Gas nozzle for semiconductor manufacturing equipment

Information

  • Patent Grant
  • D1042731
  • Patent Number
    D1,042,731
  • Date Filed
    Monday, November 28, 2022
    2 years ago
  • Date Issued
    Tuesday, September 17, 2024
    5 months ago
  • Inventors
    • Hirano; Atsushi
  • Original Assignees
  • Examiners
    • Oswecki; Elizabeth J
    Agents
    • FITCH, EVEN, TABIN & FLANNERY, LLP
  • US Classifications
    Field of Search
    • US
    • D23 200
    • D23 213
    • D23 266
    • D15 1441
    • D15 1442
    • D15 144
    • D08 1
    • D08 2
    • D08 30
    • D08 60
    • D13 182
    • D13 184
    • D13 199
    • CPC
    • B24B9/007
    • B24B9/00
    • B08B9/00
    • B08B9/02
    • B08B9/021
    • B08B9/023
    • B08B9/027
    • B08B9/032
    • B08B9/0321
    • B08B9/0323
    • B08B9/0328
    • B08B9/035
    • B08B9/0495
    • B08B5/00
    • B08B5/02
    • B08B1/00
    • B08B1/005
    • B08B1/06
    • B05B5/0537
    • B05B5/0538
    • B05B1/3093
    • F23D14/045
    • F23D14/48
    • F23D14/50
    • F23D14/52
    • F23D14/54
    • F23D14/56
    • F23D14/58
    • F23D14/60
  • International Classifications
    • 2301
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a front, top and left side perspective view of a gas nozzle for semiconductor manufacturing equipment, showing my new design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a left side elevational view thereof;



FIG. 4 is a right side elevational view thereof;



FIG. 5 is a top plan view thereof;



FIG. 6 is a bottom plan view thereof;



FIG. 7 is a rear elevational view thereof; and,



FIG. 8 is an enlarged cross-sectional view taken along line 8-8 in FIG. 2.


The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design.


Claims
  • The ornamental design for a gas nozzle for semiconductor manufacturing equipment, as shown and described.
Priority Claims (1)
Number Date Country Kind
2022-011412 D May 2022 JP national
US Referenced Citations (18)
Number Name Date Kind
4880163 Kobayashi Nov 1989 A
5135170 Takeda Aug 1992 A
D336096 Farndahl Jun 1993 S
D641830 Alexander Jul 2011 S
D771543 Morita Nov 2016 S
D771772 Morita et al. Nov 2016 S
D783351 Fujino Apr 2017 S
D828091 Fujino Sep 2018 S
D847301 Yoshida Apr 2019 S
10364498 Terada Jul 2019 B2
D888196 Okajima Jun 2020 S
D889596 Okajima et al. Jul 2020 S
D890572 Saiki Jul 2020 S
10960415 Amato Mar 2021 B1
D937385 Takeshita et al. Nov 2021 S
D965740 Sambu Oct 2022 S
D1020668 Kagaya Apr 2024 S
20120167824 Maeng Jul 2012 A1
Foreign Referenced Citations (3)
Number Date Country
D1534651 Oct 2015 JP
D1563524 Nov 2016 JP
D1605945 Jun 2018 JP
Non-Patent Literature Citations (1)
Entry
WaveTopSign Laser Machine Gas Nozzle Air Regulating Diameter 6mm 8mm 2Pcs / Lots for Co2 Laser Head and Air Nozzle,https://www.aliexpress.us/item/2251832773301553.html?src=google&gatewayAdapt=glo2usa, 2024. (Year: 2024).