Front plate of a plasma display panel (PDP) and the method of fabricating the same

Information

  • Patent Grant
  • 6621215
  • Patent Number
    6,621,215
  • Date Filed
    Wednesday, November 8, 2000
    24 years ago
  • Date Issued
    Tuesday, September 16, 2003
    21 years ago
Abstract
A front plate of a plasma display panel (PDP) comprising a glass substrate, a auxiliary electrode formed in the glass substrate, and a protecting electrode over the auxiliary electrode is disclosed. The auxiliary electrode is inlaid in the glass substrate or in a buffer layer formed atop the glass substrate. The protecting electrode is formed to prevent a bonding auxiliary electrode of the auxiliary electrode from being oxidized easily during a high temperature process. Another front plate of a PDP is disclosed and includes a glass substrate, a sustaining electrode on the glass substrate, an auxiliary electrode on the sustaining electrode, and a protecting electrode disposed on the auxiliary electrode. Again, the protecting electrode is formed to prevent the bonding auxiliary electrode of the auxiliary electrode from being oxidized easily during a high temperature process.
Description




BACKGROUND OF THE INVENTION




1. Field of the Invention




The present invention relates to a front plate of a plasma display panel (PDP) and the method of fabricating the same. More particularly, the present invention relates to a method of fabricating a front plate of a plasma display panel that is capable of preventing oxidation of the electrodes in bonding area of the plasma display panel.




2. Description of the Related Art




Recently, a variety of flat panel displays, such as a liquid crystal display (LCD) and a plasma display. panel (PDP) have been intensively developed for replacing the cathode ray tubes (CRT) display. In PDP, an ultra violet light is emitted for exciting the RBG phosphors to produce visible lights. The advantages of the PDP include large display area, wide viewing angle, and intense brightness.





FIG. 1

shows an exploded view of a conventional plasma display panel (referred as PDP) comprising a front plate


10


and a back plate


12


. The front plate


10


includes a glass substrate


14


, a plurality of scanning electrodes


16


, a transparent dielectric layer


18


, and a magnesium oxide (MgO) layer


20


. Each of the scanning electrodes


16


includes a sustaining electrode


22


and an auxiliary electrode


24


. A visible light is emitted by plasma generated between two adjacent transparent electrodes


22


after a voltage is applied to these electrodes


22


. In order to allow visible light to pass through the glass substrate


14


, each of the sustaining electrodes


22


is a transparent electrode


22


consisted of indium tin oxide (ITO) or SnO


2


. However, the resistance of the sustaining electrode is too high to be suitable for electrical conduction. For this reason, an auxiliary electrode


24


consisting of metal is disposed on every sustaining electrode


22


to enhance conductivity.




The back plate


12


comprises another glass substrate


30


, a plurality of data electrodes


32


, a dielectric layer


33


, a plurality of ribs


34


, and a plurality of fluorescence layers


36


. The data electrodes


32


of the back plate are perpendicularly to the scanning electrodes


16


of the front plate


10


. The space formed by two adjacent ribs


34


and two adjacent scanning electrodes


16


is called a “pixel”. The data electrode


32


is used for controlling the generation of the plasma. The scanning electrodes


16


are used to maintain the plasma. In addition, the fluorescence layers


36


can produce primary visible lights after absorbing UV ray generated by the plasma. The primary visible lights includes red, green, and blue light. The ribs


34


prevent the UV ray from leaking to the neighboring pixel and thereby prevent the color mixing phenomenon.




Referring to FIGS.


2


A through

FIG. 2C

,

FIG. 2A

shows a top view of the front plate of the PDP shown in

FIG. 1

, and

FIGS. 2B and 2C

show cross-sectional views of the front plate


10


along the a—a and b—b lines shown in

FIG. 2A

, respectively. A pixel area and a bonding area are formed on the glass substrate


14


, the a—a line crosses the pixel area and the b—b line crosses the bonding area. The auxiliary electrode


24


is divided into a pixel auxiliary electrode and a bonding auxiliary electrode. The bonding auxiliary electrode is the portion of the auxiliary electrode


16


extending to the edge of the front plate


10


and used for connection to an external driving circuit (not shown). As shown in

FIG. 2B

, in the pixel area, the pixel auxiliary electrode is covered by the dielectric layer


18


and MgO layer


20


. On the contract, in the bonding area as shown in

FIG. 2C

, the bonding auxiliary electrode is not covered by the dielectric layer


18


or MgO layer


20


.




