not specifically described in this specification are also within the scope of the following claims.
Number | Name | Date | Kind |
---|---|---|---|
3961273 | Trush | Jun 1976 | A |
4808912 | Potter | Feb 1989 | A |
4808913 | Grace | Feb 1989 | A |
4816767 | Cannon | Mar 1989 | A |
4839578 | Roos | Jun 1989 | A |
4864077 | Wadell | Sep 1989 | A |
4894753 | Wadell | Jan 1990 | A |
4924399 | Kaiser | May 1990 | A |
5034708 | Adamian | Jul 1991 | A |
5165034 | Kanuma | Nov 1992 | A |
5276411 | Woodin, Jr. | Jan 1994 | A |
5311440 | Hess, Jr. | May 1994 | A |
5371505 | Michaels | Dec 1994 | A |
5376938 | Martinez | Dec 1994 | A |
5381115 | Timmons | Jan 1995 | A |
5434511 | Adamian | Jul 1995 | A |
5467021 | Adamian | Nov 1995 | A |
5483158 | van Heteren | Jan 1996 | A |
5493719 | Smith | Feb 1996 | A |
5572160 | Wadell | Nov 1996 | A |
5581176 | Lee | Dec 1996 | A |
5705925 | Lee | Jan 1998 | A |
5717329 | Lee | Feb 1998 | A |
5731701 | Lee | Mar 1998 | A |
6066953 | Wadell | May 2000 | A |
6118811 | Narumi | Sep 2000 | A |
6204813 | Wadell | Mar 2001 | B1 |
7130359 | Rahman | Oct 2006 | B2 |
7248625 | Chien | Jul 2007 | B2 |
7256600 | Walker | Aug 2007 | B2 |
7539268 | Fechtel | May 2009 | B2 |
7672364 | Kang | Mar 2010 | B2 |
7782928 | Kang | Aug 2010 | B2 |
7826549 | Aggarwal | Nov 2010 | B1 |
7856048 | Smaini | Dec 2010 | B1 |
8340167 | Feng | Dec 2012 | B2 |
8411730 | Maeda | Apr 2013 | B2 |
8422540 | Negus | Apr 2013 | B1 |
8989307 | Zhou | Mar 2015 | B2 |
9203448 | Morita | Dec 2015 | B2 |
9276798 | Yu | Mar 2016 | B2 |
9341503 | Zhuge | May 2016 | B2 |
9485036 | Kordik | Nov 2016 | B2 |
9755766 | Wadell | Sep 2017 | B2 |
9780891 | Eo | Oct 2017 | B2 |
9786977 | Lyons | Oct 2017 | B2 |
9893924 | Smail | Feb 2018 | B2 |
9973940 | Rappaport | May 2018 | B1 |
10027358 | Wu | Jul 2018 | B2 |
10057795 | Starzer | Aug 2018 | B2 |
10278084 | Starzer | Apr 2019 | B2 |
10326495 | Barzegar | Jun 2019 | B1 |
10345418 | Wadell | Jul 2019 | B2 |
10374838 | Jiang | Aug 2019 | B2 |
10469109 | Gutman | Nov 2019 | B2 |
10693529 | Sissoev | Jun 2020 | B1 |
10812136 | Henry | Oct 2020 | B1 |
10972192 | Wadell | Apr 2021 | B2 |
11057123 | Chang | Jul 2021 | B1 |
11128501 | Lan | Sep 2021 | B2 |
11272616 | Brecht | Mar 2022 | B2 |
20030169827 | Shi | Sep 2003 | A1 |
20030206603 | Husted | Nov 2003 | A1 |
20040106380 | Vassiliou | Jun 2004 | A1 |
20050047384 | Wax | Mar 2005 | A1 |
20050240852 | Inaba | Oct 2005 | A1 |
20060034356 | Fechtel | Feb 2006 | A1 |
20060223457 | Rahman | Oct 2006 | A1 |
20060279310 | Walker | Dec 2006 | A1 |
20070047634 | Kang | Mar 2007 | A1 |
20070123188 | Mo | May 2007 | A1 |
20070189464 | Schmitt | Aug 2007 | A1 |
20100093282 | Martikkala | Apr 2010 | A1 |
20110026570 | Feng | Feb 2011 | A1 |
20110204910 | Suto | Aug 2011 | A1 |
20120307983 | Faulkner | Dec 2012 | A1 |
20130137381 | Vassiliou | May 2013 | A1 |
20140036973 | Au | Feb 2014 | A1 |
20140134943 | Hobbs | May 2014 | A1 |
20140355655 | Chakraborty | Dec 2014 | A1 |
20150288467 | Kahrizi | Oct 2015 | A1 |
20160087734 | Kordik | Mar 2016 | A1 |
20160216317 | Chen | Jul 2016 | A1 |
20170146632 | Wadell | May 2017 | A1 |
20170163358 | Wadell | Jun 2017 | A1 |
20170170537 | Lyons | Jun 2017 | A1 |
20170179999 | Vassiliou | Jun 2017 | A1 |
20170195961 | Chakraborty | Jul 2017 | A1 |
20170353876 | Starzer | Dec 2017 | A1 |
20180062768 | Frank | Mar 2018 | A1 |
20190349096 | Wadell | Nov 2019 | A1 |
20200106477 | Nanni | Apr 2020 | A1 |
20200313711 | Patton | Oct 2020 | A1 |
20200400742 | Wadell | Dec 2020 | A1 |
20210055347 | Poppe et al. | Feb 2021 | A1 |
20210156959 | Scherz | May 2021 | A1 |
20210240651 | Holzmann | Aug 2021 | A1 |
Number | Date | Country |
---|---|---|
3714998 | Nov 1988 | DE |
0230668 | Aug 1987 | EP |
0627631 | Dec 1994 | EP |
05-075675 | Oct 1993 | JP |
5365516 | Dec 2013 | JP |
10-2014-0146057 | Dec 2014 | KR |
2017099855 | Jun 2017 | WO |
Entry |
---|
Written Opinion received for International Patent Application No. PCT/US2022/022132, dated Jul. 13, 2022, (5 pages). |
International Search Report received for International Patent Application No. PCT/US2022/022132, dated Jul. 13, 2022, (3 pages). |