Information
-
Patent Grant
-
6621215
-
Patent Number
6,621,215
-
Date Filed
Wednesday, November 8, 200024 years ago
-
Date Issued
Tuesday, September 16, 200321 years ago
-
Inventors
-
Original Assignees
-
Examiners
- Kim; Robert H.
- Yun; Jurie
Agents
-
CPC
-
US Classifications
Field of Search
-
International Classifications
-
Abstract
A front plate of a plasma display panel (PDP) comprising a glass substrate, a auxiliary electrode formed in the glass substrate, and a protecting electrode over the auxiliary electrode is disclosed. The auxiliary electrode is inlaid in the glass substrate or in a buffer layer formed atop the glass substrate. The protecting electrode is formed to prevent a bonding auxiliary electrode of the auxiliary electrode from being oxidized easily during a high temperature process. Another front plate of a PDP is disclosed and includes a glass substrate, a sustaining electrode on the glass substrate, an auxiliary electrode on the sustaining electrode, and a protecting electrode disposed on the auxiliary electrode. Again, the protecting electrode is formed to prevent the bonding auxiliary electrode of the auxiliary electrode from being oxidized easily during a high temperature process.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a front plate of a plasma display panel (PDP) and the method of fabricating the same. More particularly, the present invention relates to a method of fabricating a front plate of a plasma display panel that is capable of preventing oxidation of the electrodes in bonding area of the plasma display panel.
2. Description of the Related Art
Recently, a variety of flat panel displays, such as a liquid crystal display (LCD) and a plasma display. panel (PDP) have been intensively developed for replacing the cathode ray tubes (CRT) display. In PDP, an ultra violet light is emitted for exciting the RBG phosphors to produce visible lights. The advantages of the PDP include large display area, wide viewing angle, and intense brightness.
FIG. 1
shows an exploded view of a conventional plasma display panel (referred as PDP) comprising a front plate
10
and a back plate
12
. The front plate
10
includes a glass substrate
14
, a plurality of scanning electrodes
16
, a transparent dielectric layer
18
, and a magnesium oxide (MgO) layer
20
. Each of the scanning electrodes
16
includes a sustaining electrode
22
and an auxiliary electrode
24
. A visible light is emitted by plasma generated between two adjacent transparent electrodes
22
after a voltage is applied to these electrodes
22
. In order to allow visible light to pass through the glass substrate
14
, each of the sustaining electrodes
22
is a transparent electrode
22
consisted of indium tin oxide (ITO) or SnO
2
. However, the resistance of the sustaining electrode is too high to be suitable for electrical conduction. For this reason, an auxiliary electrode
24
consisting of metal is disposed on every sustaining electrode
22
to enhance conductivity.
The back plate
12
comprises another glass substrate
30
, a plurality of data electrodes
32
, a dielectric layer
33
, a plurality of ribs
34
, and a plurality of fluorescence layers
36
. The data electrodes
32
of the back plate are perpendicularly to the scanning electrodes
16
of the front plate
10
. The space formed by two adjacent ribs
34
and two adjacent scanning electrodes
16
is called a “pixel”. The data electrode
32
is used for controlling the generation of the plasma. The scanning electrodes
16
are used to maintain the plasma. In addition, the fluorescence layers
36
can produce primary visible lights after absorbing UV ray generated by the plasma. The primary visible lights includes red, green, and blue light. The ribs
34
prevent the UV ray from leaking to the neighboring pixel and thereby prevent the color mixing phenomenon.
Referring to FIGS.
2
A through
FIG. 2C
,
FIG. 2A
shows a top view of the front plate of the PDP shown in
FIG. 1
, and
FIGS. 2B and 2C
show cross-sectional views of the front plate
10
along the a—a and b—b lines shown in
FIG. 2A
, respectively. A pixel area and a bonding area are formed on the glass substrate
14
, the a—a line crosses the pixel area and the b—b line crosses the bonding area. The auxiliary electrode
24
is divided into a pixel auxiliary electrode and a bonding auxiliary electrode. The bonding auxiliary electrode is the portion of the auxiliary electrode
16
extending to the edge of the front plate
10
and used for connection to an external driving circuit (not shown). As shown in
FIG. 2B
, in the pixel area, the pixel auxiliary electrode is covered by the dielectric layer
18
and MgO layer
20
. On the contract, in the bonding area as shown in
FIG. 2C
, the bonding auxiliary electrode is not covered by the dielectric layer
18
or MgO layer
20
.
