Number | Date | Country | Kind |
---|---|---|---|
44 35 270.0 | Oct 1994 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
4057190 | Kiwior et al. | Nov 1977 | |
4519370 | Iwata | May 1985 | |
5423489 | Wood | Jun 1995 | |
5484108 | Nally | Jan 1996 | |
5540387 | Reiter et al. | Jul 1996 |
Number | Date | Country |
---|---|---|
0 302 660 | Feb 1989 | EPX |
27 23 280 | Dec 1977 | DEX |
160151 | Jul 1991 | JPX |
2023226 | Dec 1979 | GBX |
WO 9213188 | Aug 1992 | WOX |
Entry |
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Heuberger: "Mikromechanik" [Micromechanics], Springer-Verlag 1989, p. 236 ff. |
Reichl: "Micro System Technologies 90", Springer-Verlag 1990, p. 521 ff. |