Conventionally, each of the scanning electrodes


16


is constituted of a sustaining electrode


22


and an auxiliary electrode


24


such that the auxiliary electrode


24


is stacked on top of the sustaining electrode


22


. The auxiliary electrode


24


has a three-layered structure constituted of Cr—Cu—Cr, wherein Cr and Cu denote chromium and copper, respectively. In particular, a heating process of about 500° C. to 600° C. is used to sinter the dielectric layer


18


. However, the top Cr metal surface of the auxiliary electrode


24


tends to be oxidized easily during the heating process. It may cause a short circuit between the bonding auxiliary electrode and the external driving circuit, and the performance of the PDP will be reduced.




SUMMARY OF THE INVENTION




Therefore, the object of the present invention is to provide a front plate of a plasma display panel (PDP) capable of preventing the bonding electrode from being oxidized during the sequential heating process.




To achieve the above-mentioned object, the present invention provides a front plate of a PDP, comprising a glass substrate, an auxiliary electrode, and a protecting electrode. The auxiliary electrode is located on the glass substrate having a pixel area and a bonding area. The auxiliary electrode includes a pixel auxiliary electrode positioned at the pixel area and a bonding auxiliary electrode positioned at the bonding area. The protecting electrode is disposed above the bonding auxiliary electrode so that the bonding auxiliary electrode is covered by the protecting electrode and is not oxidized during the sequential processes.




According to the first embodiment of the present invention, the glass substrate includes a trench and the auxiliary electrode is embedded in the trench of the glass substrate. The auxiliary electrode includes a main conducting layer, a first medium layer positioned between the main conducting layer and the glass substrate, and a second medium layer positioned between the main conducting layer and the protecting electrode. The first medium layer is used to eliminate the stress between the main conducting layer and the glass substrate, and the second medium layer is used to eliminate the stress between the main conducting layer and the protecting electrode.




According to the second embodiment of the present invention, the glass substrate includes a trench, and the auxiliary electrode is embedded in the trench of the glass substrate. The auxiliary electrode includes a main conducting layer positioned under the protecting electrode and a first medium layer positioned between the main conducting layer and the glass substrate. The first medium layer is used to eliminate the stress between the main conducting layer and the glass substrate.




According to the third embodiment of the present invention, the front plate further incldues a buffer layer located on the glass substrate. The buffer layer has a trench and the auxiliary electrode is embedded in the trench of the buffer layer. The auxiliary electrode includes a main conducting layer, a first medium layer positioned between the main conducting layer and the buffer layer, and a second medium layer positioned between the main conducting layer and the protecting electrode. The first medium layer is used to eliminate the stress between the main conducting layer and the buffer layer, and the second medium layer is used to eliminate the stress between the main conducting layer and the protecting electrode.




According to the fourth embodiment of the present invention, the front plate further includes a buffer layer located on the glass substrate, the buffer layer has a trench, and the auxiliary electrode is embedded in the trench of the buffer layer. The auxiliary electrode includes a main conducting layer positioned under the protecting electrode and a first medium layer positioned between the main conducting layer and the buffer layer. The first medium layer is used to eliminate the stress between the main conducting layer and the buffer layer.




According to the fifth embodiment of the present invention, the front plate further includes a sustaining electrode located between the glass substrate and the auxiliary electrode. The auxiliary electrode includes a main conducting layer, a first medium layer positioned between the main conducting layer and the sustaining electrode, and a second medium layer positioned between the main conducting layer and the protecting electrode.




According to the sixth embodiment of the present invention, the front plate further includes a sustaining electrode located between the glass substrate and the auxiliary electrode. The auxiliary electrode includes a main conducting layer positioned under the protecting electrode and a first medium layer positioned between the main conducting layer and the sustaining electrode.




According to the embodiments of the present invention, the main conducting layer is made of copper (Cu), the first and the second medium layers are made of chromium (Cr) Furthermore, the protecting electrode is made of a layer of metal-oxide, which is selected from the group of ITO (Indium Tin Oxide), ZnO (Zinc Oxide), and SnO


2


(Stannum dioxide).