Conventionally, each of the scanning electrodes
16
is constituted of a sustaining electrode
22
and an auxiliary electrode
24
such that the auxiliary electrode
24
is stacked on top of the sustaining electrode
22
. The auxiliary electrode
24
has a three-layered structure constituted of Cr—Cu—Cr, wherein Cr and Cu denote chromium and copper, respectively. In particular, a heating process of about 500° C. to 600° C. is used to sinter the dielectric layer
18
. However, the top Cr metal surface of the auxiliary electrode
24
tends to be oxidized easily during the heating process. It may cause a short circuit between the bonding auxiliary electrode and the external driving circuit, and the performance of the PDP will be reduced.
SUMMARY OF THE INVENTION
Therefore, the object of the present invention is to provide a front plate of a plasma display panel (PDP) capable of preventing the bonding electrode from being oxidized during the sequential heating process.
To achieve the above-mentioned object, the present invention provides a front plate of a PDP, comprising a glass substrate, an auxiliary electrode, and a protecting electrode. The auxiliary electrode is located on the glass substrate having a pixel area and a bonding area. The auxiliary electrode includes a pixel auxiliary electrode positioned at the pixel area and a bonding auxiliary electrode positioned at the bonding area. The protecting electrode is disposed above the bonding auxiliary electrode so that the bonding auxiliary electrode is covered by the protecting electrode and is not oxidized during the sequential processes.
According to the first embodiment of the present invention, the glass substrate includes a trench and the auxiliary electrode is embedded in the trench of the glass substrate. The auxiliary electrode includes a main conducting layer, a first medium layer positioned between the main conducting layer and the glass substrate, and a second medium layer positioned between the main conducting layer and the protecting electrode. The first medium layer is used to eliminate the stress between the main conducting layer and the glass substrate, and the second medium layer is used to eliminate the stress between the main conducting layer and the protecting electrode.
According to the second embodiment of the present invention, the glass substrate includes a trench, and the auxiliary electrode is embedded in the trench of the glass substrate. The auxiliary electrode includes a main conducting layer positioned under the protecting electrode and a first medium layer positioned between the main conducting layer and the glass substrate. The first medium layer is used to eliminate the stress between the main conducting layer and the glass substrate.
According to the third embodiment of the present invention, the front plate further incldues a buffer layer located on the glass substrate. The buffer layer has a trench and the auxiliary electrode is embedded in the trench of the buffer layer. The auxiliary electrode includes a main conducting layer, a first medium layer positioned between the main conducting layer and the buffer layer, and a second medium layer positioned between the main conducting layer and the protecting electrode. The first medium layer is used to eliminate the stress between the main conducting layer and the buffer layer, and the second medium layer is used to eliminate the stress between the main conducting layer and the protecting electrode.
According to the fourth embodiment of the present invention, the front plate further includes a buffer layer located on the glass substrate, the buffer layer has a trench, and the auxiliary electrode is embedded in the trench of the buffer layer. The auxiliary electrode includes a main conducting layer positioned under the protecting electrode and a first medium layer positioned between the main conducting layer and the buffer layer. The first medium layer is used to eliminate the stress between the main conducting layer and the buffer layer.
According to the fifth embodiment of the present invention, the front plate further includes a sustaining electrode located between the glass substrate and the auxiliary electrode. The auxiliary electrode includes a main conducting layer, a first medium layer positioned between the main conducting layer and the sustaining electrode, and a second medium layer positioned between the main conducting layer and the protecting electrode.
According to the sixth embodiment of the present invention, the front plate further includes a sustaining electrode located between the glass substrate and the auxiliary electrode. The auxiliary electrode includes a main conducting layer positioned under the protecting electrode and a first medium layer positioned between the main conducting layer and the sustaining electrode.
