The broken lines shown in the drawings are for the purpose of illustrating boundaries of the enlarged views of
The broken lines shown in the drawings are for the purpose of illustrating boundaries of the enlarged views of
Number | Date | Country | Kind |
---|---|---|---|
111301059 | Mar 2022 | TW | national |
Number | Name | Date | Kind |
---|---|---|---|
20110005967 | Gregerson | Jan 2011 | A1 |
20140319020 | Gregerson | Oct 2014 | A1 |
20150318195 | Ohnuki | Nov 2015 | A1 |
20170365496 | Mushel | Dec 2017 | A1 |
20180102269 | Liu | Apr 2018 | A1 |
20200286761 | Onuki | Sep 2020 | A1 |
20220277977 | Kanai | Sep 2022 | A1 |
20230238265 | Kubota | Jul 2023 | A1 |
20240055287 | Chiu | Feb 2024 | A1 |
20240096671 | Fuller | Mar 2024 | A1 |
20240321614 | Chiu | Sep 2024 | A1 |
Entry |
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Entegris, “A300 FOUPs”, First published PDF link indicated Jun. 7, 2021. (https://www.entegris.com/shop/en/USD/products/wafer-handling/wafer-processing/300-mm-front-opening-unified-pods-%28foups%29/A300-FOUPs/p/A300FOUPs) (Year: 2021). |
Cae, “Used Entegris Lot of (640) Amber FOUPs . . . ”, Accessed Dec. 20, 2024. (https://caeonline.com/buy/spare-parts/entegris-lot-of-640-amber-foups-spectra-foups/9394553) (Year: 2024). |