A method of fabricating the above-described front plate a PDP according to the present invention includes the steps of: (a) providing a glass substrate having a pixel area and a bonding area; (b) forming a trench in the glass substrate; (c) forming an auxiliary electrode in the trench, wherein the auxiliary electrode comprises a pixel auxiliary electrode disposed in the pixel area and a bonding auxiliary electrode disposed in the bonding area; and (d) forming a protecting electrode-over the bonding auxiliary electrode to prevent the bonding auxiliary electrode from oxidation during the sequential process.




A further method of fabricating the above-described front plate a PDP according to the present invention comprises the steps of: (a) providing a glass substrate having a pixel area and a bonding area; (b) forming a dielectric layer on the glass substrate; (c) forming a trench on the dielectric layer; (d) forming an auxiliary electrode in the trench, wherein the auxiliary electrode comprises a pixel auxiliary electrode disposed in the pixel area and a bonding auxiliary electrode disposed in the bonding area; and (e) forming a protecting electrode over the bonding auxiliary electrode to prevent the bonding auxiliary electrode from oxidation during the sequential process.




A further method of fabricating the above-described front plate a PDP according to the present invention comprises the steps of: (a) providing a glass substrate having a pixel area and a bonding area; (b) forming a transparent electrode on the glass substrate; (c) forming an auxiliary electrode above the transparent electrode, the auxiliary electrode comprising a pixel auxiliary electrode disposed in the pixel area and a bonding auxiliary electrode disposed in the bonding pad area; and (d) forming a protecting electrode on the auxiliary electrode to prevent the bonding auxiliary electrode from oxidation.











BRIEF DESCRIPTION OF THE DRAWINGS




The present invention will become more fully understood from the detailed description given hereinbelow and the accompanying drawings, given by way of illustration only and thus not intended to be limitative of the present invention.





FIG. 1

shows an exploded view of a conventional plasma display panel (referred to as PDP hereinafter) comprising a front plate and a back plate;





FIG. 2A

shows a top view of the front plate of the PDP shown in

FIG. 1

;





FIGS. 2B and 2C

are cross-sectional views of the front plate along the a—a and the b—b lines shown in

FIG. 2A

, respectively;





FIG. 3A

shows a top view of the front plate of the PDP according to the first embodiment of the present invention;





FIGS. 3B and 3C

are cross-sectional views of a pixel area and a bonding area of the front plate along the a—a and the b—b lines shown in

FIG. 3A

in accordance with the first embodiment;





FIGS. 4A and 4B

are cross-sectional views of a pixel area and a bonding area of the front plate in accordance with the second embodiment;





FIGS. 5A and 5B

are cross-sectional views of a pixel area and a bonding area of the front plate in accordance with the third embodiment;





FIGS. 6A and 6B

are cross-sectional views of a pixel area and a bonding area of the front plate in accordance with the fourth embodiment;





FIGS. 7A and 7B

are cross-sectional views of a pixel area and a bonding area, respectively, of the front plate along the a—a and the b—b lines shown in

FIG. 7A

in accordance with the fifth embodiment;





FIGS. 8A and 8B

are cross-sectional views of a pixel area and a bonding area of the front plate in accordance with the sixth embodiment;




FIG.


9


A through

FIG. 9D

are cross-sectional views illustrating steps involved in the process for fabricating a PDP having an oxidation-resistive electrode according to the aforementioned third embodiment of the present invention; and




FIG.


10


A through

FIG. 10C

are cross-sectional views illustrating the steps involved in fabricating a PDP having an oxidation-resistive electrode according to the fifth embodiment of the present invention.











DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT




Accordingly, the present invention provides a plasma display panel (PDP) capable of preventing the bonding electrodes of the PDP from being oxidized easily during a high temperature heating process.




First and Second Embodiments




Referring to FIG.


3


A through

FIG. 3C

,

FIG. 3A

shows a top view of the front plate


40


of the PDP according to the first embodiment of the present invention.

FIGS. 3B

shows a cross-sectional view of a pixel area of the front plate


40


along the a—a line shown in FIG.


3


A.