According to the embodiments of the present invention, the main conducting layer is made of copper (Cu), the first and the second medium layers are made of chromium (Cr) Furthermore, the protecting electrode is made of a layer of metal-oxide, which is selected from the group of ITO (Indium Tin Oxide), ZnO (Zinc Oxide), and SnO
2
(Stannum dioxide).
A method of fabricating the above-described front plate a PDP according to the present invention includes the steps of: (a) providing a glass substrate having a pixel area and a bonding area; (b) forming a trench in the glass substrate; (c) forming an auxiliary electrode in the trench, wherein the auxiliary electrode comprises a pixel auxiliary electrode disposed in the pixel area and a bonding auxiliary electrode disposed in the bonding area; and (d) forming a protecting electrode-over the bonding auxiliary electrode to prevent the bonding auxiliary electrode from oxidation during the sequential process.
A further method of fabricating the above-described front plate a PDP according to the present invention comprises the steps of: (a) providing a glass substrate having a pixel area and a bonding area; (b) forming a dielectric layer on the glass substrate; (c) forming a trench on the dielectric layer; (d) forming an auxiliary electrode in the trench, wherein the auxiliary electrode comprises a pixel auxiliary electrode disposed in the pixel area and a bonding auxiliary electrode disposed in the bonding area; and (e) forming a protecting electrode over the bonding auxiliary electrode to prevent the bonding auxiliary electrode from oxidation during the sequential process.
A further method of fabricating the above-described front plate a PDP according to the present invention comprises the steps of: (a) providing a glass substrate having a pixel area and a bonding area; (b) forming a transparent electrode on the glass substrate; (c) forming an auxiliary electrode above the transparent electrode, the auxiliary electrode comprising a pixel auxiliary electrode disposed in the pixel area and a bonding auxiliary electrode disposed in the bonding pad area; and (d) forming a protecting electrode on the auxiliary electrode to prevent the bonding auxiliary electrode from oxidation.
BRIEF DESCRIPTION OF THE DRAWINGS
The present invention will become more fully understood from the detailed description given hereinbelow and the accompanying drawings, given by way of illustration only and thus not intended to be limitative of the present invention.
FIG. 1
shows an exploded view of a conventional plasma display panel (referred to as PDP hereinafter) comprising a front plate and a back plate;
FIG. 2A
shows a top view of the front plate of the PDP shown in
FIG. 1
;
FIGS. 2B and 2C
are cross-sectional views of the front plate along the a—a and the b—b lines shown in
FIG. 2A
, respectively;
FIG. 3A
shows a top view of the front plate of the PDP according to the first embodiment of the present invention;
FIGS. 3B and 3C
are cross-sectional views of a pixel area and a bonding area of the front plate along the a—a and the b—b lines shown in
FIG. 3A
in accordance with the first embodiment;
FIGS. 4A and 4B
are cross-sectional views of a pixel area and a bonding area of the front plate in accordance with the second embodiment;
FIGS. 5A and 5B
are cross-sectional views of a pixel area and a bonding area of the front plate in accordance with the third embodiment;
FIGS. 6A and 6B
are cross-sectional views of a pixel area and a bonding area of the front plate in accordance with the fourth embodiment;
FIGS. 7A and 7B
are cross-sectional views of a pixel area and a bonding area, respectively, of the front plate along the a—a and the b—b lines shown in
FIG. 7A
in accordance with the fifth embodiment;
FIGS. 8A and 8B
are cross-sectional views of a pixel area and a bonding area of the front plate in accordance with the sixth embodiment;
FIG.
9
A through
FIG. 9D
are cross-sectional views illustrating steps involved in the process for fabricating a PDP having an oxidation-resistive electrode according to the aforementioned third embodiment of the present invention; and
FIG.
10
A through
FIG. 10C
are cross-sectional views illustrating the steps involved in fabricating a PDP having an oxidation-resistive electrode according to the fifth embodiment of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
Accordingly, the present invention provides a plasma display panel (PDP) capable of preventing the bonding electrodes of the PDP from being oxidized easily during a high temperature heating process.
First and Second Embodiments
Referring to FIG.
3
A through
FIG. 3C
,
FIG. 3A
shows a top view of the front plate
40
of the PDP according to the first embodiment of the present invention.
