Gas nozzle for substrate processing apparatus

Abstract

Description

FIG. 1 is a front, bottom and left side perspective view of an gas nozzle for substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is an enlarged front view take along line 8-8 in FIG. 2 thereof;

FIG. 9 is a cross-sectional view take along line 9-9 in FIG. 8; and,

FIG. 10 is a cross-sectional view take along line 10-10 in FIG. 9.

The broken lines in FIG. 2 designating the enlarged view form no part of the claimed design.

Claims

We claim the ornamental design for an gas nozzle for substrate processing apparatus, as shown (and described).