FIGS. 3C

shows a cross-sectional view of a bonding area of the front plate


40


. along the b—b line shown in FIG.


3


A.




According to this embodiment, the front plate


40


of the PDP comprises a glass substrate


42


having a trench


50


, an auxiliary electrode


52


embedded in the trench


50


of the glass substrate


42


, and a protecting electrode


54


formed over the auxiliary electrode


52


and a part of the glass substrate


42


. A dielectric layer


44


is formed to cover both the protecting electrode


54


and the glass substrate


42


in the pixel area


46


, and a MgO layer


45


is further formed on the dielectric layer


44


.




The depth of the trench


50


is substantially the same as the height of the auxiliary electrode.


52


as shown in

FIGS. 3B and 3C

, therefore, the auxiliary electrode


52


can fill in the trench


50


completely.




The auxiliary electrode


52


is constituted of a pixel auxiliary electrode


52


′ disposed in the pixel area


46


and a bonding auxiliary electrode


52


″ disposed in the bonding area


48


. The pixel auxiliary electrode


52


′ is connected with the bonding auxiliary electrode


52


″. The auxiliary electrode


52


includes a first medium layer


52




a


, a main conducting layer


52




b


, and an second medium layer


52




c


. Because the properties of metal and glass are different, the first medium layer


52




a


is used to eliminate the stress between the main conducting layer


52




b


and the glass substrate


42


, and the second medium layer


52




c


is used to eliminate the stress between the main conducting layer


52




b


and the protecting electrode


54


.




Further, a dielectric layer


44


is formed over the glass substrate


42


in the pixel area


46


, and a magnesium oxide (MgO) layer


45


is then formed over the dielectric layer


44


. Therefore, the bonding area


48


is covered by neither the dielectric layer


44


nor the magnesium oxide layer


45


, the protecting electrode


54


in the bonding area


48


is then exposed and the bonding auxiliary electrode


52


″ is covered by the protecting electrode


54


. In the prior art, a conventional bonding auxiliary electrode is directly exposed in the air without any covering material, and the exposed bonding auxiliary electrode is vulnerable and easily be oxidized during a subsequent high temperature process. To the contrary, the bonding auxiliary electrode


52


″ according to the present invention is covered by the protecting electrode


54


, which can effectively prevent the bonding auxiliary electrode


52


″ from being oxidized during the heating process.




The main conducting layer


52




b


is typically comprised of copper. (Cu), whereas the lower medium layer


52




a


and the upper medium layer


52




c


are typically comprised of chromium (Cr). The protecting electrode


54


, on the other hand, is typically comprised of indium tin oxide (ITO) or tin oxide (SnO


2


). The protecting electrode


54


is a metal oxide so it will not be oxidized easily. The property of these electrodes remains the same during the heating process so the connection between the bonding auxiliary electrode


52


″ and the external circuit will be not influenced.




Referring to

FIGS. 4A and 4B

,

FIGS. 4A

shows a cross-sectional view of a pixel area of the front plate


40


along the a—a line shown in

FIG. 3A

in accordance with the second embodiment. And

FIGS. 4B

shows a cross-sectional view of a bonding area of the front plate


40


along the b—b line shown in

FIG. 3A

in accordance with the second embodiment.




The difference between the first and the second embodiments is the structure of the auxiliary electrode


52


. The auxiliary electrode


52


according to the second embodiment is a two-layered structure comprising a main conducting layer


52




b


and an first medium layer


52




a


. The first medium layer


52




a


is used to eliminate the stress between the main conducting layer


52




b


and the glass substrate


42


. The second medium layer


52




c


is omitted in the second embodiment.




Third and Fourth Embodiments




Referring to

FIGS. 5A and 5B

,

FIGS. 5A

shows a cross-sectional view of a pixel area of the front plate


40


along the a—a line shown in

FIG. 3A

in accordance with the third embodiment, and

FIGS. 5B

shows a cross-sectional view of a bonding area of the front plate


40


along the b—b line shown in

FIG. 3A

in accordance with the third embodiment.