FIGS. 3B
shows a cross-sectional view of a pixel area of the front plate
40
along the a—a line shown in FIG.
3
A.
FIGS. 3C
shows a cross-sectional view of a bonding area of the front plate
40
. along the b—b line shown in FIG.
3
A.
According to this embodiment, the front plate
40
of the PDP comprises a glass substrate
42
having a trench
50
, an auxiliary electrode
52
embedded in the trench
50
of the glass substrate
42
, and a protecting electrode
54
formed over the auxiliary electrode
52
and a part of the glass substrate
42
. A dielectric layer
44
is formed to cover both the protecting electrode
54
and the glass substrate
42
in the pixel area
46
, and a MgO layer
45
is further formed on the dielectric layer
44
.
The depth of the trench
50
is substantially the same as the height of the auxiliary electrode.
52
as shown in
FIGS. 3B and 3C
, therefore, the auxiliary electrode
52
can fill in the trench
50
completely.
The auxiliary electrode
52
is constituted of a pixel auxiliary electrode
52
′ disposed in the pixel area
46
and a bonding auxiliary electrode
52
″ disposed in the bonding area
48
. The pixel auxiliary electrode
52
′ is connected with the bonding auxiliary electrode
52
″. The auxiliary electrode
52
includes a first medium layer
52
a
, a main conducting layer
52
b
, and an second medium layer
52
c
. Because the properties of metal and glass are different, the first medium layer
52
a
is used to eliminate the stress between the main conducting layer
52
b
and the glass substrate
42
, and the second medium layer
52
c
is used to eliminate the stress between the main conducting layer
52
b
and the protecting electrode
54
.
Further, a dielectric layer
44
is formed over the glass substrate
42
in the pixel area
46
, and a magnesium oxide (MgO) layer
45
is then formed over the dielectric layer
44
. Therefore, the bonding area
48
is covered by neither the dielectric layer
44
nor the magnesium oxide layer
45
, the protecting electrode
54
in the bonding area
48
is then exposed and the bonding auxiliary electrode
52
″ is covered by the protecting electrode
54
. In the prior art, a conventional bonding auxiliary electrode is directly exposed in the air without any covering material, and the exposed bonding auxiliary electrode is vulnerable and easily be oxidized during a subsequent high temperature process. To the contrary, the bonding auxiliary electrode
52
″ according to the present invention is covered by the protecting electrode
54
, which can effectively prevent the bonding auxiliary electrode
52
″ from being oxidized during the heating process.
The main conducting layer
52
b
is typically comprised of copper. (Cu), whereas the lower medium layer
52
a
and the upper medium layer
52
c
are typically comprised of chromium (Cr). The protecting electrode
54
, on the other hand, is typically comprised of indium tin oxide (ITO) or tin oxide (SnO
2
). The protecting electrode
54
is a metal oxide so it will not be oxidized easily. The property of these electrodes remains the same during the heating process so the connection between the bonding auxiliary electrode
52
″ and the external circuit will be not influenced.
Referring to
FIGS. 4A and 4B
,
FIGS. 4A
shows a cross-sectional view of a pixel area of the front plate
40
along the a—a line shown in
FIG. 3A
in accordance with the second embodiment. And
FIGS. 4B
shows a cross-sectional view of a bonding area of the front plate
40
along the b—b line shown in
FIG. 3A
in accordance with the second embodiment.
The difference between the first and the second embodiments is the structure of the auxiliary electrode
52
. The auxiliary electrode
52
according to the second embodiment is a two-layered structure comprising a main conducting layer
52
b
and an first medium layer
52
a
. The first medium layer
52
a
is used to eliminate the stress between the main conducting layer
52
b
and the glass substrate
42
. The second medium layer
52
c
is omitted in the second embodiment.
Third and Fourth Embodiments
Referring to
FIGS. 5A and 5B
,
FIGS. 5A
shows a cross-sectional view of a pixel area of the front plate
40
along the a—a line shown in
FIG. 3A
in accordance with the third embodiment, and
FIGS. 5B
shows a cross-sectional view of a bonding area of the front plate
40
along the b—b line shown in
FIG. 3A
in accordance with the third embodiment.
