Gas inlet attachment for wafer processing apparatus

Information

  • Patent Grant
  • D901564
  • Patent Number
    D901,564
  • Date Filed
    Friday, July 26, 2019
    5 years ago
  • Date Issued
    Tuesday, November 10, 2020
    4 years ago
  • US Classifications
    Field of Search
    • US
    • D13 182
    • D13 184
    • D13 199
    • D13 122
    • D15 144
    • D15 1441
    • D15 1442
    • D08 2
    • D08 382
    • CPC
    • C23C16/00
    • C23C16/455
    • C23C16/45502
    • C23C16/45504
    • C23C16/45506
    • C23C16/45508
    • C23C16/4551
    • C23C16/45512
    • C23C16/45514
    • C23C16/45517
    • C23C16/45563
    • C23C16/4557
    • C23C16/45576
    • C23C16/45578
    • C23C16/402
    • C23C16/4584
    • C23C16/45587
    • C23C16/45525
    • C23C16/45544
    • C23C16/46
    • C23C16/45527
    • C23C16/4412
    • H01L21/00
    • H01L21/02
    • H01L21/02263
    • H01L21/31
    • H01L21/205
    • H01L21/0228
    • H01L21/02164
  • International Classifications
    • 1509
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a front, top and right side perspective view of a gas inlet attachment for wafer processing apparatus showing our new design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a rear elevational view thereof;



FIG. 4 is a right side elevational view thereof;



FIG. 5 is a left side elevational view thereof;



FIG. 6 is a top plan view thereof;



FIG. 7 is a bottom plan view thereof; and,



FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2.


Claims
  • The ornamental design for a gas inlet attachment for wafer processing apparatus, as shown and described.
Priority Claims (1)
Number Date Country Kind
2019-001458 Jan 2019 JP national
US Referenced Citations (17)
Number Name Date Kind
D326272 Nakao May 1992 S
D326273 Nakao May 1992 S
D787458 Kim May 2017 S
D796458 Jang Sep 2017 S
10364493 Lee Jul 2019 B2
20040217217 Han Nov 2004 A1
20070131168 Gomi Jun 2007 A1
20080092815 Chen Apr 2008 A1
20100243166 Hayashi Sep 2010 A1
20110098841 Tsuda Apr 2011 A1
20150240359 Jdira Aug 2015 A1
20150348755 Han Dec 2015 A1
20170051408 Takagi Feb 2017 A1
20180087152 Yoshida Mar 2018 A1
20180087156 Fukushima Mar 2018 A1
20180135173 Kim May 2018 A1
20180135179 Ikeuchi May 2018 A1