According to this embodiment, the front plate


40


of the PDP comprises a glass substrate


42


divided into a pixel area


46


and a bonding area


48


, a buffer layer


43


formed on the glass substrate


42


, an auxiliary electrode


52


embedded in the buffer layer


43


, a protecting electrode


54


formed over the auxiliary electrode


52


, a dielectric layer


44


coated over both the protecting electrode


54


and the buffer layer


43


in the pixel area


46


of the glass substrate


42


, and a MgO layer


45


formed on the dielectric layer


44


.




The difference between the third embodiment and the first embodiment lies in that the trench


53


is formed in the buffer layer


43


instead of in the glass substrate


42


of the first embodiment. The auxiliary electrode


52


is embedded into the trench


53


of the buffer layer


43


. The buffer layer


43


is made of a dielectric material, and it is easier to form the trench


53


in the buffer layer


43


than in the glass substrate


42


by etching or other process. Although an additional deposition process is required to form the buffer layer


43


on the glass substrate


42


, etching the buffer layer


43


instead of the glass substrate


42


ensures a more controllable yield of the PDPs.




During the assembly process of the PDP, the protecting electrode


54


in the bonding area


48


is connected to the external driving circuit. When the assembly process exists any problem and the PDP needs to be reworked, the external driving circuit must be detached from the protecting electrode


54


. In the meanwhile, the auxiliary electrode


52


will not be pulled out easily during the reworking process because the auxiliary electrode


52


is embedded in the trench


53


of the buffer layer


43


. Further, the glass substrate


42


will not be broken during the reworking process because the glass substrate


42


is covered by the buffer layer


43


.




Referring to

FIGS. 6A and 6B

,

FIGS. 6A

shows a cross-sectional view of a pixel area of the front plate


40


along the a—a line shown in

FIG. 3A

in accordance with the fourth embodiment. And

FIGS. 6B

shows a cross-sectional view of a bonding area of the front plate


40


along the b—b line shown in

FIG. 3A

in accordance with the fourth embodiment.




The difference between the third and the fourth embodiments is the structure of the auxiliary electrode


52


. The auxiliary electrode


52


according to the fourth embodiment is a two-layered structure comprising a main conducting layer


52




b


and an first medium layer


52




a


. The first medium layer


52




a


is used to eliminate the stress between the main conducting layer


52




b


and the glass substrate


42


. The second medium layer


52




c


is omitted in the fourth embodiment.




Fifth and Sixth Embodiments




Referring to

FIGS. 7A and 7B

,

FIGS. 7A

shows a cross-sectional view of a pixel area of the front plate


40


along the a—a line shown in

FIG. 3A

in accordance with the fifth embodiment. And

FIGS. 7B

shows a cross-sectional view of a bonding area of the front plate


40


along the b—b line shown in

FIG. 3A

in accordance with the fifth embodiment.




According to this embodiment, the front plate


40


of the PDP at least comprises a glass substrate


42


divided into a pixel area


46


and a bonding area


48


, a sustaining electrode


60


formed on the glass substrate


42


, a auxiliary electrode


52


formed on the top of the sustaining electrode


60


, a protecting electrode


54


formed on the top of the auxiliary electrode


52


, a dielectric layer


44


covered the glass substrate


42


, and a MgO layer


45


formed covering the top of the dielectric layer


44


.




The auxiliary electrode


52


is constituted of a three-layered structure including a first medium layer


52




a


, a main conducting layer


52




b


, and a second medium layer


52




c


. The first medium layer


52




a


is formed between the maining conducting layer


52




b


and the protecting electrode


54


, and the second medium layer


52




c


is formed between the main conducting layer


52




b


and the protecting electrode


54


. The auxiliary electrode


52


includes a pixel auxiliary electrode


52


′ disposed in the pixel area


46


and a bonding auxiliary electrode


52


″ disposed in the bonding area


48


. The dielectric layer


44


and the MgO layer


45


are formed in the pixel area


46


of the glass substrate


42


but not in the bonding area


48


. Therefore, the dielectric layer


44


and the MgO layer


45


will cover the pixel auxiliary electrode


52


′ as shown in FIG.


7


A. In

FIG. 7B

, neither the dielectric layer


44


nor the magnesium oxide layer


45


is formed in the bonding area


48


, the bonding auxiliary electrode


52


″ is only covered by the protecting electrode


54


so as to prevent the bonding auxiliary electrode


52


″ from being oxidized during the subsequent high temperature process. Preferably, the protecting electrode


54


. covers both the bonding auxiliary electrode


52


″ and the pixel auxiliary electrode


52


′ as shown in

FIGS. 7A and 7B

.