According to this embodiment, the front plate
40
of the PDP comprises a glass substrate
42
divided into a pixel area
46
and a bonding area
48
, a buffer layer
43
formed on the glass substrate
42
, an auxiliary electrode
52
embedded in the buffer layer
43
, a protecting electrode
54
formed over the auxiliary electrode
52
, a dielectric layer
44
coated over both the protecting electrode
54
and the buffer layer
43
in the pixel area
46
of the glass substrate
42
, and a MgO layer
45
formed on the dielectric layer
44
.
The difference between the third embodiment and the first embodiment lies in that the trench
53
is formed in the buffer layer
43
instead of in the glass substrate
42
of the first embodiment. The auxiliary electrode
52
is embedded into the trench
53
of the buffer layer
43
. The buffer layer
43
is made of a dielectric material, and it is easier to form the trench
53
in the buffer layer
43
than in the glass substrate
42
by etching or other process. Although an additional deposition process is required to form the buffer layer
43
on the glass substrate
42
, etching the buffer layer
43
instead of the glass substrate
42
ensures a more controllable yield of the PDPs.
During the assembly process of the PDP, the protecting electrode
54
in the bonding area
48
is connected to the external driving circuit. When the assembly process exists any problem and the PDP needs to be reworked, the external driving circuit must be detached from the protecting electrode
54
. In the meanwhile, the auxiliary electrode
52
will not be pulled out easily during the reworking process because the auxiliary electrode
52
is embedded in the trench
53
of the buffer layer
43
. Further, the glass substrate
42
will not be broken during the reworking process because the glass substrate
42
is covered by the buffer layer
43
.
Referring to
FIGS. 6A and 6B
,
FIGS. 6A
shows a cross-sectional view of a pixel area of the front plate
40
along the a—a line shown in
FIG. 3A
in accordance with the fourth embodiment. And
FIGS. 6B
shows a cross-sectional view of a bonding area of the front plate
40
along the b—b line shown in
FIG. 3A
in accordance with the fourth embodiment.
The difference between the third and the fourth embodiments is the structure of the auxiliary electrode
52
. The auxiliary electrode
52
according to the fourth embodiment is a two-layered structure comprising a main conducting layer
52
b
and an first medium layer
52
a
. The first medium layer
52
a
is used to eliminate the stress between the main conducting layer
52
b
and the glass substrate
42
. The second medium layer
52
c
is omitted in the fourth embodiment.
Fifth and Sixth Embodiments
Referring to
FIGS. 7A and 7B
,
FIGS. 7A
shows a cross-sectional view of a pixel area of the front plate
40
along the a—a line shown in
FIG. 3A
in accordance with the fifth embodiment. And
FIGS. 7B
shows a cross-sectional view of a bonding area of the front plate
40
along the b—b line shown in
FIG. 3A
in accordance with the fifth embodiment.
According to this embodiment, the front plate
40
of the PDP at least comprises a glass substrate
42
divided into a pixel area
46
and a bonding area
48
, a sustaining electrode
60
formed on the glass substrate
42
, a auxiliary electrode
52
formed on the top of the sustaining electrode
60
, a protecting electrode
54
formed on the top of the auxiliary electrode
52
, a dielectric layer
44
covered the glass substrate
42
, and a MgO layer
45
formed covering the top of the dielectric layer
44
.
The auxiliary electrode
52
is constituted of a three-layered structure including a first medium layer
52
a
, a main conducting layer
52
b
, and a second medium layer
52
c
. The first medium layer
52
a
is formed between the maining conducting layer
52
b
and the protecting electrode
54
, and the second medium layer
52
c
is formed between the main conducting layer
52
b
and the protecting electrode
54
. The auxiliary electrode
52
includes a pixel auxiliary electrode
52
′ disposed in the pixel area
46
and a bonding auxiliary electrode
52
″ disposed in the bonding area
48
. The dielectric layer
44
and the MgO layer
45
are formed in the pixel area
46
of the glass substrate
42
but not in the bonding area
48
. Therefore, the dielectric layer
44
and the MgO layer
45
will cover the pixel auxiliary electrode
52
′ as shown in FIG.
