Claims
- 1. A gas detecting device comprising:
- a substrate;
- an insulator layer formed on said substrate;
- a gas sensitive layer buried in said insulator layer;
- a pair of detection leads formed on said insulator layer, said pair of detection leads partially overlying said gas sensitive layer, a signal derived from said gas sensitive layer being sent to an external circuit through said pair of detection leads;
- a heater member arranged on said insulator layer in the vicinity of said gas sensitive layer; and
- an insulation coating layer formed on said pair of detection leads and said heater member, a portion of an upper surface of said gas sensitive layer being exposed to gas through the pair of the detection leads.
- 2. A gas detecting device comprising:
- a substrate having a cavity;
- an insulator layer formed across said cavity formed in said substrate;
- a gas sensitive layer buried in said insulator layer;
- a pair of detection leads formed on said insulator layer, a signal derived from said gas sensitive layer being sent to an external circuit through said pair of detection leads, said pair of detection leads partially overlying said gas sensitive layer; and
- an insulation coating layer formed on said pair of detection leads and the entire surface of said gas sensitive layer, a bottom surface of said gas sensitive layer facing said cavity, being served with a gas sensitive surface.
Priority Claims (8)
Number |
Date |
Country |
Kind |
62-325921 |
Dec 1987 |
JPX |
|
63-48408 |
Mar 1988 |
JPX |
|
63-71061 |
Mar 1988 |
JPX |
|
63-114372 |
May 1988 |
JPX |
|
63-126836 |
May 1988 |
JPX |
|
63-126837 |
May 1988 |
JPX |
|
63-169534 |
Jul 1988 |
JPX |
|
63-306850 |
Dec 1988 |
JPX |
|
Parent Case Info
This is a division, of application Ser. No. 07/288,279, filed on Dec. 22, 1988 now U.S. Pat. No. 4,967,589.
US Referenced Citations (4)
Foreign Referenced Citations (1)
Number |
Date |
Country |
61-191953 |
Nov 1986 |
JPX |
Non-Patent Literature Citations (2)
Entry |
T. Oyabu, "Sensing Characteristics of SnO.sub.2 Thin Film Gas Sensor", J. Appl. Phys., 53, 1982, pp. 2785-2787, (p. 65). |
H. Ogawa et al., "Electrical Properties of Tin Oxide Ultrafine Particle Films", The Electrochemical Society, vol. 128, No. 9, pp. 2020-2025, 1981. |
Divisions (1)
|
Number |
Date |
Country |
Parent |
288279 |
Dec 1988 |
|