The protecting electrode


54


is made of metal oxides as ITO (Indium Tin Oxide), SnO


2


, or zinc oxide (ZnO). The protecting electrode


54


can be transparent or not.




Referring to FIG.


8


A and

FIG. 8B

,

FIGS. 8A

shows a cross-sectional view of a pixel area of the front plate


40


along the a—a line shown in

FIG. 3A

in accordance with the sixth embodiment, and

FIGS. 8B

shows a cross-sectional view of a bonding area of the front plate


40


along the b—b line shown in

FIG. 3A

in accordance with the sixth embodiment.




The difference between the fifth and the sixth embodiments is the structure of the auxiliary electrode


52


. The auxiliary electrode


52


according to the sixth embodiment is a two-layered structure comprising a main conducting layer


52




b


and an first medium layer


52




a


. The first medium layer


52




a


is used to eliminate the stress between the main conducting layer


52




b


and the glass substrate


42


. The second medium layer


52




c


is omitted in the sixth embodiment.




FABRICATION METHOD FOR THE FRONT PLATE OF A PDP:




The followings are the detailed descriptions of the fabrication method for forming the front plate of a PDP.




FIG.


9


A through

FIG. 9D

are cross-sectional views illustrating steps involved in the process for fabricating a front plate of a PDP according to the aforementioned third embodiment of the present invention.




Referring to

FIG. 9A

, a glass substrate


42


is provided, a buffer layer


43


, such as silicon oxide, is then formed on the glass substrate


42


by a screen printing method. A trench


53


is formed on the buffer layer


43


by a photolithography and an etching processes.




Referring to

FIG. 9B

, an auxiliary electrode


52


is deposited into the trench


53


via evaporation or sputtering process. For example, a first medium layer


52




a


, typically made of Cr metal, is deposited on the bottom of the trench


53


. Then, a main conducting layer


52




b


, typically made of Cu metal, is formed on the first medium layer


52




a


, and finally a second medium layer


52




c


, typically made of Cr, is formed on the main conducting layer


52




b


. The glass substrate


42


is divided into a pixel area


46


and a bonding area


48


, and the auxiliary electrode


52


is also defined as a pixel auxiliary electrode


52


′ disposed in the pixel area


46


and a bonding auxiliary electrode


52


″ disposed in the bonding area


48


.




Referring to

FIG. 9C

, a protecting electrode


54


is formed by a sputtering and photolithographing process. First, a metal oxide layer, such as ITO or SiO


2


, is sputtered on the glass substrate


42


, and is then patterned by a photolithography process to form the protecting electrode


54


above the auxiliary electrode


52


.




Referring to

FIG. 9D

, a dielectric layer


44


and a MgO layer


45


are sequentially deposited over the protecting electrode


54


and the buffer layer


43


in the pixel area


46


. The dielectric layer


44


is deposited by, for example, a screen printing method. The MgO layer


45


is deposited by, for example, an evaporation or a sputtering method.




On the other hand, as described in the first embodiment, a trench


50


is formed by etching the glass substrate


42


directly. Thereby, the auxiliary electrode


52


is inlaid into the trench


50


formed in the glass substrate


42


as shown in

FIGS. 3B and 3C

.




Further, as described in the second and the fourth embodiments, the auxiliary electrode


52


is characterized by a two-layered structure comprised of a first medium layer


52




a


and a main conducting layer


52




b


formed sequentially via a an evaporation or a sputtering method.




FIG.


10


A through

FIG. 10C

are cross-sectional views illustrating the steps involved in fabricating the front plate of a PDP according to the fifth embodiment of the present invention.




Referring to

FIG. 10A

, a glass substrate


42


is provided. A sustaining electrode


60


(also called as a transparent electrode) is then formed by sputtering a metal oxide layer on the glass substrate


42


. The sustaining electrode is usually constituted of ITO (Indium Tin Oxide) or SnO


2


. The metal oxide layer is then patterned by a etching process to form the sustaining electrode


60


on the glass substrate


42


.