7
A. In
FIG. 7B
, neither the dielectric layer
44
nor the magnesium oxide layer
45
is formed in the bonding area
48
, the bonding auxiliary electrode
52
″ is only covered by the protecting electrode
54
so as to prevent the bonding auxiliary electrode
52
″ from being oxidized during the subsequent high temperature process. Preferably, the protecting electrode
54
. covers both the bonding auxiliary electrode
52
″ and the pixel auxiliary electrode
52
′ as shown in
FIGS. 7A and 7B
.
The protecting electrode
54
is made of metal oxides as ITO (Indium Tin Oxide), SnO
2
, or zinc oxide (ZnO). The protecting electrode
54
can be transparent or not.
Referring to FIG.
8
A and
FIG. 8B
,
FIGS. 8A
shows a cross-sectional view of a pixel area of the front plate
40
along the a—a line shown in
FIG. 3A
in accordance with the sixth embodiment, and
FIGS. 8B
shows a cross-sectional view of a bonding area of the front plate
40
along the b—b line shown in
FIG. 3A
in accordance with the sixth embodiment.
The difference between the fifth and the sixth embodiments is the structure of the auxiliary electrode
52
. The auxiliary electrode
52
according to the sixth embodiment is a two-layered structure comprising a main conducting layer
52
b
and an first medium layer
52
a
. The first medium layer
52
a
is used to eliminate the stress between the main conducting layer
52
b
and the glass substrate
42
. The second medium layer
52
c
is omitted in the sixth embodiment.
FABRICATION METHOD FOR THE FRONT PLATE OF A PDP:
The followings are the detailed descriptions of the fabrication method for forming the front plate of a PDP.
FIG.
9
A through
FIG. 9D
are cross-sectional views illustrating steps involved in the process for fabricating a front plate of a PDP according to the aforementioned third embodiment of the present invention.
Referring to
FIG. 9A
, a glass substrate
42
is provided, a buffer layer
43
, such as silicon oxide, is then formed on the glass substrate
42
by a screen printing method. A trench
53
is formed on the buffer layer
43
by a photolithography and an etching processes.
Referring to
FIG. 9B
, an auxiliary electrode
52
is deposited into the trench
53
via evaporation or sputtering process. For example, a first medium layer
52
a
, typically made of Cr metal, is deposited on the bottom of the trench
53
. Then, a main conducting layer
52
b
, typically made of Cu metal, is formed on the first medium layer
52
a
, and finally a second medium layer
52
c
, typically made of Cr, is formed on the main conducting layer
52
b
. The glass substrate
42
is divided into a pixel area
46
and a bonding area
48
, and the auxiliary electrode
52
is also defined as a pixel auxiliary electrode
52
′ disposed in the pixel area
46
and a bonding auxiliary electrode
52
″ disposed in the bonding area
48
.
Referring to
FIG. 9C
, a protecting electrode
54
is formed by a sputtering and photolithographing process. First, a metal oxide layer, such as ITO or SiO
2
, is sputtered on the glass substrate
42
, and is then patterned by a photolithography process to form the protecting electrode
54
above the auxiliary electrode
52
.
Referring to
FIG. 9D
, a dielectric layer
44
and a MgO layer
45
are sequentially deposited over the protecting electrode
54
and the buffer layer
43
in the pixel area
46
. The dielectric layer
44
is deposited by, for example, a screen printing method. The MgO layer
45
is deposited by, for example, an evaporation or a sputtering method.
On the other hand, as described in the first embodiment, a trench
50
is formed by etching the glass substrate
42
directly. Thereby, the auxiliary electrode
52
is inlaid into the trench
50
formed in the glass substrate
42
as shown in
FIGS. 3B and 3C
.
Further, as described in the second and the fourth embodiments, the auxiliary electrode
52
is characterized by a two-layered structure comprised of a first medium layer
52
a
and a main conducting layer
52
b
formed sequentially via a an evaporation or a sputtering method.
FIG.
10
A through
FIG. 10C
are cross-sectional views illustrating the steps involved in fabricating the front plate of a PDP according to the fifth embodiment of the present invention.
