Gas injector for substrate processing apparatus

Abstract

Description

FIG. 1 is a front, top and right side perspective view of a gas injector for substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is an enlarged left side elevational view thereof;

FIG. 5 is an enlarged right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 2 thereof;

FIG. 9 is an enlarged cross-sectional view taken from the area 9 in FIG. 8; and,

FIG. 10 is an enlarged partial view taken from the area 10 in FIG. 1.

The dash-dash lines illustrate environmental structure and form no part of the claimed design.

The dash-dot lines illustrate the boundary of the claimed design and form no part of the claimed design.

The dash-dot-dot lines in FIGS. 1, 8, 9, and 10 show the boundary of the enlarged portion view and form no part of the claimed design.

Claims

The ornamental design for a gas injector for substrate processing apparatus, as shown and described.