Referring to

FIG. 10B

, an auxiliary electrode


52


is then deposited on the sustaining electrode


60


. The auxiliary electrode


52


is constituted of a first medium layer


52




a


, a main conducting layer


52




b


, and a second medium layer


52




c


. These layers are deposited sequentially stacked on the sustaining electrode


60


by evaporation or sputtering.




Usually, the first and second medium layer


52




a


and


52




c


are made by Cr metal, and the main conducting layer


52




b


is made by Cu metal. Then, a protecting electrode is formed on the auxiliary electrode


52


. A metal oxide layer, such as ITO (Indium Tin Oxide), SnO


2


, or ZnO, is deposited on top of the second medium layer


52




c


by sputtering.




Referring to

FIG. 10C

, a dielectric layer


44


, made of silicon oxide, and a MgO layer


45


are deposited sequentially over the sustaining electrode


60


and the auxiliary electrode


52


in the pixel area


46


. The dielectric layer


44


is deposited via a screen printing process, and the MgO layer


45


is deposited by evaporation or sputtering.




As described in the sixth embodiment, the auxiliary electrode


52


is a two-layered structure constituted of a first medium layer


52




a


and a main conducting layer


52




b


. It is worthy of note that, in the sixth embodiment of the present invention, the patterns of the protecting electrode


54


and the auxiliary electrode


52


can be defined at the same time by a single etching process. The first medium layer


52




a


is made of Cr metal, the main conducting layer


52




b


is made of Cu metal, and the protecting layer


54


is made of ITO. Furthermore, the etching rate for etching ITO is about one tenth of the etching rate for etching Cu or Cr, so the ITO layer will not be over etched when etching the Cu or Cr layer. Therefore, the sustaining electrode


60


and the protecting electrode


54


, constituting a ITO/Cr/Cu structure, can be formed in one etching process and the manufacturing cost can be reduced.




In the present invention, a high temperature heating process (about 500° C. to about 600° C.) still be needed to sinter the above-described dielectric layer


44


of a PDP, a protecting layer


54


is formed to prevent the bonding auxiliary electrode


52


″ from being oxidized easily during the heating process.




The foregoing description of the preferred embodiments of this invention has been presented for purposes of illustration and description. Obvious modifications or variations are possible in light of the above teaching. The embodiments are chosen and described to provide the best illustration of the principles of this invention and its practical application to thereby enable those skilled in the art to utilize the invention in various embodiments and with various modifications as are suited to the particular use contemplated. All such modifications and variations are within the scope of the present invention as determined by the appended claims when interpreted in accordance with the breadth to which they are fairly, legally, and equitably entitled.