Referring to
FIG. 10A
, a glass substrate
42
is provided. A sustaining electrode
60
(also called as a transparent electrode) is then formed by sputtering a metal oxide layer on the glass substrate
42
. The sustaining electrode is usually constituted of ITO (Indium Tin Oxide) or SnO
2
. The metal oxide layer is then patterned by a etching process to form the sustaining electrode
60
on the glass substrate
42
.
Referring to
FIG. 10B
, an auxiliary electrode
52
is then deposited on the sustaining electrode
60
. The auxiliary electrode
52
is constituted of a first medium layer
52
a
, a main conducting layer
52
b
, and a second medium layer
52
c
. These layers are deposited sequentially stacked on the sustaining electrode
60
by evaporation or sputtering.
Usually, the first and second medium layer
52
a
and
52
c
are made by Cr metal, and the main conducting layer
52
b
is made by Cu metal. Then, a protecting electrode is formed on the auxiliary electrode
52
. A metal oxide layer, such as ITO (Indium Tin Oxide), SnO
2
, or ZnO, is deposited on top of the second medium layer
52
c
by sputtering.
Referring to
FIG. 10C
, a dielectric layer
44
, made of silicon oxide, and a MgO layer
45
are deposited sequentially over the sustaining electrode
60
and the auxiliary electrode
52
in the pixel area
46
. The dielectric layer
44
is deposited via a screen printing process, and the MgO layer
45
is deposited by evaporation or sputtering.
As described in the sixth embodiment, the auxiliary electrode
52
is a two-layered structure constituted of a first medium layer
52
a
and a main conducting layer
52
b
. It is worthy of note that, in the sixth embodiment of the present invention, the patterns of the protecting electrode
54
and the auxiliary electrode
52
can be defined at the same time by a single etching process. The first medium layer
52
a
is made of Cr metal, the main conducting layer
52
b
is made of Cu metal, and the protecting layer
54
is made of ITO. Furthermore, the etching rate for etching ITO is about one tenth of the etching rate for etching Cu or Cr, so the ITO layer will not be over etched when etching the Cu or Cr layer. Therefore, the sustaining electrode
60
and the protecting electrode
54
, constituting a ITO/Cr/Cu structure, can be formed in one etching process and the manufacturing cost can be reduced.
In the present invention, a high temperature heating process (about 500° C. to about 600° C.) still be needed to sinter the above-described dielectric layer
44
of a PDP, a protecting layer
54
is formed to prevent the bonding auxiliary electrode
52
″ from being oxidized easily during the heating process.
The foregoing description of the preferred embodiments of this invention has been presented for purposes of illustration and description. Obvious modifications or variations are possible in light of the above teaching. The embodiments are chosen and described to provide the best illustration of the principles of this invention and its practical application to thereby enable those skilled in the art to utilize the invention in various embodiments and with various modifications as are suited to the particular use contemplated. All such modifications and variations are within the scope of the present invention as determined by the appended claims when interpreted in accordance with the breadth to which they are fairly, legally, and equitably entitled.
Claims
- 1. A front plate of a plasma display panel (PDP), comprising:a glass substrate comprising a pixel area, a bonding area, and a trench; an auxiliary electrode embedded in the trench of the glass substrate, the auxiliary electrode including a pixel auxiliary electrode positioned at the pixel area and a bonding auxiliary electrode positioned at the bonding area; and a protecting electrode disposed above the bonding auxiliary electrode so that the bonding auxiliary electrode is covered by the protecting electrode and is not oxidized during sequential processes.
- 2. The front plate of the PDP as claimed in claim 1 wherein the auxiliary electrode comprises a main conducting layer positioned under the protecting electrode and a first medium layer positioned under the main conducting layer.
- 3. The front plate of the PDP as claimed in claim 2 wherein the first medium layer is positioned between the main conducting layer and the glass substrate, and the first medium is used to eliminate the stress between the main conducting layer and the glass substrate.
- 4. The front plate of the PDP as claimed in claim 2 wherein the auxiliary electrode comprises a second medium layer positioned above the main conducting layer, and is used to eliminate the stress between the main conducting layer and the protecting electrode.
- 5. The front plate of the PDP as claimed in claim 4 wherein the main conducting layer is made of copper (Cu), the first and the second medium layer are made of chromium (Cr).
- 6. The front plate of the PDP as claimed in claim 1 wherein the protecting electrode is made of a layer of metal-oxide.
- 7. The front plate of the PDP as claimed in claim 6 wherein the protecting electrode is selected from the group of ITO (Indium Tin Oxide), ZnO (Zinc Oxide), and SnO2 (Stannum dioxide).
- 8. A method for fabricating a plasma display panel (PDP), comprising the steps of:(a) providing a glass substrate having a pixel area and a bonding area; (b) forming a trench in the glass substrate; (c) forming an auxiliary electrode in the trench, the auxiliary electrode comprising a pixel auxiliary electrode disposed in the pixel area and a bonding auxiliary electrode disposed in the bonding area; and (d) forming a protecting electrode over the bonding auxiliary electrode to prevent the bonding auxiliary electrode from oxidation during sequential processes.
- 9. A method for fabricating a plasma display panel (PDP), comprising the steps of:(a) providing a glass substrate having a pixel area and a bonding area; (b) forming a dielectric layer on the glass substrate; (c) forming a trench in the dielectric layer; (d) forming an auxiliary electrode in the trench, the auxiliary electrode comprising a pixel auxiliary electrode disposed in the pixel area and a bonding auxiliary electrode disposed in the bonding area; and (e) forming a protecting electrode over the bonding auxiliary electrode to prevent the bonding auxiliary electrode from oxidation during sequential processes.
- 10. A front plate of a plasma display panel (PDP) comprising:a glass substrate having a pixel area and a bonding area; a buffer layer disposed on the glass substrate, the buffer layer having a trench; an auxiliary electrode embedded in the trench of the buffer layer, the auxiliary electrode comprising a pixel auxiliary electrode positioned at the pixel area and a bonding auxiliary electrode positioned at the bonding area; and a protecting electrode disposed above the bonding auxiliary electrode so that the bonding auxiliary electrode is covered by the protecting electrode and is not oxidized during subsequent processes.
- 11. The front plate of the PDP as claimed in claim 10 wherein the auxiliary electrode comprises a main conducting layer positioned under the protecting electrode and a first medium layer positioned under the main conducting layer.
- 12. The front plate of the PDP as claimed in claim 11 wherein the first medium layer is positioned between the main conducting layer and the buffer layer, and the first medium eliminates the stress between the main conducting layer and the buffer layer.
- 13. The front plate of the PDP as claimed in claim 11 wherein the auxiliary electrode comprises a second medium layer positioned above the main conducting layer, and eliminates the stress between the main conducting layer and the protecting electrode.
- 14. The front plate of the PDP as claimed in claim 13 wherein the main conducting layer is made of copper (Cu), and the first and second medium layers are made of chromium (Cr).
- 15. The front plate of the PDP as claimed in claim 10 wherein the protecting electrode is a layer of metal-oxide.
- 16. The front plate of the PDP as claimed in claim 15 wherein the protecting electrode is selected from the group of ITO (Indium Tin Oxide), ZnO (Zinc Oxide), and SnO2 (Stannum dioxide).
- 17. A front plate of a plasma display panel (PDP), comprising:a glass substrate having a pixel area and a bonding area; and a scanning electrode comprising: a protecting electrode disposed on the glass substrate; and an auxiliary electrode disposed between the protecting electrode and the glass substrate and covered by the protecting electrode, the auxiliary electrode including a pixel auxiliary electrode positioned at the pixel area and a bonding auxiliary electrode positioned at the bonding area, wherein the protecting electrode in the bonding area is connected to an external driving circuit.
- 18. The front plate of the PDP as claimed in claim 17 wherein the glass substrate comprises a trench, and the auxiliary electrode is embedded in the trench of the glass substrate.
- 19. The front plate of the PDP as claimed in claim 17 wherein the front plate further comprises a buffer layer disposed on the glass substrate, the buffer layer has a trench, and the auxiliary electrode is embedded in the trench of the buffer layer.
Priority Claims (1)
Number |
Date |
Country |
Kind |
89100193 A |
Jan 2000 |
TW |
|
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