Claims
  • 1. A front plate of a plasma display panel (PDP), comprising:a glass substrate comprising a pixel area, a bonding area, and a trench; an auxiliary electrode embedded in the trench of the glass substrate, the auxiliary electrode including a pixel auxiliary electrode positioned at the pixel area and a bonding auxiliary electrode positioned at the bonding area; and a protecting electrode disposed above the bonding auxiliary electrode so that the bonding auxiliary electrode is covered by the protecting electrode and is not oxidized during sequential processes.
  • 2. The front plate of the PDP as claimed in claim 1 wherein the auxiliary electrode comprises a main conducting layer positioned under the protecting electrode and a first medium layer positioned under the main conducting layer.
  • 3. The front plate of the PDP as claimed in claim 2 wherein the first medium layer is positioned between the main conducting layer and the glass substrate, and the first medium is used to eliminate the stress between the main conducting layer and the glass substrate.
  • 4. The front plate of the PDP as claimed in claim 2 wherein the auxiliary electrode comprises a second medium layer positioned above the main conducting layer, and is used to eliminate the stress between the main conducting layer and the protecting electrode.
  • 5. The front plate of the PDP as claimed in claim 4 wherein the main conducting layer is made of copper (Cu), the first and the second medium layer are made of chromium (Cr).
  • 6. The front plate of the PDP as claimed in claim 1 wherein the protecting electrode is made of a layer of metal-oxide.
  • 7. The front plate of the PDP as claimed in claim 6 wherein the protecting electrode is selected from the group of ITO (Indium Tin Oxide), ZnO (Zinc Oxide), and SnO2 (Stannum dioxide).
  • 8. A method for fabricating a plasma display panel (PDP), comprising the steps of:(a) providing a glass substrate having a pixel area and a bonding area; (b) forming a trench in the glass substrate; (c) forming an auxiliary electrode in the trench, the auxiliary electrode comprising a pixel auxiliary electrode disposed in the pixel area and a bonding auxiliary electrode disposed in the bonding area; and (d) forming a protecting electrode over the bonding auxiliary electrode to prevent the bonding auxiliary electrode from oxidation during sequential processes.
  • 9. A method for fabricating a plasma display panel (PDP), comprising the steps of:(a) providing a glass substrate having a pixel area and a bonding area; (b) forming a dielectric layer on the glass substrate; (c) forming a trench in the dielectric layer; (d) forming an auxiliary electrode in the trench, the auxiliary electrode comprising a pixel auxiliary electrode disposed in the pixel area and a bonding auxiliary electrode disposed in the bonding area; and (e) forming a protecting electrode over the bonding auxiliary electrode to prevent the bonding auxiliary electrode from oxidation during sequential processes.
  • 10. A front plate of a plasma display panel (PDP) comprising:a glass substrate having a pixel area and a bonding area; a buffer layer disposed on the glass substrate, the buffer layer having a trench; an auxiliary electrode embedded in the trench of the buffer layer, the auxiliary electrode comprising a pixel auxiliary electrode positioned at the pixel area and a bonding auxiliary electrode positioned at the bonding area; and a protecting electrode disposed above the bonding auxiliary electrode so that the bonding auxiliary electrode is covered by the protecting electrode and is not oxidized during subsequent processes.
  • 11. The front plate of the PDP as claimed in claim 10 wherein the auxiliary electrode comprises a main conducting layer positioned under the protecting electrode and a first medium layer positioned under the main conducting layer.
  • 12. The front plate of the PDP as claimed in claim 11 wherein the first medium layer is positioned between the main conducting layer and the buffer layer, and the first medium eliminates the stress between the main conducting layer and the buffer layer.
  • 13. The front plate of the PDP as claimed in claim 11 wherein the auxiliary electrode comprises a second medium layer positioned above the main conducting layer, and eliminates the stress between the main conducting layer and the protecting electrode.
  • 14. The front plate of the PDP as claimed in claim 13 wherein the main conducting layer is made of copper (Cu), and the first and second medium layers are made of chromium (Cr).
  • 15. The front plate of the PDP as claimed in claim 10 wherein the protecting electrode is a layer of metal-oxide.
  • 16. The front plate of the PDP as claimed in claim 15 wherein the protecting electrode is selected from the group of ITO (Indium Tin Oxide), ZnO (Zinc Oxide), and SnO2 (Stannum dioxide).
  • 17. A front plate of a plasma display panel (PDP), comprising:a glass substrate having a pixel area and a bonding area; and a scanning electrode comprising: a protecting electrode disposed on the glass substrate; and an auxiliary electrode disposed between the protecting electrode and the glass substrate and covered by the protecting electrode, the auxiliary electrode including a pixel auxiliary electrode positioned at the pixel area and a bonding auxiliary electrode positioned at the bonding area, wherein the protecting electrode in the bonding area is connected to an external driving circuit.
  • 18. The front plate of the PDP as claimed in claim 17 wherein the glass substrate comprises a trench, and the auxiliary electrode is embedded in the trench of the glass substrate.
  • 19. The front plate of the PDP as claimed in claim 17 wherein the front plate further comprises a buffer layer disposed on the glass substrate, the buffer layer has a trench, and the auxiliary electrode is embedded in the trench of the buffer layer.
Priority Claims (1)
Number Date Country Kind
89100193 A Jan 2000 TW
US Referenced Citations (7)
Number Name Date Kind
6037713 Fukuta et al. Mar 2000 A
6160345 Tanaka et al. Dec 2000 A
6337538 Awaji et al. Jan 2002 B1
6419540 Tanaka et al. Jul 2002 B1
6420831 Awaji et al. Jul 2002 B2
6452331 Sakurada et al. Sep 2002 B1
6509689 Kim et al. Jan 2003 B1